EP1021843B1 - Electromechanical converter and method for producing the same - Google Patents
Electromechanical converter and method for producing the same Download PDFInfo
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- EP1021843B1 EP1021843B1 EP99941409A EP99941409A EP1021843B1 EP 1021843 B1 EP1021843 B1 EP 1021843B1 EP 99941409 A EP99941409 A EP 99941409A EP 99941409 A EP99941409 A EP 99941409A EP 1021843 B1 EP1021843 B1 EP 1021843B1
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- fibre
- electromechanical transducer
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- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/01—Manufacture or treatment
- H10N30/06—Forming electrodes or interconnections, e.g. leads or terminals
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- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/702—Piezoelectric or electrostrictive devices based on piezoelectric or electrostrictive fibres
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/80—Constructional details
- H10N30/87—Electrodes or interconnections, e.g. leads or terminals
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/80—Constructional details
- H10N30/87—Electrodes or interconnections, e.g. leads or terminals
- H10N30/877—Conductive materials
- H10N30/878—Conductive materials the principal material being non-metallic, e.g. oxide or carbon based
Definitions
- the invention relates to an electromechanical Transducer, method of manufacturing the same and a Compound system that includes the electromechanical transducer contains.
- a preferred field of application of the invention is the area of adaptive materials. Active materials changing environmental conditions can be reversible and defined adjust when using an adaptive Circuit can be controlled. For example, they enable Vibration damping, noise reduction and contour control of components. There is a special one here Need for mechanically resilient composite materials, which contain sensory and actuator components.
- Electromechanical transducers how they work based on the piezoelectric effect are suitable in special way for the integration or integration in such composites. These converters work as sensitive force or displacement sensor and show as Actuator an outstanding potential for power or Path generation with high dynamics.
- the electromechanical transducer in this way into the overall structure of a composite material can be integrated that the mechanical properties this structure is affected as little as possible become. Furthermore, the converter should be used with one low electrical voltage can be.
- Ferroelectrics need for their polarity, which for It is necessary to achieve the piezoelectric properties is electric fields of a certain size.
- the Polarity takes place between two electrodes with the distance d and with an electrical voltage U.
- the resulting electric field E U / d increases with increasing Distance d of the electrodes. Therefore, longer ones Fibers are not polarized by electrodizing their ends as the required polarity fields from to at 6 kV / mm from fiber lengths of a few mm in the Practice cannot be achieved.
- the polarization long fibers, i.e. one or more cm long, in the longitudinal direction is therefore in a conventional discontinuous poling step with two electrodes not possible on the end faces because the required electrical fields require voltages of over 100 kV would.
- the electrodes are initially manufactured using this system in structured form on Kapton layers applied. This is done by applying one Silver ink using the technique of so-called screen printing. The fibers are between these Kapton layers arranged that the adhesive bond to the fibers. Thus lies with the finished one Transducer an arrangement in which the fibers between two Kapton layers are embedded on which each has a flat electrode structure.
- the object of the present invention is therefore an electromechanical converter and method for Manufacture to provide the same for the Integration in a network system is suitable and the Polarity and control with lower electrical Tensions.
- the electromechanical transducer according to the invention consists of at least one elongated fiber or a thin rod made of a piezoelectric Material. At spaced apart locations At least two electrodes are provided around the fiber To apply an electric field to the fiber.
- the Electrodes are in direct contact with the fiber Contact and at least partially enclose the fiber. In this context, direct contact also means that there is no other one between the electrode and the fiber, for example dielectric layer.
- This direct contact between the electrode and fiber is the optimal coupling of the electrical Allows field in the fiber, so lower electrical voltages at the electrodes are sufficient, to polarize the fiber.
- Another The advantage of the construction according to the invention is that that the electrode is not only at one point with the Fiber is in direct contact, but over one Part of the perimeter of the fiber. This creates the coupling of the electric field further improved.
- the electrodes preferably consist of a conductive adhesive. This can be done easily Apply wisely, adheres to the fiber, stabilizes this mechanically and leads in contacting the Fiber automatically to partially enclose the Fiber.
- Electromechanical Transducer Another improvement in electromechanical Transducer is achieved in that the individual electrodes completely enclose the fiber. The electrodes form ring electrodes around the fiber.
- the electromechanical transducer preferably has Fibers with a diameter of less than 100 ⁇ m and with a length of 5 to 100 mm.
- the converter consists in direct contact of the conductive Material with the fiber. This will make the required Voltage to generate a certain field strength already significantly reduced in the fiber. Furthermore, this results at least in part Enclose the fiber (with direct contact) further improving the coupling of the field strength and thus a reduction in the required electrical Tensions. Particularly advantageous for the production is the use of a conductive adhesive Formation of the electrodes.
- a preferred embodiment of the invention are long ferroelectric fibers to form a Monolayer arranged side by side in parallel.
- the fibers are polarized and controlled by the electrodes along their longitudinal axis at short intervals be applied, as described for example in A.A. Bent, "Active Fiber Composites for Structural Actuation ", Ph.D. Thesis, MIT, January 1997 becomes.
- These electrodes are alternately positive and connected negatively.
- the in the fibers electrical fields required for polarity low electrical voltages can be achieved.
- the concept of electroding according to the invention is preferably made by parallel tracks of conductive Realized glue perpendicular to the Alignment of the monolayer of parallel fibers. For the provision of large converter areas several transducers constructed according to the invention side by side to be ordered.
- Electrodes i.e. the comb or interdigital electrodes
- the electromechanical Transducers For a structurally compliant integration of the electromechanical Transducers have the functional fibers a diameter well below 100 ⁇ m, preferably ⁇ 30 ⁇ m. Only with such dimensions do they put in introduced a fiber composite material, a minimal structural disorder and can occur without the occurrence high mechanical moments can be bent.
- composite layers can thinner than 200 ⁇ m, one electrode gap smaller than 100 ⁇ m and a parallel fiber placement of more than 100 fibers per cm achieved side by side become.
- ferroelectric ceramic fibers as functional fibers, these can be polarized forces and then smaller as a pressure sensor as 1 N by an alternating electric field Vibrations are excited and introduced from the outside mechanical vibrations active (in combination with an adaptive circuit) or passive damping.
- PZT fibers are preferred. This Fibers can be processed by methods such as in described in DE 43 32 831 or DE 196 35 748, getting produced.
- electromechanical transducers are not preferred Area of application of the composite materials limited. So can also be an electromechanical transducer, for example with a single fiber as an actuator or sensor microtechnology.
- a process for the production of composite materials, the electromechanical according to the invention Transducer with controllable piezoelectric fibers, PZT fibers, for example, are subdivided in the manufacture and application of the electrode structure, in the production of fiber fabrics, in the Placing the fibers on the electrodes or electrodes on the fibers, in the pouring and laminating this structural element and the subsequent poling of the Fibers in the structure.
- Figure 1 schematically shows an example of a converter according to the invention.
- the fibers are along their long axis at spaced apart locations by electrodes contacted, arranged in interdigital geometry are.
- the electrodes here have direct Contact the fibers and enclose the individual Fibers partially, as can be clearly seen from the figure is.
- the electrical connection of the arrangement is made over the two pads (4) of the electrodes.
- FIG. 2a shows an example of the electrodeposition an area of a single fiber (1).
- the electrode structure (2) consists of an example first layer or layer (2a) and an overlying one second layer (2b).
- the second layer is here optionally provided. While the fiber in the first Layer is partially embedded, so that the fiber of half of the electrode is made possible the second layer completely enclosing the fiber. In this way, a ring electrode is formed which encloses the fiber.
- Electromechanical transducer An example of a method for producing the Electromechanical transducer according to the invention is in following explained in connection with Figure 2.
- the document can consist for example of a carrier layer, or from the composite itself, into which the converter should be integrated.
- A is preferred as the conductive adhesive thixotropic epoxy resin that contains metal particles (e.g. from Ag) contains used.
- This adhesive can be on the one hand, lightly into the negative template under pressure delete and flows on the other hand when the Not stencil while keeping straight sides further.
- the structure of the adhesive can be hardened to such an extent that it does not flow even under pressure, but still the Necessary stickiness that fibers on it be liable.
- the hardening is done to a To prevent the adhesive from entering the capillaries, between the fibers and the base in the further course can result. It takes place preferably at elevated temperatures.
- the fibers (1) are then applied to the electrodes (2a).
- the electrodes are then fully cured.
- the structure can now be cast, for example by applying a resin (5).
- An improvement in the properties of the converter is achieved if additionally before shedding a further electrode layer (2b) on the fibers (1) is applied, which is largely congruent with the first electrode layer (2a).
- the conductive adhesive can process, distributed over the fibers so regularly, that these are at the crossing points of the electrode tracks with the fibers completely from the electrode be surrounded.
- a is preferred conductive adhesive of lower viscosity than that for the lower electrode layer (2a) is used.
- This adhesive is also applied to the structure hardened. Then this structure can also as shown in Figure 2b, with a resin (5) be shed.
- the fibers are first converted in parallel Poured assembly into a polymer.
- a laser (2) locally removed in the polymer layer until the The fiber surface is exposed.
- the wavelength and energy the laser should be set so that the plastic is removed without damaging the fibers.
- To the one-sided introduction of the structure becomes the electrode arrangement made by filling the wells.
- a conductive adhesive is preferred used.
- other materials are also possible, for example by steaming the fibers with a metal.
- the electrodes are the fibers each completely enclose the steps Laser ablation and filling for the opposite side the polymer layer is repeated.
- the preferably ferroelectric fibers used for a flat composite material are used for example PZT fibers, as described in DE 43 32 831 or DE 196 35 748 are described. These will about a wet chemical process, a sol-gel process, manufactured and via thermal steps in ceramic Fibers converted.
- the fibers are preferably electrodeposited as a monolayer, i.e. they are arranged in parallel without Fibers come to lie on top of each other.
- the fibers are either mono or Multifilament fiber (see DE 196 35 748) manufactured and then placed in a monolayer, or she are already produced as a monolayer.
- PZT fibers Another option is a monolayer of PZT fibers is to get the fibers already through the spinning process, in which it is still called the sol-gel stage are present in a group of parallel fibers bring that largely do not overlap or cross.
- the fibers may need pyrolysis and sintering thermally treated on various substrates what makes it necessary to fold the fibers. Since the most functional fibers should be very fragile a gentle process is used here the fibers without disturbing their parallel arrangement, on another surface. For example using a vacuum suction technique.
- a carrier layer can be made with the electrodes still wet conductive adhesive on the fiber fabric be lowered. With some pressure on the The fibers are then inserted into the electrode structure Glue pressed.
- Another possibility is the successive Applying individual fibers to the electrode structure This can be done manually or in that the fibers pass through a slot from above, which runs perpendicular to the electrode tracks these fall down. By moving the slot vertically the fibers become the electrode tracks one behind the other and filed parallel to each other.
- the one-sided or all around electrodized fibers preferably potted with a polymer.
- a polymer is preferred for this an epoxy resin, that of the matrix material of the composite material is largely the same.
- This layer can be combined with any number of others Single layers of laminate, which in turn are PZT fiber structures may contain, overlaminated.
- the fibers were like the second one described above Process after embedding in a polymer Electrodized, the polymer layer with the fibers can be laminated directly into the composite.
- Transducer within the composite structure e.g. side by side or one above the other, can be delayed by a phase Actuation of the transducers targeted vibrations be stimulated.
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Abstract
Description
Die Erfindung betrifft einen elektromechanischen Wandler, Verfahren zur Herstellung desselben sowie ein Verbundsystem, das den elektromechanischen Wandler enthält.The invention relates to an electromechanical Transducer, method of manufacturing the same and a Compound system that includes the electromechanical transducer contains.
Ein bevorzugtes Anwendungsgebiet der Erfindung ist der Bereich adaptiver Werkstoffe. Aktive Werkstoffe können sich ändernden Umgebungsbedingungen reversibel und definiert anpassen, wenn sie über eine adaptive Schaltung gesteuert werden. Sie ermöglichen beispielsweise Schwingungsdämpfung, Schallreduktion und Kontursteuerung von Bauteilen. Hierbei besteht ein besonderer Bedarf an mechanisch belastbaren Verbundwerkstoffen, die sensorische und aktorische Komponenten enthalten.A preferred field of application of the invention is the area of adaptive materials. Active materials changing environmental conditions can be reversible and defined adjust when using an adaptive Circuit can be controlled. For example, they enable Vibration damping, noise reduction and contour control of components. There is a special one here Need for mechanically resilient composite materials, which contain sensory and actuator components.
Elektromechanische Wandler, deren Funktionsweise auf dem piezoelektrischen Effekt beruht, eignen sich in besonderer Weise für die Einbindung bzw. Integration in derartige Verbundwerkstoffe. Diese Wandler arbeiten als empfindlicher Kraft- bzw. Wegsensor und zeigen als Aktor ein herausragendes Potential für Kraft- bzw. Weggenerierung bei hoher Dynamik.Electromechanical transducers, how they work based on the piezoelectric effect are suitable in special way for the integration or integration in such composites. These converters work as sensitive force or displacement sensor and show as Actuator an outstanding potential for power or Path generation with high dynamics.
Idealerweise sollte der elektromechanische Wandler hierbei so in die Gesamtstruktur eines Verbundwerkstoffes integrierbar sein, daß die mechanischen Eigenschaften dieser Struktur möglichst wenig beeinträchtigt werden. Weiterhin sollte der Wandler mit einer möglichst niedrigen elektrischen Spannung angesteuert werden können.Ideally, the electromechanical transducer in this way into the overall structure of a composite material can be integrated that the mechanical properties this structure is affected as little as possible become. Furthermore, the converter should be used with one low electrical voltage can be.
Das Ziel dieser strukturkonformen Integration, d.h. der minimalen Störung der Gesamtstruktur, kann gerade durch den Einsatz von faserförmigen Piezoelektrika, insbesondere ferroelektrischer Keramiken, erreicht werden.The goal of this structurally compliant integration, i.e. the minimal disturbance of the forest especially through the use of fibrous piezoelectric materials, especially ferroelectric ceramics, can be achieved.
In R.E. Newnham, D.P. Skinner, L.E. Cross, Mat. Res. Bull., 13 (1978) 525, wird die Konzeptionierung und Herstellung von Verbundwerkstoffen bzw. Komposita aus funktionellen Keramiken und einer Polymermatrix beschrieben. Es werden u.a. die Vorteile von Komposita, die Fasern bzw. Stäbchen aus ferroelektrischer Keramik enthalten, berechnet und verifiziert (siehe z.B. R.E. Newnham, A. Safari, J. Giniewicz, B.H. Fox, Ferroelectrics, 60 (1984) 15 - 21). Bei diesen Arbeiten bestehen die Komposita aus dünnen Scheibchen von ca. 1 mm Dicke, in denen die Fasern senkrecht zur Stirnseite angeordnet sind. Die Fasern werden hierbei durch Elektrodieren der Stirnseiten polarisiert und angesteuert.In R.E. Newnham, D.P. Skinner, L.E. Cross, Mat. Res. Bull., 13 (1978) 525, is the conception and production of composite materials or composites from functional ceramics and a polymer matrix described. Among other things, the advantages of composites, the fibers or rods made of ferroelectric ceramic included, calculated and verified (see e.g. R.E. Newnham, A. Safari, J. Giniewicz, B.H. Fox, Ferroelectrics, 60 (1984) 15-21). In this work the composites consist of thin slices of approx. 1 mm thick, in which the fibers are perpendicular to the face are arranged. The fibers are through Electrode the end faces polarized and controlled.
Ferroelektrika benötigen für ihre Polung, die zum Erreichen der piezoelektrischen Eigenschaften notwendig ist, elektrische Felder einer bestimmten Größe. Die Polung erfolgt zwischen zwei Elektroden mit dem Abstand d und mit einer elektrischen Spannung U. Das resultierende elektrische Feld E = U/d nimmt mit zunehmendem Abstand d der Elektroden ab. Daher können längere Fasern nicht durch Elektrodieren ihrer Enden polarisiert werden, da die benötigten Polungsfelder von bis zu 6 kV/mm bereits ab Faserlängen von einigen mm in der Praxis nicht erzielt werden können. Die Polarisierung langer Fasern, d.h. von einem oder mehreren cm Länge, in Längsrichtung ist daher in einem herkömmlichen diskontinuierlichen Polungsschritt mit zwei Elektroden an den Stirnseiten nicht möglich, da die benötigten elektrischen Felder Spannungen von über 100 kV erfordern würden.Ferroelectrics need for their polarity, which for It is necessary to achieve the piezoelectric properties is electric fields of a certain size. The Polarity takes place between two electrodes with the distance d and with an electrical voltage U. The resulting electric field E = U / d increases with increasing Distance d of the electrodes. Therefore, longer ones Fibers are not polarized by electrodizing their ends as the required polarity fields from to at 6 kV / mm from fiber lengths of a few mm in the Practice cannot be achieved. The polarization long fibers, i.e. one or more cm long, in the longitudinal direction is therefore in a conventional discontinuous poling step with two electrodes not possible on the end faces because the required electrical fields require voltages of over 100 kV would.
In A.A. Bent, "Active Fiber Composites for Structural Actuation", Ph.D. Thesis, MIT, Januar 1997, ist eine Technik beschrieben, mit der längere Fasern in Längsrichtung polarisiert werden können. Hierzu werden in gewissen Abständen entlang der Längsachse der Fasern Elektroden angelegt, um die Fasern abschnittsweise anzusteuern. Die Elektroden werden abwechselnd positiv und negativ verschaltet. Somit können die in den Fasern zur Polung benötigten elektrischen Felder durch weitaus geringere elektrische Spannungen erreicht werden, als wenn die Fasern über die Stirnseiten als Ganzes der Länge nach gepolt und angesteuert werden müßten. Zur Herstellung dieses Systems werden die Elektroden zunächst in strukturierter Form auf Kapton-Schichten aufgebracht. Dies erfolgt durch Aufbringen einer Silbertinte mittels der Technik des sog. Screen-Printings. Die Fasern werden zwischen diesen Kapton-Schichten angeordnet, die die haftende Verbindung zu den Fasern herstellen. Somit liegt bei dem fertigen Wandler eine Anordnung vor, bei der die Fasern zwischen zwei Kapton-Schichten eingebettet sind, auf denen jeweils eine ebene Elektrodenstruktur vorliegt.In A.A. Bent, "Active Fiber Composites for Structural Actuation ", Ph.D. Thesis, MIT, January 1997, describes a technique with which longer fibers in Longitudinal direction can be polarized. To do this at certain intervals along the longitudinal axis of the fibers Electrodes applied to the fibers in sections head for. The electrodes become positive alternately and connected negatively. Thus, the in the fibers electrical fields required for polarity by far lower electrical voltages can be achieved than when the fibers across the front faces as a whole Pole length and control would have to be. to The electrodes are initially manufactured using this system in structured form on Kapton layers applied. This is done by applying one Silver ink using the technique of so-called screen printing. The fibers are between these Kapton layers arranged that the adhesive bond to the fibers. Thus lies with the finished one Transducer an arrangement in which the fibers between two Kapton layers are embedded on which each has a flat electrode structure.
Eine derartige Anordnung hat jedoch den Nachteil, daß trotz der realisierbaren geringen Abstände zwischen den einzelnen Elektroden noch immer relativ hohe Spannungen benötigt werden, um die einzelnen Faserbereiche zu polarisieren.However, such an arrangement has the disadvantage that despite the realizable short distances between the individual electrodes are still relatively high Tensions are needed to the individual To polarize fiber areas.
Aufgabe der vorliegenden Erfindung ist es daher, einen elektromechanischen Wandler sowie Verfahren zur Herstellung desselben bereitzustellen, der für die Integration in ein Verbundsystem geeignet ist und die Polung und Ansteuerung mit niedrigeren elektrischen Spannungen ermöglicht.The object of the present invention is therefore an electromechanical converter and method for Manufacture to provide the same for the Integration in a network system is suitable and the Polarity and control with lower electrical Tensions.
Diese Aufgabe wird mit dem elektromechanischen
Wandler nach Anspruch 1 sowie den Verfahren nach
Anspruch 13 und 14 erreicht. Vorteilhafte Ausgestaltungen
der Erfindung sind Gegenstand der Unteransprüche.This task is done with the electromechanical
Converter according to
Der erfindungsgemäße elektromechanische Wandler besteht aus zumindest einer langgestreckten Faser bzw. einem dünnen Stäbchen aus einem piezoelektrischen Material. An voneinander beabstandeten Stellen der Faser sind zumindest zwei Elektroden vorgesehen, um die Faser mit einem elektrischen Feld zu beaufschlagen. Die Elektroden stehen hierbei mit der Faser in direktem Kontakt und umschließen die Faser zumindest teilweise. Unter direktem Kontakt ist hierbei auch zu verstehen, daß zwischen der Elektrode und der Faser keine weitere, beispielsweise dielektrische Schicht liegt.The electromechanical transducer according to the invention consists of at least one elongated fiber or a thin rod made of a piezoelectric Material. At spaced apart locations At least two electrodes are provided around the fiber To apply an electric field to the fiber. The Electrodes are in direct contact with the fiber Contact and at least partially enclose the fiber. In this context, direct contact also means that there is no other one between the electrode and the fiber, for example dielectric layer.
Durch diesen direkten Kontakt zwischen Elektrode und Faser wird die optimale Einkopplung des elektrischen Feldes in die Faser ermöglicht, so daß niedrigere elektrische Spannungen an den Elektroden ausreichen, um die Faser zu polarisieren. Ein weiterer Vorteil des erfindungsgemäßen Aufbaus besteht darin, daß die Elektrode nicht nur an einem Punkt mit der Faser in direktem Kontakt steht, sondern über einen Teil des Umfangs der Faser. Hierdurch wird die Einkopplung des elektrischen Feldes weiter verbessert.This direct contact between the electrode and fiber is the optimal coupling of the electrical Allows field in the fiber, so lower electrical voltages at the electrodes are sufficient, to polarize the fiber. Another The advantage of the construction according to the invention is that that the electrode is not only at one point with the Fiber is in direct contact, but over one Part of the perimeter of the fiber. This creates the coupling of the electric field further improved.
Vorzugsweise bestehen die Elektroden aus einem leitfähigen Klebstoff. Dieser läßt sich auf einfache Weise applizieren, haftet an der Faser, stabilisiert diese mechanisch und führt bei der Kontaktierung der Faser automatisch zu einem teilweisen Umschließen der Faser.The electrodes preferably consist of a conductive adhesive. This can be done easily Apply wisely, adheres to the fiber, stabilizes this mechanically and leads in contacting the Fiber automatically to partially enclose the Fiber.
Eine weitere Verbesserung des elektromechanischen Wandlers wird dadurch erzielt, daß die einzelnen Elektroden die Faser vollständig umschließen. Die Elektroden bilden hierbei Ringelektroden um die Faser.Another improvement in electromechanical Transducer is achieved in that the individual electrodes completely enclose the fiber. The electrodes form ring electrodes around the fiber.
Der elektromechanische Wandler weist vorzugsweise Fasern mit einen Durchmesser von weniger als 100 µm und mit einer Länge von 5 bis 100 mm auf.The electromechanical transducer preferably has Fibers with a diameter of less than 100 µm and with a length of 5 to 100 mm.
In einer bevorzugten Ausführungsform liegen dabei mehrere dieser Fasern parallel nebeneinander (Monolage) und werden von Elektroden in Interdigitalgeometrie kontaktiert, die quer zur Längsachse der Fasern verlaufen.In a preferred embodiment there are several of these fibers in parallel next to each other (monolayer) and are made of electrodes in interdigital geometry contacted, which run transverse to the longitudinal axis of the fibers.
Ein wesentliches Merkmal des erfindungsgemäßen Wandlers besteht im direkten Kontakt des leitfähigen Materials mit der Faser. Hierdurch wird die erforderliche Spannung zur Erzeugung einer bestimmten Feldstärke in der Faser bereits deutlich verringert. Weiterhin ergibt sich durch das zumindest teilweise Umschließen der Faser (bei direktem Kontakt) eine weitere Verbesserung der Einkopplung der Feldstärke und damit eine Reduzierung der erforderlichen elektrischen Spannungen. Besonders vorteilhaft für die Herstellung ist die Verwendung eines leitfähigen Klebstoffs zur Bildung der Elektroden.An essential feature of the invention The converter consists in direct contact of the conductive Material with the fiber. This will make the required Voltage to generate a certain field strength already significantly reduced in the fiber. Furthermore, this results at least in part Enclose the fiber (with direct contact) further improving the coupling of the field strength and thus a reduction in the required electrical Tensions. Particularly advantageous for the production is the use of a conductive adhesive Formation of the electrodes.
In einer bevorzugten Ausgestaltung der Erfindung werden lange ferroelektrische Fasern zur Bildung einer Monolage parallel nebeneinander angeordnet. Die Fasern werden dadurch gepolt und angesteuert, daß die Elektroden entlang ihrer Längsachse in kurzen Abständen aufgebracht werden, wie dies beispielsweise in A.A. Bent, "Active Fiber Composites for Structural Actuation", Ph.D. Thesis, MIT, Januar 1997, vorgeschlagen wird. Diese Elektroden werden abwechselnd positiv und negativ verschaltet. Somit können die in den Fasern zur Polung benötigten elektrischen Felder durch niedrige elektrische Spannungen erreicht werden.In a preferred embodiment of the invention are long ferroelectric fibers to form a Monolayer arranged side by side in parallel. The fibers are polarized and controlled by the electrodes along their longitudinal axis at short intervals be applied, as described for example in A.A. Bent, "Active Fiber Composites for Structural Actuation ", Ph.D. Thesis, MIT, January 1997 becomes. These electrodes are alternately positive and connected negatively. Thus, the in the fibers electrical fields required for polarity low electrical voltages can be achieved.
Das erfindungsgemäße Konzept der Elektrodierung wird vorzugsweise durch parallele Bahnen aus leitfähigem Klebstoff verwirklicht, die senkrecht zur Ausrichtung der Monolage paralleler Fasern verlaufen. Für die Bereitstellung großer Wandlerflächen können mehrere erfindungsgemäß aufgebaute Wandler nebeneinander angeordnet werden.The concept of electroding according to the invention is preferably made by parallel tracks of conductive Realized glue perpendicular to the Alignment of the monolayer of parallel fibers. For the provision of large converter areas several transducers constructed according to the invention side by side to be ordered.
Für die Integration des erfindungsgemäßen Wandlers mit den Piezofasern in ein Verbundwerkstoff-Laminat, werden ober- und unterhalb der aktiven Einzelschicht weitere Schichten des Verbundmaterials auflaminiert.For the integration of the converter according to the invention with the piezo fibers in a composite laminate, are above and below the active single layer laminated further layers of the composite material.
Mit einem solchen Verbundwerkstoff eröffnet sich eine Reihe von Anwendungsfeldern in den verschiedensten Industriezweigen. Die Schädigung von Verbundstrukturen kann unter Ausnutzung des direkten Piezoeffekts erfaßt werden, ohne daß durch die Sensoren, d.h. den bzw. die erfindungsgemäßen elektromechanischen Wandler, die Struktur des Verbundwerkstoffes gestört wird. Durch den inversen Piezoeffekt können die Wandler als aktive Komposita die Geometrie von Verbundwerkstoff-Bauteilen verändern. Eine mechanische Schwingung können die Komposita aktiv durch Erzeugen einer Gegenwelle oder passiv durch Kurzschließen der beim Piezoeffekt erzeugten Spannungen dämpfen.With such a composite material opens up a number of fields of application in the most varied Industries. Damage to composite structures can be captured using the direct piezo effect without the sensors, i.e. the or the electromechanical transducers according to the invention, the Structure of the composite is disturbed. By the inverse piezo effect, the transducers can be as active Composites the geometry of composite parts change. A mechanical vibration can Composites active by generating a counter wave or passively by short-circuiting those generated with the piezo effect Dampen tensions.
Hierbei können weitere Verbesserungen durch die im folgenden beschriebenen Maßnahmen erreicht werden, die weitere Ausgestaltungen der Erfindung darstellen.Here, further improvements can be made through the The following measures can be achieved represent further embodiments of the invention.
Durch Verringerung des Abstandes zwischen den Elektroden, d.h. den Kamm- bzw. Interdigitalelektroden, auf unter 100 µm werden die zum Polarisieren und Ansteuern der Fasern erforderlichen Spannungen weiter reduziert.By reducing the distance between the Electrodes, i.e. the comb or interdigital electrodes, to less than 100 µm they are used for polarization and control of the fibers required tensions further reduced.
Für eine strukturkonforme Integration des elektromechanischen Wandlers weisen die funktionellen Fasern einen Durchmesser weit unter 100 µm, vorzugsweise < 30 µm auf. Nur bei derartigen Abmessungen stellen sie, in einen Faserverbundwerkstoff eingebracht, eine minimale strukturelle Störung dar und können ohne das Auftreten hoher mechanischer Momente gebogen werden.For a structurally compliant integration of the electromechanical Transducers have the functional fibers a diameter well below 100 μm, preferably <30 µm. Only with such dimensions do they put in introduced a fiber composite material, a minimal structural disorder and can occur without the occurrence high mechanical moments can be bent.
Zur Erreichung der Strukturkonformität werden weiterhin die Fasern nur in einer sehr dünnen Kompositeinzelschicht, beispielsweise einer Polymerschicht, eingebettet, die dann wiederum in den Gesamtverbundwerkstoff integriert werden kann.To achieve structural conformity furthermore the fibers only in a very thin composite single layer, for example a polymer layer, embedded, which then in turn in the overall composite material can be integrated.
Mit den erfindungsgemäßen Verfahren können Kompositschichten dünner als 200 µm, ein Elektrodenabstand kleiner als 100 µm und eine parallele Faserablage von mehr als 100 Fasern pro cm nebeneinander erzielt werden. Bei der Verwendung von ferroelektrischen Keramikfasern als Funktionsfasern können diese polarisiert werden und anschließend als Drucksensor Kräfte kleiner als 1 N erfassen, durch ein elektrisches Wechselfeld zu Schwingungen angeregt werden und von außen eingebrachte mechanische Schwingungen aktiv (in Kombination mit einer adaptiven Schaltung) oder passiv dämpfen.With the method according to the invention, composite layers can thinner than 200 µm, one electrode gap smaller than 100 µm and a parallel fiber placement of more than 100 fibers per cm achieved side by side become. When using ferroelectric ceramic fibers as functional fibers, these can be polarized forces and then smaller as a pressure sensor as 1 N by an alternating electric field Vibrations are excited and introduced from the outside mechanical vibrations active (in combination with an adaptive circuit) or passive damping.
Als piezoelektrische Fasern bzw. Funktionsfasern werden dabei bevorzugt PZT-Fasern verwendet. Diese Fasern können durch Verfahren, wie beispielsweise in der DE 43 32 831 oder der DE 196 35 748 beschrieben, hergestellt werden.As piezoelectric fibers or functional fibers PZT fibers are preferred. This Fibers can be processed by methods such as in described in DE 43 32 831 or DE 196 35 748, getting produced.
Selbstverständlich ist der erfindungsgemäße elektromechanische Wandler nicht auf das bevorzugte Anwendungsgebiet der Verbundwerkstoffe begrenzt. So kann beispielsweise auch ein elektromechanischer Wandler mit einer einzelnen Faser als Aktor oder Sensor in der Mikrotechnik eingesetzt werden.Of course, the invention is electromechanical transducers are not preferred Area of application of the composite materials limited. So can also be an electromechanical transducer, for example with a single fiber as an actuator or sensor microtechnology.
Die vorliegende Erfindung wird nachfolgend anhand der Ausführungsbeispiele in Verbindung mit den Zeichnungen näher erläutert. Hierbei zeigen
Figur 1- schematisch ein Beispiel für einen erfindungsgemäßen Wandler;
Figur 2a- ein Beispiel für die Elektrodierung eines Bereiches einer einzelnen Faser gemäß der Erfindung;
Figur 2b- ein Beispiel für die Aufbringung einer
weiteren Schicht auf die
Faser der Figur 2a; und Figur 3- schematisch die Geometrie einer Elektrodenstruktur in einer Ausführungsform der Erfindung.
- Figure 1
- schematically an example of a converter according to the invention;
- Figure 2a
- an example of the electroding of a region of a single fiber according to the invention;
- Figure 2b
- an example of the application of a further layer on the fiber of Figure 2a; and
- Figure 3
- schematically the geometry of an electrode structure in one embodiment of the invention.
Ein Verfahren zur Herstellung von Verbundwerkstoffen, die den erfindungsgemäßen elektromechanischen Wandler mit ansteuerbaren piezoelektrischen Fasern, beispielsweise PZT-Fasern, enthalten, unterteilt sich in die Anfertigung und Aufbringung der Elektrodenstruktur, in die Herstellung der Fasergelege, in die Ablage der Fasern auf die Elektroden bzw. der Elektroden auf die Fasern, in das Eingießen und Laminieren dieses Strukturelements und das anschließende Polen der Fasern in der Struktur.A process for the production of composite materials, the electromechanical according to the invention Transducer with controllable piezoelectric fibers, PZT fibers, for example, are subdivided in the manufacture and application of the electrode structure, in the production of fiber fabrics, in the Placing the fibers on the electrodes or electrodes on the fibers, in the pouring and laminating this structural element and the subsequent poling of the Fibers in the structure.
Figur 1 zeigt schematisch ein Beispiel für einen erfindungsgemäßen Wandler. In diesem Beispiel sind fünf Fasern (1) parallel nebeneinander auf einer Unterlage (3) angeordnet. Die Fasern werden entlang ihrer Längsachse an voneinander beabstandeten Stellen durch Elektroden kontaktiert, die in Interdigitalgeometrie angeordnet sind. Die Elektroden haben hierbei direkten Kontakt zu den Fasern und umschließen die einzelnen Fasern teilweise, wie aus der Figur deutlich zu erkennen ist. Der elektrische Anschluß der Anordnung erfolgt über die beiden Anschlußflächen (4) der Elektroden.Figure 1 schematically shows an example of a converter according to the invention. In this example there are five Fibers (1) parallel to each other on a base (3) arranged. The fibers are along their long axis at spaced apart locations by electrodes contacted, arranged in interdigital geometry are. The electrodes here have direct Contact the fibers and enclose the individual Fibers partially, as can be clearly seen from the figure is. The electrical connection of the arrangement is made over the two pads (4) of the electrodes.
Figur 2a zeigt ein Beispiel für die Elektrodierung eines Bereiches einer einzelnen Faser (1). In diesem Beispiel besteht die Elektrodenstruktur (2) aus einer ersten Lage bzw. Schicht (2a) und einer darüberliegenden zweiten Lage (2b). Die zweite Lage ist hierbei optional vorgesehen. Während die Faser in die erste Lage teilweise eingebettet ist, so daß die Faser von der Elektrode zur Hälfte umschlossen wird, ermöglicht die zweite Lage das vollständige Umschließen der Faser. Auf diese Weise wird eine Ringelektrode gebildet, die die Faser umschließt.Figure 2a shows an example of the electrodeposition an area of a single fiber (1). In this The electrode structure (2) consists of an example first layer or layer (2a) and an overlying one second layer (2b). The second layer is here optionally provided. While the fiber in the first Layer is partially embedded, so that the fiber of half of the electrode is made possible the second layer completely enclosing the fiber. In this way, a ring electrode is formed which encloses the fiber.
Ein Beispiel für ein Verfahren zur Herstellung des erfindungsgemäßen elektromechanischen Wandlers wird im folgenden in Verbindung mit Figur 2 erläutert. Die Struktur der unteren Elektroden (2a), beispielsweise eine Interdigitalstruktur wie in Figur 3 gezeigt, wird in eine dünne Schablone als Negativform eingebracht. Durch einen Rakelschritt mit leitfähigem Klebstoff werden die Elektrodenbahnen (2) über die Negativform auf eine Unterlage (3) gerakelt. Die Unterlage kann beispielsweise aus einer Trägerschicht bestehen, oder aus dem Verbundwerkstoff selbst, in den der Wandler integriert werden soll.An example of a method for producing the Electromechanical transducer according to the invention is in following explained in connection with Figure 2. The Structure of the lower electrodes (2a), for example an interdigital structure as shown in Figure 3 placed in a thin template as a negative form. With a squeegee step with conductive adhesive the electrode tracks (2) over the negative form squeegee on a support (3). The document can consist for example of a carrier layer, or from the composite itself, into which the converter should be integrated.
Als leitfähiger Klebstoff wird bevorzugt ein thixotropes Epoxidharz, das Metallpartikeln (z.B. aus Ag) enthält, verwendet. Dieser Klebstoff läßt sich einerseits unter Druck leicht in die Negativschablone streichen und fließt andererseits bei Wegnahme der Schablone unter Beibehalten gerader Seitenflächen nicht weiter. Vor dem Aufbringen der Fasern (1) auf diese Struktur kann der Kleber so weit angehärtet werden, daß er auch unter Druck nicht fließt, jedoch noch die nötige Klebrigkeit dafür aufweist, daß Fasern an ihm haften. Das Anhärten wird durchgeführt, um ein Eindringen des Klebstoffes in Kapillaren zu verhindern, die sich zwischen den Fasern und der Unterlage im weiteren Verlauf ergeben können. Es erfolgt vorzugsweise bei erhöhten Temperaturen. Die Fasern (1) werden dann auf die Elektroden (2a) aufgebracht. Anschließend werden die Elektroden völlig ausgehärtet. Nun kann die Struktur vergossen werden, beispielsweise durch Aufbringen eines Harzes (5).A is preferred as the conductive adhesive thixotropic epoxy resin that contains metal particles (e.g. from Ag) contains used. This adhesive can be on the one hand, lightly into the negative template under pressure delete and flows on the other hand when the Not stencil while keeping straight sides further. Before applying the fibers (1) to them The structure of the adhesive can be hardened to such an extent that it does not flow even under pressure, but still the Necessary stickiness that fibers on it be liable. The hardening is done to a To prevent the adhesive from entering the capillaries, between the fibers and the base in the further course can result. It takes place preferably at elevated temperatures. The fibers (1) are then applied to the electrodes (2a). The electrodes are then fully cured. The structure can now be cast, for example by applying a resin (5).
Eine Verbesserung der Eigenschaften des Wandlers wird erreicht, wenn vor dem Vergießen zusätzlich noch eine weitere Elektrodenschicht (2b) auf die Fasern (1) aufgebracht wird, die weitgehend deckungsgleich mit der ersten Elektrodenschicht (2a) ist. Diese Struktur wird mit Hilfe eines Dispensers, der leitfähigen Klebstoff verarbeiten kann, über die Fasern so regulär verteilt, daß diese an den Kreuzungspunkten der Elektrodenbahnen mit den Fasern jeweils vollständig von der Elektrode umgeben werden. Vorzugsweise wird in diesem Fall ein leitfähiger Klebstoff geringerer Viskosität als der für die untere Elektrodenschicht (2a) verwendet. Nach Aufbringen der Struktur wird auch dieser Klebstoff ausgehärtet. Anschließend kann diese Struktur ebenfalls, wie in Figur 2b gezeigt, mit einem Harz (5) vergossen werden.An improvement in the properties of the converter is achieved if additionally before shedding a further electrode layer (2b) on the fibers (1) is applied, which is largely congruent with the first electrode layer (2a). This structure will with the help of a dispenser, the conductive adhesive can process, distributed over the fibers so regularly, that these are at the crossing points of the electrode tracks with the fibers completely from the electrode be surrounded. In this case, a is preferred conductive adhesive of lower viscosity than that for the lower electrode layer (2a) is used. To This adhesive is also applied to the structure hardened. Then this structure can also as shown in Figure 2b, with a resin (5) be shed.
Bei einem weiteren beispielhaften Verfahren zur Herstellung einer Ausgestaltungsform des erfindungsgemäßen Wandlers werden die Fasern zunächst in paralleler Anordnung in ein Polymer eingegossen. Nachfolgend wird mit einem Laser die Struktur für die Elektroden (2) in der Polymerschicht lokal abgetragen, bis die Faseroberfläche freiliegt. Die Wellenlänge und Energie des Lasers sind dabei so einzustellen, daß der Kunststoff entfernt wird, ohne die Fasern zu schädigen. Nach dem einseitigen Einbringen der Struktur wird die Elektrodenanordnung durch Füllen der Vertiefungen hergestellt. Dazu wird bevorzugt ein leitfähiger Klebstoff verwendet. Selbstverständlich sind auch andere Materialien möglich, beispielsweise durch Bedampfen der Fasern mit einem Metall. Sollen die Elektroden die Fasern jeweils vollständig umschließen, werden die Schritte Laserabtrag und Füllen für die gegenüberliegende Seite der Polymerschicht wiederholt.In another exemplary method for Production of an embodiment of the invention The fibers are first converted in parallel Poured assembly into a polymer. following is the structure for the electrodes with a laser (2) locally removed in the polymer layer until the The fiber surface is exposed. The wavelength and energy the laser should be set so that the plastic is removed without damaging the fibers. To the one-sided introduction of the structure becomes the electrode arrangement made by filling the wells. A conductive adhesive is preferred used. Of course, other materials are also possible, for example by steaming the fibers with a metal. The electrodes are the fibers each completely enclose the steps Laser ablation and filling for the opposite side the polymer layer is repeated.
Die vorzugsweise ferroelektrischen Fasern, die für einen flächigen Verbundwerkstoff verwendet werden, sind beispielsweise PZT-Fasern, wie sie in der DE 43 32 831 oder der DE 196 35 748 beschrieben sind. Diese werden über ein naßchemisches Verfahren, ein Sol-Gel-Verfahren, hergestellt und über thermische Schritte in keramische Fasern umgewandelt.The preferably ferroelectric fibers used for a flat composite material are used for example PZT fibers, as described in DE 43 32 831 or DE 196 35 748 are described. These will about a wet chemical process, a sol-gel process, manufactured and via thermal steps in ceramic Fibers converted.
Die Fasern werden bevorzugt als Monolage elektrodiert, d.h. sie sind parallel angeordnet, ohne daß Fasern übereinander zu liegen kommen. Um dies zu erreichen, werden die Fasern entweder als Mono- oder als Multifilamentfaser (siehe DE 196 35 748) hergestellt und anschließend in eine Monolage gebracht, oder sie werden bereits als Monolage hergestellt.The fibers are preferably electrodeposited as a monolayer, i.e. they are arranged in parallel without Fibers come to lie on top of each other. To achieve this, the fibers are either mono or Multifilament fiber (see DE 196 35 748) manufactured and then placed in a monolayer, or she are already produced as a monolayer.
Eine andere Möglichkeit, eine Monolage von PZT-Fasern zu erhalten, besteht darin, die Fasern bereits durch den Spinnvorgang, in dem sie noch als Sol-Gel-Stufe vorliegen, in ein Gelege paralleler Fasern zu bringen, die sich weitgehend nicht überdecken oder kreuzen. In den darauffolgenden Schritten Trocknung, Pyrolyse und Sinterung müssen die Fasern möglicherweise auf verschiedenen Unterlagen thermisch behandelt werden, was ein Umheben der Fasern nötig macht. Da die meisten funktionellen Fasern sehr fragil sind, sollte hierbei ein schonendes Verfahren eingesetzt werden, das die Fasern, ohne ihre parallele Anordnung zu stören, auf eine andere Unterlage hebt. Dies kann beispielsweise mittels einer Vakuumansaugtechnik erfolgen.Another option is a monolayer of PZT fibers is to get the fibers already through the spinning process, in which it is still called the sol-gel stage are present in a group of parallel fibers bring that largely do not overlap or cross. In the subsequent drying steps, The fibers may need pyrolysis and sintering thermally treated on various substrates what makes it necessary to fold the fibers. Since the most functional fibers should be very fragile a gentle process is used here the fibers without disturbing their parallel arrangement, on another surface. For example using a vacuum suction technique.
Das Aufbringen der Fasern auf die Elektrodenstruktur oder der Elektrodenstruktur auf die Fasern ist mit verschiedenen Methoden möglich.The application of the fibers to the electrode structure or the electrode structure on the fibers possible with different methods.
So kann eine Trägerschicht mit den Elektroden aus noch nassem leitfähigen Klebstoff auf das Fasergelege abgesenkt werden. Durch einen gewissen Druck auf die Elektrodenstruktur werden die Fasern dann in den Klebstoff gedrückt.A carrier layer can be made with the electrodes still wet conductive adhesive on the fiber fabric be lowered. With some pressure on the The fibers are then inserted into the electrode structure Glue pressed.
Eine weitere Möglichkeit stellt das aufeinanderfolgende Aufbringen einzelner Fasern auf die Elektrodenstruktur dar. Dies kann manuell geschehen oder dadurch, daß die Fasern von oben durch einen Schlitz, der senkrecht zu den Elektrodenbahnen verläuft, auf diese herabfallen. Durch Bewegen des Schlitzes senkrecht zu den Elektrodenbahnen werden die Fasern hintereinander und parallel zueinander abgelegt.Another possibility is the successive Applying individual fibers to the electrode structure This can be done manually or in that the fibers pass through a slot from above, which runs perpendicular to the electrode tracks these fall down. By moving the slot vertically the fibers become the electrode tracks one behind the other and filed parallel to each other.
Zur Integration in einen Verbundwerkstoff werden die einseitig oder ringsum elektrodierten Fasern vorzugsweise mit einem Polymer vergossen. Bevorzugt wird hierfür ein Epoxidharz verwendet, das dem des Matrixmaterials des Verbundwerkstoffs weitgehend gleicht.For integration into a composite material the one-sided or all around electrodized fibers preferably potted with a polymer. Is preferred for this an epoxy resin is used, that of the matrix material of the composite material is largely the same.
Diese Schicht kann mit beliebig vielen weiteren Laminateinzelschichten, die wiederum PZT-Faserstrukturen enthalten können, überlaminiert werden. This layer can be combined with any number of others Single layers of laminate, which in turn are PZT fiber structures may contain, overlaminated.
Wurden die Fasern, wie bei dem zweiten oben beschriebenen Verfahren, nach Einbettung in ein Polymer elektrodiert, kann die Polymerschicht mit den Fasern direkt in den Verbundwerkstoff einlaminiert werden.The fibers were like the second one described above Process after embedding in a polymer Electrodized, the polymer layer with the fibers can be laminated directly into the composite.
An den äußeren Anschlüssen (4), die beim Eingießen nicht mit Polymer bedeckt wurden, wird bei Einsatz des Wandlers durch eine Steuerelektronik bzw. Meßschaltung eine Spannung angelegt, durch die die Fasern, bevorzugt bei erhöhten Temperaturen, in der Struktur polarisiert werden. Über die Anschlüsse (4) werden die Fasern für ihre sensorischen oder aktorischen Aufgaben auch angesteuert.At the outer connections (4), when pouring have not been covered with polymer Transducer by control electronics or measuring circuit a voltage is applied by which the fibers are preferred at elevated temperatures, polarized in the structure become. Via the connections (4) the fibers for their sensory or actuator tasks are also controlled.
Bei mehrfacher Anordnung des erfindungsgemäßen Wandlers innerhalb der Verbundstruktur, z.B. nebeneinander oder übereinander, können durch eine phasenverzögerte Ansteuerung der Wandler gezielt Schwingungen angeregt werden.With multiple arrangement of the invention Transducer within the composite structure, e.g. side by side or one above the other, can be delayed by a phase Actuation of the transducers targeted vibrations be stimulated.
Claims (19)
- An electromechanical transducer with at least one elongated fibre (1) of a piezoelectric material and at least two electrodes (2) which are provided at mutually spaced places on the fibre, in order to impose an electric field in the longitudinal direction on the fibre, characterized in that the electrodes (1) are in direct contact with the fibre (1), the individual electrodes at least partially surrounding the fibre.
- An electromechanical transducer according to claim 1, characterized in that the electrodes (2) are formed from an electrically conductive adhesive.
- An electromechanical transducer according to claim 1 or 2, characterized in that the individual electrodes (2) completely surround the fibre (1).
- An electromechanical transducer according to any of claims 1 to 3, characterized in that the fibre (1) has a diameter of less than 100 µm.
- An electromechanical transducer according to any of claims 1 to 4, characterized in that the fibre (1) has a length from 5 to 100 mm.
- An electromechanical transducer according to any of claims 1 to 5, characterized in that a plurality of electrodes (2) are arranged along the longitudinal axis of the fibre (1) in an interdigitatated geometry.
- An electromechanical transducer according to any of claims 1 to 6, characterized in that a plurality of fibres (1) are arranged parallel alongside one another, so that a mono-layer of fibres is formed.
- An electromechanical transducer according to claim 7, characterized in that a plurality of mono-layers of the fibres (1) lie one on the other.
- An electromechanical transducer according to claim 7 or 8, characterized in that further layers (5) of other materials are attached to the mono-layer(s), on top and/or underneath.
- An electromechanical transducer according to any of claims 1 to 9, characterized in that the fibres (1) are embedded in a polymer layer.
- An electromechanical transducer according to any of claims 1 to 10, characterized in that the piezoelectric material is a ferroelectric ceramic.
- A composite material of a plurality of layers, characterized in that at least one of the layers comprises the electromechanical transducer according to any of claims 1 to 11.
- A method of making an electromechanical transducer with the following steps:providing one or more elongated fibres (1) of a piezoelectric material;applying the fibre(s) (1) to a supporting layer (3); andapplying electrically conductive material for forming electrodes (2) at at least two places spaced from one another, directly on the fibre(s), so that the conductive material is in direct contact with the fibre(s), at least partially surrounds the fibre(s), and an adhesive connection between the fibre(s) and the conductive material is created.
- A method of producing an electromechanical transducer with the following steps:providing one or more elongated fibres (1) of a piezoelectric material;applying electrically conductive material for forming electrodes (2) at at least two places spaced from one another on a supporting layer (3),applying the fibre(s) (1) directly on the conductive material, so that the conductive material is in direct contact with the fibre(s), at least partially surrounds the fibre(s), and an adhesive connection between the fibre(s) and the conductive material is created.
- A method according to claim 14, characterized in that conductive material is further applied directly on the fibre(s) at places whereat which the fibre or fibres is or are already partially enclosed by conductive material, so that the conductive material completely surrounds the fibre(s).
- A method according to claim 14 or 15, characterized in that a negative pattern for definition of an interdigitated geometry of the electrodes is applied on the supporting layer before the application of the conductive material, whereby the conductive material is applied in the negative pattern.
- A method according to any of claims 13 to 16, characterized in that the conductive material is an electrically conductive adhesive, especially a thixotropic polymer.
- A method according to any of claims 13 to 17, characterized in that the supporting layer (3) is put down on the fibres with still wet conductive adhesive, whereby the fibres are pressed into the adhesive.
- A method according to any of claims 13 to 17, characterized in that the supporting layer (3) is part of a composite material in which the electromechanical transducer is to be integrated.
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| DE19829216 | 1998-06-30 | ||
| DE19829216A DE19829216C1 (en) | 1998-06-30 | 1998-06-30 | Electromechanical transducer and manufacturing method |
| PCT/DE1999/001895 WO2000002265A1 (en) | 1998-06-30 | 1999-06-29 | Electromechanical converter and method for producing the same |
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| Publication Number | Publication Date |
|---|---|
| EP1021843A1 EP1021843A1 (en) | 2000-07-26 |
| EP1021843B1 true EP1021843B1 (en) | 2003-06-25 |
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| Application Number | Title | Priority Date | Filing Date |
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| EP99941409A Expired - Lifetime EP1021843B1 (en) | 1998-06-30 | 1999-06-29 | Electromechanical converter and method for producing the same |
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| Country | Link |
|---|---|
| US (1) | US6337835B1 (en) |
| EP (1) | EP1021843B1 (en) |
| AT (1) | ATE243886T1 (en) |
| DE (2) | DE19829216C1 (en) |
| WO (1) | WO2000002265A1 (en) |
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| US9026212B2 (en) * | 2008-09-23 | 2015-05-05 | Incube Labs, Llc | Energy harvesting mechanism for medical devices |
| DE102010019666A1 (en) * | 2010-04-28 | 2011-11-03 | Technische Universität Dresden | Aktorisches, sensory and / or regenerative fiber composite component and method for its preparation |
| US9365013B2 (en) | 2010-07-09 | 2016-06-14 | Massachusetts Institute Of Technology | Multimaterial thermally drawn piezoelectric fibers |
| EP4252833B1 (en) | 2015-11-17 | 2026-02-11 | Inspire Medical Systems, Inc. | Microstimulation sleep disordered breathing (sdb) therapy device |
| US12141680B2 (en) | 2019-12-30 | 2024-11-12 | Massachusetts Institute Of Technology | Fiber and fabric computers |
Family Cites Families (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| USRE23813E (en) * | 1947-12-26 | 1954-04-20 | Piezoelectric transducer and method for producing same | |
| DE3434729A1 (en) * | 1984-09-21 | 1986-04-03 | Siemens AG, 1000 Berlin und 8000 München | Flexural element made of piezoceramic, and method for the fabrication thereof |
| FR2634088B1 (en) * | 1988-07-11 | 1991-05-31 | Inst Francais Du Petrole | PIEZOELECTRIC SENSOR COMPRISING AT LEAST ONE PAIR OF FLEXIBLE SENSITIVE ELEMENTS OF LONG LENGTH |
| DE19624204C1 (en) * | 1996-06-18 | 1997-10-23 | Stettner Gmbh & Co | Piezoceramic flexural transducer |
-
1998
- 1998-06-30 DE DE19829216A patent/DE19829216C1/en not_active Expired - Fee Related
-
1999
- 1999-06-29 AT AT99941409T patent/ATE243886T1/en not_active IP Right Cessation
- 1999-06-29 DE DE59906089T patent/DE59906089D1/en not_active Expired - Lifetime
- 1999-06-29 EP EP99941409A patent/EP1021843B1/en not_active Expired - Lifetime
- 1999-06-29 WO PCT/DE1999/001895 patent/WO2000002265A1/en not_active Ceased
- 1999-06-29 US US09/486,633 patent/US6337835B1/en not_active Expired - Fee Related
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP3059772A1 (en) * | 2015-02-23 | 2016-08-24 | Commissariat A L'energie Atomique Et Aux Energies Alternatives | Piezoelectric device |
| FR3033087A1 (en) * | 2015-02-23 | 2016-08-26 | Commissariat Energie Atomique | PIEZOELECTRIC DEVICE |
Also Published As
| Publication number | Publication date |
|---|---|
| DE59906089D1 (en) | 2003-07-31 |
| US6337835B1 (en) | 2002-01-08 |
| ATE243886T1 (en) | 2003-07-15 |
| WO2000002265A1 (en) | 2000-01-13 |
| EP1021843A1 (en) | 2000-07-26 |
| DE19829216C1 (en) | 2000-03-02 |
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