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EP0069701A1 - Verfahren zur Herstellung eines korrosionsbeständigen festen Schmiermittelüberzuges - Google Patents

Verfahren zur Herstellung eines korrosionsbeständigen festen Schmiermittelüberzuges Download PDF

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Publication number
EP0069701A1
EP0069701A1 EP82810275A EP82810275A EP0069701A1 EP 0069701 A1 EP0069701 A1 EP 0069701A1 EP 82810275 A EP82810275 A EP 82810275A EP 82810275 A EP82810275 A EP 82810275A EP 0069701 A1 EP0069701 A1 EP 0069701A1
Authority
EP
European Patent Office
Prior art keywords
sulphide
forming metal
coating
corrosion
compound
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
EP82810275A
Other languages
English (en)
French (fr)
Other versions
EP0069701B1 (de
Inventor
Paul Niederhaeuser
Michel Maillat
Hans-Erich Hintermann
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
CSEM Centre Suisse dElectronique et de Microtechnique SA Recherche et Développement
Original Assignee
Laboratoire Suisse de Recherches Horlogeres
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from CH650981A external-priority patent/CH642509A/fr
Application filed by Laboratoire Suisse de Recherches Horlogeres filed Critical Laboratoire Suisse de Recherches Horlogeres
Publication of EP0069701A1 publication Critical patent/EP0069701A1/de
Application granted granted Critical
Publication of EP0069701B1 publication Critical patent/EP0069701B1/de
Expired legal-status Critical Current

Links

Classifications

    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C28/00Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D

Definitions

  • Lamellar chalcogen compounds such as molybdenum sulfide
  • Lamellar chalcogen compounds have already been used successfully as solid lubricants in an environment containing very little oxygen and humidity, for example under vacuum (space equipment) and in gas atmospheres. inert (nuclear power plants).
  • attempts to use such solid lubricants in the Earth's atmosphere, in the presence of oxygen and moisture have been unsuccessful, as these solid lubricants corrode to form oxidation products, as well as sulfur dioxide and hydrogen sulfide in the case of molybdenum sulfide.
  • the object of the invention is to remedy these drawbacks and, for this purpose, the invention relates to a method for producing a solid lubricating coating, resistant to corrosion, on a surface resistant to corrosion and consisting of a sulfide-forming metal, characterized in that the surface is subjected to a plasma in an atmosphere containing hydrogen sulfide in order to form an adherent sulfide on this surface and in that the sulfided surface is exposed to a spray simultaneous cathodic of at least one solid lubricant, chosen from chalcogenic lamellar compounds, and at least one hydrophobic solid polymer, in order to form a. composite garment in which the particles of the chalcogenous compound are protected by the hydrophobic polymer, the atmospheres in which the sulfurization and the deposition of the coating take place are free of free or bound oxygen.
  • the sulfurization treatment of the surface to be coated is carried out in the sputtering apparatus used for depositing the composite solid lubricant.
  • an atmosphere of an inert gas, such as argon, containing hydrogen sulphide is maintained in a proportion which can vary between 0.5 and 20% by volume, under a pressure generally between 0.1 millibar and 0.0001 millibar, more particularly between 0.06 millibar and 0.001 millibar, and an electrical discharge is maintained between the part to be coated functioning as an anode, and a cathode.
  • Hydrogen sulfide probably in ionized form, reacts effectively with the sulfide-forming metal.
  • sulfide-forming metal is meant herein a metal or a metalloid which is sulfurizable when exposed as an electrode to an electric plasma in an atmosphere containing hydrogen sulfide.
  • the sulphide-forming metal can be chosen from nickel, cobalt, chromium, molybdenum, copper, silver, rhodium, ruthenium, tungsten, palladium, silicon, hafnium, niobium, titanium, tantalum, rhenium, osmium, iridium, platinum and their alloys. Most often, the part to be coated is not made of a corrosion-resistant sulfide-forming metal and must therefore first be coated with such a metal.
  • the sputtering technique is advantageously used in use. reading a cathode made of the sulphide-forming metal, for example cobalt.
  • a cathode made of the sulphide-forming metal for example cobalt.
  • it is possible to use a direct or alternating high frequency electrical voltage generally greater than 1 MHz, for example 13.56 MHz, with a power density between 2 W / cm 2 and 17 W / cm 2 , in particular between 3 W / cm 2 and 7 W / cm.
  • nickel can be replaced by cobalt, rhodium, ruthenium, chromium, tungsten, palladium, copper, silicon, hafnium, niobium, titanium, molybdenum, tantalum and their alloys as sulfur metals.

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Lubricants (AREA)
  • Physical Vapour Deposition (AREA)
  • Rolling Contact Bearings (AREA)
EP82810275A 1981-06-30 1982-06-28 Verfahren zur Herstellung eines korrosionsbeständigen festen Schmiermittelüberzuges Expired EP0069701B1 (de)

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
CH431181 1981-06-30
CH650981A CH642509A (en) 1981-10-12 1981-10-12 Process for producing a corrosion-resistant solid lubricating coating on a surface of a moving member of a timepiece or of a microtechnical instrument
CH4311/81 1982-03-18
CH6509/81 1982-03-24

Publications (2)

Publication Number Publication Date
EP0069701A1 true EP0069701A1 (de) 1983-01-12
EP0069701B1 EP0069701B1 (de) 1985-09-18

Family

ID=25695171

Family Applications (1)

Application Number Title Priority Date Filing Date
EP82810275A Expired EP0069701B1 (de) 1981-06-30 1982-06-28 Verfahren zur Herstellung eines korrosionsbeständigen festen Schmiermittelüberzuges

Country Status (4)

Country Link
US (1) US4415419A (de)
EP (1) EP0069701B1 (de)
AT (1) ATE15698T1 (de)
DE (1) DE3266380D1 (de)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0341010A1 (de) * 1988-05-02 1989-11-08 Orient Watch Co., Ltd. Verbundschicht
EP0608421A4 (de) * 1991-10-15 1994-12-07 Tadahiro Ohmi Metallisches material mit hoher widerstandsfähigkeit gegenüber chemischen lösungen sowie vorrichtung zum behandeln mit chemischen lösungen oder teil einer solchen vorrichtung, die von diesem material gebrauch macht.

Families Citing this family (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3516933A1 (de) * 1985-05-10 1986-11-13 Deutsche Forschungs- und Versuchsanstalt für Luft- und Raumfahrt e.V., 5300 Bonn Verfahren zum aufbringen einer mos(pfeil abwaerts)2(pfeil abwaerts)-beschichtung auf ein substrat
JPH068503B2 (ja) * 1987-03-31 1994-02-02 セントラル硝子株式会社 含フツ素樹脂被膜の形成方法
US5262241A (en) * 1991-08-26 1993-11-16 Eeonyx Corporation Surface coated products
DK177291D0 (da) * 1991-10-24 1991-10-24 Gunnar Soerensen Fremgangsmaade til fremstilling af slidbestandige toersmoerende film
US5370778A (en) * 1992-11-19 1994-12-06 Iowa State University Research Foundation, Inc. Method for preparing basal oriented molybdenum disulfide (MoS2) thin films
DE19708880A1 (de) * 1997-03-05 1998-09-10 Widia Gmbh Schneideinsatz zum Zerspanen
AT406756B (de) * 1998-12-21 2000-08-25 Johannes Dr Heitz Fluorpolymer-beschichtungen mit guter haftung und guter abriebfestigkeit für den einsatz in der medizin sowie ein verfahren zu ihrer herstellung
US20030157270A1 (en) * 2002-02-19 2003-08-21 Xu Wang Process for plasma sulfurization in vacuum
US20100087346A1 (en) * 2006-03-31 2010-04-08 Honeywell International, Inc. Solid film lubricated high oxidation temperature rhenium material
WO2010074242A1 (ja) * 2008-12-26 2010-07-01 シチズン電子株式会社 潤滑用キットおよび該潤滑用キットを用いた小型電子機器
DE102016124734A1 (de) 2016-12-19 2018-06-21 Schaeffler Technologies AG & Co. KG Bauteil, insbesondere Wälzkörper
DE102020102645A1 (de) * 2020-02-03 2021-08-05 Klüber Lubrication München Se & Co. Kg Tribologisches System
CN114251365B (zh) * 2021-12-30 2022-11-22 西南交通大学 一种改善仿生水润滑轴承摩擦表面承载耐磨性能的方法

Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CH365921A (de) * 1958-11-04 1962-11-30 Berghaus Elektrophysik Anst Verfahren zur Behandlung der Oberfläche von Metallkörpern
CH397377A (de) * 1959-01-23 1965-08-15 Berghaus Elektrophysik Anst Verfahren zur Oberflächenbehandlung von Metallkörpern
GB1299308A (en) * 1971-05-01 1972-12-13 Ceskoslovenska Akademie Ved Improvements in or relating to blades for rotary flow machines
US3767559A (en) * 1970-06-24 1973-10-23 Eastman Kodak Co Sputtering apparatus with accordion pleated anode means
FR2311102A1 (fr) * 1975-05-13 1976-12-10 Lucas Industries Ltd Procede de formation d'un metal et d'une substance de resine synthetique sur un substrat
EP0010070A1 (de) * 1978-10-09 1980-04-16 ASU Composants S.A. Verfahren zum Absetzen einer selbstschmierenden, aus metallischen Chalkogeniden bestehenden Schicht auf Unterlagen durch Kathodenzerstäubung
FR2441444A1 (fr) * 1978-11-20 1980-06-13 Bar Lorforge Procede de traitement a chaud de masse metallique comportant une mise en forme de celle-ci avec un appareil de formage, permettant d'ameliorer notamment la duree de vie de ce dernier

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2530002A1 (de) 1975-07-04 1977-01-27 Dow Corning Gmbh Verfahren zur verbesserung der schmiereigenschaften von festschmierstoffen

Patent Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CH365921A (de) * 1958-11-04 1962-11-30 Berghaus Elektrophysik Anst Verfahren zur Behandlung der Oberfläche von Metallkörpern
CH397377A (de) * 1959-01-23 1965-08-15 Berghaus Elektrophysik Anst Verfahren zur Oberflächenbehandlung von Metallkörpern
US3767559A (en) * 1970-06-24 1973-10-23 Eastman Kodak Co Sputtering apparatus with accordion pleated anode means
GB1299308A (en) * 1971-05-01 1972-12-13 Ceskoslovenska Akademie Ved Improvements in or relating to blades for rotary flow machines
FR2311102A1 (fr) * 1975-05-13 1976-12-10 Lucas Industries Ltd Procede de formation d'un metal et d'une substance de resine synthetique sur un substrat
EP0010070A1 (de) * 1978-10-09 1980-04-16 ASU Composants S.A. Verfahren zum Absetzen einer selbstschmierenden, aus metallischen Chalkogeniden bestehenden Schicht auf Unterlagen durch Kathodenzerstäubung
FR2441444A1 (fr) * 1978-11-20 1980-06-13 Bar Lorforge Procede de traitement a chaud de masse metallique comportant une mise en forme de celle-ci avec un appareil de formage, permettant d'ameliorer notamment la duree de vie de ce dernier

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0341010A1 (de) * 1988-05-02 1989-11-08 Orient Watch Co., Ltd. Verbundschicht
EP0516248B1 (de) * 1988-05-02 1996-09-18 Orient Watch Co., Ltd. Mehrfachschicht
EP0608421A4 (de) * 1991-10-15 1994-12-07 Tadahiro Ohmi Metallisches material mit hoher widerstandsfähigkeit gegenüber chemischen lösungen sowie vorrichtung zum behandeln mit chemischen lösungen oder teil einer solchen vorrichtung, die von diesem material gebrauch macht.

Also Published As

Publication number Publication date
US4415419A (en) 1983-11-15
ATE15698T1 (de) 1985-10-15
DE3266380D1 (en) 1985-10-24
EP0069701B1 (de) 1985-09-18

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