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DE69211504D1 - Halbleiter-Druckwandler mit zwei Membranen - Google Patents

Halbleiter-Druckwandler mit zwei Membranen

Info

Publication number
DE69211504D1
DE69211504D1 DE69211504T DE69211504T DE69211504D1 DE 69211504 D1 DE69211504 D1 DE 69211504D1 DE 69211504 T DE69211504 T DE 69211504T DE 69211504 T DE69211504 T DE 69211504T DE 69211504 D1 DE69211504 D1 DE 69211504D1
Authority
DE
Germany
Prior art keywords
membranes
pressure transducer
semiconductor pressure
semiconductor
transducer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69211504T
Other languages
English (en)
Other versions
DE69211504T2 (de
Inventor
Kazuyuki Kato
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fuji Electric Co Ltd
Original Assignee
Fuji Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fuji Electric Co Ltd filed Critical Fuji Electric Co Ltd
Application granted granted Critical
Publication of DE69211504D1 publication Critical patent/DE69211504D1/de
Publication of DE69211504T2 publication Critical patent/DE69211504T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L19/00—Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
    • G01L19/14—Housings
    • G01L19/147—Details about the mounting of the sensor to support or covering means
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L19/00—Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
    • G01L19/0007—Fluidic connecting means
    • G01L19/0038—Fluidic connecting means being part of the housing
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L19/00—Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
    • G01L19/0061—Electrical connection means
    • G01L19/0084—Electrical connection means to the outside of the housing
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L19/00—Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
    • G01L19/06—Means for preventing overload or deleterious influence of the measured medium on the measuring device or vice versa
    • G01L19/0627—Protection against aggressive medium in general
    • G01L19/0645—Protection against aggressive medium in general using isolation membranes, specially adapted for protection
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L19/00—Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
    • G01L19/14—Housings
    • G01L19/148—Details about the circuit board integration, e.g. integrated with the diaphragm surface or encapsulation
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
    • G01L9/0051—Transmitting or indicating the displacement of flexible diaphragms using variations in ohmic resistance
    • G01L9/0052—Transmitting or indicating the displacement of flexible diaphragms using variations in ohmic resistance of piezoresistive elements
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
    • G01L9/0051—Transmitting or indicating the displacement of flexible diaphragms using variations in ohmic resistance
    • G01L9/0052—Transmitting or indicating the displacement of flexible diaphragms using variations in ohmic resistance of piezoresistive elements
    • G01L9/0054—Transmitting or indicating the displacement of flexible diaphragms using variations in ohmic resistance of piezoresistive elements integral with a semiconducting diaphragm

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Measuring Fluid Pressure (AREA)
DE69211504T 1991-11-29 1992-11-27 Halbleiter-Druckwandler mit zwei Membranen Expired - Fee Related DE69211504T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3315694A JPH05149814A (ja) 1991-11-29 1991-11-29 二重ダイヤフラム式半導体圧力センサ

Publications (2)

Publication Number Publication Date
DE69211504D1 true DE69211504D1 (de) 1996-07-18
DE69211504T2 DE69211504T2 (de) 1996-10-10

Family

ID=18068433

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69211504T Expired - Fee Related DE69211504T2 (de) 1991-11-29 1992-11-27 Halbleiter-Druckwandler mit zwei Membranen

Country Status (4)

Country Link
US (1) US5335549A (de)
EP (1) EP0545319B1 (de)
JP (1) JPH05149814A (de)
DE (1) DE69211504T2 (de)

Families Citing this family (24)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3198779B2 (ja) * 1994-03-04 2001-08-13 株式会社デンソー 半導体圧力検出器の製造方法
CA2145696A1 (en) * 1994-04-15 1995-10-16 Michael F. Mattes Pressure sensor assembly and method of producing the pressure sensor assembly
WO1996022515A1 (en) * 1995-01-19 1996-07-25 Honeywell Inc. Apparatus for detection of a diaphragm rupture in a pressure sensor
US5889211A (en) * 1995-04-03 1999-03-30 Motorola, Inc. Media compatible microsensor structure and methods of manufacturing and using the same
US5874679A (en) * 1996-04-04 1999-02-23 Ssi Technologies, Inc. Pressure sensor package and method of making the same
US5831170A (en) * 1996-04-04 1998-11-03 Ssi Technologies, Inc. Pressure sensor package and method of making the same
DE69706213T2 (de) * 1996-04-04 2002-05-16 Ssi Technologies, Inc. Druckmessgerät und Verfahren zu seiner Herstellung
US5741975A (en) * 1996-07-31 1998-04-21 Motorola, Inc. Media isolated differential pressure sensor and fluid injection method
JPH10281897A (ja) * 1997-04-08 1998-10-23 Mitsubishi Electric Corp 半導体圧力検出装置
US6038961A (en) * 1998-03-02 2000-03-21 Rosemount Inc. Flush mount remote seal
KR100331799B1 (ko) * 1999-06-04 2002-04-09 구자홍 압력센서 및 그 제조방법
US6570485B1 (en) * 2000-11-17 2003-05-27 Honeywell International Inc. Transducer packaging assembly for use in sensing unit subjected to high G forces
JP4717237B2 (ja) * 2001-03-26 2011-07-06 株式会社鷺宮製作所 圧力センサ用ダイヤフラム保護カバーおよび圧力センサ
JP4325133B2 (ja) * 2001-08-27 2009-09-02 株式会社デンソー ガスセンサおよびその製造方法
JP2004124817A (ja) 2002-10-02 2004-04-22 Mitsubishi Electric Corp 燃料ポンプモジュールおよび車両用の燃料タンク内圧センサ
JP2004198147A (ja) * 2002-12-16 2004-07-15 Toyoda Mach Works Ltd 圧力センサ
JP2005037310A (ja) 2003-07-18 2005-02-10 Fuji Koki Corp 圧力センサ
DE102004044982A1 (de) * 2004-09-16 2006-04-06 Infineon Technologies Ag Drucksensorvorrichtung und Verfahren zum Herstellen derselben
JP4548066B2 (ja) * 2004-09-24 2010-09-22 株式会社デンソー 圧力センサ
WO2008133314A1 (ja) * 2007-04-24 2008-11-06 Bridgestone Corporation センサモジュール
JP2009288003A (ja) * 2008-05-28 2009-12-10 Kyocera Corp 圧力センサモジュール
US8746075B2 (en) 2012-02-16 2014-06-10 7-Sigma, Inc. Flexible electrically conductive nanotube sensor for elastomeric devices
US9534972B2 (en) * 2012-02-16 2017-01-03 7-Sigma Inc. Pressure sensor with a deformable electrically resistive membrane
JP2016004016A (ja) 2014-06-19 2016-01-12 富士電機株式会社 二重ダイアフラム式圧力センサ

Family Cites Families (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5937716Y2 (ja) * 1979-01-31 1984-10-19 日産自動車株式会社 半導体差圧センサ
JPS55103440A (en) * 1979-02-02 1980-08-07 Nissan Motor Co Ltd Semiconductor pressure sensor
JPS5817421B2 (ja) * 1979-02-02 1983-04-07 日産自動車株式会社 半導体圧力センサ
DE2935476B2 (de) * 1979-09-01 1981-07-09 Hottinger Baldwin Messtechnik Gmbh, 6100 Darmstadt Flüssigkeitsgefüllter Differenzdruckaufnehmer
JPS59125032A (ja) * 1982-12-29 1984-07-19 Fuji Electric Co Ltd 差圧測定装置
DE3313261A1 (de) * 1983-04-13 1984-10-25 Ermeto Armaturen Gmbh, 4800 Bielefeld Sensor
JPS59217375A (ja) * 1983-05-26 1984-12-07 Toyota Central Res & Dev Lab Inc 半導体機械−電気変換装置
EP0197130A1 (de) * 1984-10-12 1986-10-15 Ametek, Inc. Druckwandler
US4665754A (en) * 1985-04-08 1987-05-19 Honeywell Inc. Pressure transducer
DE3703685A1 (de) * 1987-02-06 1988-08-18 Rbs Techn Anlagen Und Apparate Verfahren zur montage eines drucksensors sowie drucksensor
JPS63290932A (ja) * 1987-05-22 1988-11-28 Fuji Electric Co Ltd 半導体感圧素子
JPH0262032A (ja) * 1988-08-26 1990-03-01 Matsushita Electric Works Ltd 半導体基板及び半導体装置
US4944187A (en) * 1988-12-23 1990-07-31 Rosemount Inc. Multimodulus pressure sensor
KR930011091B1 (ko) * 1990-06-08 1993-11-20 미쯔비시 덴끼 가부시끼가이샤 압력 센서
KR950005891B1 (ko) * 1990-11-28 1995-06-02 미쓰비시덴키 가부시키가이샤 압력센서

Also Published As

Publication number Publication date
EP0545319B1 (de) 1996-06-12
JPH05149814A (ja) 1993-06-15
DE69211504T2 (de) 1996-10-10
US5335549A (en) 1994-08-09
EP0545319A2 (de) 1993-06-09
EP0545319A3 (en) 1993-06-30

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8320 Willingness to grant licences declared (paragraph 23)
8339 Ceased/non-payment of the annual fee