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DE69810683D1 - Kurzbogenentladungslampe - Google Patents

Kurzbogenentladungslampe

Info

Publication number
DE69810683D1
DE69810683D1 DE69810683T DE69810683T DE69810683D1 DE 69810683 D1 DE69810683 D1 DE 69810683D1 DE 69810683 T DE69810683 T DE 69810683T DE 69810683 T DE69810683 T DE 69810683T DE 69810683 D1 DE69810683 D1 DE 69810683D1
Authority
DE
Germany
Prior art keywords
short
discharge lamp
arc discharge
arc
lamp
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE69810683T
Other languages
English (en)
Other versions
DE69810683T2 (de
Inventor
Akiyasu Yamaguchi
Masanori Sugihara
Shinkichi Morimoto
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Ushio Denki KK
Original Assignee
Ushio Denki KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ushio Denki KK filed Critical Ushio Denki KK
Publication of DE69810683D1 publication Critical patent/DE69810683D1/de
Application granted granted Critical
Publication of DE69810683T2 publication Critical patent/DE69810683T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70008—Production of exposure light, i.e. light sources
    • G03F7/70016—Production of exposure light, i.e. light sources by discharge lamps
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J61/00—Gas-discharge or vapour-discharge lamps
    • H01J61/02—Details
    • H01J61/04—Electrodes; Screens; Shields
    • H01J61/06—Main electrodes
    • H01J61/073—Main electrodes for high-pressure discharge lamps
    • H01J61/0732—Main electrodes for high-pressure discharge lamps characterised by the construction of the electrode
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J61/00—Gas-discharge or vapour-discharge lamps
    • H01J61/84—Lamps with discharge constricted by high pressure
    • H01J61/86—Lamps with discharge constricted by high pressure with discharge additionally constricted by close spacing of electrodes, e.g. for optical projection

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • General Physics & Mathematics (AREA)
  • Discharge Lamp (AREA)
  • Discharge Lamps And Accessories Thereof (AREA)
  • Vessels And Coating Films For Discharge Lamps (AREA)
DE69810683T 1997-03-18 1998-03-12 Kurzbogenentladungslampe Expired - Lifetime DE69810683T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP08338697A JP3298453B2 (ja) 1997-03-18 1997-03-18 ショートアーク型放電ランプ

Publications (2)

Publication Number Publication Date
DE69810683D1 true DE69810683D1 (de) 2003-02-20
DE69810683T2 DE69810683T2 (de) 2003-09-18

Family

ID=13800992

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69810683T Expired - Lifetime DE69810683T2 (de) 1997-03-18 1998-03-12 Kurzbogenentladungslampe

Country Status (6)

Country Link
US (1) US6107741A (de)
EP (1) EP0866492B1 (de)
JP (1) JP3298453B2 (de)
KR (1) KR100499618B1 (de)
DE (1) DE69810683T2 (de)
TW (1) TW385478B (de)

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2857137B1 (ja) * 1997-12-25 1999-02-10 ウシオ電機株式会社 ショートアーク型水銀ランプ
JP3065581B2 (ja) * 1998-03-24 2000-07-17 ウシオ電機株式会社 ショートアーク型水銀ランプ、および紫外線発光装置
WO2003001563A1 (en) * 2001-06-25 2003-01-03 Koninklijke Philips Electronics N.V. High-pressure gas discharge lamp and method of manufacturing the same
DE10209426A1 (de) 2002-03-05 2003-09-18 Patent Treuhand Ges Fuer Elektrische Gluehlampen Mbh Kurzbogen-Hochdruckentladungslampe
JP4042605B2 (ja) * 2003-03-31 2008-02-06 ウシオ電機株式会社 キセノンランプ
US20060175973A1 (en) * 2005-02-07 2006-08-10 Lisitsyn Igor V Xenon lamp
JP5363174B2 (ja) * 2009-04-10 2013-12-11 株式会社ユメックス ショートアーク型放電灯
JP5856380B2 (ja) * 2011-03-04 2016-02-09 岩崎電気株式会社 ショートアーク型放電ランプ

Family Cites Families (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5550565A (en) * 1978-10-06 1980-04-12 Toshiba Corp Super high voltage discharging lamp
JPS5754211Y2 (de) * 1978-12-07 1982-11-24
JPS6017849A (ja) * 1983-07-08 1985-01-29 Toshiba Corp 小形金属蒸気放電灯
JPS6056346A (ja) * 1983-09-08 1985-04-01 Ushio Inc 半導体露光装置
JPS6247941A (ja) * 1985-08-28 1987-03-02 Toshiba Corp 小形高圧金属蒸気放電灯
JPH02304857A (ja) * 1989-05-19 1990-12-18 Ushio Inc ショートアーク型高圧水銀蒸気ランプ
US5083059A (en) * 1990-12-31 1992-01-21 Welch Allyn, Inc. Electrode for metal halide discharge lamp
US5239230A (en) * 1992-03-27 1993-08-24 General Electric Company High brightness discharge light source
JPH07235281A (ja) * 1994-02-23 1995-09-05 Toshiba Lighting & Technol Corp 直流放電灯および該放電灯を用いた半導体露光装置並びに映写装置
US5539273A (en) * 1994-06-29 1996-07-23 Welch Allyn, Inc. Etched electrode for metal halide discharge lamps
DE69527491T2 (de) * 1994-11-25 2003-02-20 Ushiodenki Kabushiki Kaisha, Tokio/Tokyo Metallhalogenidlampe vom Kurz-Bogen Typ
JP3077538B2 (ja) * 1994-11-29 2000-08-14 ウシオ電機株式会社 ショートアーク型水銀ランプ
JP3158972B2 (ja) * 1995-06-26 2001-04-23 ウシオ電機株式会社 ショートアーク型水銀ランプ及びその点灯方法

Also Published As

Publication number Publication date
JP3298453B2 (ja) 2002-07-02
US6107741A (en) 2000-08-22
KR100499618B1 (ko) 2005-10-24
KR19980080433A (ko) 1998-11-25
TW385478B (en) 2000-03-21
JPH10261383A (ja) 1998-09-29
EP0866492A3 (de) 1999-02-03
EP0866492B1 (de) 2003-01-15
DE69810683T2 (de) 2003-09-18
EP0866492A2 (de) 1998-09-23

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition