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DE69512354D1 - Verfahren zur optischen Projektionsbelichtung - Google Patents

Verfahren zur optischen Projektionsbelichtung

Info

Publication number
DE69512354D1
DE69512354D1 DE69512354T DE69512354T DE69512354D1 DE 69512354 D1 DE69512354 D1 DE 69512354D1 DE 69512354 T DE69512354 T DE 69512354T DE 69512354 T DE69512354 T DE 69512354T DE 69512354 D1 DE69512354 D1 DE 69512354D1
Authority
DE
Germany
Prior art keywords
exposure method
projection exposure
optical projection
optical
projection
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69512354T
Other languages
English (en)
Other versions
DE69512354T2 (de
Inventor
Atsushi Someya
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sony Corp
Original Assignee
Sony Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sony Corp filed Critical Sony Corp
Application granted granted Critical
Publication of DE69512354D1 publication Critical patent/DE69512354D1/de
Publication of DE69512354T2 publication Critical patent/DE69512354T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/20—Exposure; Apparatus therefor
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70216—Mask projection systems
    • G03F7/70325—Resolution enhancement techniques not otherwise provided for, e.g. darkfield imaging, interfering beams, spatial frequency multiplication, nearfield lenses or solid immersion lenses
    • G03F7/70333—Focus drilling, i.e. increase in depth of focus for exposure by modulating focus during exposure [FLEX]
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70216—Mask projection systems
    • G03F7/70358—Scanning exposure, i.e. relative movement of patterned beam and workpiece during imaging

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
DE69512354T 1994-11-28 1995-11-24 Verfahren zur optischen Projektionsbelichtung Expired - Fee Related DE69512354T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6293468A JPH08153661A (ja) 1994-11-28 1994-11-28 投影露光方法

Publications (2)

Publication Number Publication Date
DE69512354D1 true DE69512354D1 (de) 1999-10-28
DE69512354T2 DE69512354T2 (de) 2000-03-23

Family

ID=17795144

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69512354T Expired - Fee Related DE69512354T2 (de) 1994-11-28 1995-11-24 Verfahren zur optischen Projektionsbelichtung

Country Status (5)

Country Link
US (1) US5883700A (de)
EP (1) EP0715213B1 (de)
JP (1) JPH08153661A (de)
KR (1) KR960018770A (de)
DE (1) DE69512354T2 (de)

Families Citing this family (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3159163B2 (ja) 1998-04-06 2001-04-23 日本電気株式会社 走査露光方法及び走査露光装置
JP3363787B2 (ja) * 1998-05-02 2003-01-08 キヤノン株式会社 露光方法および露光装置
US6586160B2 (en) 2001-03-26 2003-07-01 Motorola, Inc. Method for patterning resist
US6784975B2 (en) * 2001-08-30 2004-08-31 Micron Technology, Inc. Method and apparatus for irradiating a microlithographic substrate
US6794100B2 (en) * 2001-08-30 2004-09-21 Micron Technology, Inc. Method for controlling radiation beam intensity directed to microlithographic substrates
US6894765B2 (en) * 2003-10-14 2005-05-17 Micron Technology, Inc. Methods and systems for controlling radiation beam characteristics for microlithographic processing
EP1524557A1 (de) * 2003-10-15 2005-04-20 ASML Netherlands B.V. Lithographischer Apparat und Methode zur Herstellung einer Vorrichtung
US7446855B2 (en) * 2005-07-25 2008-11-04 Micron Technology, Inc Methods and apparatuses for configuring radiation in microlithographic processing of workpieces using an adjustment structure
US20080090396A1 (en) * 2006-10-06 2008-04-17 Semiconductor Energy Laboratory Co., Ltd. Light exposure apparatus and method for making semiconductor device formed using the same
US7838178B2 (en) * 2007-08-13 2010-11-23 Micron Technology, Inc. Masks for microlithography and methods of making and using such masks
DE102008064504B4 (de) * 2008-12-22 2011-04-07 Carl Zeiss Smt Gmbh Projektionsbelichtungsverfahren und Projektionsbelichtungsanlage für die Mikrolithographie
WO2011083411A1 (en) * 2010-01-05 2011-07-14 Koninklijke Philips Electronics N.V. Image projection apparatus and method
JP2017050816A (ja) * 2015-09-04 2017-03-09 パナソニックＩｐマネジメント株式会社 照明装置、及び、照明システム

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5817446A (ja) 1981-07-24 1983-02-01 Hitachi Ltd 投影露光方法および装置
US4688932A (en) * 1985-02-12 1987-08-25 Canon Kabushiki Kaisha Exposure apparatus
JPH0810666B2 (ja) 1986-09-05 1996-01-31 株式会社日立製作所 パターン形成方法
US4869999A (en) * 1986-08-08 1989-09-26 Hitachi, Ltd. Method of forming pattern and projection aligner for carrying out the same
US4924257A (en) * 1988-10-05 1990-05-08 Kantilal Jain Scan and repeat high resolution projection lithography system
US5117255A (en) * 1990-09-19 1992-05-26 Nikon Corporation Projection exposure apparatus
JP2830492B2 (ja) * 1991-03-06 1998-12-02 株式会社ニコン 投影露光装置及び投影露光方法
JPH07142325A (ja) * 1993-06-23 1995-06-02 Nikon Corp 位置合わせ装置
US5473409A (en) * 1993-09-21 1995-12-05 Sony Corporation Semiconductor light exposure device

Also Published As

Publication number Publication date
JPH08153661A (ja) 1996-06-11
DE69512354T2 (de) 2000-03-23
EP0715213B1 (de) 1999-09-22
KR960018770A (ko) 1996-06-17
US5883700A (en) 1999-03-16
EP0715213A1 (de) 1996-06-05

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee