DE69840287D1 - Hochfrequenz-angeregter wellenleiterlaser - Google Patents
Hochfrequenz-angeregter wellenleiterlaserInfo
- Publication number
- DE69840287D1 DE69840287D1 DE69840287T DE69840287T DE69840287D1 DE 69840287 D1 DE69840287 D1 DE 69840287D1 DE 69840287 T DE69840287 T DE 69840287T DE 69840287 T DE69840287 T DE 69840287T DE 69840287 D1 DE69840287 D1 DE 69840287D1
- Authority
- DE
- Germany
- Prior art keywords
- aided
- high frequency
- waveguide laser
- waveguide
- laser
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
- H01S3/02—Constructional details
- H01S3/03—Constructional details of gas laser discharge tubes
- H01S3/0315—Waveguide lasers
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
- H01S3/02—Constructional details
- H01S3/03—Constructional details of gas laser discharge tubes
- H01S3/038—Electrodes, e.g. special shape, configuration or composition
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
- H01S3/05—Construction or shape of optical resonators; Accommodation of active medium therein; Shape of active medium
- H01S3/06—Construction or shape of active medium
- H01S3/07—Construction or shape of active medium consisting of a plurality of parts, e.g. segments
- H01S3/073—Gas lasers comprising separate discharge sections in one cavity, e.g. hybrid lasers
- H01S3/076—Folded-path lasers
Landscapes
- Physics & Mathematics (AREA)
- Electromagnetism (AREA)
- Engineering & Computer Science (AREA)
- Plasma & Fusion (AREA)
- Optics & Photonics (AREA)
- Lasers (AREA)
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US4109297P | 1997-03-14 | 1997-03-14 | |
| PCT/US1998/005055 WO1998040939A1 (en) | 1997-03-14 | 1998-03-13 | Rf excited waveguide laser |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| DE69840287D1 true DE69840287D1 (de) | 2009-01-15 |
Family
ID=21914691
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| DE69840287T Expired - Lifetime DE69840287D1 (de) | 1997-03-14 | 1998-03-13 | Hochfrequenz-angeregter wellenleiterlaser |
Country Status (7)
| Country | Link |
|---|---|
| US (1) | US6192061B1 (de) |
| EP (1) | EP0904616B1 (de) |
| JP (1) | JP3932207B2 (de) |
| AU (1) | AU6939198A (de) |
| CA (1) | CA2252085A1 (de) |
| DE (1) | DE69840287D1 (de) |
| WO (1) | WO1998040939A1 (de) |
Families Citing this family (59)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6522679B1 (en) | 2000-02-22 | 2003-02-18 | Tuilaser | Gas laser discharge unit |
| US6859482B1 (en) | 2000-02-22 | 2005-02-22 | Tuilaser Ag | Modular gas laser discharge unit |
| US6493375B1 (en) | 2000-02-22 | 2002-12-10 | Tuilaser Ag | Adjustable mounting unit for an optical element of a gas laser |
| US6603790B1 (en) | 2000-02-22 | 2003-08-05 | Hans Kodeda | Gas laser and a dedusting unit thereof |
| US6804284B1 (en) * | 2000-02-22 | 2004-10-12 | Tuilaser Ag | Optical element holding and extraction device |
| US6480517B1 (en) | 2000-02-22 | 2002-11-12 | Tuilaser Ag | Shadow device for a gas laser |
| US6782029B1 (en) | 2000-02-22 | 2004-08-24 | Tuilaser Ag | Dedusting unit for a laser optical element of a gas laser and method for assembling |
| US6788722B1 (en) * | 2000-07-10 | 2004-09-07 | Coherent, Inc. | High power waveguide laser |
| US7200161B2 (en) * | 2001-01-22 | 2007-04-03 | The Boeing Company | Side-pumped solid-state disk laser for high-average power |
| US6625193B2 (en) * | 2001-01-22 | 2003-09-23 | The Boeing Company | Side-pumped active mirror solid-state laser for high-average power |
| US6711201B2 (en) * | 2001-03-17 | 2004-03-23 | Peter Vitruk | Truncated ridge waveguide for all-metal gas laser excitation |
| WO2002082600A2 (en) | 2001-04-04 | 2002-10-17 | Coherent Deos | Q-switched cavity dumped co2 laser for material processing |
| US20020167976A1 (en) * | 2001-04-04 | 2002-11-14 | Seguin Vernon A. | Thermally efficient laser head |
| EP1384293B1 (de) * | 2001-04-04 | 2009-12-23 | Coherent Deos | Gütegeschalteter co2 laser für materialbearbeitung |
| TW528636B (en) | 2001-05-09 | 2003-04-21 | Electro Scient Ind Inc | Micromachining with high-energy, intra-cavity Q-switched CO2 laser pulses |
| US6798816B2 (en) * | 2002-10-21 | 2004-09-28 | Coherent, Inc. | Folded tapered-waveguide CO2 laser |
| DE602004027429D1 (de) * | 2003-02-12 | 2010-07-15 | Coherent Gmbh | Elementensatz zur chirurgischen Ablation von Augengewebe |
| US7039079B2 (en) | 2003-03-14 | 2006-05-02 | Coherent, Inc. | Pulsed CO2 laser including an optical damage resistant electro-optical switching arrangement |
| US7113529B2 (en) * | 2003-03-14 | 2006-09-26 | Coherent, Inc. | Pulsed CO2 laser including an optical damage resistant electro-optical switching arrangement |
| US20040188379A1 (en) * | 2003-03-28 | 2004-09-30 | Cabot Microelectronics Corporation | Dielectric-in-dielectric damascene process for manufacturing planar waveguides |
| US7050475B2 (en) * | 2003-05-02 | 2006-05-23 | Litelaser Llc | Waveguide laser |
| US6999490B2 (en) * | 2003-07-21 | 2006-02-14 | Coherent, Inc. | Discharge igniter for a waveguide CO2 laser |
| WO2005070160A2 (en) * | 2004-01-12 | 2005-08-04 | Litelaser L.L.C. | Multi-path laser system |
| US7260134B2 (en) * | 2004-02-06 | 2007-08-21 | Coherent, Inc. | Dielectric coupled CO2 slab laser |
| US7263116B2 (en) * | 2004-08-05 | 2007-08-28 | Coherent, Inc. | Dielectric coupled CO2 slab laser |
| US7583717B2 (en) * | 2004-08-30 | 2009-09-01 | Videojet Technologies Inc | Laser system |
| US7310360B2 (en) * | 2004-10-25 | 2007-12-18 | The Boeing Company | Apparatus and method for face cooling of optical components of a laser system |
| WO2006049634A1 (en) * | 2004-10-27 | 2006-05-11 | Litelaser L.L.C. | Laser alignment system and method |
| US20070031156A1 (en) * | 2005-07-29 | 2007-02-08 | Robotham W S Jr | Amplification of TTL RF oscillator signals with digital logic and power switching technology for CO2 laser RF power supplies |
| US20070024011A1 (en) * | 2005-07-29 | 2007-02-01 | Raymond Michaud | Thermally stable vacuum enclosure seal design for CO2 lasers |
| US20080002751A1 (en) * | 2005-08-10 | 2008-01-03 | Gongxue Hua | High damage threshold Q-switched CO2 laser |
| US7453918B2 (en) * | 2005-08-11 | 2008-11-18 | Coherent, Inc. | Pulsed RF high pressure CO2 lasers |
| WO2007092235A2 (en) * | 2006-02-03 | 2007-08-16 | Videojet Technologies | Waveguide laser having reduced cross-sectional size and/or reduced optical axis distortion |
| US7570683B1 (en) | 2006-03-01 | 2009-08-04 | Epilog Corporation | Waveguided laser channels for a gas laser |
| US7817684B2 (en) | 2006-11-16 | 2010-10-19 | Ofs Fitel Llc | Passively modelocked figure eight fiber laser |
| US7411989B2 (en) * | 2006-12-13 | 2008-08-12 | Coherent, Inc. | Mechanically Q-switched CO2 laser |
| JP5179793B2 (ja) * | 2007-07-18 | 2013-04-10 | ギガフォトン株式会社 | 極端紫外光源用ドライバレーザ |
| US8942270B2 (en) * | 2008-02-22 | 2015-01-27 | Coherent, Inc. | Diffusion-cooled CO2 laser with flexible housing |
| US7940816B2 (en) | 2008-09-05 | 2011-05-10 | Ofs Fitel Llc | Figure eight fiber laser for ultrashort pulse generation |
| WO2012058685A2 (en) * | 2010-10-29 | 2012-05-03 | Trumpf, Inc. | Rf-excited laser assembly |
| US8422528B2 (en) * | 2011-02-24 | 2013-04-16 | Iradion Laser, Inc. | Ceramic slab, free-space and waveguide lasers |
| US8611391B2 (en) * | 2011-05-03 | 2013-12-17 | Coherent, Inc. | Waveguide CO2 laser with mutiply folded resonator |
| ES2452529T3 (es) | 2011-09-05 | 2014-04-01 | ALLTEC Angewandte Laserlicht Technologie Gesellschaft mit beschränkter Haftung | Dispositivo láser y procedimiento para marcar un objeto |
| DK2565673T3 (da) | 2011-09-05 | 2014-01-06 | Alltec Angewandte Laserlicht Technologie Gmbh | Indretning og fremgangsmåde til markering af et objekt ved hjælp af en laserstråle |
| ES2544034T3 (es) | 2011-09-05 | 2015-08-27 | ALLTEC Angewandte Laserlicht Technologie Gesellschaft mit beschränkter Haftung | Aparato de marcado con al menos un láser de gas y un termodisipador |
| EP2564972B1 (de) * | 2011-09-05 | 2015-08-26 | ALLTEC Angewandte Laserlicht Technologie Gesellschaft mit beschränkter Haftung | Markierungsvorrichtung mith mehreren Lasern, Deflektionmitteln und Telescopikmitteln für jeden Laserstrahl |
| ES2530069T3 (es) * | 2011-09-05 | 2015-02-26 | ALLTEC Angewandte Laserlicht Technologie Gesellschaft mit beschränkter Haftung | Aparato de marcado con una pluralidad de láseres y un dispositivo de desviación de combinación |
| EP2564974B1 (de) * | 2011-09-05 | 2015-06-17 | ALLTEC Angewandte Laserlicht Technologie Gesellschaft mit beschränkter Haftung | Markierungsvorrichtung mit mehreren Resonatorröhren aufweisenden Gas-Lasern und einzel justierbaren Deflektoren |
| EP2564975B1 (de) * | 2011-09-05 | 2014-12-10 | ALLTEC Angewandte Laserlicht Technologie Gesellschaft mit beschränkter Haftung | Markierungsvorrichtung mit mehreren Lasern und individuell justierbaren Deflektionsmitteln |
| EP2565996B1 (de) | 2011-09-05 | 2013-12-11 | ALLTEC Angewandte Laserlicht Technologie Gesellschaft mit beschränkter Haftung | Lasergerät mit Lasereinheit und Flüssigkeitsbehälter für eine Kühlvorrichtung dieser Lasereinheit |
| JP2012164666A (ja) * | 2012-03-29 | 2012-08-30 | Komatsu Ltd | 極端紫外光源用ドライバレーザのレーザ増幅器 |
| US9281651B2 (en) * | 2014-04-30 | 2016-03-08 | Gsi Group Corporation | Laser resonator with parasitic mode suppression |
| US9231362B2 (en) | 2014-06-06 | 2016-01-05 | Synrad, Inc. | Multi-pass slab laser with internal beam shaping |
| CN105048256B (zh) * | 2015-09-23 | 2017-10-20 | 江苏卓远激光科技有限公司 | 一种激光器电极板活动安装式结构 |
| CA3089935A1 (en) | 2018-01-29 | 2019-08-01 | IDEA machine development design AND production ltd. | Compact coaxial laser |
| US10644474B2 (en) | 2018-03-07 | 2020-05-05 | Coherent, Inc. | Conductively-cooled slab laser |
| US12444897B2 (en) | 2019-07-31 | 2025-10-14 | IDEA machine development design AND production ltd. | Disc laser |
| KR102792195B1 (ko) * | 2019-11-25 | 2025-04-04 | 루머스 리미티드 | 도파관의 표면을 폴리싱하는 방법 |
