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DE69318601D1 - Laserlichtstrahlerzeugende Vorrichtung - Google Patents

Laserlichtstrahlerzeugende Vorrichtung

Info

Publication number
DE69318601D1
DE69318601D1 DE69318601T DE69318601T DE69318601D1 DE 69318601 D1 DE69318601 D1 DE 69318601D1 DE 69318601 T DE69318601 T DE 69318601T DE 69318601 T DE69318601 T DE 69318601T DE 69318601 D1 DE69318601 D1 DE 69318601D1
Authority
DE
Germany
Prior art keywords
laser light
generating device
light generating
laser
light
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE69318601T
Other languages
English (en)
Other versions
DE69318601T2 (de
Inventor
Naoya Eguchi
Michio Oka
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sony Corp
Original Assignee
Sony Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sony Corp filed Critical Sony Corp
Publication of DE69318601D1 publication Critical patent/DE69318601D1/de
Application granted granted Critical
Publication of DE69318601T2 publication Critical patent/DE69318601T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/35—Non-linear optics
    • G02F1/37—Non-linear optics for second-harmonic generation
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/10—Controlling the intensity, frequency, phase, polarisation or direction of the emitted radiation, e.g. switching, gating, modulating or demodulating
    • H01S3/106—Controlling the intensity, frequency, phase, polarisation or direction of the emitted radiation, e.g. switching, gating, modulating or demodulating by controlling devices placed within the cavity
    • H01S3/108—Controlling the intensity, frequency, phase, polarisation or direction of the emitted radiation, e.g. switching, gating, modulating or demodulating by controlling devices placed within the cavity using non-linear optical devices, e.g. exhibiting Brillouin or Raman scattering
    • H01S3/109—Frequency multiplication, e.g. harmonic generation
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/10—Controlling the intensity, frequency, phase, polarisation or direction of the emitted radiation, e.g. switching, gating, modulating or demodulating
    • H01S3/13—Stabilisation of laser output parameters, e.g. frequency or amplitude
    • H01S3/139—Stabilisation of laser output parameters, e.g. frequency or amplitude by controlling the mutual position or the reflecting properties of the reflectors of the cavity, e.g. by controlling the cavity length
    • H01S3/1398—Stabilisation of laser output parameters, e.g. frequency or amplitude by controlling the mutual position or the reflecting properties of the reflectors of the cavity, e.g. by controlling the cavity length by using a supplementary modulation of the output
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/35—Non-linear optics
    • G02F1/353—Frequency conversion, i.e. wherein a light beam is generated with frequency components different from those of the incident light beams
    • G02F1/3542—Multipass arrangements, i.e. arrangements to make light pass multiple times through the same element, e.g. using an enhancement cavity

Landscapes

  • Physics & Mathematics (AREA)
  • Nonlinear Science (AREA)
  • Optics & Photonics (AREA)
  • Electromagnetism (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Lasers (AREA)
  • Optical Radar Systems And Details Thereof (AREA)
DE69318601T 1992-03-02 1993-03-02 Laserlichtstrahlerzeugende Vorrichtung Expired - Lifetime DE69318601T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP07875392A JP3564705B2 (ja) 1992-03-02 1992-03-02 レーザ光発生装置

Publications (2)

Publication Number Publication Date
DE69318601D1 true DE69318601D1 (de) 1998-06-25
DE69318601T2 DE69318601T2 (de) 1998-09-10

Family

ID=13670660

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69318601T Expired - Lifetime DE69318601T2 (de) 1992-03-02 1993-03-02 Laserlichtstrahlerzeugende Vorrichtung

Country Status (7)

Country Link
US (2) US5367531A (de)
EP (1) EP0560179B1 (de)
JP (1) JP3564705B2 (de)
KR (1) KR100302814B1 (de)
AU (1) AU663563B2 (de)
CA (1) CA2090591C (de)
DE (1) DE69318601T2 (de)

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* Cited by examiner, † Cited by third party
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JP3564705B2 (ja) * 1992-03-02 2004-09-15 ソニー株式会社 レーザ光発生装置
US5572543A (en) * 1992-04-09 1996-11-05 Deutsch Aerospace Ag Laser system with a micro-mechanically moved mirror
JP3309430B2 (ja) * 1992-07-28 2002-07-29 ソニー株式会社 レーザ光発生装置
JPH07211620A (ja) * 1994-01-25 1995-08-11 Sony Corp 半導体露光装置
JPH07254744A (ja) * 1994-03-15 1995-10-03 Sony Corp レーザ光発生装置
JPH07273391A (ja) * 1994-03-30 1995-10-20 Sony Corp レーザ光発生装置
US5608744A (en) * 1995-03-31 1997-03-04 Litton Systems, Inc. Compact laser apparatus and method
US5680412A (en) * 1995-07-26 1997-10-21 Demaria Electrooptics Systems, Inc. Apparatus for improving the optical intensity induced damage limit of optical quality crystals
US5832009A (en) * 1995-08-18 1998-11-03 Sony Corporation Laser light emitting device, laser beacon device and laser imager display device
US5642193A (en) * 1996-03-08 1997-06-24 Met One, Inc. Particle counter employing a solid-state laser with an intracavity view volume
WO1998019824A1 (en) * 1996-11-07 1998-05-14 Okuma Corporation Error correction apparatus for nc machine tool
JPH10301153A (ja) * 1997-04-23 1998-11-13 Sony Corp 光源装置とこれを用いた光学測定装置および露光装置
JP3601645B2 (ja) * 1997-04-24 2004-12-15 澁谷工業株式会社 固体レーザ発振器のボンディング方法
US6097741A (en) * 1998-02-17 2000-08-01 Calmar Optcom, Inc. Passively mode-locked fiber lasers
JP3035613B1 (ja) * 1999-01-14 2000-04-24 神戸大学長 単一モ―ドレ―ザ光のパルス化増幅装置および方法
JP2000223760A (ja) * 1999-02-04 2000-08-11 Nec Corp イオンレーザ装置及びイオンレーザ装置のミラー角度調整方法
DE19937565B4 (de) * 1999-08-09 2006-02-09 Wallenstein, Richard, Prof. Dr. Verfahren zum Regeln der Ausgangsleistung eines Laserstrahls sowie eine dazugehörige Vorrichtung
DE60040047D1 (de) * 1999-10-28 2008-10-09 Fujifilm Corp Optisches Wellenlängenumwandlungssystem und wellenlängenstabilisierter Laser
US7173955B2 (en) * 2001-08-31 2007-02-06 Balobeck Joseph J Laser stimulated sympathetic vibration of molecular structure of a body
GB0122670D0 (en) 2001-09-20 2001-11-14 Karpushko Fedor V Intracavity frequency conversion of laser
WO2003069300A1 (fr) * 2002-02-13 2003-08-21 Riken Procede d'evaluation d'un cristal optique non lineaire et son dispositif ainsi que procede de conversion de longueur d'ondes et son dispositif
JP4242141B2 (ja) * 2002-11-19 2009-03-18 株式会社トプコン 固体レーザ装置
JP2007515765A (ja) * 2003-01-23 2007-06-14 エヌエルジー−ニュー レーザー ジェネレーション ゲゼルシャフト ミット ベシュレンクテル ハフツング レーザ共振器および周波数変換型のレーザ
DE10339210B4 (de) * 2003-01-23 2011-12-29 Crylas Crystal Laser Systems Gmbh Laserresonator und Frequenzkonvertierter Laser
JP4128092B2 (ja) * 2003-02-21 2008-07-30 株式会社トプコン 固体レーザ装置
JP4190325B2 (ja) * 2003-03-24 2008-12-03 株式会社トプコン 固体レーザ装置及び固体レーザ装置によるレーザ照射方法
JP2004334129A (ja) * 2003-05-12 2004-11-25 Sony Corp レンズ、光照射装置及びレーザポインタ
JP2006049584A (ja) * 2004-08-04 2006-02-16 Sony Corp レーザ光発生装置
US7602825B1 (en) 2004-10-20 2009-10-13 Calmar Optcom, Inc. Tunable passively mode-locked lasers with phase-lock feedback for low timing jitters
JP2007019361A (ja) * 2005-07-11 2007-01-25 Mitsutoyo Corp 周波数安定化レーザ
KR101106807B1 (ko) 2008-06-24 2012-01-19 두산디에스티주식회사 레이저 발생장치에서의 레이저 빔 모드 변경을 위한 광경로보정 장치 및 방법
DE102012208912B4 (de) * 2012-05-25 2013-12-12 Crylas Crystal Laser Systems Gmbh Laseranordnung zur Erzeugung einerzweifach frequenzkonvertierten Laserstrahlung
US9564732B2 (en) * 2013-03-25 2017-02-07 Inter-University Research Institute Corporation High Energy Accelerator Research Organization Optical resonator system
US9509112B2 (en) 2013-06-11 2016-11-29 Kla-Tencor Corporation CW DUV laser with improved stability
US9293882B2 (en) 2013-09-10 2016-03-22 Kla-Tencor Corporation Low noise, high stability, deep ultra-violet, continuous wave laser
EP3086172A4 (de) * 2013-12-20 2017-07-26 Sony Corporation Lichtquellenvorrichtung und verfahren zur umwandlung von wellenlängen
US10371625B1 (en) * 2015-06-23 2019-08-06 Lockheed Martin Corporation Identification of a reflective surface as being associated with a threat optic
US10175555B2 (en) 2017-01-03 2019-01-08 KLA—Tencor Corporation 183 nm CW laser and inspection system
US12308600B2 (en) 2021-05-21 2025-05-20 Lasertec Corporation Light source apparatus and inspection apparatus
KR102603290B1 (ko) * 2021-12-29 2023-11-17 한국기계연구원 광변조 레이저 펄스의 생성 시스템

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4594715A (en) * 1983-11-17 1986-06-10 Particle Measuring Systems, Inc. Laser with stabilized external passive cavity
JPS61222289A (ja) * 1985-03-28 1986-10-02 Tokyo Gas Co Ltd レ−ザ装置
US4845718A (en) * 1988-06-07 1989-07-04 The Boeing Company Method and apparatus for FEL sideband suppression
US4939739A (en) * 1989-04-24 1990-07-03 Coherent, Inc. Laser alignment servo method and apparatus
US5018150A (en) * 1989-09-05 1991-05-21 General Electric Company Reflector switched lasers
US5253198A (en) * 1991-12-20 1993-10-12 Syracuse University Three-dimensional optical memory
JP3564705B2 (ja) * 1992-03-02 2004-09-15 ソニー株式会社 レーザ光発生装置

Also Published As

Publication number Publication date
EP0560179B1 (de) 1998-05-20
US5418810A (en) 1995-05-23
CA2090591C (en) 2004-06-01
JPH05243661A (ja) 1993-09-21
KR100302814B1 (ko) 2001-11-30
AU663563B2 (en) 1995-10-12
US5367531A (en) 1994-11-22
JP3564705B2 (ja) 2004-09-15
CA2090591A1 (en) 1993-09-03
KR930020782A (ko) 1993-10-20
DE69318601T2 (de) 1998-09-10
EP0560179A1 (de) 1993-09-15
AU3391593A (en) 1993-09-09

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