DE69205094D1 - Ionisierungs-Vakuum-Messgerät. - Google Patents

Ionisierungs-Vakuum-Messgerät.

Info

Publication number: DE69205094D1
Authority: DE; Germany
Prior art keywords: measuring device; ionization vacuum; vacuum measuring; ionization; vacuum
Prior art date: 1991-07-23
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.): Expired - Fee Related

Application number

DE69205094T

Other languages

English (en)

Other versions

DE69205094T2 (de

Inventor

Robert Baptist

Christophe Py

Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)

Commissariat a lEnergie Atomique et aux Energies Alternatives CEA

Original Assignee

Commissariat a lEnergie Atomique CEA

Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)

1991-07-23

Filing date

1992-07-21

Publication date

1995-11-02

Family has litigation

First worldwide family litigation filed litigation Critical https://patents.darts-ip.com/?family=9415426&utm_source=google_patent&utm_medium=platform_link&utm_campaign=public_patent_search&patent=DE69205094(D1) "Global patent litigation dataset” by Darts-ip is licensed under a Creative Commons Attribution 4.0 International License.

1992-07-21 Application filed by Commissariat a lEnergie Atomique CEA filed Critical Commissariat a lEnergie Atomique CEA

1995-11-02 Application granted granted Critical

1995-11-02 Publication of DE69205094D1 publication Critical patent/DE69205094D1/de

1996-05-09 Publication of DE69205094T2 publication Critical patent/DE69205094T2/de

2012-07-22 Anticipated expiration legal-status Critical

Status Expired - Fee Related legal-status Critical Current

Classifications

- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L21/00—Vacuum gauges
- G01L21/30—Vacuum gauges by making use of ionisation effects
- G01L21/34—Vacuum gauges by making use of ionisation effects using electric discharge tubes with cold cathodes
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2201/00—Electrodes common to discharge tubes
- H01J2201/30—Cold cathodes
- H01J2201/304—Field emission cathodes
- H01J2201/30403—Field emission cathodes characterised by the emitter shape

Landscapes

Physics & Mathematics (AREA)
General Physics & Mathematics (AREA)
Measuring Fluid Pressure (AREA)

DE69205094T 1991-07-23 1992-07-21 Ionisierungs-Vakuum-Messgerät. Expired - Fee Related DE69205094T2 (de)

Applications Claiming Priority (1)

Application Number	Priority Date	Filing Date	Title
FR9109283A FR2679653B1 (fr)	1991-07-23	1991-07-23	Vacumetre a ionisation.

Publications (2)

Publication Number	Publication Date
DE69205094D1 true DE69205094D1 (de)	1995-11-02
DE69205094T2 DE69205094T2 (de)	1996-05-09

Family

ID=9415426

Family Applications (1)

Application Number	Title	Priority Date	Filing Date
DE69205094T Expired - Fee Related DE69205094T2 (de)	1991-07-23	1992-07-21	Ionisierungs-Vakuum-Messgerät.

Country Status (5)

Country	Link
US (1)	US5278510A (de)
EP (1)	EP0524870B1 (de)
JP (1)	JPH07181095A (de)
DE (1)	DE69205094T2 (de)
FR (1)	FR2679653B1 (de)

Families Citing this family (30)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
DE4137527A1 (de) *	1991-11-14	1993-05-19	Siemens Ag	Ionisationsdruckmesser
FR2711794B1 (fr) *	1993-10-28	1997-08-29	Cit Alcatel	Détecteur de fuite à gaz traceur et procédé de fonctionnement.
FR2714966B1 (fr) *	1994-01-11	1996-02-16	Commissariat Energie Atomique	Jauge à ionisation munie d'une cathode à micropointes.
US5655886A (en) *	1995-06-06	1997-08-12	Color Planar Displays, Inc.	Vacuum maintenance device for high vacuum chambers
FR2736465B1 (fr) *	1995-07-03	1997-08-08	Commissariat Energie Atomique	Dispositif d'amorcage et/ou de maintien d'une decharge et jauge a vide a cathode froide comportant un tel dispositif
DE19855522C2 (de) *	1998-12-02	2001-11-08	Univ Magdeburg Tech	Vakuum-Meßverfahren und Vakuum-Meßeinrichtung
DE10134912A1 (de) *	2001-07-18	2003-02-06	Mu Sen Mikrosystemtechnik Gmbh	Ionisationsmanometer
US6566884B2 (en)	2001-09-13	2003-05-20	Duniway Stockroom Corporation	Ionization vacuum pressure gauge
ITTO20030626A1 (it) *	2003-08-08	2005-02-09	Varian Spa	Vacuometro a ionizzazione.
ITTO20030627A1 (it) *	2003-08-08	2005-02-09	Varian Spa	Vacuometro a ionizzazione.
US7098667B2 (en) *	2003-12-31	2006-08-29	Fei Company	Cold cathode ion gauge
US7295015B2 (en) *	2004-02-19	2007-11-13	Brooks Automation, Inc.	Ionization gauge
SI21714A (en)	2004-02-23	2005-08-31	Inst Jozef Stefan	Procedure and device for measuring ultrahigh vacuum
CN100426440C (zh) *	2004-04-21	2008-10-15	清华大学	冷阴极电子枪和采用该冷阴极电子枪的真空规管
EP1698878A1 (de)	2005-03-04	2006-09-06	Inficon GmbH	Elektrodenanordnung und Druckmessvorrichtung
CN101266180A (zh)	2007-03-16	2008-09-17	清华大学	电离规
CN101303955B (zh) *	2007-05-09	2010-05-26	清华大学	离子源组件
CN101303264B (zh) *	2007-05-09	2010-05-26	清华大学	电离规
US7768267B2 (en) *	2007-07-11	2010-08-03	Brooks Automation, Inc.	Ionization gauge with a cold electron source
US8686733B2 (en) *	2007-12-19	2014-04-01	Brooks Automation, Inc.	Ionization gauge having electron multiplier cold emission source
JP5728728B2 (ja)	2008-02-21	2015-06-03	エムケーエスインストルメンツインコーポレーテッドＭｋｓＩｎｓｔｒｕｍｅｎｔｓ，Ｉｎｃｏｒｐｏｒａｔｅｄ	高圧力動作用に設計された動作パラメータと形状とを有する電離真空計
US8928329B2 (en) *	2011-07-26	2015-01-06	Mks Instruments, Inc.	Cold cathode gauge fast response signal circuit
US9484176B2 (en) *	2012-09-10	2016-11-01	Thomas Schenkel	Advanced penning ion source
TWI795918B (zh)	2015-01-15	2023-03-11	美商Ｍｋｓ儀器公司	製造測量裝置之方法
CN107796559B (zh) *	2016-08-31	2020-06-09	中国石油化工股份有限公司	真空室的真空度检测方法
CN107993908B (zh) *	2017-11-27	2019-11-15	温州大学	一种基于场发射阴极电子源的电离真空计及其应用方法
JP7036675B2 (ja) *	2018-06-11	2022-03-15	株式会社アルバック	Ｂａ型電離真空計及びその感度異常検知方法、並びにｂａ型電離真空計を用いた圧力測定方法
JP6721806B1 (ja) *	2019-09-13	2020-07-15	キヤノンアネルバ株式会社	電離真空計およびカートリッジ
WO2023114166A1 (en) *	2021-12-16	2023-06-22	Inficon, Inc.	Ion source assembly with multiple elliptical filaments
CN115468699B (zh) *	2022-08-19	2024-07-16	核工业西南物理研究院	一种原位测量中性气体压强的快规系统

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
FR2593953B1 (fr) *	1986-01-24	1988-04-29	Commissariat Energie Atomique	Procede de fabrication d'un dispositif de visualisation par cathodoluminescence excitee par emission de champ
FR2607623B1 (fr) *	1986-11-27	1995-02-17	Commissariat Energie Atomique	Source d'electrons polarises de spin, utilisant une cathode emissive a micropointes, application en physique des interactions electrons-matiere ou electrons-particules, physique des plasmas, microscopie electronique
FR2623013A1 (fr) *	1987-11-06	1989-05-12	Commissariat Energie Atomique	Source d'electrons a cathodes emissives a micropointes et dispositif de visualisation par cathodoluminescence excitee par emission de champ,utilisant cette source
US5103145A (en) *	1990-09-05	1992-04-07	Raytheon Company	Luminance control for cathode-ray tube having field emission cathode

1991
- 1991-07-23 FR FR9109283A patent/FR2679653B1/fr not_active Expired - Fee Related
1992
- 1992-07-20 US US07/917,484 patent/US5278510A/en not_active Expired - Fee Related
- 1992-07-21 DE DE69205094T patent/DE69205094T2/de not_active Expired - Fee Related
- 1992-07-21 EP EP92402095A patent/EP0524870B1/de not_active Expired - Lifetime
- 1992-07-23 JP JP4197094A patent/JPH07181095A/ja active Pending

Also Published As

Publication number	Publication date
US5278510A (en)	1994-01-11
FR2679653B1 (fr)	1993-09-24
EP0524870A1 (de)	1993-01-27
DE69205094T2 (de)	1996-05-09
EP0524870B1 (de)	1995-09-27
FR2679653A1 (fr)	1993-01-29
JPH07181095A (ja)	1995-07-18

Publication	Publication Date	Title
DE69205094D1 (de)	1995-11-02	Ionisierungs-Vakuum-Messgerät.
MX9201185A (es)	1992-10-01	Dispositivo de inhalacion.
DE68915411D1 (de)	1994-06-23	Unterdruck-Messvorrichtung.
DE69108817D1 (de)	1995-05-18	Verschiebungsmessapparat.
ITRM910096A1 (it)	1992-08-08	Dispositivo di inalazione.
DE59200921D1 (de)	1995-01-19	Integrierbare leitfähigkeitsmessvorrichtung.
DE59201199D1 (de)	1995-02-23	Wegmesseinrichtung.
DE69203280D1 (de)	1995-08-10	Verschiebungsvorrichtung.
DE69232149D1 (de)	2001-11-29	Messgerät
DE69103738D1 (de)	1994-10-06	Vakuum-Aufdampfvorrichtung.
DE69111681D1 (de)	1995-09-07	Elektronenoptische Messeinrichtung.
DE69107288D1 (de)	1995-03-23	Abstandsmessgerät.
DE69208253D1 (de)	1996-03-21	Betätigunseinrichtung
DE69215884D1 (de)	1997-01-23	Messapparat
DE69201145D1 (de)	1995-02-23	Dimensionsmessvorrichtung.
ITMI920391A1 (it)	1993-08-21	Dispositivo per aspirapolvere-battitappeto
DE68908785D1 (de)	1993-10-07	Vakuummessgerät.
DE69204490D1 (de)	1995-10-12	Positionsdetektionsgerät.
NO913199L (no)	1992-10-12	Monteringsanordning.
DE69105796D1 (de)	1995-01-26	Absolute Positionsfeststellungsvorrichtung.
DE59202529D1 (de)	1995-07-20	Kraftmesseinrichtung.
DE59103437D1 (de)	1994-12-08	Winkelmessvorrichtung.
DE59006053D1 (de)	1994-07-14	Winkelmesseinrichtung.
DE69201670D1 (de)	1995-04-20	Bremsvorrichtung.
DE69110904D1 (de)	1995-08-03	Messvorrichtung.

Legal Events

Date	Code	Title
1996-09-12	8363	Opposition against the patent
1998-06-04	8365	Fully valid after opposition proceedings
2002-09-26	8339	Ceased/non-payment of the annual fee