| WO2021158396A1 (en) | 2020-02-05 | 2021-08-12 | Coherent, Inc. | Radio-frequency excited gas laser |
Family Cites Families (16)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4064465A (en) * | 1973-05-30 | 1977-12-20 | Westinghouse Electric Corporation | Laser cavities with gas flow through the electrodes |
| US4493087A (en) * | 1979-12-13 | 1985-01-08 | Walwel, Inc. | RF Excited waveguide gas laser |
| US4438514A (en) | 1982-02-16 | 1984-03-20 | United Technologies Corporation | Sure-start waveguide laser |
| US4577323A (en) * | 1983-09-06 | 1986-03-18 | United Technologies Corporation | U Channel waveguide laser |
| US4870654A (en) * | 1987-05-22 | 1989-09-26 | California Laboratories, Inc. | Generation of multiply folded optical paths |
| US4807233A (en) * | 1987-12-28 | 1989-02-21 | United Technologies Corporation | Phase locked cusp-shaped dielectric ridge gas laser |
| US4807232A (en) * | 1987-12-28 | 1989-02-21 | United Technologies Corporation | Phase locked staggered dielectric ridge array waveguide gas laser |
| US4807234A (en) * | 1987-12-28 | 1989-02-21 | United Technologies Corporation | Phase locked alternating dielectric ridge gas laser |
| US4787090A (en) | 1988-03-28 | 1988-11-22 | United Technologies Corporation | Compact distributed inductance RF-excited waveguide gas laser arrangement |
| JPH021998A (ja) * | 1988-06-10 | 1990-01-08 | Toshiba Corp | ガスレーザー装置 |
| US4837769A (en) | 1989-02-01 | 1989-06-06 | The United States Of America As Represented By The Secretary Of The Army | Phase conjugated slab laser designator |
| US5321717A (en) * | 1993-04-05 | 1994-06-14 | Yoshifumi Adachi | Diode laser having minimal beam diameter and optics |
| US5353297A (en) * | 1993-07-12 | 1994-10-04 | Coherent, Inc. | Gas slab laser with folded resonator structure |
| JP2908677B2 (ja) * | 1993-10-15 | 1999-06-21 | 株式会社ケンウッド | 光学式ピックアップの対物レンズ姿勢調整機構 |
| US5467362A (en) | 1994-08-03 | 1995-11-14 | Murray; Gordon A. | Pulsed gas discharge Xray laser |
| US5663980A (en) * | 1995-05-22 | 1997-09-02 | Adachi; Yoshi | Semiconductor laser device having changeable wavelength, polarization mode, and beam shape image |
-
1998
- 1998-03-13 AU AU69391/98A patent/AU6939198A/en not_active Abandoned
- 1998-03-13 JP JP53988798A patent/JP3932207B2/ja not_active Expired - Lifetime
- 1998-03-13 WO PCT/US1998/005055 patent/WO1998040939A1/en not_active Ceased
- 1998-03-13 EP EP98915138A patent/EP0904616B1/de not_active Expired - Lifetime
- 1998-03-13 US US09/039,036 patent/US6192061B1/en not_active Expired - Lifetime
- 1998-03-13 CA CA002252085A patent/CA2252085A1/en not_active Abandoned
- 1998-03-13 DE DE69840287T patent/DE69840287D1/de not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| EP0904616A4 (de) | 2003-11-05 |
| AU6939198A (en) | 1998-09-29 |
| CA2252085A1 (en) | 1998-09-17 |
| JP3932207B2 (ja) | 2007-06-20 |
| US6192061B1 (en) | 2001-02-20 |
| EP0904616A1 (de) | 1999-03-31 |
| WO1998040939A1 (en) | 1998-09-17 |
| EP0904616B1 (de) | 2008-12-03 |
| JP2000511005A (ja) | 2000-08-22 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| 8364 | No opposition during term of opposition | ||
| R082 | Change of representative |
Ref document number: 904616 Country of ref document: EP Representative=s name: MEHLER ACHLER PATENTANWAELTE, 65185 WIESBADEN, DE |