DE69300587D1 - Mikrovakuumvorrichtung. - Google Patents

Mikrovakuumvorrichtung.

Info

Publication number: DE69300587D1
Authority: DE; Germany
Prior art keywords: vacuum device; micro vacuum; micro; vacuum
Prior art date: 1992-12-07
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.): Expired - Fee Related

Application number

DE69300587T

Other languages

English (en)

Other versions

DE69300587T2 (de

Inventor

Mitsuteru Kimura

Masato Honma

Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)

Ricoh Co Ltd

Original Assignee

Ricoh Co Ltd

Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)

1992-12-07

Filing date

1993-12-07

Publication date

1995-11-09

1993-12-07 Application filed by Ricoh Co Ltd filed Critical Ricoh Co Ltd

1995-11-09 Publication of DE69300587D1 publication Critical patent/DE69300587D1/de

1996-03-28 Application granted granted Critical

1996-03-28 Publication of DE69300587T2 publication Critical patent/DE69300587T2/de

2013-12-08 Anticipated expiration legal-status Critical

Status Expired - Fee Related legal-status Critical Current

Classifications

- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J31/00—Cathode ray tubes; Electron beam tubes
- H01J31/08—Cathode ray tubes; Electron beam tubes having a screen on or from which an image or pattern is formed, picked up, converted, or stored
- H01J31/10—Image or pattern display tubes, i.e. having electrical input and optical output; Flying-spot tubes for scanning purposes
- H01J31/12—Image or pattern display tubes, i.e. having electrical input and optical output; Flying-spot tubes for scanning purposes with luminescent screen
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J1/00—Details of electrodes, of magnetic control means, of screens, or of the mounting or spacing thereof, common to two or more basic types of discharge tubes or lamps
- H01J1/02—Main electrodes
- H01J1/13—Solid thermionic cathodes
- H01J1/20—Cathodes heated indirectly by an electric current; Cathodes heated by electron or ion bombardment
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J21/00—Vacuum tubes
- H01J21/02—Tubes with a single discharge path
- H01J21/06—Tubes with a single discharge path having electrostatic control means only
- H01J21/10—Tubes with a single discharge path having electrostatic control means only with one or more immovable internal control electrodes, e.g. triode, pentode, octode
- H01J21/105—Tubes with a single discharge path having electrostatic control means only with one or more immovable internal control electrodes, e.g. triode, pentode, octode with microengineered cathode and control electrodes, e.g. Spindt-type

DE69300587T 1992-12-07 1993-12-07 Mikrovakuumvorrichtung. Expired - Fee Related DE69300587T2 (de)

Applications Claiming Priority (2)

Application Number	Priority Date	Filing Date	Title
JP32638392		1992-12-07
JP5329952A JPH08138561A (ja)	1992-12-07	1993-11-30	微小真空デバイス

Publications (2)

Publication Number	Publication Date
DE69300587D1 true DE69300587D1 (de)	1995-11-09
DE69300587T2 DE69300587T2 (de)	1996-03-28

Family

ID=26572170

Family Applications (1)

Application Number	Title	Priority Date	Filing Date
DE69300587T Expired - Fee Related DE69300587T2 (de)	1992-12-07	1993-12-07	Mikrovakuumvorrichtung.

Country Status (5)

Country	Link
US (1)	US5463277A (de)
EP (1)	EP0601533B1 (de)
JP (1)	JPH08138561A (de)
KR (1)	KR0160530B1 (de)
DE (1)	DE69300587T2 (de)

Families Citing this family (20)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
US5841219A (en) *	1993-09-22	1998-11-24	University Of Utah Research Foundation	Microminiature thermionic vacuum tube
JP3131339B2 (ja) *	1993-12-22	2001-01-31	三菱電機株式会社	陰極、陰極線管および陰極線管の作動方法
US5686779A (en) *	1995-03-01	1997-11-11	The United States Of America As Represented By The Secretary Of The Army	High sensitivity temperature sensor and sensor array
US5818166A (en) *	1996-07-03	1998-10-06	Si Diamond Technology, Inc.	Field emission device with edge emitter and method for making
US5955828A (en) *	1996-10-16	1999-09-21	University Of Utah Research Foundation	Thermionic optical emission device
JP3377162B2 (ja) *	1997-01-17	2003-02-17	株式会社リコー	熱分析装置およびその計測方法
WO1999003603A1 (en)	1997-07-16	1999-01-28	Systemation Engineered Products, Inc.	Inspection handler apparatus and method
US6188939B1 (en)	1997-08-18	2001-02-13	The Texas A&M University System	Advanced law enforcement and response technology
JPH1196892A (ja)	1997-09-17	1999-04-09	Nec Corp	フィールドエミッタ
FR2792770A1 (fr) *	1999-04-22	2000-10-27	Cit Alcatel	Fonctionnement a haute pression d'une cathode froide a emission de champ
KR100749460B1 (ko) *	2001-04-25	2007-08-14	삼성에스디아이 주식회사	전계 방출 표시소자와 그의 제조 방법
US6995502B2 (en)	2002-02-04	2006-02-07	Innosys, Inc.	Solid state vacuum devices and method for making the same
US7005783B2 (en)	2002-02-04	2006-02-28	Innosys, Inc.	Solid state vacuum devices and method for making the same
US20060006787A1 (en) *	2004-07-06	2006-01-12	David Champion	Electronic device having a plurality of conductive beams
KR20070010660A (ko) *	2005-07-19	2007-01-24	삼성에스디아이 주식회사	전자 방출 소자 및 이를 구비한 평판 디스플레이 장치
US8719960B2 (en) *	2008-01-31	2014-05-06	The Board Of Trustees Of The University Of Illinois	Temperature-dependent nanoscale contact potential measurement technique and device
US8387443B2 (en) *	2009-09-11	2013-03-05	The Board Of Trustees Of The University Of Illinois	Microcantilever with reduced second harmonic while in contact with a surface and nano scale infrared spectrometer
WO2013016528A1 (en) *	2011-07-28	2013-01-31	The Board Of Trustees Of The University Of Illinois	Electron emission device
CN107346720B (zh) *	2016-05-04	2020-09-01	中国科学院苏州纳米技术与纳米仿生研究所	场发射器件及其制作方法
CN110875165A (zh) *	2018-08-30	2020-03-10	中国科学院微电子研究所	一种场发射阴极电子源及其阵列

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
GB8621600D0 (en) *	1986-09-08	1987-03-18	Gen Electric Co Plc	Vacuum devices
US4855636A (en) *	1987-10-08	1989-08-08	Busta Heinz H	Micromachined cold cathode vacuum tube device and method of making
FR2641412B1 (fr) *	1988-12-30	1991-02-15	Thomson Tubes Electroniques	Source d'electrons du type a emission de champ
US5217401A (en) *	1989-07-07	1993-06-08	Matsushita Electric Industrial Co., Ltd.	Method of manufacturing a field-emission type switching device
JP2574500B2 (ja) *	1990-03-01	1997-01-22	松下電器産業株式会社	プレーナ型冷陰極の製造方法
JPH0456040A (ja) *	1990-06-22	1992-02-24	Yokogawa Electric Corp	微小真空デバイス
US5204588A (en) *	1991-01-14	1993-04-20	Sony Corporation	Quantum phase interference transistor
JPH04286825A (ja) *	1991-03-15	1992-10-12	Canon Inc	熱電子放出素子
US5145438A (en) *	1991-07-15	1992-09-08	Xerox Corporation	Method of manufacturing a planar microelectronic device

1993
- 1993-11-30 JP JP5329952A patent/JPH08138561A/ja active Pending
- 1993-12-06 US US08/161,609 patent/US5463277A/en not_active Expired - Lifetime
- 1993-12-07 DE DE69300587T patent/DE69300587T2/de not_active Expired - Fee Related
- 1993-12-07 KR KR1019930026690A patent/KR0160530B1/ko not_active Expired - Fee Related
- 1993-12-07 EP EP93119687A patent/EP0601533B1/de not_active Expired - Lifetime

Also Published As

Publication number	Publication date
US5463277A (en)	1995-10-31
EP0601533B1 (de)	1995-10-04
KR940016429A (ko)	1994-07-23
JPH08138561A (ja)	1996-05-31
KR0160530B1 (ko)	1998-12-01
EP0601533A1 (de)	1994-06-15
DE69300587T2 (de)	1996-03-28

Publication	Publication Date	Title
DE69006949D1 (de)	1994-04-07	Elektrostatisches Druckgerät.
NO912647D0 (no)	1991-07-05	Betraktningsanordning.
DE69302084D1 (de)	1996-05-09	Elektromechanische positionierungsvorrichtung.
DE69300587D1 (de)	1995-11-09	Mikrovakuumvorrichtung.
DE69108141D1 (de)	1995-04-20	Stanzgerät.
NL193638B (nl)	2000-01-03	Stapelinrichting.
DE69108305D1 (de)	1995-04-27	Druckgerät.
ITRM930562A0 (it)	1993-08-13	Dispositivo di filatura.
DE69111469D1 (de)	1995-08-24	Unterschiedliche öffnungseinrichtungen.
ITRM930102A0 (it)	1993-02-19	Dispositivo di filatura.
DE69012773D1 (de)	1994-10-27	Vakuum-Abwasservorrichtung.
DE69303447D1 (de)	1996-08-08	Vakuumpumpgerät
DE59307092D1 (de)	1997-09-11	Vakuum-pumpeinrichtung
ITRM910970A0 (it)	1991-12-24	Dispositivo di zettatura.
FI900185L (fi)	1991-07-13	Appliceringsanordning.
DE69015243D1 (de)	1995-02-02	Anschlussvorrichtung.
DE69106209D1 (de)	1995-02-09	Aufsichtsvorrichtung.
ITRM930153A0 (it)	1993-03-11	Dispositivo di filatura.
ITRM930168A0 (it)	1993-03-17	Dispositivo di distacco.
DE59407958D1 (de)	1999-04-22	Mikrovakuumsensor
FI913961L (fi)	1992-02-24	Separeringsanordning.
NL194582B (nl)	2002-04-02	Scheidingsinrichting.
FI894561A0 (fi)	1989-09-27	Suganordning.
FR2676346B3 (fr)	1993-04-23	Aspirateur.
ES1020707Y (es)	1993-06-16	Dispositivo despaletizador.

Legal Events

Date	Code	Title	Description
1996-10-31	8364	No opposition during term of opposition
2010-10-21	8339	Ceased/non-payment of the annual fee