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DK720388A - Apparat til generering af negativt ladede komponenter - Google Patents

Apparat til generering af negativt ladede komponenter

Info

Publication number
DK720388A
DK720388A DK720388A DK720388A DK720388A DK 720388 A DK720388 A DK 720388A DK 720388 A DK720388 A DK 720388A DK 720388 A DK720388 A DK 720388A DK 720388 A DK720388 A DK 720388A
Authority
DK
Denmark
Prior art keywords
loaded components
generating negatively
negatively loaded
generating
components
Prior art date
Application number
DK720388A
Other languages
English (en)
Other versions
DK720388D0 (da
Inventor
Hideaki Toya
Hiroyuki Sasao
Tatsuya Hayashi
Original Assignee
Mitsubishi Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from JP62326850A external-priority patent/JPH0731995B2/ja
Priority claimed from JP63111467A external-priority patent/JP2656067B2/ja
Priority claimed from JP63184643A external-priority patent/JP2618006B2/ja
Application filed by Mitsubishi Electric Corp filed Critical Mitsubishi Electric Corp
Publication of DK720388D0 publication Critical patent/DK720388D0/da
Publication of DK720388A publication Critical patent/DK720388A/da

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J27/00—Ion beam tubes
    • H01J27/02—Ion sources; Ion guns
    • H01J27/028—Negative ion sources

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Combustion & Propulsion (AREA)
  • Electron Sources, Ion Sources (AREA)
  • Manufacture Of Metal Powder And Suspensions Thereof (AREA)
DK720388A 1987-12-25 1988-12-23 Apparat til generering af negativt ladede komponenter DK720388A (da)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP62326850A JPH0731995B2 (ja) 1987-12-25 1987-12-25 負電荷発生装置
JP63111467A JP2656067B2 (ja) 1988-05-10 1988-05-10 負電荷発生装置
JP63184643A JP2618006B2 (ja) 1988-07-26 1988-07-26 負電荷発生装置

Publications (2)

Publication Number Publication Date
DK720388D0 DK720388D0 (da) 1988-12-23
DK720388A true DK720388A (da) 1989-06-26

Family

ID=27311968

Family Applications (1)

Application Number Title Priority Date Filing Date
DK720388A DK720388A (da) 1987-12-25 1988-12-23 Apparat til generering af negativt ladede komponenter

Country Status (4)

Country Link
US (1) US4924102A (da)
DE (1) DE3843334C2 (da)
DK (1) DK720388A (da)
NL (1) NL192649C (da)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2700280B2 (ja) * 1991-03-28 1998-01-19 理化学研究所 イオンビーム発生装置および成膜装置および成膜方法

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR1452393A (fr) * 1964-10-26 1966-02-25 Atomic Energy Authority Uk Source ionique pour la production d'ions négatifs
US3356897A (en) * 1965-01-18 1967-12-05 Jr Thomas A Barr Arc plasma generator with starter
US3323002A (en) * 1965-12-28 1967-05-30 Gen Electric Triggered vacuum gap device having field emitting trigger assembly
US3465192A (en) * 1966-09-21 1969-09-02 Gen Electric Triggerable arc discharge devices and trigger assemblies therefor
CA1140198A (en) * 1980-05-23 1983-01-25 National Research Council Of Canada Laser triggered high voltage rail gap switch
US4458180A (en) * 1982-02-18 1984-07-03 Elscint Ltd. Plasma electron source for cold-cathode discharge device or the like
US4587430A (en) * 1983-02-10 1986-05-06 Mission Research Corporation Ion implantation source and device
US4714860A (en) * 1985-01-30 1987-12-22 Brown Ian G Ion beam generating apparatus
US4721889A (en) * 1986-04-11 1988-01-26 The United States Of America As Represented By The United States Department Of Energy Uniform insulation applied-B ion diode

Also Published As

Publication number Publication date
NL8803157A (nl) 1989-07-17
US4924102A (en) 1990-05-08
DK720388D0 (da) 1988-12-23
DE3843334C2 (de) 1996-05-02
NL192649B (nl) 1997-07-01
NL192649C (nl) 1997-11-04
DE3843334A1 (de) 1989-07-13

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Legal Events

Date Code Title Description
AHB Application shelved due to non-payment