DK132676A - Fremgangsmade til fremstilling af en tantaltyndfilmkondensator - Google Patents

Fremgangsmade til fremstilling af en tantaltyndfilmkondensator

Info

Publication number: DK132676A
Authority: DK; Denmark
Prior art keywords: tantal; procedure; making; thin film; film condenser
Prior art date: 1975-03-27

Application number

DK132676A

Other languages

English (en)

Inventor

W Anders

Original Assignee

Siemens Ag

Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)

1975-03-27

Filing date

1976-03-25

Publication date

1976-09-28

1976-03-25 Application filed by Siemens Ag filed Critical Siemens Ag

1976-09-28 Publication of DK132676A publication Critical patent/DK132676A/da

Classifications

- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01G—CAPACITORS; CAPACITORS, RECTIFIERS, DETECTORS, SWITCHING DEVICES, LIGHT-SENSITIVE OR TEMPERATURE-SENSITIVE DEVICES OF THE ELECTROLYTIC TYPE
- H01G4/00—Fixed capacitors; Processes of their manufacture
- H01G4/002—Details
- H01G4/018—Dielectrics
- H01G4/06—Solid dielectrics
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
- H10D84/00—Integrated devices formed in or on semiconductor substrates that comprise only semiconducting layers, e.g. on Si wafers or on GaAs-on-Si wafers
- H10D84/01—Manufacture or treatment
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T29/00—Metal working
- Y10T29/43—Electric condenser making
- Y10T29/435—Solid dielectric type

Landscapes

Engineering & Computer Science (AREA)
Power Engineering (AREA)
Manufacturing & Machinery (AREA)
Microelectronics & Electronic Packaging (AREA)
Fixed Capacitors And Capacitor Manufacturing Machines (AREA)
Semiconductor Integrated Circuits (AREA)

DK132676A 1975-03-27 1976-03-25 Fremgangsmade til fremstilling af en tantaltyndfilmkondensator DK132676A (da)

Applications Claiming Priority (1)

Application Number	Priority Date	Filing Date	Title
DE2513858A DE2513858C3 (de)	1975-03-27	1975-03-27	Verfahren zur Herstellung eines Tantal-Dünnschichtkondensators

Publications (1)

Publication Number	Publication Date
DK132676A true DK132676A (da)	1976-09-28

Family

ID=5942662

Family Applications (1)

Application Number	Title	Priority Date	Filing Date
DK132676A DK132676A (da)	1975-03-27	1976-03-25	Fremgangsmade til fremstilling af en tantaltyndfilmkondensator

Country Status (12)

Country	Link
US (1)	US4058445A (da)
JP (1)	JPS51121172A (da)
AT (1)	AT363569B (da)
BE (1)	BE840072A (da)
CH (1)	CH604353A5 (da)
DE (1)	DE2513858C3 (da)
DK (1)	DK132676A (da)
FR (1)	FR2305839A1 (da)
GB (1)	GB1544506A (da)
IT (1)	IT1058510B (da)
NL (1)	NL7603137A (da)
SE (1)	SE412662B (da)

Families Citing this family (17)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
US5654207A (en) *	1903-02-03	1997-08-05	Sharp Kabushiki Kaisha	Method of making two-terminal nonlinear device and liquid crystal apparatus including the same
US4251326A (en) *	1978-12-28	1981-02-17	Western Electric Company, Inc.	Fabricating an RC network utilizing alpha tantalum
US4410867A (en) *	1978-12-28	1983-10-18	Western Electric Company, Inc.	Alpha tantalum thin film circuit device
DE3063506D1 (en) *	1979-08-31	1983-07-07	Fujitsu Ltd	A tantalum thin film capacitor and process for producing the same
US4488340A (en) *	1981-02-27	1984-12-18	Illinois Tool Works Inc.	Apparatus for making capacitive structures
US5221449A (en) *	1990-10-26	1993-06-22	International Business Machines Corporation	Method of making Alpha-Ta thin films
JPH0819516B2 (ja) *	1990-10-26	1996-02-28	インターナシヨナル・ビジネス・マシーンズ・コーポレーシヨン	薄膜状のアルファＴａを形成するための方法および構造
US5316893A (en) *	1991-01-03	1994-05-31	Lueder Ernst	Method of producing electronic switching element
US5414588A (en) *	1993-09-20	1995-05-09	The Regents Of The University Of California	High performance capacitors using nano-structure multilayer materials fabrication
US6447838B1 (en) *	1993-12-10	2002-09-10	Symetrix Corporation	Integrated circuit capacitors with barrier layer and process for making the same
JP3929513B2 (ja) *	1995-07-07	2007-06-13	ローム株式会社	誘電体キャパシタおよびその製造方法
US5872696A (en) *	1997-04-09	1999-02-16	Fujitsu Limited	Sputtered and anodized capacitors capable of withstanding exposure to high temperatures
US6395148B1 (en)	1998-11-06	2002-05-28	Lexmark International, Inc.	Method for producing desired tantalum phase
US7335552B2 (en)	2002-05-15	2008-02-26	Raytheon Company	Electrode for thin film capacitor devices
US8407871B2 (en) *	2009-07-06	2013-04-02	Delphi Technologies, Inc.	Method of manufacturing a shapeable short-resistant capacitor
US8665059B2 (en)	2011-11-18	2014-03-04	Avx Corporation	High frequency resistor
CN104988358A (zh) *	2015-07-22	2015-10-21	宁波工程学院	一种薄膜电阻材料及其制备方法

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
US3275915A (en) *		1966-09-27		Beta tantalum thin-film capacitors
US3274025A (en) *	1963-12-13	1966-09-20	Corning Glass Works	Method of forming an electrical capacitor
IL26086A (en) *	1965-08-17	1970-07-19	Western Electric Co	Thin-film capacitors using beta tantalum oxide and method for their production
US3544434A (en) *	1968-10-29	1970-12-01	Ronald R Giller	Thick film capactors for miniaturized circuitry
US3607679A (en) *	1969-05-05	1971-09-21	Bell Telephone Labor Inc	Method for the fabrication of discrete rc structure
US3664931A (en) *	1970-07-27	1972-05-23	Dieter Gerstenberg	Method for fabrication of thin film capacitor
US3718565A (en) *	1970-11-27	1973-02-27	Bell Telephone Labor Inc	Technique for the fabrication of discrete rc structure
BE791139A (fr) *	1972-01-14	1973-03-01	Western Electric Co	Procede pour le depot de beta-tantale dope par l'azote

1975
- 1975-03-27 DE DE2513858A patent/DE2513858C3/de not_active Expired
1976
- 1976-01-27 CH CH96276A patent/CH604353A5/xx not_active IP Right Cessation
- 1976-01-28 AT AT0059676A patent/AT363569B/de not_active IP Right Cessation
- 1976-02-27 SE SE7602900A patent/SE412662B/xx unknown
- 1976-03-16 GB GB10432/76A patent/GB1544506A/en not_active Expired
- 1976-03-24 IT IT21518/76A patent/IT1058510B/it active
- 1976-03-24 FR FR7608508A patent/FR2305839A1/fr active Granted
- 1976-03-25 NL NL7603137A patent/NL7603137A/xx not_active Application Discontinuation
- 1976-03-25 DK DK132676A patent/DK132676A/da unknown
- 1976-03-26 BE BE165591A patent/BE840072A/xx not_active IP Right Cessation
- 1976-03-26 US US05/670,827 patent/US4058445A/en not_active Expired - Lifetime
- 1976-03-26 JP JP51034113A patent/JPS51121172A/ja active Pending

Also Published As

Publication number	Publication date
ATA59676A (de)	1981-01-15
BE840072A (fr)	1976-09-27
FR2305839A1 (fr)	1976-10-22
DE2513858B2 (de)	1980-09-25
SE7602900L (sv)	1976-09-28
AT363569B (de)	1981-08-10
GB1544506A (en)	1979-04-19
NL7603137A (nl)	1976-09-29
US4058445A (en)	1977-11-15
SE412662B (sv)	1980-03-10
FR2305839B1 (da)	1981-02-13
IT1058510B (it)	1982-05-10
DE2513858C3 (de)	1981-08-06
DE2513858A1 (de)	1976-09-30
JPS51121172A (en)	1976-10-22
CH604353A5 (da)	1978-09-15

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