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EP0460255B1 - Measuring head for a quadrupole mass spectrometer - Google Patents

Measuring head for a quadrupole mass spectrometer Download PDF

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Publication number
EP0460255B1
EP0460255B1 EP90110681A EP90110681A EP0460255B1 EP 0460255 B1 EP0460255 B1 EP 0460255B1 EP 90110681 A EP90110681 A EP 90110681A EP 90110681 A EP90110681 A EP 90110681A EP 0460255 B1 EP0460255 B1 EP 0460255B1
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EP
European Patent Office
Prior art keywords
measuring head
head according
separating system
components
flange
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
EP90110681A
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German (de)
French (fr)
Other versions
EP0460255A1 (en
Inventor
Ulrich Dr. Döbler
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Balzers und Leybold Deutschland Holding AG
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Leybold AG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Leybold AG filed Critical Leybold AG
Priority to AT90110681T priority Critical patent/ATE118925T1/en
Priority to EP90110681A priority patent/EP0460255B1/en
Priority to DE59008540T priority patent/DE59008540D1/en
Priority to US07/707,575 priority patent/US5132536A/en
Priority to JP13390091A priority patent/JP3179130B2/en
Publication of EP0460255A1 publication Critical patent/EP0460255A1/en
Application granted granted Critical
Publication of EP0460255B1 publication Critical patent/EP0460255B1/en
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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00—Particle spectrometers or separator tubes
    • H01J49/26—Mass spectrometers or separator tubes
    • H01J49/34—Dynamic spectrometers
    • H01J49/42—Stability-of-path spectrometers, e.g. monopole, quadrupole, multipole, farvitrons
    • H01J49/4205—Device types
    • H01J49/421—Mass filters, i.e. deviating unwanted ions without trapping
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00—Particle spectrometers or separator tubes
    • H01J49/02—Details
    • H01J49/04—Arrangements for introducing or extracting samples to be analysed, e.g. vacuum locks; Arrangements for external adjustment of electron- or ion-optical components

Definitions

  • the invention relates to a measuring head for a quadrupole mass spectrometer with an ion source, a one-piece quadrupole separation system, a detector, a flange for attaching the measuring head to a recipient and support means for these components.
  • a measuring head of this type is known from the document "Fundamentals of Vacuum Technology, Calculations and Tables" by Leybold-Heraeus GmbH, edition 11/82, pages 58, 59.
  • the quadrupole separation system consists of a one-piece, cylindrical ceramic part with an axis-parallel opening. In cross-section, this opening has the shape of four hyper-loads arranged centrally symmetrically around the cylinder axis.
  • the hyperbolic surfaces are provided with metal coatings, which form four electrodes with a hyperbolic cross section. A high-frequency voltage and a superimposed DC voltage are applied to these electrodes. It depends on the value of these voltages whether an ion with the mass number M can pass the separation system or not.
  • Quadrupole separation systems of this type are known from DE-A-22 15 763, DE-A-23 47 544 and DE-A-26 25 660.
  • a central, metallic support part with a multiplicity of current feedthroughs is provided.
  • the flange with the aid of which the measuring head is connected to a corresponding counter flange of a recipient, is fastened to this support part.
  • the lines that are led through the supporting part open into plug-in systems to which the supply voltages and the signal-processing components are connected.
  • the detector and the quadrupole separation system are mounted on the inside of the flange on the central support part.
  • a tube comprising the separation system is provided on the support part, which carries the ion source upstream of the separation system.
  • Quadrupolmeßkopfes The construction of the known Quadrupolmeßkopfes is complex and complicated. Because of the large number of components that adjust to each other, the mounting of the measuring head is time-consuming. The known measuring head is very sensitive to shocks and vibrations. The number of its components and thus the surface of these components located in the recipient is large, as a result of which the generation of the vacuum required for the operation of the mass spectrometer is impaired. This also applies and in particular to quadrupole separation systems which are assembled from several individual rods and as are known, for example, from US Pat. No. 3,560,734.
  • the present invention has for its object to provide a Quadrupolmeßkopf of the type mentioned, the structure is much simpler.
  • this object is achieved in that the one-piece quadrupole separation system itself is the carrier of the ion source, the detector and the mounting flange and that the detector is part of a cover with which the ion outlet opening of the separation system is closed in a vacuum-tight manner.
  • connections between the quadrupole separation system and the components are adhesive connections. This results in a stable structure with simple assembly. If the adhesive used is a non-conductor, there is also the possibility of passing voltage and current-carrying connecting lines in the form of conductor tracks applied to the quadrupole separation system through the adhesive points. The large number of current feedthroughs through the metallic flange itself can thus be eliminated.
  • Figures 1 to 6 each show measuring heads 1 according to the invention (or parts thereof), in which the quadrupole separation system itself with 2, the ion source with 3 and the detector with 4 are designated.
  • the separation system consists of a one-part, cylindrical ceramic part with an axis-parallel opening 5, which in cross section preferably has the shape of four central symmetries arranged around the cylinder axis 6. These surfaces are provided with metal coatings, which form four electrodes, not shown in detail.
  • the separation system can be a one-piece ceramic part; but it can also consist of several parts which are joined together (glued together) (cf. DE-A-26 25 660).
  • an electron impact ion source is shown, which is an annular one Cathode 7 and a basket anode 8 comprises.
  • the carrier of these components is preferably the separation system 2 itself.
  • the flange 11 is arranged in the vicinity of the ion source 3, so that the surface of the measuring head 1 which is in a vacuum is as small as possible.
  • the flange 11 encompasses the separating system 2 in a central opening 13.
  • a stable and vacuum-tight connection of the flange 11 and separating system is possible with the aid of a compression fitting or a suitable metal / ceramic adhesive. In the illustrated embodiments, adhesive connections are provided.
  • the respective adhesive layer is designated 14.
  • the detector 4 which is designed differently in the illustrated exemplary embodiments, is in each case part of a cover 16, with which the opening 5 of the separation system 2 is closed in the region of the end face located outside the vacuum. A stable and vacuum-tight connection between the separation system 2 and the cover 16 is expediently ensured again with the aid of a suitable adhesive.
  • the adhesive layer is designated 17.
  • an ion catcher is provided as the detector 4, which is arranged on the bottom of the pot-shaped cover 16 made of ceramic.
  • the signal line 21 is led out through a hole in the cover 16.
  • the lid 16 itself is the carrier of electronic components 22, for. B. a preamplifier.
  • the electronic components 22 are only shown as a dashed block. Of course, there is also the possibility of using the separation system 2 itself as a carrier for electronic components.
  • the basket anode 8 of the ion source 3 located within the recipient 12 is carried by the front end of the separation system 2 which projects into the recipient 12.
  • a metallic support ring 23 is glued to this end.
  • An extraction electrode 25 and a carrier plate 26 for the basket anode 8 are fastened to this via spacers 24 made of electrically insulating material (advantageously ceramic).
  • the Power is supplied via lines 27, 28 which are insulated and passed through the flange 11.
  • the line 27 is connected to the basket anode 8.
  • a separate voltage supply for the extraction electrode 25 is not shown.
  • the line 28 is connected to the cathode 7 and at the same time serves as its carrier.
  • a separate heating voltage supply is also not shown.
  • the components in the vacuum are supplied with voltage via conductor tracks 35, 36 which are applied to the ceramic separation system 2.
  • an adhesive layer 14 consisting of an electrically insulating material, a bushing insulated from the flange 11 is ensured.
  • the signals emitted by the detector 4 designed as a Faraday beaker are also routed to the outside with the aid of a conductor track 37.
  • the conductor track 37 passes through the adhesive joint 17.
  • Figure 3 shows the detector area of a mass spectrometer according to the invention.
  • a channeltron is provided as detector 4. This is offset from the axis 6 of the separation system 2. With the aid of the deflection electrode 38, the ions emerging from the separation system 2 are deflected onto the input of the channeltron 4.
  • a duct plate can also be used.
  • the detector 4 comprises two ion catchers 41 and 42.
  • the catcher 41 has the shape of a disk.
  • the catcher 42 has a ring-shaped design and concentrically surrounds the catcher 41. As a result, the detector 4 has a spatially resolving effect.
  • the signal line 21 adjoining the capture electrode 41 is again led out to the electronics 22 through a hole in the cover 16.
  • the signal emitted by the ring-shaped catcher 42 is fed with the aid of a conductor track 43 to a preamplifier 44 arranged inside the cover 16.
  • the amplified signal is led out of the cover 16 via the conductor track 45 which passes through the adhesive point 17 and is supplied to the electronics 22 on the outside of the cover 16, for example.
  • Figure 5 shows an embodiment with an outer housing 51 which is attached to the flange 11.
  • Printed circuit boards 52, 53, 54 are held within the housing 51 in a manner not shown in detail.
  • Electronic components for supplying the ion source 3 are located on the printed circuit board 52.
  • the lines 55, 56 emanating from the printed circuit board 52 are connected to the direct supply lines 27, 28 via plugs 57, 58.
  • the lines 27, 28 are again insulated by the Flange 11 passed through and designed so stable that they are able to carry the ring cathode 7 and the basket anode 8.
  • the components located on the circuit board 53 are used to generate the supply voltages for the electrodes of the separation system 2.
  • the electrodes located in the separation system 2 are connected to the circuit board 53 via conductor tracks 61, 62 which pass through the adhesive point 17 and metal tongues 63, 64 which lie over these conductor tracks .
  • the electronic components located on the printed circuit board 54 are used for signal processing.
  • the line 21 is connected to the printed circuit board 54 via the plug 65.
  • the present invention makes it possible in a simple manner to equip the separation system 2 with a pre-filter and / or with a post-filter.
  • a pre-filter causes the desired and undesired masses to be separated for the first time and thus serves to better focus the ions in the separation system.
  • a post-filter improves the transfer of the ions to the detector. Overall, the use of pre- and post-filters improves resolution and sensitivity.
  • the pre-filter 71 and the post-filter 72 are assigned to the separation system 2. They are also designed as quadrupole systems and connected to the separation system 2 via the adhesive points 73, 74.
  • the electronics for the voltage supply is not shown in detail. The voltage supply can again take place via conductor tracks which are led through the adhesive points 73, 74. If the pre-filter and after-filter 71, 72 are operated only with AC voltage, specifically with the AC voltage of the separation system 2, then there is the possibility of designing the adhesive points 73, 74 as capacitors and, via these capacitors, the voltage present at the AC voltage electrodes of the separation system 2 to be transferred to the electrodes of the pre- and post-filter 71, 72. Pre- and post-filters are then isolated from the DC potential of the separation system 2.
  • the capacitors are expediently formed by metallized surface sections 75 to 78 located on the respective end faces.
  • the capacitance of the respective capacitors depends on the size and spacing of these surfaces and on the type of adhesive used, that is to say on the sizes that the dielectric of the Form capacitors.
  • the size and arrangement, in particular of the metallized sections 76, 77 is to be selected so that the supply of direct voltages to the electrodes of the separation system 2 via the interconnects 73, 74 penetrating through conductor tracks remains possible.
  • the appropriate glue metal-ceramic or ceramic-ceramic glue
  • glass solder and active solder or hard solder for the metal-ceramic connections.

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  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Other Investigation Or Analysis Of Materials By Electrical Means (AREA)
  • Electron Tubes For Measurement (AREA)

Abstract

The invention relates to a measuring head (1) for a quadrupole mass spectrometer having an ion source (3), an integral quadrupole isolation system (2), a detector (4), a flange (11) for attachment of the measuring head (1) to a container (12), and supporting means for these components; in order to effect a simpler and smaller design, it is proposed that the integral quadrupole isolation system (2) is itself the support for the ion source (3), the detector (4) and/or the attachment flange (11). <IMAGE>

Description

Die Erfindung bezieht sich auf einen Meßkopf für ein Quadrupolmassenspektrometer mit einer Ionenquelle, einem einstückigen Quadrupol-Trennsystem, einem Detektor, einem Flansch zur Befestigung des Meßkopfes an einem Rezipienten und Tragmitteln für diese Bauteile.The invention relates to a measuring head for a quadrupole mass spectrometer with an ion source, a one-piece quadrupole separation system, a detector, a flange for attaching the measuring head to a recipient and support means for these components.

Aus der Schrift "Grundlagen der Vakuumtechnik, Berechnungen und Tabellen" der Leybold-Heraeus GmbH, Auflage 11/82, Seiten 58, 59 ist ein Meßkopf dieser Art bekannt. Das Quadrupol-Trennsystem besteht aus einem einteiligen, zylindrischen Keramikteil mit einer achsparallelen Öffnung. Im Querschnitt hat diese Öffnung die Form von vier zentralsymmetrisch um die Zylinderachse herum angeordneten Hyperbelästen. Die hyperbelförmigen Flächen sind mit Metallbeschichtungen versehen, welche vier Elektroden mit hyperbolischem Querschnitt bilden. An diese Elektroden wird eine Hochfrequenzspannung und eine überlagerte Gleichspannung angelegt. Vom Wert dieser Spannungen hängt es ab, ob ein Ion mit der Massenzahl M das Trennsystem passieren kann oder nicht. Quadrupol-Trennsysteme dieser Art sind aus DE-A-22 15 763, DE-A-23 47 544 und DE-A-26 25 660 bekannt.A measuring head of this type is known from the document "Fundamentals of Vacuum Technology, Calculations and Tables" by Leybold-Heraeus GmbH, edition 11/82, pages 58, 59. The quadrupole separation system consists of a one-piece, cylindrical ceramic part with an axis-parallel opening. In cross-section, this opening has the shape of four hyper-loads arranged centrally symmetrically around the cylinder axis. The hyperbolic surfaces are provided with metal coatings, which form four electrodes with a hyperbolic cross section. A high-frequency voltage and a superimposed DC voltage are applied to these electrodes. It depends on the value of these voltages whether an ion with the mass number M can pass the separation system or not. Quadrupole separation systems of this type are known from DE-A-22 15 763, DE-A-23 47 544 and DE-A-26 25 660.

Beim Quadrupolmeßkopf nach dem Stand der Technik ist ein zentrales, metallisches Tragteil mit einer Vielzahl von Stromdurchführungen vorgesehen. An diesem Tragteil ist der Flansch befestigt, mit dessen Hilfe der Meßkopf an einen korrespondierenden Gegenflansch eines Rezipienten angeschlossen wird. Auf der Außenseite des Flansches münden die durch das Tragteil hindurchgeführten Leitungen in Stecksystemen, an die die Versorgungsspannungen und die signalverarbeitenden Bauteile angeschlossen werden. Auf der Innenseite des Flansches sind am zentralen Tragteil der Detektor und das Quadrupol-Trennsystem gehaltert. Weiterhin ist am Tragteil ein das Trennsystem umfassendes Rohr vorgesehen, das die dem Trennsystem vorgelagerte Ionenquelle trägt.In the quadrupole measuring head according to the prior art, a central, metallic support part with a multiplicity of current feedthroughs is provided. The flange, with the aid of which the measuring head is connected to a corresponding counter flange of a recipient, is fastened to this support part. On the On the outside of the flange, the lines that are led through the supporting part open into plug-in systems to which the supply voltages and the signal-processing components are connected. The detector and the quadrupole separation system are mounted on the inside of the flange on the central support part. Furthermore, a tube comprising the separation system is provided on the support part, which carries the ion source upstream of the separation system.

Der Aufbau des vorbekannten Quadrupolmeßkopfes ist aufwendig und kompliziert. Wegen der Vielzahl der zueinander justierenden Bauteile ist die Montage des Meßkopfes zeitaufwendig. Gegen Erschütterungen und Vibrationen ist der vorbekannte Meßkopf sehr empfindlich. Die Zahl seiner Bauteile und damit die im Rezipienten befindliche Oberfläche dieser Bauteile ist groß, wodurch die Erzeugung des für den Betrieb des Massenspektrometers erforderlichen Vakuums beeinträchtigt ist. Dieses gilt auch und insbesondere für Quadrupol-Trennsysteme, die aus mehreren einzelnen Stäben zusammengefügt sind und wie sie beispielsweise aus der US-A-35 60 734 bekannt sind.The construction of the known Quadrupolmeßkopfes is complex and complicated. Because of the large number of components that adjust to each other, the mounting of the measuring head is time-consuming. The known measuring head is very sensitive to shocks and vibrations. The number of its components and thus the surface of these components located in the recipient is large, as a result of which the generation of the vacuum required for the operation of the mass spectrometer is impaired. This also applies and in particular to quadrupole separation systems which are assembled from several individual rods and as are known, for example, from US Pat. No. 3,560,734.

Der vorliegenden Erfindung liegt die Aufgabe zugrunde einen Quadrupolmeßkopf der eingangs genannten Art zu schaffen, dessen Aufbau wesentlich einfacher ist.The present invention has for its object to provide a Quadrupolmeßkopf of the type mentioned, the structure is much simpler.

Erfindungsgemäß wird diese Aufgabe dadurch gelöst, daß das einstückige Quadrupol-Trennsystem selbst der Träger der Ionenquelle, des Detektors und des Befestigungsflansches ist und daß der Detektor Bestandteil eines Deckels ist, mit dem die Ionenaustrittsöffnung des Trennsystems vakuumdicht verschlossen ist. Durch diese Maßnahmen ergibt sich ein überraschend einfacher und stabiler Aufbau des Meßkopfes, der dadurch wesentlich robuster ist. Ein weiterer Vorteil besteht darin, daß weniger Bauteile im Vakuum untergebracht werden müssen, so daß die Größe nachgasender, die Erzeugung des Vakuums beeinträchtigender Oberflächen maßgeblich reduziert ist. Das erfindungsgemäß gestaltete Massenspektrometer ist deshalb nach dem Einschalten wesentlich früher betriebsbereit. Der vakuumdichte Verschluß der Ionenaustrittsöffnung mit dem Deckel ermöglicht es, das Trennsystem selbst als Gefäßwand des Vakuumsystems zu verwenden. Außerdem treten infolge einer derartigen, völlig vibrationsfreien Anordnung des Detektors Mikrofonie-Effekte, welche die Empfindlichkeit der Messungen beeinträchtigen, nicht mehr auf.According to the invention, this object is achieved in that the one-piece quadrupole separation system itself is the carrier of the ion source, the detector and the mounting flange and that the detector is part of a cover with which the ion outlet opening of the separation system is closed in a vacuum-tight manner. These measures result in a surprisingly simple and stable construction of the measuring head, which is therefore much more robust. Another advantage is that fewer components have to be accommodated in a vacuum, so that the size of the after-gassing surfaces which impair the generation of the vacuum is significantly reduced. The mass spectrometer designed according to the invention is therefore much earlier after being switched on ready for use. The vacuum-tight closure of the ion outlet opening with the lid makes it possible to use the separation system itself as the vessel wall of the vacuum system. In addition, as a result of such a completely vibration-free arrangement of the detector, microphonic effects which impair the sensitivity of the measurements no longer occur.

Zweckmäßig ist weiterhin, wenn die Verbindungen zwischen dem Quadrupol-Trennsystem und den Bauteilen Klebeverbindungen sind. Dadurch ergibt sich ein stabiler Aufbau bei einfacher Montage. Ist der verwendete Kleber ein Nichtleiter, dann besteht außerdem die Möglichkeit, spannungs- und stromführende Verbindungsleitungen in Form von auf das Quadrupol-Trennsystem aufgebrachten Leiterbahnen durch die Klebestellen hindurchzuführen. Die Vielzahl der bisher nötigen Stromdurchführungen durch den metallischen Flansch selbst kann dadurch entfallen.It is also expedient if the connections between the quadrupole separation system and the components are adhesive connections. This results in a stable structure with simple assembly. If the adhesive used is a non-conductor, there is also the possibility of passing voltage and current-carrying connecting lines in the form of conductor tracks applied to the quadrupole separation system through the adhesive points. The large number of current feedthroughs through the metallic flange itself can thus be eliminated.

Weitere Vorteile und Einzelheiten der Erfindung sollen anhand von in den Figuren 1 bis 6 dargestellten Ausführungsbeispielen erläutert werden.Further advantages and details of the invention will be explained on the basis of the exemplary embodiments illustrated in FIGS. 1 to 6.

Die Figuren 1 bis 6 zeigen jeweils Meßköpfe 1 nach der Erfindung (oder Teile davon), bei welchen das Quadrupol-Trennsystem selbst mit 2, die Ionenquelle mit 3 und der Detektor mit 4 bezeichnet sind. Das Trennsystem besteht aus einem einteiligen, zylindrischen Keramikteil mit einer achsparallelen Öffnung 5, die im Querschnitt vorzugsweise die Form von vierzentralsymmetrisch um die Zylinderachse 6 herum angeordneten Hyberbelästen hat. Diese Flächen sind mit Metallbeschichtungen versehen, welche vier im einzelnen nicht dargestellte Elektroden bilden. Das Trennsystem kann ein einstückiges Keramikteil sein; es kann aber auch aus mehreren, zu einer Einheit zusammengefügten (zusammengeklebten) Teilen bestehen (vgl. DE-A-26 25 660).Figures 1 to 6 each show measuring heads 1 according to the invention (or parts thereof), in which the quadrupole separation system itself with 2, the ion source with 3 and the detector with 4 are designated. The separation system consists of a one-part, cylindrical ceramic part with an axis-parallel opening 5, which in cross section preferably has the shape of four central symmetries arranged around the cylinder axis 6. These surfaces are provided with metal coatings, which form four electrodes, not shown in detail. The separation system can be a one-piece ceramic part; but it can also consist of several parts which are joined together (glued together) (cf. DE-A-26 25 660).

Als Ausführungsbeispiel für eine Ionenquelle 3 ist jeweils eine Elektronenstoßionenquelle dargestellt, welche eine ringförmige Kathode 7 und eine Korbanode 8 umfaßt. Der Träger dieser Bauteile ist vorzugsweise das Trennsystem 2 selbst.As an exemplary embodiment of an ion source 3, an electron impact ion source is shown, which is an annular one Cathode 7 and a basket anode 8 comprises. The carrier of these components is preferably the separation system 2 itself.

Auch der Flansch 11, mit dem der Meßkopf 1 an einem Rezipienten 12 (angedeutet nur in Figur 1) befestigt wird, wird vom Trennsystem 2 selbst getragen. Der Flansch 11 ist in der Nähe der Ionenquelle 3 angeordnet, so daß die sich im Vakuum befindende Oberfläche des Meßkopfes 1 möglichst klein ist. Der Flansch 11 umfaßt in einer zentralen Öffnung 13 das Trennsystem 2. Mit Hilfe einer Quetschverschraubung oder eines geeigneten Metall-/ Keramikklebers ist eine stabile und vakuumdichte Verbindung von Flansch 11 und Trennsystem möglich. Bei den dargestellten Ausführungsbeispielen sind Klebeverbindungen vorgesehen. Die jeweilige Klebeschicht ist mit 14 bezeichnet.The flange 11, with which the measuring head 1 is attached to a recipient 12 (indicated only in FIG. 1), is also carried by the separation system 2 itself. The flange 11 is arranged in the vicinity of the ion source 3, so that the surface of the measuring head 1 which is in a vacuum is as small as possible. The flange 11 encompasses the separating system 2 in a central opening 13. A stable and vacuum-tight connection of the flange 11 and separating system is possible with the aid of a compression fitting or a suitable metal / ceramic adhesive. In the illustrated embodiments, adhesive connections are provided. The respective adhesive layer is designated 14.

Der bei den dargestellten Ausführungsbeispielen verschieden gestaltete Detektor 4 ist jeweils Bestandteil eines Deckels 16, mit dem die Öffnung 5 des Trennsystems 2 im Bereich der außerhalb des Vakuums gelegenen Stirnseite verschlossen ist. Eine stabile und vakuumdichte Verbindung zwischen Trennsystem 2 und Deckel 16 wird zweckmäßig wieder mit Hilfe eines geeigneten Klebers sichergestellt. Die Klebeschicht ist mit 17 bezeichnet.The detector 4, which is designed differently in the illustrated exemplary embodiments, is in each case part of a cover 16, with which the opening 5 of the separation system 2 is closed in the region of the end face located outside the vacuum. A stable and vacuum-tight connection between the separation system 2 and the cover 16 is expediently ensured again with the aid of a suitable adhesive. The adhesive layer is designated 17.

Beim Ausführungsbeispiel nach Figur 1 ist als Detektor 4 ein Ionenfänger vorgesehen, der am Boden des topfförmigen, aus Keramik bestehenden Deckels 16 angeordnet ist. Die Signalleitung 21 ist durch eine Bohrung im Deckel 16 herausgeführt. Der Deckel 16 selbst ist der Träger von elektronischen Bauteilen 22, z. B. eines Vorverstärkers. Die elektronischen Bauteile 22 sind lediglich als gestrichelter Block dargestellt. Natürlich besteht auch die Möglichkeit, das Trennsystem 2 selbst als Träger für elektronische Bauteile zu verwenden.In the exemplary embodiment according to FIG. 1, an ion catcher is provided as the detector 4, which is arranged on the bottom of the pot-shaped cover 16 made of ceramic. The signal line 21 is led out through a hole in the cover 16. The lid 16 itself is the carrier of electronic components 22, for. B. a preamplifier. The electronic components 22 are only shown as a dashed block. Of course, there is also the possibility of using the separation system 2 itself as a carrier for electronic components.

Die innerhalb des Rezipienten 12 befindliche Korbanode 8 der Ionenquelle 3 wird vom stirnseitigen, in den Rezipienten 12 hineinragenden Ende des Trennsystems 2 getragen. Dazu ist auf dieses stirnseitige Ende ein metallischer Tragring 23 aufgeklebt. An diesem sind über Abstandshalter 24 aus elektrisch isolierendem Werkstoff (zweckmäßig Keramik) eine Extraktionselektrode 25 und eine Trägerplatte 26 für die Korbanode 8 befestigt. Die Spannungsversorgung erfolgt über isoliert durch den Flansch 11 hindurchgeführte Leitungen 27, 28. Die Leitung 27 ist mit der Korbanode 8 verbunden. Eine gesonderte Spannungszuführung für die Extraktionselektrode 25 ist nicht dargestellt. Die Leitung 28 steht mit der Kathode 7 in Verbindung und dient gleichzeitig als deren Träger. Eine gesonderte Heizspannungsversorgung ist ebenfalls nicht dargestellt.The basket anode 8 of the ion source 3 located within the recipient 12 is carried by the front end of the separation system 2 which projects into the recipient 12. For this purpose, a metallic support ring 23 is glued to this end. An extraction electrode 25 and a carrier plate 26 for the basket anode 8 are fastened to this via spacers 24 made of electrically insulating material (advantageously ceramic). The Power is supplied via lines 27, 28 which are insulated and passed through the flange 11. The line 27 is connected to the basket anode 8. A separate voltage supply for the extraction electrode 25 is not shown. The line 28 is connected to the cathode 7 and at the same time serves as its carrier. A separate heating voltage supply is also not shown.

Beim Ausführungsbeispiel nach Figur 2 trägt die im Vakuum befindliche Stirnseite des Trennsystems 2 vier Ringe, welche im einzelnen die folgende Funktion haben:

31
Isolationsring
32
Trägerring für eine Ionenlinse
33
Isolationsring
34
Anodengrundplatte
In the exemplary embodiment according to FIG. 2, the end face of the separation system 2, which is in a vacuum, carries four rings, each of which has the following function:
31
Insulation ring
32
Carrier ring for an ion lens
33
Insulation ring
34
Anode base plate

Die Spannungsversorgung der im Vakuum befindlichen Bauteile erfolgt über Leiterbahnen 35, 36, welche auf das Keramik-Trennsystem 2 aufgebracht sind. Infolge einer aus elektrisch isolierendem Werkstoff bestehenden Kleberschicht 14 ist eine gegenüber dem Flansch 11 isolierte Durchführung sichergestellt.The components in the vacuum are supplied with voltage via conductor tracks 35, 36 which are applied to the ceramic separation system 2. As a result of an adhesive layer 14 consisting of an electrically insulating material, a bushing insulated from the flange 11 is ensured.

Auch die vom als Faraday-Becher ausgebildeten Detektor 4 abgegebenen Signale werden mit Hilfe einer Leiterbahn 37 nach außen geführt. Die Leiterbahn 37 durchsetzt die Klebestelle 17.The signals emitted by the detector 4 designed as a Faraday beaker are also routed to the outside with the aid of a conductor track 37. The conductor track 37 passes through the adhesive joint 17.

Figur 3 zeigt den Detektorbereich eines Massenspektrometers nach der Erfindung. Als Detektor 4 ist ein Channeltron vorgesehen. Dieses ist gegenüber der Achse 6 des Trennsystem 2 versetzt angeordnet. Mit Hilfe der Ablenkelektrode 38 werden die aus dem Trennsystem 2 austretenden Ionen auf den Eingang des Channeltrons 4 abgelenkt. Alternativ kann auch eine Kanalplatte verwendet werden.Figure 3 shows the detector area of a mass spectrometer according to the invention. A channeltron is provided as detector 4. This is offset from the axis 6 of the separation system 2. With the aid of the deflection electrode 38, the ions emerging from the separation system 2 are deflected onto the input of the channeltron 4. Alternatively, a duct plate can also be used.

Beim Massenspektrometer nach Figur 4 umfaßt der Detektor 4 zwei Ionenfänger 41 und 42. Der Fänger 41 hat die Form einer Scheibe. Der Fänger 42 ist ringförmig gestaltet und umgibt den Fänger 41 konzentrisch. Der Detektor 4 hat dadurch eine ortsauflösende Wirkung.In the mass spectrometer according to FIG. 4, the detector 4 comprises two ion catchers 41 and 42. The catcher 41 has the shape of a disk. The catcher 42 has a ring-shaped design and concentrically surrounds the catcher 41. As a result, the detector 4 has a spatially resolving effect.

Die sich an die Fängerelektrode 41 anschließende Signalleitung 21 ist wieder durch eine Bohrung im Deckel 16 zur Elektronik 22 herausgeführt. Das vom ringförmigen Fänger 42 abgegebene Signal wird mit Hilfe einer Leiterbahn 43 einem innerhalb des Deckels 16 angeordneten Vorverstärker 44 zugeführt. Das verstärkte Signal wird über die Leiterbahn 45, die die Klebestelle 17 durchsetzt, aus dem Deckel 16 herausgeführt und auf der Außenseite des Deckels 16 beispielsweise der Elektronik 22 zugeführt.The signal line 21 adjoining the capture electrode 41 is again led out to the electronics 22 through a hole in the cover 16. The signal emitted by the ring-shaped catcher 42 is fed with the aid of a conductor track 43 to a preamplifier 44 arranged inside the cover 16. The amplified signal is led out of the cover 16 via the conductor track 45 which passes through the adhesive point 17 and is supplied to the electronics 22 on the outside of the cover 16, for example.

Figur 5 zeigt ein Ausführungsbeispiel mit einem äußeren Gehäuse 51, das am Flansch 11 befestigt ist. Innerhalb des Gehäuses 51 sind in im einzelnen nicht näher dargestellter Weise Leiterplatten 52, 53, 54 gehaltert. Auf der Leiterplatte 52 befinden sich elektronische Bauteile zur Versorgung der Ionenquelle 3. Die Verbindung der von der Leiterplatte 52 ausgehenden Leitungen 55, 56 mit den unmittelbaren Zuführungsleitungen 27, 28 erfolgt über Stecker 57, 58. Die Leitungen 27, 28 sind wieder isoliert durch den Flansch 11 hindurchgeführt und derart stabil ausgebildet, daß sie in der Lage sind, die Ringkathode 7 und die Korbanode 8 zu tragen.Figure 5 shows an embodiment with an outer housing 51 which is attached to the flange 11. Printed circuit boards 52, 53, 54 are held within the housing 51 in a manner not shown in detail. Electronic components for supplying the ion source 3 are located on the printed circuit board 52. The lines 55, 56 emanating from the printed circuit board 52 are connected to the direct supply lines 27, 28 via plugs 57, 58. The lines 27, 28 are again insulated by the Flange 11 passed through and designed so stable that they are able to carry the ring cathode 7 and the basket anode 8.

Die auf der Leiterplatte 53 befindlichen Bauteile dienen der Erzeugung der Versorgungsspannungen für die Elektroden des Trennsystems 2. Über durch die Klebestelle 17 hindurchgeführte Leiterbahnen 61, 62 und über diesen Leiterbahnen anliegende Metallzungen 63, 64 sind die im Trennsystem 2 befindlichen Elektroden mit der Leiterplatte 53 verbunden.The components located on the circuit board 53 are used to generate the supply voltages for the electrodes of the separation system 2. The electrodes located in the separation system 2 are connected to the circuit board 53 via conductor tracks 61, 62 which pass through the adhesive point 17 and metal tongues 63, 64 which lie over these conductor tracks .

Die auf der Leiterplatte 54 befindlichen elektronischen Bauteile dienen der Signalverarbeitung. Über den Stecker 65 ist die Leitung 21 mit der Leiterplatte 54 verbunden.The electronic components located on the printed circuit board 54 are used for signal processing. The line 21 is connected to the printed circuit board 54 via the plug 65.

Die vorliegende Erfindung ermöglicht es in einfacher Weise, das Trennsystem 2 mit einem Vorfilter und/oder mit einem Nachfilter auszurüsten. Ein Vorfilter bewirkt eine erste Trennung der gewünschten und nicht gewünschten Massen und dient damit der besseren Fokussierung der Ionen ins Trennsystem. Ein Nachfilter verbessert die Überleitung der Ionen auf den Detektor. Insgesamt werden bei der Verwendung von Vor- und Nachfilter eine Verbesserung der Auflösung und der Empfindlichkeit erreicht.The present invention makes it possible in a simple manner to equip the separation system 2 with a pre-filter and / or with a post-filter. A pre-filter causes the desired and undesired masses to be separated for the first time and thus serves to better focus the ions in the separation system. A post-filter improves the transfer of the ions to the detector. Overall, the use of pre- and post-filters improves resolution and sensitivity.

Beim Ausführungsbeispiel nach Figur 6 sind dem Trennsystem 2 der Vorfilter 71 und der Nachfilter 72 zugeordnet. Sie sind ebenfalls als Quadrupol-Systeme ausgebildet und über die Klebestellen 73, 74 mit dem Trennsystem 2 verbunden. Die Elektronik für die Spannungsversorgung ist im einzelnen nicht dargestellt. Die Spannungsversorgung kann wieder über Leiterbahnen erfolgen, die durch die Klebestellen 73, 74 hindurchgeführt sind. Werden der Vor- und Nachfilter 71, 72 nur mit Wechselspannung betrieben, und zwar mit der Wechselspannung des Trennsystems 2, dann besteht die Möglichkeit, die Klebestellen 73, 74 als Kondensatoren auszubilden und über diese Kondensatoren, die an den Wechselspannungselektroden des Trennsystems 2 anliegende Spannung auf die Elektroden des Vor- und Nachfilters 71, 72 zu übertragen. Gegenüber dem Gleichspannungspotential des Trennsystems 2 sind dann Vor- und Nachfilter isoliert.6, the pre-filter 71 and the post-filter 72 are assigned to the separation system 2. They are also designed as quadrupole systems and connected to the separation system 2 via the adhesive points 73, 74. The electronics for the voltage supply is not shown in detail. The voltage supply can again take place via conductor tracks which are led through the adhesive points 73, 74. If the pre-filter and after-filter 71, 72 are operated only with AC voltage, specifically with the AC voltage of the separation system 2, then there is the possibility of designing the adhesive points 73, 74 as capacitors and, via these capacitors, the voltage present at the AC voltage electrodes of the separation system 2 to be transferred to the electrodes of the pre- and post-filter 71, 72. Pre- and post-filters are then isolated from the DC potential of the separation system 2.

Die Kondensatoren werden zweckmäßig gebildet von metallisierten, auf den jeweiligen Stirnseiten befindlichen Flächenabschnitten 75 bis 78. Die Kapazität der jeweiligen Kondensatoren hängt von der Größe und vom Abstand dieser Flächen sowie von der Art des verwendeten Klebers ab, also von den Größen, die das Dielektrikum der Kondensatoren bilden. Die Größe und Anordnung insbesondere der metallisierten Abschnitte 76, 77 ist so zu wählen, daß die Zuführung von Gleichspannungen zu den Elektroden des Trennsystems 2 über die Klebestellen 73, 74 durchsetzende Leiterbahnen möglich bleiben.The capacitors are expediently formed by metallized surface sections 75 to 78 located on the respective end faces. The capacitance of the respective capacitors depends on the size and spacing of these surfaces and on the type of adhesive used, that is to say on the sizes that the dielectric of the Form capacitors. The size and arrangement, in particular of the metallized sections 76, 77 is to be selected so that the supply of direct voltages to the electrodes of the separation system 2 via the interconnects 73, 74 penetrating through conductor tracks remains possible.

Für die verschiedenen Klebestellen 14, 17, 73, 74 müssen die jeweils geeigneten Kleber (Metall-Keramik- oder Keramik-Keramik-Kleber) verwendet werden.
Auch die Verwendung von Glaslot und Aktivlot oder Hartlot für die Metall-Keramik-Verbindungen ist möglich.For the various gluing points 14, 17, 73, 74, the appropriate glue (metal-ceramic or ceramic-ceramic glue) must be used.
It is also possible to use glass solder and active solder or hard solder for the metal-ceramic connections.

Claims (13)

  1. Measuring head (1) for a quadrupole mass spectrometer having an ion source (3), an integral quadrupole separating system (2) consisting of a one-piece, cylindrical ceramic body with an axially parallel aperture (5), the measuring head also comprising a detector (4), a flange (11) for fixing the measuring head (1) to a receptacle (12), and support means for these components, characterised in that the integral quadrupole separating system (2) itself is the support for the ion source (3) the detector (4) and the fixing flange (11), and in that the detector (4) is part of a cover (16) for sealing the ion outlet aperture of the separating system (2) in a vacuum-tight manner.
  2. Measuring head according to claim 1, characterised in that the cover (16) is the support for electronic components (22).
  3. Measuring head according to claim 1 or 2, characterised in that the joints between the separating system (2) and the components (3, 11, 16) are glue or solder joints.
  4. Measuring head according to claim 3, characterised in that joints consisting of glass solder, hard solder or active solder are provided.
  5. Measuring head according to claim 3 or 4, characterised in that the adhesive or solder used has electrically insulating properties and in that voltage-carrying and/or current-carrying connecting leads in the form of strip conductors (35, 36, 37, 45, 61, 62) pass through the glue or solder joints (14, 17, 73, 74).
  6. Measuring head according to claim 5, characterised in that in order to connect the strip conductors (35, 36, 37, 45, 61, 62) to electronic supply and/or signal-processing components, metal tongues (63, 64) are provided.
  7. Measuring head according to one of the preceding claims, characterised in that the flange (11) is disposed in the vicinity of the ion source (3).
  8. Measuring head according to one of the preceding claims, characterised in that the separating system (2) is also the support for electronic components (22).
  9. Measuring head according to one of the preceding claims, characterised in that an outer housing (51) enclosing the separating system (2) is provided and is detachably fixed to the flange (11).
  10. Measuring head according to claim 9, characterised in that electronic supply and signal processing components are disposed in the housing (51) and in that, in order to connect these components to the associated elements, socket systems (57, 58, 65) and/or metal tongues (63, 64) are provided.
  11. Measuring head according to one of the preceding claims, characterised in that the separating system (2) is equipped with an ante- and/or after-filter (71, 72).
  12. Measuring head according to claim 11, characterised in that the ante-filter and/or after-filter (71, 72) are also formed as a quadrupole system and are connected to the separating system (2) via glue joints (70, 74).
  13. Measuring head according to claim 12, characterised in that the glue joints (73, 74) are formed as capacitors and transmit alternating voltages from the separating system (2) to the ante- and/or after-filter (71, 72).
EP90110681A 1990-06-06 1990-06-06 Measuring head for a quadrupole mass spectrometer Expired - Lifetime EP0460255B1 (en)

Priority Applications (5)

Application Number Priority Date Filing Date Title
AT90110681T ATE118925T1 (en) 1990-06-06 1990-06-06 MEASURING HEAD FOR A QUADRUPOLE MASS SPECTROMETER.
EP90110681A EP0460255B1 (en) 1990-06-06 1990-06-06 Measuring head for a quadrupole mass spectrometer
DE59008540T DE59008540D1 (en) 1990-06-06 1990-06-06 Measuring head for a quadrupole mass spectrometer.
US07/707,575 US5132536A (en) 1990-06-06 1991-05-30 Gauge head for a quadrupole mass spectrometer
JP13390091A JP3179130B2 (en) 1990-06-06 1991-06-05 Measurement head for quadrupole mass spectrometer

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
EP90110681A EP0460255B1 (en) 1990-06-06 1990-06-06 Measuring head for a quadrupole mass spectrometer

Publications (2)

Publication Number Publication Date
EP0460255A1 EP0460255A1 (en) 1991-12-11
EP0460255B1 true EP0460255B1 (en) 1995-02-22

Family

ID=8204057

Family Applications (1)

Application Number Title Priority Date Filing Date
EP90110681A Expired - Lifetime EP0460255B1 (en) 1990-06-06 1990-06-06 Measuring head for a quadrupole mass spectrometer

Country Status (5)

Country Link
US (1) US5132536A (en)
EP (1) EP0460255B1 (en)
JP (1) JP3179130B2 (en)
AT (1) ATE118925T1 (en)
DE (1) DE59008540D1 (en)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5401962A (en) * 1993-06-14 1995-03-28 Ferran Scientific Residual gas sensor utilizing a miniature quadrupole array

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3075076A (en) * 1958-12-12 1963-01-22 Siemens Ag Gas-analyzing method and apparatus
US3105899A (en) * 1960-03-25 1963-10-01 Siemens Ag Electric mass filter
US3350559A (en) * 1965-01-26 1967-10-31 Gen Electric Monopole mass spectrometer having one ceramic electrode coated with metal to within a short distance of each end
US3457404A (en) * 1965-09-13 1969-07-22 Electronic Associates Quadrupole mass analyzer
US3560734A (en) * 1968-06-26 1971-02-02 Edward F Barnett Quadrupole mass filter with fringing-field penetrating structure
GB1379515A (en) * 1970-10-30 1975-01-02 Ball G W Mass spectrometers
US3937954A (en) * 1973-03-30 1976-02-10 Extranuclear Laboratories, Inc. Methods and apparatus for spatial separation of AC and DC electric fields, with application to fringe fields in quadrupole mass filters
GB2138201B (en) * 1983-03-28 1986-07-16 Prutec Ltd Mass spectrometer
CN85102774B (en) * 1985-04-01 1987-11-04 复旦大学 Structure for generating electrostatic quadrupole field by using closed boundary
US4885500A (en) * 1986-11-19 1989-12-05 Hewlett-Packard Company Quartz quadrupole for mass filter

Also Published As

Publication number Publication date
DE59008540D1 (en) 1995-03-30
JP3179130B2 (en) 2001-06-25
EP0460255A1 (en) 1991-12-11
US5132536A (en) 1992-07-21
ATE118925T1 (en) 1995-03-15
JPH04229544A (en) 1992-08-19

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