DE69902800D1 - Optische wellenleitervorrichtung - Google Patents

Optische wellenleitervorrichtung

Info

Publication number: DE69902800D1
Authority: DE; Germany
Prior art keywords: guide device; wave guide; optical wave; optical; wave
Prior art date: 1998-10-15
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.): Expired - Lifetime

Application number

DE69902800T

Other languages

English (en)

Other versions

DE69902800T2 (de

Inventor

Peter Bloechl

Gian-Luca Bona

W Germann

Folkert Horst

Illana Massarek

Jan Offrein

L Salemink

Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)

International Business Machines Corp

Original Assignee

International Business Machines Corp

Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)

1998-10-15

Filing date

1999-10-01

Publication date

2002-10-10

1999-10-01 Application filed by International Business Machines Corp filed Critical International Business Machines Corp

2002-10-10 Publication of DE69902800D1 publication Critical patent/DE69902800D1/de

2003-05-28 Application granted granted Critical

2003-05-28 Publication of DE69902800T2 publication Critical patent/DE69902800T2/de

2019-10-02 Anticipated expiration legal-status Critical

Status Expired - Lifetime legal-status Critical Current

Classifications

- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/02—Optical fibres with cladding with or without a coating
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
- G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
- G02B6/122—Basic optical elements, e.g. light-guiding paths
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
- G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
- G02B6/126—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind using polarisation effects
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
- G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
- G02B6/13—Integrated optical circuits characterised by the manufacturing method
- G02B6/136—Integrated optical circuits characterised by the manufacturing method by etching
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
- G02B6/105—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type having optical polarisation effects

Landscapes

Physics & Mathematics (AREA)
General Physics & Mathematics (AREA)
Optics & Photonics (AREA)
Engineering & Computer Science (AREA)
Microelectronics & Electronic Packaging (AREA)
Optical Integrated Circuits (AREA)

DE69902800T 1998-10-15 1999-10-01 Optische wellenleitervorrichtung Expired - Lifetime DE69902800T2 (de)

Applications Claiming Priority (2)

Application Number	Priority Date	Filing Date	Title
EP98119510		1998-10-15
PCT/IB1999/001612 WO2000022465A1 (en)	1998-10-15	1999-10-01	Optical waveguide device

Publications (2)

Publication Number	Publication Date
DE69902800D1 true DE69902800D1 (de)	2002-10-10
DE69902800T2 DE69902800T2 (de)	2003-05-28

Family

ID=8232806

Family Applications (1)

Application Number	Title	Priority Date	Filing Date
DE69902800T Expired - Lifetime DE69902800T2 (de)	1998-10-15	1999-10-01	Optische wellenleitervorrichtung

Country Status (8)

Country	Link
US (1)	US6678452B1 (de)
EP (1)	EP1121611B1 (de)
JP (1)	JP3496829B2 (de)
KR (1)	KR100446171B1 (de)
CN (1)	CN1157611C (de)
DE (1)	DE69902800T2 (de)
IL (1)	IL141831A0 (de)
WO (1)	WO2000022465A1 (de)

Families Citing this family (19)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
GB2366394A (en)	2000-08-11	2002-03-06	Kymata Ltd	Integrated optical device with cladding having mesa formation
DE10045566A1 (de)	2000-09-14	2002-03-28	Scc Special Comm Cables Gmbh	Optischer Chip und Verfahren zur Herstellung eines strukturverstärkten optischen Chips
US20020048433A1 (en) *	2000-10-10	2002-04-25	Chi Wu	Optical component having a protected ridge
EP1327170A2 (de) *	2000-10-20	2003-07-16	Corning Incorporated	Gebrauch von deuterium enthaltenden gasen zur herstellung von germanium-dotierten, silizium-oxynitriden wellenleitern mit niedrigen verlusten
JP2003121666A (ja) *	2001-10-10	2003-04-23	Nec Corp	導波路型光デバイスおよびその製造方法
US7020374B2 (en) *	2003-02-03	2006-03-28	Freescale Semiconductor, Inc.	Optical waveguide structure and method for fabricating the same
JP4626153B2 (ja) *	2004-02-20	2011-02-02	日本電気株式会社	光導波路回路の製造方法
JP4681644B2 (ja) *	2008-11-18	2011-05-11	日本電信電話株式会社	光導波路の作製方法
JP2012068399A (ja) *	2010-09-22	2012-04-05	Nec Corp	光モジュール及びその製造方法
KR101521160B1 (ko) *	2010-11-03	2015-05-18	엠파이어 테크놀로지 디벨롭먼트 엘엘씨	광도파관의 형성
US10191213B2 (en)	2014-01-09	2019-01-29	Globalfoundries Inc.	Shielding structures between optical waveguides
CN103760691B (zh) *	2014-01-24	2016-05-11	东南大学	一种偏振态控制的多模干涉型光开关及其制备方法
CN105158858B (zh) *	2015-06-24	2017-01-18	湖南晶图科技有限公司	一种消除成型plc晶圆内部残余应力的方法
US10132997B2 (en)	2016-05-16	2018-11-20	Finisar Corporation	Adiabatically coupled optical system
CN109059749B (zh) *	2018-07-09	2019-09-20	清华大学	柔性传感器的制备方法
CN111229336B (zh) *	2020-01-17	2021-11-23	上海新微技术研发中心有限公司	光波导多微流道芯片的制造方法
CN113687530B (zh) *	2021-08-31	2023-12-08	中国科学院半导体研究所	硅基电光调制器及其制备方法
EP4443205A4 (de)	2021-12-03	2025-01-22	Fujitsu Limited	Optische wellenleitervorrichtung, quantenbetriebsvorrichtung und verfahren zur herstellung einer optischen wellenleitervorrichtung
CN115951509B (zh) *	2023-03-13	2023-06-02	济南晶正电子科技有限公司	电光晶体薄膜、制备方法及电子元件

Family Cites Families (11)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
US4358181A (en)	1977-09-29	1982-11-09	Corning Glass Works	Gradient index optical waveguide and method of making
US4724316A (en)	1985-07-12	1988-02-09	Eldec Corporation	Temperature independent fiber optic sensor
US4781424A (en)	1986-07-28	1988-11-01	Nippon Telegraph And Telephone Corporation	Single mode channel optical waveguide with a stress-induced birefringence control region
JPS6399589A (ja)	1986-10-15	1988-04-30	Mitsubishi Electric Corp	半導体レ−ザ
DE3887567T2 (de) *	1987-05-26	1994-06-01	Toshiba Kawasaki Kk	Halbleiterlaservorrichtung und Verfahren zu ihrer Herstellung.
JPS63303305A (ja)	1987-06-03	1988-12-09	Fujikura Ltd	石英系薄膜導波路
US5467415A (en)	1994-04-22	1995-11-14	At&T Corp.	Method for making polarization independent silica optical circuits
US5483613A (en) *	1994-08-16	1996-01-09	At&T Corp.	Optical device with substrate and waveguide structure having thermal matching interfaces
KR100303279B1 (ko) *	1994-08-27	2001-12-01	윤종용	반도체레이저다이오드와그제조방법
US5502781A (en)	1995-01-25	1996-03-26	At&T Corp.	Integrated optical devices utilizing magnetostrictively, electrostrictively or photostrictively induced stress
US6031858A (en) *	1996-09-09	2000-02-29	Kabushiki Kaisha Toshiba	Semiconductor laser and method of fabricating same

1999
- 1999-10-01 WO PCT/IB1999/001612 patent/WO2000022465A1/en not_active Ceased
- 1999-10-01 IL IL14183199A patent/IL141831A0/xx not_active IP Right Cessation
- 1999-10-01 CN CNB998120898A patent/CN1157611C/zh not_active Expired - Lifetime
- 1999-10-01 KR KR10-2001-7004088A patent/KR100446171B1/ko not_active Expired - Fee Related
- 1999-10-01 DE DE69902800T patent/DE69902800T2/de not_active Expired - Lifetime
- 1999-10-01 US US09/807,627 patent/US6678452B1/en not_active Expired - Lifetime
- 1999-10-01 EP EP99944743A patent/EP1121611B1/de not_active Expired - Lifetime
- 1999-10-01 JP JP2000576307A patent/JP3496829B2/ja not_active Expired - Fee Related

Also Published As

Publication number	Publication date
KR20010088825A (ko)	2001-09-28
EP1121611A1 (de)	2001-08-08
EP1121611B1 (de)	2002-09-04
JP3496829B2 (ja)	2004-02-16
US6678452B1 (en)	2004-01-13
WO2000022465A1 (en)	2000-04-20
JP2002527787A (ja)	2002-08-27
CN1323404A (zh)	2001-11-21
KR100446171B1 (ko)	2004-08-30
IL141831A0 (en)	2002-03-10
CN1157611C (zh)	2004-07-14
DE69902800T2 (de)	2003-05-28

Publication	Publication Date	Title
DE69937926D1 (de)	2008-02-21	Optische Schalteinrichtung
DE69602938D1 (de)	1999-07-22	Optische wellenleitervorrichtung
DE69908294D1 (de)	2003-07-03	Optische schaltvorrichtung
DE69719117D1 (de)	2003-03-27	Optische Vorrichtung
DE59805839D1 (de)	2002-11-07	Optische detektoreinrichtung
DE60032338D1 (de)	2007-01-25	Optische nachrichrenübertragungsvorrichtung
DE69902800D1 (de)	2002-10-10	Optische wellenleitervorrichtung
DE69526174D1 (de)	2002-05-08	Optische Wellenleitervorrichtung
DE60039403D1 (de)	2008-08-21	Optische Vorrichtung
DE69831363T2 (de)	2006-06-14	Optische Abtastvorrichtung
DE69917007D1 (de)	2004-06-09	Wellenlänge multiplexer/demultilexer optische vorrichtung
DE69724757D1 (de)	2003-10-16	Optische Polarisationsvorrichtung
DE60036049D1 (de)	2007-10-04	Optische vorrichtung
DE19882819T1 (de)	2001-02-22	Optische Empfangsvorrichtung
DE69932563D1 (de)	2006-09-14	Optische Abtastvorrichtung
DE69839961D1 (de)	2008-10-16	Optische querverbindungsvorrichtung
DE69840429D1 (de)	2009-02-26	Optische Abtastvorrichtung
DE69415238D1 (de)	1999-01-28	Optische Wellenleiter-Vorrichtung
DE50009478D1 (de)	2005-03-17	Optische modulationseinrichtung
DE69930584D1 (de)	2006-05-18	Optische Abtastvorrichtung
DE69834003D1 (de)	2006-05-18	Optische Abtastvorrichtung
DE69728708D1 (de)	2004-05-27	Optische Vorrichtung
ATE220218T1 (de)	2002-07-15	Optische vorrichtung
DE69722339D1 (de)	2003-07-03	Optische Vorrichtung
DE69738906D1 (de)	2008-09-25	Optische vorrichtung

Legal Events

Date	Code	Title	Description
2003-10-02	8364	No opposition during term of opposition
2007-11-29	8320	Willingness to grant licences declared (paragraph 23)
2010-06-17	8328	Change in the person/name/address of the agent	Representative=s name: DUSCHER, R., DIPL.-PHYS. DR.RER.NAT., PAT.-ANW., 7