DE69533700D1 - Beheitztes fluidumregelventil - Google Patents

Beheitztes fluidumregelventil

Info

Publication number: DE69533700D1
Authority: DE; Germany
Prior art keywords: control valve; fluid control; heated fluid; heated; valve
Prior art date: 1994-07-18
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.): Expired - Fee Related

Application number

DE69533700T

Other languages

English (en)

Other versions

DE69533700T2 (de

Inventor

D Ericson

Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)

MKS Instruments Inc

Original Assignee

MKS Instruments Inc

Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)

1994-07-18

Filing date

1995-07-11

Publication date

2004-12-02

1995-07-11 Application filed by MKS Instruments Inc filed Critical MKS Instruments Inc

2004-12-02 Publication of DE69533700D1 publication Critical patent/DE69533700D1/de

2005-04-28 Application granted granted Critical

2005-04-28 Publication of DE69533700T2 publication Critical patent/DE69533700T2/de

2015-07-12 Anticipated expiration legal-status Critical

Status Expired - Fee Related legal-status Critical Current

Classifications

- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K49/00—Means in or on valves for heating or cooling
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K49/00—Means in or on valves for heating or cooling
- F16K49/002—Electric heating means
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T137/00—Fluid handling
- Y10T137/6416—With heating or cooling of the system
- Y10T137/6606—With electric heating element

Landscapes

Engineering & Computer Science (AREA)
General Engineering & Computer Science (AREA)
Mechanical Engineering (AREA)
Lift Valve (AREA)
Temperature-Responsive Valves (AREA)
Details Of Valves (AREA)

DE69533700T 1994-07-18 1995-07-11 Beheitztes Fluidumregelventil Expired - Fee Related DE69533700T2 (de)

Applications Claiming Priority (3)

Application Number	Priority Date	Filing Date	Title
US08/276,558 US5485542A (en)	1994-07-18	1994-07-18	Heated fluid control valve with electric heating element and thermocouple wiring disposed in rotatable shaft
US276558		1994-07-18
PCT/US1995/008647 WO1996003012A1 (en)	1994-07-18	1995-07-11	Heated fluid control valves

Publications (2)

Publication Number	Publication Date
DE69533700D1 true DE69533700D1 (de)	2004-12-02
DE69533700T2 DE69533700T2 (de)	2005-04-28

Family

ID=23057116

Family Applications (1)

Application Number	Title	Priority Date	Filing Date
DE69533700T Expired - Fee Related DE69533700T2 (de)	1994-07-18	1995-07-11	Beheitztes Fluidumregelventil

Country Status (7)

Country	Link
US (1)	US5485542A (de)
EP (1)	EP0771516B1 (de)
JP (1)	JPH10502995A (de)
KR (1)	KR100253698B1 (de)
CA (1)	CA2195080A1 (de)
DE (1)	DE69533700T2 (de)
WO (1)	WO1996003012A1 (de)

Families Citing this family (29)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
US5837970A (en) *	1995-04-20	1998-11-17	Jilek; Gerard T.	Method and apparatus for controlled delivery of heat energy into a mechanical device
KR100189981B1 (ko) *	1995-11-21	1999-06-01	윤종용	진공 시스템을 구비한 반도체 소자 제조장치
US6076359A (en) *	1996-11-25	2000-06-20	American Air Liquide Inc.	System and method for controlled delivery of liquified gases
US6104011A (en) *	1997-09-04	2000-08-15	Watlow Electric Manufacturing Company	Sheathed thermocouple with internal coiled wires
JP3915083B2 (ja) *	1998-05-20	2007-05-16	Ｓｍｃ株式会社	高真空バルブ
JP3439121B2 (ja) *	1998-06-08	2003-08-25	重高賢治郎	真空装置のバルブ
DE29911713U1 (de) *	1999-07-06	2000-08-31	Fritz Eichenauer GmbH & Co. KG Fabrik elektr. Spezialartikel, 76870 Kandel	Heizeinrichtung für Fluide
JP3390708B2 (ja) *	1999-11-22	2003-03-31	メガトール株式会社	広帯域可変コンダクタンスバルブ
DE10007611A1 (de) *	2000-02-18	2001-08-23	Mannesmann Vdo Ag	Drosselklappenstutzen
WO2001075341A2 (en)	2000-03-31	2001-10-11	Mks Instruments, Inc.	Butterfly valve
US6439255B1 (en)	2000-11-17	2002-08-27	Mks Instruments, Inc.	Valve flapper with dynamic circumference seal
US6296007B1 (en) *	2001-02-14	2001-10-02	Joseph Cifune	Heated valve for operation in freezing conditions
JP4596409B2 (ja)	2003-04-21	2010-12-08	株式会社東京技術研究所	バルブ装着用ヒータユニット
JP4171670B2 (ja) *	2003-05-26	2008-10-22	株式会社東京技術研究所	ヒータユニットの製造方法
US8029454B2 (en)	2003-11-05	2011-10-04	Baxter International Inc.	High convection home hemodialysis/hemofiltration and sorbent system
US8078333B2 (en)	2007-07-05	2011-12-13	Baxter International Inc.	Dialysis fluid heating algorithms
TWI431213B (zh) *	2008-08-06	2014-03-21	開滋Ｓｃｔ股份有限公司	蝶形壓力控制閥
JP5664846B2 (ja) *	2010-05-25	2015-02-04	Smc株式会社	真空用バルブ
US8833383B2 (en)	2011-07-20	2014-09-16	Ferrotec (Usa) Corporation	Multi-vane throttle valve
US9133960B2 (en) *	2013-01-29	2015-09-15	Mks Instruments, Inc.	Fluid control valves
US20150147054A1 (en) *	2013-11-25	2015-05-28	Ironman Valve Heaters, Llc	Heater and Heating System
US9745184B2 (en)	2014-09-10	2017-08-29	Acertacorp LLC	Fluid dispensing apparatus with pre-heated valve
US10415720B2 (en) *	2015-09-22	2019-09-17	AdelWiggins Group, a Division of Transdigm Inc.	Automatic fill system
CN105422877A (zh) *	2015-12-24	2016-03-23	百吉瑞（天津）新能源有限公司	一种适用于熔盐工质的防凝式高温蝶阀
DE102016205696A1 (de) *	2016-04-06	2017-10-12	Volkswagen Ag	Ventil und Brennstoffzelle mit einem solchen
US20170350322A1 (en) *	2016-06-02	2017-12-07	Hamilton Sundstrand Corporation	Heated starter air valve
EP3938691A4 (de) *	2019-04-22	2023-03-15	MKS Instruments, Inc.	Beheizte drosselklappenvorrichtung und verfahren zu ihrer verwendung und herstellung
CN114857282B (zh) *	2021-02-04	2025-10-28	中国科学院微电子研究所	一种节流阀、处理腔室及半导体处理设备
JP7605781B2 (ja) *	2022-03-08	2024-12-24	Ckd株式会社	圧力制御バルブ

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
US2680449A (en) *	1950-03-08	1954-06-08	Ohio Commw Eng Co	Lubricated plug valve
US3180350A (en) *	1962-04-20	1965-04-27	Gen Motors Corp	Mixing apparatus
US3938544A (en) *	1974-05-28	1976-02-17	Bernaerts Henry J	Valve with heat transport monitor for leakage determining rate
JPS58131476A (ja) *	1982-01-28	1983-08-05	Shuichi Nakagawa	セラミツク製バルブ
US4715400A (en) *	1983-03-09	1987-12-29	Xomox Corporation	Valve and method of making same
JP3274895B2 (ja) *	1992-12-02	2002-04-15	ミリポア・コーポレイション	スロットルバルブ

1994
- 1994-07-18 US US08/276,558 patent/US5485542A/en not_active Expired - Lifetime
1995
- 1995-07-11 DE DE69533700T patent/DE69533700T2/de not_active Expired - Fee Related
- 1995-07-11 EP EP95927132A patent/EP0771516B1/de not_active Expired - Lifetime
- 1995-07-11 WO PCT/US1995/008647 patent/WO1996003012A1/en not_active Ceased
- 1995-07-11 CA CA002195080A patent/CA2195080A1/en not_active Abandoned
- 1995-07-11 KR KR1019970700334A patent/KR100253698B1/ko not_active Expired - Fee Related
- 1995-07-11 JP JP8505093A patent/JPH10502995A/ja not_active Ceased

Also Published As

Publication number	Publication date
WO1996003012A1 (en)	1996-02-01
EP0771516A4 (de)	1998-02-25
US5485542A (en)	1996-01-16
CA2195080A1 (en)	1996-02-01
JPH10502995A (ja)	1998-03-17
KR970705327A (ko)	1997-09-06
EP0771516B1 (de)	2004-10-27
DE69533700T2 (de)	2005-04-28
KR100253698B1 (ko)	2000-04-15
EP0771516A1 (de)	1997-05-07

Publication	Publication Date	Title
DE69533700D1 (de)	2004-12-02	Beheitztes fluidumregelventil
DE69530909D1 (de)	2003-07-03	Flüssigkeitsflussregler
DE59510003D1 (de)	2002-02-21	Druckregelventil
DE59505726D1 (de)	1999-05-27	Druckregelventil
DE69709529D1 (de)	2002-02-14	Durchflussregelventil
DE69400742D1 (de)	1996-11-21	Durchflussregelventil
FI962660A7 (fi)	1996-12-29	Läpivirtauksen säätöventtiili
DE69516754D1 (de)	2000-06-15	Fluidventil
DE69515277D1 (de)	2000-04-06	Wegeventil
DE69718016D1 (de)	2003-01-30	Verbessertes fluidkontrollventil
DE69304039D1 (de)	1996-09-19	Stromregelventil
DE69408626D1 (de)	1998-04-02	Durchfluss-Steuerventil
DE69431876D1 (de)	2003-01-23	Schaltventil
DE69510153D1 (de)	1999-07-15	Steuerventil mit veränderlicher Priorität
DK0621427T3 (da)	1996-10-07	Mængdereguleringsventil
DE59605471D1 (de)	2000-07-27	Stromregelventil
DE69411008D1 (de)	1998-07-16	Durchflussregelventil
DE59506286D1 (de)	1999-07-29	Druckregelventil
DE69509487D1 (de)	1999-06-10	Ventilsteuerungsvorrichtung
DE59604460D1 (de)	2000-03-23	Flussregelventil
DE69407704D1 (de)	1998-02-12	Durchflussregelventil
DE69528976D1 (de)	2003-01-09	Regelungsventil
DE69524582D1 (de)	2002-01-24	Richtungssteuerventil
DE69715111D1 (de)	2002-10-10	Durchflussregelventil
DE69725486D1 (de)	2003-11-20	Durchflussregelventil

Legal Events

Date	Code	Title	Description
2005-11-24	8364	No opposition during term of opposition
2006-03-16	8328	Change in the person/name/address of the agent	Representative=s name: SCHROETER, M., DIPL.-ING., PAT.-ANW., 58636 ISERLOH
2009-06-04	8339	Ceased/non-payment of the annual fee