DE69203606D1 - Temperaturunabhängiger Mikrosensor mit schwingendem Stab. - Google Patents

Temperaturunabhängiger Mikrosensor mit schwingendem Stab.

Info

Publication number: DE69203606D1
Authority: DE; Germany
Prior art keywords: microsensor; independent; temperature; vibrating rod; vibrating
Prior art date: 1991-08-23
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.): Expired - Fee Related

Application number

DE69203606T

Other languages

English (en)

Other versions

DE69203606T2 (de

Inventor

Didier Largeau

Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)

Mobrey Group Ltd

Original Assignee

Solartron Group Ltd

Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)

1991-08-23

Filing date

1992-08-19

Publication date

1995-08-24

1992-08-19 Application filed by Solartron Group Ltd filed Critical Solartron Group Ltd

1995-08-24 Publication of DE69203606D1 publication Critical patent/DE69203606D1/de

1996-04-04 Application granted granted Critical

1996-04-04 Publication of DE69203606T2 publication Critical patent/DE69203606T2/de

2012-08-20 Anticipated expiration legal-status Critical

Status Expired - Fee Related legal-status Critical Current

Classifications

- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
- G01L9/0001—Transmitting or indicating the displacement of elastically deformable gauges by electric, electro-mechanical, magnetic or electro-magnetic means
- G01L9/0008—Transmitting or indicating the displacement of elastically deformable gauges by electric, electro-mechanical, magnetic or electro-magnetic means using vibrations
- G01L9/0019—Transmitting or indicating the displacement of elastically deformable gauges by electric, electro-mechanical, magnetic or electro-magnetic means using vibrations of a semiconductive element
- G01L9/002—Optical excitation or measuring

Landscapes

Physics & Mathematics (AREA)
General Physics & Mathematics (AREA)
Length Measuring Devices By Optical Means (AREA)
Measuring Fluid Pressure (AREA)

DE69203606T 1991-08-23 1992-08-19 Temperaturunabhängiger Mikrosensor mit schwingendem Stab. Expired - Fee Related DE69203606T2 (de)

Applications Claiming Priority (2)

Application Number	Priority Date	Filing Date	Title
FR9110623A FR2680574B1 (fr)	1991-08-23	1991-08-23	Microcapteur a poutre vibrante compense en temperature.
PCT/FR1992/000806 WO1993004347A1 (fr)	1991-08-23	1992-08-19	Microcapteur a poutre vibrante compense en temperature

Publications (2)

Publication Number	Publication Date
DE69203606D1 true DE69203606D1 (de)	1995-08-24
DE69203606T2 DE69203606T2 (de)	1996-04-04

Family

ID=9416396

Family Applications (1)

Application Number	Title	Priority Date	Filing Date
DE69203606T Expired - Fee Related DE69203606T2 (de)	1991-08-23	1992-08-19	Temperaturunabhängiger Mikrosensor mit schwingendem Stab.

Country Status (5)

Country	Link
US (1)	US5442963A (de)
EP (1)	EP0601081B1 (de)
DE (1)	DE69203606T2 (de)
FR (1)	FR2680574B1 (de)
WO (1)	WO1993004347A1 (de)

Families Citing this family (12)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
US5559358A (en) *	1993-05-25	1996-09-24	Honeywell Inc.	Opto-electro-mechanical device or filter, process for making, and sensors made therefrom
US6021675A (en) *	1995-06-07	2000-02-08	Ssi Technologies, Inc.	Resonating structure and method for forming the resonating structure
US6246638B1 (en) *	1999-03-30	2001-06-12	Honeywell International Inc.	Fiber-optic vibration sensor based on frequency modulation of light-excited oscillators
JP4082907B2 (ja) *	2002-01-21	2008-04-30	正喜江刺	振動形圧力センサ
DE10318069A1 (de) *	2003-04-17	2004-11-11	Endress + Hauser Gmbh + Co. Kg	Drucksensor nach dem Resonatorprinzip und Verfahren zu dessen Betrieb
US7176048B1 (en)	2004-12-12	2007-02-13	Burns David W	Optically coupled sealed-cavity resonator and process
US7605391B2 (en) *	2004-12-12	2009-10-20	Burns David W	Optically coupled resonator
US7379629B1 (en)	2004-12-12	2008-05-27	Burns David W	Optically coupled resonant pressure sensor
US7499604B1 (en)	2004-12-12	2009-03-03	Burns David W	Optically coupled resonant pressure sensor and process
US7443509B1 (en)	2004-12-12	2008-10-28	Burns David W	Optical and electronic interface for optically coupled resonators
GB2508908B (en) *	2012-12-14	2017-02-15	Gen Electric	Resonator device
GB2509105B (en) *	2012-12-20	2017-02-22	Oxsensis Ltd	Mechanical resonator sensor

