DE69532624D1 - Thermisches Detektorelement - Google Patents
Thermisches DetektorelementInfo
- Publication number
- DE69532624D1 DE69532624D1 DE69532624T DE69532624T DE69532624D1 DE 69532624 D1 DE69532624 D1 DE 69532624D1 DE 69532624 T DE69532624 T DE 69532624T DE 69532624 T DE69532624 T DE 69532624T DE 69532624 D1 DE69532624 D1 DE 69532624D1
- Authority
- DE
- Germany
- Prior art keywords
- detector element
- thermal detector
- thermal
- detector
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R21/00—Arrangements for measuring electric power or power factor
- G01R21/02—Arrangements for measuring electric power or power factor by thermal methods, e.g. calorimetric
Landscapes
- Engineering & Computer Science (AREA)
- Power Engineering (AREA)
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Fire-Detection Mechanisms (AREA)
- Investigating Or Analyzing Materials Using Thermal Means (AREA)
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US08/364,626 US5550526A (en) | 1994-12-27 | 1994-12-27 | Thermal detection elements with heater |
| US364626 | 1999-07-29 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| DE69532624D1 true DE69532624D1 (de) | 2004-04-08 |
| DE69532624T2 DE69532624T2 (de) | 2005-02-10 |
Family
ID=23435357
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| DE69532624T Expired - Lifetime DE69532624T2 (de) | 1994-12-27 | 1995-12-11 | Thermisches Detektorelement |
Country Status (4)
| Country | Link |
|---|---|
| US (1) | US5550526A (de) |
| EP (1) | EP0720022B1 (de) |
| JP (1) | JPH08233664A (de) |
| DE (1) | DE69532624T2 (de) |
Families Citing this family (11)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2812929B2 (ja) * | 1996-11-27 | 1998-10-22 | 三立電機株式会社 | 鑑賞用水槽の水中ヒータ |
| US6744346B1 (en) * | 1998-02-27 | 2004-06-01 | Micron Technology, Inc. | Electronic device workpieces, methods of semiconductor processing and methods of sensing temperature of an electronic device workpiece |
| US6967497B1 (en) | 1998-08-21 | 2005-11-22 | Micron Technology, Inc. | Wafer processing apparatuses and electronic device workpiece processing apparatuses |
| US6229322B1 (en) * | 1998-08-21 | 2001-05-08 | Micron Technology, Inc. | Electronic device workpiece processing apparatus and method of communicating signals within an electronic device workpiece processing apparatus |
| US7109842B1 (en) * | 1998-12-07 | 2006-09-19 | Honeywell International Inc. | Robust fluid flow and property microsensor made of optimal material |
| US6794981B2 (en) | 1998-12-07 | 2004-09-21 | Honeywell International Inc. | Integratable-fluid flow and property microsensor assembly |
| EP1446634A4 (de) * | 2001-10-26 | 2010-04-07 | Univ Rochester | Verfahren zur biomolekularen messung und system dafür |
| AU2003232085A1 (en) * | 2002-05-09 | 2003-11-11 | Harmonics, Inc | Tapecast electro-conductive cermets for high temperature resistive heating systems |
| US7670045B2 (en) | 2004-06-18 | 2010-03-02 | Raytheon Company | Microstrip power sensor |
| US10168365B2 (en) | 2013-02-22 | 2019-01-01 | Bird Technologies Group Inc. | Microfabricated calorimeter for RF power measurement |
| CN112654134A (zh) * | 2020-11-10 | 2021-04-13 | 深圳可瑞高新材料股份有限公司 | 一种热传感器基板及热传感器 |
Family Cites Families (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE3539402A1 (de) * | 1985-11-07 | 1987-05-21 | Rohde & Schwarz | Leistungsmesssensor zum messen von hochfrequenzleistung |
| US4866559A (en) * | 1988-07-26 | 1989-09-12 | Texas Instruments Incorporated | Solid state circuit protector |
| US5140394A (en) * | 1988-07-26 | 1992-08-18 | Texas Instruments Incorporated | Electrothermal sensor apparatus |
| US5057811A (en) * | 1988-12-22 | 1991-10-15 | Texas Instruments Incorporated | Electrothermal sensor |
| US5370458A (en) * | 1990-10-09 | 1994-12-06 | Lockheed Sanders, Inc. | Monolithic microwave power sensor |
| US5302024A (en) * | 1990-10-09 | 1994-04-12 | Lockheed Sanders, Inc. | Monolithic microwave power sensor using a heat sensing diode junction |
-
1994
- 1994-12-27 US US08/364,626 patent/US5550526A/en not_active Expired - Lifetime
-
1995
- 1995-12-11 DE DE69532624T patent/DE69532624T2/de not_active Expired - Lifetime
- 1995-12-11 EP EP95308959A patent/EP0720022B1/de not_active Expired - Lifetime
- 1995-12-25 JP JP7336265A patent/JPH08233664A/ja not_active Withdrawn
Also Published As
| Publication number | Publication date |
|---|---|
| EP0720022A1 (de) | 1996-07-03 |
| US5550526A (en) | 1996-08-27 |
| DE69532624T2 (de) | 2005-02-10 |
| JPH08233664A (ja) | 1996-09-13 |
| EP0720022B1 (de) | 2004-03-03 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| 8364 | No opposition during term of opposition |