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DE69527969D1 - Verfahren zur verklebung einer optischen membranaddeckung für rahmen - Google Patents

Verfahren zur verklebung einer optischen membranaddeckung für rahmen

Info

Publication number
DE69527969D1
DE69527969D1 DE69527969T DE69527969T DE69527969D1 DE 69527969 D1 DE69527969 D1 DE 69527969D1 DE 69527969 T DE69527969 T DE 69527969T DE 69527969 T DE69527969 T DE 69527969T DE 69527969 D1 DE69527969 D1 DE 69527969D1
Authority
DE
Germany
Prior art keywords
component
frame
resin
initiator
gluing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE69527969T
Other languages
German (de)
English (en)
Inventor
Ching-Bore Wang
Ysung-Tsai Yen
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Micro Lithography Inc
Original Assignee
Micro Lithography Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Micro Lithography Inc filed Critical Micro Lithography Inc
Application granted granted Critical
Publication of DE69527969D1 publication Critical patent/DE69527969D1/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • CCHEMISTRY; METALLURGY
    • C08ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08JWORKING-UP; GENERAL PROCESSES OF COMPOUNDING; AFTER-TREATMENT NOT COVERED BY SUBCLASSES C08B, C08C, C08F, C08G or C08H
    • C08J5/00Manufacture of articles or shaped materials containing macromolecular substances
    • C08J5/12Bonding of a preformed macromolecular material to the same or other solid material such as metal, glass, leather, e.g. using adhesives
    • C08J5/124Bonding of a preformed macromolecular material to the same or other solid material such as metal, glass, leather, e.g. using adhesives using adhesives based on a macromolecular component
    • GPHYSICS
    • G03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03FPHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F1/00Originals for photomechanical production of textured or patterned surfaces, e.g., masks, photo-masks, reticles; Mask blanks or pellicles therefor; Containers specially adapted therefor; Preparation thereof
    • G03F1/62Pellicles, e.g. pellicle assemblies, e.g. having membrane on support frame; Preparation thereof
    • G03F1/64Pellicles, e.g. pellicle assemblies, e.g. having membrane on support frame; Preparation thereof characterised by the frames, e.g. structure or material, including bonding means therefor
    • CCHEMISTRY; METALLURGY
    • C08ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08JWORKING-UP; GENERAL PROCESSES OF COMPOUNDING; AFTER-TREATMENT NOT COVERED BY SUBCLASSES C08B, C08C, C08F, C08G or C08H
    • C08J2327/00Characterised by the use of homopolymers or copolymers of compounds having one or more unsaturated aliphatic radicals, each having only one carbon-to-carbon double bond, and at least one being terminated by a halogen; Derivatives of such polymers
    • C08J2327/02Characterised by the use of homopolymers or copolymers of compounds having one or more unsaturated aliphatic radicals, each having only one carbon-to-carbon double bond, and at least one being terminated by a halogen; Derivatives of such polymers not modified by chemical after-treatment
    • C08J2327/12Characterised by the use of homopolymers or copolymers of compounds having one or more unsaturated aliphatic radicals, each having only one carbon-to-carbon double bond, and at least one being terminated by a halogen; Derivatives of such polymers not modified by chemical after-treatment containing fluorine atoms

Landscapes

  • Chemical & Material Sciences (AREA)
  • Medicinal Chemistry (AREA)
  • Manufacturing & Machinery (AREA)
  • Materials Engineering (AREA)
  • Health & Medical Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Polymers & Plastics (AREA)
  • Organic Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Adhesives Or Adhesive Processes (AREA)
  • Preparing Plates And Mask In Photomechanical Process (AREA)
  • Closing Of Containers (AREA)
DE69527969T 1994-09-22 1995-09-22 Verfahren zur verklebung einer optischen membranaddeckung für rahmen Expired - Lifetime DE69527969D1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US31053594A 1994-09-22 1994-09-22
PCT/US1995/012079 WO1996009183A1 (fr) 1994-09-22 1995-09-22 Procede de collage d'une membrane de pellicule optique sur un cadre

Publications (1)

Publication Number Publication Date
DE69527969D1 true DE69527969D1 (de) 2002-10-02

Family

ID=23202949

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69527969T Expired - Lifetime DE69527969D1 (de) 1994-09-22 1995-09-22 Verfahren zur verklebung einer optischen membranaddeckung für rahmen

Country Status (6)

Country Link
EP (1) EP0778804B1 (fr)
JP (1) JP3405732B2 (fr)
AT (1) ATE222863T1 (fr)
AU (1) AU3595295A (fr)
DE (1) DE69527969D1 (fr)
WO (1) WO1996009183A1 (fr)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7060774B2 (en) * 2002-02-28 2006-06-13 Merck Patent Gesellschaft Prepolymer material, polymer material, imprinting process and their use
US8711484B2 (en) 2008-05-06 2014-04-29 Hewlett-Packard Development Company, L.P. Fabrication of thin pellicle beam splitters
KR101990345B1 (ko) * 2009-10-02 2019-06-18 신에쓰 가가꾸 고교 가부시끼가이샤 펠리클의 제조 방법

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4985473A (en) * 1980-05-20 1991-01-15 Minnesota Mining And Manufacturing Company Compositions for providing abherent coatings
US5168001A (en) * 1991-05-20 1992-12-01 E. I. Du Pont De Nemours And Company Perfluoropolymer coated pellicle

Also Published As

Publication number Publication date
EP0778804B1 (fr) 2002-08-28
EP0778804A1 (fr) 1997-06-18
JP3405732B2 (ja) 2003-05-12
WO1996009183A1 (fr) 1996-03-28
JPH10509989A (ja) 1998-09-29
ATE222863T1 (de) 2002-09-15
AU3595295A (en) 1996-04-09
EP0778804A4 (fr) 1998-01-07

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Legal Events

Date Code Title Description
8332 No legal effect for de