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
GB2197069B (en) *	1986-11-03	1990-10-24	Stc Plc	Sensor device
GB2198531B (en) *	1986-12-13	1990-11-07	Stc Plc	Optical sensor device
EP0419021A3 (en) *	1989-08-30	1991-10-09	Schlumberger Industries Limited	Sensors with vibrating elements
GB8923374D0 (en) *	1989-10-17	1989-12-06	Lucas Ind Plc	Sensor

1991
- 1991-08-23 FR FR9110623A patent/FR2680574B1/fr not_active Expired - Fee Related
1992
- 1992-08-19 EP EP92919104A patent/EP0601081B1/de not_active Expired - Lifetime
- 1992-08-19 US US08/196,130 patent/US5442963A/en not_active Expired - Lifetime
- 1992-08-19 WO PCT/FR1992/000806 patent/WO1993004347A1/fr not_active Ceased
- 1992-08-19 DE DE69203606T patent/DE69203606T2/de not_active Expired - Fee Related

Also Published As

Publication number	Publication date
FR2680574B1 (fr)	1996-04-12
FR2680574A1 (fr)	1993-02-26
EP0601081A1 (de)	1994-06-15
WO1993004347A1 (fr)	1993-03-04
DE69203606T2 (de)	1996-04-04
EP0601081B1 (de)	1995-07-19
US5442963A (en)	1995-08-22

Publication	Publication Date	Title
FI921594A0 (fi)	1992-04-10	Sensor foer anvaendning i livmodern.
DE69201653D1 (de)	1995-04-20	Gassensor.
DE59102805D1 (de)	1994-10-13	Füllelement.
FI922095A0 (fi)	1992-05-08	Substituerade karboxylsyraderivat.
DE69203606D1 (de)	1995-08-24	Temperaturunabhängiger Mikrosensor mit schwingendem Stab.
MX9204547A (es)	1993-03-01	Neristatina 1.
FI921361A0 (fi)	1992-03-27	Lagerhus foer ett flerradigt rullager.
DE59103409D1 (de)	1994-12-08	Reflexionslichtschranke.
FI924355A0 (fi)	1992-09-29	Substituerade imidazolylpropensyraderivat.
FI922749A0 (fi)	1992-06-12	Kroman derivat.
FI921608A0 (fi)	1992-04-10	Vals.
FI910080A0 (fi)	1991-01-07	Boejningsreglerbar vals.
DE68906149D1 (de)	1993-05-27	Inertialwaage mit gefesselter linearbewegung.
DE59105670D1 (de)	1995-07-13	Elektromechanische Waage mit Saitenschwinger.
DE69206522D1 (de)	1996-01-18	Vibrator.
DE69201153D1 (de)	1995-02-23	Sensor mit einem schwingenden Element.
DE69207274D1 (de)	1996-02-15	Bewegungssensor
FI924361A0 (fi)	1992-09-29	Identifikationsbaermedel foer ett tillslutningssystem.
BR9404299A (pt)	1995-07-04	Conjunto pistão-biela.
FI915179A0 (fi)	1991-11-01	Digitaldetektor foer ett soekaranlaeggningsystem.
DE68913549D1 (de)	1994-04-07	Rohrförmige gegenstände.
DE59102018D1 (de)	1994-07-28	Drosselklappe.
FI915360L (fi)	1992-05-15	Poratankokomponentti
DE69204876D1 (de)	1995-10-26	Brennstabdichtsetzvorrichtung.
FI901663L (fi)	1991-10-03	Roerfoerbindning.

Legal Events

Date	Code	Title	Description
1996-08-14	8364	No opposition during term of opposition
1998-08-13	8339	Ceased/non-payment of the annual fee