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DE69129104D1 - Fühlvorrichtung zur messung des charakteristischen wertes eines zu messenden elementes unter verwendung der veränderungen des thermischen widerstands - Google Patents

Fühlvorrichtung zur messung des charakteristischen wertes eines zu messenden elementes unter verwendung der veränderungen des thermischen widerstands

Info

Publication number
DE69129104D1
DE69129104D1 DE69129104T DE69129104T DE69129104D1 DE 69129104 D1 DE69129104 D1 DE 69129104D1 DE 69129104 T DE69129104 T DE 69129104T DE 69129104 T DE69129104 T DE 69129104T DE 69129104 D1 DE69129104 D1 DE 69129104D1
Authority
DE
Germany
Prior art keywords
measuring
measured
sensor
changes
characteristic value
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69129104T
Other languages
English (en)
Other versions
DE69129104T2 (de
Inventor
Jun Hiraoka
Setsuo Kodato
Yoshinobu Naitoh
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Anritsu Corp
Original Assignee
Anritsu Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Anritsu Corp filed Critical Anritsu Corp
Publication of DE69129104D1 publication Critical patent/DE69129104D1/de
Application granted granted Critical
Publication of DE69129104T2 publication Critical patent/DE69129104T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N25/00—Investigating or analyzing materials by the use of thermal means
    • G01N25/18—Investigating or analyzing materials by the use of thermal means by investigating thermal conductivity
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
    • G01B11/06—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B7/00—Measuring arrangements characterised by the use of electric or magnetic techniques
    • G01B7/02—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring length, width or thickness
    • G01B7/06—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring length, width or thickness for measuring thickness

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Investigating Or Analyzing Materials Using Thermal Means (AREA)
DE69129104T 1990-12-14 1991-12-13 Fühlvorrichtung zur messung des charakteristischen wertes eines zu messenden elementes unter verwendung der veränderungen des thermischen widerstands Expired - Fee Related DE69129104T2 (de)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP41087590 1990-12-14
JP11926191 1991-04-23
PCT/JP1991/001711 WO1992010742A1 (fr) 1990-12-14 1991-12-13 Systeme detecteur servant a mesurer une valeur caracteristique d'un element a mesurer au moyen des variations de la resistance thermique

Publications (2)

Publication Number Publication Date
DE69129104D1 true DE69129104D1 (de) 1998-04-23
DE69129104T2 DE69129104T2 (de) 1998-11-19

Family

ID=26457041

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69129104T Expired - Fee Related DE69129104T2 (de) 1990-12-14 1991-12-13 Fühlvorrichtung zur messung des charakteristischen wertes eines zu messenden elementes unter verwendung der veränderungen des thermischen widerstands

Country Status (5)

Country Link
US (1) US5251980A (de)
EP (1) EP0515695B1 (de)
JP (1) JP3118459B2 (de)
DE (1) DE69129104T2 (de)
WO (1) WO1992010742A1 (de)

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US5922959A (en) * 1996-10-15 1999-07-13 Currency Systems International Methods of measuring currency limpness
JP3377162B2 (ja) * 1997-01-17 2003-02-17 株式会社リコー 熱分析装置およびその計測方法
KR100265556B1 (ko) 1997-03-21 2000-11-01 구본준 식각장치
US5982014A (en) * 1997-05-30 1999-11-09 Thermalytics, Inc. Microfabricated silicon thermopile sensor
US6327011B2 (en) * 1997-10-20 2001-12-04 Lg Electronics, Inc. Liquid crystal display device having thin glass substrate on which protective layer formed and method of making the same
KR20000067106A (ko) * 1999-04-23 2000-11-15 구본준 유리기판 에칭장치
US6331075B1 (en) 1998-05-01 2001-12-18 Administrator, National Aeronautics And Space Administration Device and method for measuring thermal conductivity of thin films
KR100272513B1 (ko) 1998-09-08 2001-01-15 구본준 유리기판의 식각장치
KR100308157B1 (ko) 1998-10-22 2001-11-15 구본준, 론 위라하디락사 액정표시소자용 유리기판
DE19948908C2 (de) * 1999-10-11 2001-10-04 Siemens Ag Verfahren zur Bestimmung der Alkoholkonzentration in Brennstoffzellen sowie ein zu dessen Durchführung geeignetes Brennstoffzellensystem
JP2002131257A (ja) * 2000-10-26 2002-05-09 Nisshinbo Ind Inc 熱伝導率測定方法、測定装置及び断熱材の製造方法
DE10123920B4 (de) * 2001-05-17 2006-02-02 Robert Bosch Gmbh Integriertes Mikrostruktursensorelement zur Erfassung thermodynamischer Größen eines Fluids
US6491426B1 (en) 2001-06-25 2002-12-10 Sbs Technologies Inc. Thermal bond verification
JP3828030B2 (ja) * 2002-03-25 2006-09-27 エスアイアイ・ナノテクノロジー株式会社 温度測定プローブおよび温度測定装置
US6902316B1 (en) * 2004-02-05 2005-06-07 The United States Of America As Represented By The Secretary Of The Navy Non-invasive corrosion sensor
DE102004051113B4 (de) * 2004-10-21 2006-11-30 X-Fab Semiconductor Foundries Ag Verfahren und Messanordnung zur elektrischen Ermittlung der Dicke von Halbleitermembranen durch Energieeintrag
JP4390066B2 (ja) * 2004-10-25 2009-12-24 三井金属鉱業株式会社 液位検出方法及び液位検出装置
GB0605683D0 (en) * 2006-03-21 2006-05-03 Servomex Group Ltd Thermal conductivity sensor
CN101055300B (zh) * 2006-04-14 2010-08-25 鸿富锦精密工业（深圳）有限公司 电阻测量方法
WO2008035293A2 (en) * 2006-09-20 2008-03-27 Koninklijke Philips Electronics N.V. A micro-fluidic device for the use in biochips or biosystems
US10338016B1 (en) 2015-09-28 2019-07-02 Jeffrey Callister Verification of material composition in precious metal object
KR20250035132A (ko) * 2023-09-05 2025-03-12 재단법인대구경북과학기술원 온감 측정 장치, 온감 측정 시스템 및 그것의 온감 측정 방법

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US2852850A (en) * 1955-12-06 1958-09-23 Gen Motors Corp Method and apparatus for thickness measurement
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PL139300B1 (en) * 1983-04-27 1987-01-31 Pan Ct Badan Molekularnych I M Method of determination of thermal conductivity and heat storage capacity of materials and apparatus therefor
US4621929A (en) * 1983-10-12 1986-11-11 Luxtron Corporation Fiber optic thermal anemometer
JPS61169752A (ja) * 1985-01-23 1986-07-31 Canon Inc センサ
GB2179748B (en) * 1985-08-20 1989-09-06 Sharp Kk Thermal flow sensor
JP2686928B2 (ja) * 1985-08-26 1997-12-08 アンリツ株式会社 シリコン・ゲルマニウム混晶薄膜導電体
FR2588962B1 (fr) * 1985-10-23 1988-01-15 Centre Nat Rech Scient Capteur de mesure de la conductivite thermique de materiaux
FR2592489B1 (fr) * 1985-12-27 1988-02-12 Bull Sa Procede et dispositif de mesure de la resistance thermique d'un element tel qu'un equipement de circuits integres de haute densite.
JPS6413445A (en) * 1987-07-07 1989-01-18 Fujitsu Ltd Method for calculating thermal resistance of heat radiating route from surface packaging type element
SE461177B (sv) * 1988-03-16 1990-01-15 Thermetrol Ab Anordning foer maetning av termiska egenskaper hos en provsubstans
JPH02285241A (ja) * 1989-04-26 1990-11-22 Koberuko Kaken:Kk 透明試料の熱伝導率測定方法
US5112136A (en) * 1990-09-24 1992-05-12 Kiyoshi Sakuma Method of and apparatus for measuring thermal conductivity

Also Published As

Publication number Publication date
WO1992010742A1 (fr) 1992-06-25
JP3118459B2 (ja) 2000-12-18
EP0515695A4 (en) 1993-05-12
US5251980A (en) 1993-10-12
EP0515695A1 (de) 1992-12-02
DE69129104T2 (de) 1998-11-19
EP0515695B1 (de) 1998-03-18

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee