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DE69435124D1 - Mikrobearbeitete Filter - Google Patents

Mikrobearbeitete Filter

Info

Publication number
DE69435124D1
DE69435124D1 DE69435124T DE69435124T DE69435124D1 DE 69435124 D1 DE69435124 D1 DE 69435124D1 DE 69435124 T DE69435124 T DE 69435124T DE 69435124 T DE69435124 T DE 69435124T DE 69435124 D1 DE69435124 D1 DE 69435124D1
Authority
DE
Germany
Prior art keywords
micromachined filters
micromachined
filters
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE69435124T
Other languages
English (en)
Inventor
Elric W Saaski
Dale M Lawrence
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Research International Inc
Original Assignee
Research International Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Research International Inc filed Critical Research International Inc
Application granted granted Critical
Publication of DE69435124D1 publication Critical patent/DE69435124D1/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D71/00—Semi-permeable membranes for separation processes or apparatus characterised by the material; Manufacturing processes specially adapted therefor
    • B01D71/02—Inorganic material
    • B01D71/024—Oxides
    • B01D71/025—Aluminium oxide
    • A—HUMAN NECESSITIES
    • A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
    • A61M—DEVICES FOR INTRODUCING MEDIA INTO, OR ONTO, THE BODY; DEVICES FOR TRANSDUCING BODY MEDIA OR FOR TAKING MEDIA FROM THE BODY; DEVICES FOR PRODUCING OR ENDING SLEEP OR STUPOR
    • A61M5/00—Devices for bringing media into the body in a subcutaneous, intra-vascular or intramuscular way; Accessories therefor, e.g. filling or cleaning devices, arm-rests
    • A61M5/14—Infusion devices, e.g. infusing by gravity; Blood infusion; Accessories therefor
    • A61M5/168—Means for controlling media flow to the body or for metering media to the body, e.g. drip meters, counters ; Monitoring media flow to the body
    • A61M5/16877—Adjusting flow; Devices for setting a flow rate
    • A61M5/16881—Regulating valves
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D61/00—Processes of separation using semi-permeable membranes, e.g. dialysis, osmosis or ultrafiltration; Apparatus, accessories or auxiliary operations specially adapted therefor
    • B01D61/14—Ultrafiltration; Microfiltration
    • B01D61/18—Apparatus therefor
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D67/00—Processes specially adapted for manufacturing semi-permeable membranes for separation processes or apparatus
    • B01D67/0039—Inorganic membrane manufacture
    • B01D67/0053—Inorganic membrane manufacture by inducing porosity into non porous precursor membranes
    • B01D67/0058—Inorganic membrane manufacture by inducing porosity into non porous precursor membranes by selective elimination of components, e.g. by leaching
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D67/00—Processes specially adapted for manufacturing semi-permeable membranes for separation processes or apparatus
    • B01D67/0039—Inorganic membrane manufacture
    • B01D67/0053—Inorganic membrane manufacture by inducing porosity into non porous precursor membranes
    • B01D67/006—Inorganic membrane manufacture by inducing porosity into non porous precursor membranes by elimination of segments of the precursor, e.g. nucleation-track membranes, lithography or laser methods
    • B01D67/0065—Inorganic membrane manufacture by inducing porosity into non porous precursor membranes by elimination of segments of the precursor, e.g. nucleation-track membranes, lithography or laser methods by anodic oxidation
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D69/00—Semi-permeable membranes for separation processes or apparatus characterised by their form, structure or properties; Manufacturing processes specially adapted therefor
    • B01D69/02—Semi-permeable membranes for separation processes or apparatus characterised by their form, structure or properties; Manufacturing processes specially adapted therefor characterised by their properties
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D71/00—Semi-permeable membranes for separation processes or apparatus characterised by the material; Manufacturing processes specially adapted therefor
    • B01D71/02—Inorganic material
    • B01D71/0213—Silicon
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B43/00—Machines, pumps, or pumping installations having flexible working members
    • F04B43/02—Machines, pumps, or pumping installations having flexible working members having plate-like flexible members, e.g. diaphragms
    • F04B43/04—Pumps having electric drive
    • F04B43/043—Micropumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F15—FLUID-PRESSURE ACTUATORS; HYDRAULICS OR PNEUMATICS IN GENERAL
    • F15C—FLUID-CIRCUIT ELEMENTS PREDOMINANTLY USED FOR COMPUTING OR CONTROL PURPOSES
    • F15C5/00—Manufacture of fluid circuit elements; Manufacture of assemblages of such elements integrated circuits
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K99/00—Subject matter not provided for in other groups of this subclass
    • F16K99/0001—Microvalves
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K99/00—Subject matter not provided for in other groups of this subclass
    • F16K99/0001—Microvalves
    • F16K99/0003—Constructional types of microvalves; Details of the cutting-off member
    • F16K99/0015—Diaphragm or membrane valves
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K99/00—Subject matter not provided for in other groups of this subclass
    • F16K99/0001—Microvalves
    • F16K99/0003—Constructional types of microvalves; Details of the cutting-off member
    • F16K99/0026—Valves using channel deformation
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K99/00—Subject matter not provided for in other groups of this subclass
    • F16K99/0001—Microvalves
    • F16K99/0034—Operating means specially adapted for microvalves
    • F16K99/0055—Operating means specially adapted for microvalves actuated by fluids
    • F16K99/0057—Operating means specially adapted for microvalves actuated by fluids the fluid being the circulating fluid itself, e.g. check valves
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
    • G05D7/00—Control of flow
    • G05D7/06—Control of flow characterised by the use of electric means
    • G05D7/0617—Control of flow characterised by the use of electric means specially adapted for fluid materials
    • G05D7/0629—Control of flow characterised by the use of electric means specially adapted for fluid materials characterised by the type of regulator means
    • G05D7/0694—Control of flow characterised by the use of electric means specially adapted for fluid materials characterised by the type of regulator means by action on throttling means or flow sources of very small size, e.g. microfluidics
    • A—HUMAN NECESSITIES
    • A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
    • A61M—DEVICES FOR INTRODUCING MEDIA INTO, OR ONTO, THE BODY; DEVICES FOR TRANSDUCING BODY MEDIA OR FOR TAKING MEDIA FROM THE BODY; DEVICES FOR PRODUCING OR ENDING SLEEP OR STUPOR
    • A61M2205/00—General characteristics of the apparatus
    • A61M2205/02—General characteristics of the apparatus characterised by a particular materials
    • A61M2205/0244—Micromachined materials, e.g. made from silicon wafers, microelectromechanical systems [MEMS] or comprising nanotechnology
    • A—HUMAN NECESSITIES
    • A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
    • A61M—DEVICES FOR INTRODUCING MEDIA INTO, OR ONTO, THE BODY; DEVICES FOR TRANSDUCING BODY MEDIA OR FOR TAKING MEDIA FROM THE BODY; DEVICES FOR PRODUCING OR ENDING SLEEP OR STUPOR
    • A61M2205/00—General characteristics of the apparatus
    • A61M2205/02—General characteristics of the apparatus characterised by a particular materials
    • A61M2205/0272—Electro-active or magneto-active materials
    • A61M2205/0294—Piezoelectric materials
    • A—HUMAN NECESSITIES
    • A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
    • A61M—DEVICES FOR INTRODUCING MEDIA INTO, OR ONTO, THE BODY; DEVICES FOR TRANSDUCING BODY MEDIA OR FOR TAKING MEDIA FROM THE BODY; DEVICES FOR PRODUCING OR ENDING SLEEP OR STUPOR
    • A61M5/00—Devices for bringing media into the body in a subcutaneous, intra-vascular or intramuscular way; Accessories therefor, e.g. filling or cleaning devices, arm-rests
    • A61M5/14—Infusion devices, e.g. infusing by gravity; Blood infusion; Accessories therefor
    • A61M5/142—Pressure infusion, e.g. using pumps
    • A61M5/14244—Pressure infusion, e.g. using pumps adapted to be carried by the patient, e.g. portable on the body
    • A61M5/14276—Pressure infusion, e.g. using pumps adapted to be carried by the patient, e.g. portable on the body specially adapted for implantation
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K99/00—Subject matter not provided for in other groups of this subclass
    • F16K2099/0073—Fabrication methods specifically adapted for microvalves
    • F16K2099/0074—Fabrication methods specifically adapted for microvalves using photolithography, e.g. etching
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K99/00—Subject matter not provided for in other groups of this subclass
    • F16K2099/0073—Fabrication methods specifically adapted for microvalves
    • F16K2099/0076—Fabrication methods specifically adapted for microvalves using electrical discharge machining [EDM], milling or drilling
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K99/00—Subject matter not provided for in other groups of this subclass
    • F16K2099/0073—Fabrication methods specifically adapted for microvalves
    • F16K2099/0078—Fabrication methods specifically adapted for microvalves using moulding or stamping
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K99/00—Subject matter not provided for in other groups of this subclass
    • F16K2099/0082—Microvalves adapted for a particular use
    • F16K2099/0086—Medical applications
    • F16K2099/0088—Implanted devices
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K99/00—Subject matter not provided for in other groups of this subclass
    • F16K99/0001—Microvalves
    • F16K99/0034—Operating means specially adapted for microvalves
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S366/00—Agitating
    • Y10S366/03—Micromixers: variable geometry from the pathway influences mixing/agitation of non-laminar fluid flow
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T137/00—Fluid handling
    • Y10T137/0318—Processes
    • Y10T137/0402—Cleaning, repairing, or assembling
    • Y10T137/0491—Valve or valve element assembling, disassembling, or replacing
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T137/00—Fluid handling
    • Y10T137/2496—Self-proportioning or correlating systems
    • Y10T137/2559—Self-controlled branched flow systems
    • Y10T137/2574—Bypass or relief controlled by main line fluid condition
    • Y10T137/2605—Pressure responsive
    • Y10T137/2607—With pressure reducing inlet valve
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T137/00—Fluid handling
    • Y10T137/7722—Line condition change responsive valves
    • Y10T137/7781—With separate connected fluid reactor surface
    • Y10T137/7784—Responsive to change in rate of fluid flow
    • Y10T137/7787—Expansible chamber subject to differential pressures
    • Y10T137/7788—Pressures across fixed choke
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T137/00—Fluid handling
    • Y10T137/7722—Line condition change responsive valves
    • Y10T137/7781—With separate connected fluid reactor surface
    • Y10T137/7784—Responsive to change in rate of fluid flow
    • Y10T137/7787—Expansible chamber subject to differential pressures
    • Y10T137/7791—Pressures across flow line valve
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T137/00—Fluid handling
    • Y10T137/7722—Line condition change responsive valves
    • Y10T137/7781—With separate connected fluid reactor surface
    • Y10T137/7784—Responsive to change in rate of fluid flow
    • Y10T137/7792—Movable deflector or choke
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00—Metal working
    • Y10T29/49—Method of mechanical manufacture
    • Y10T29/49405—Valve or choke making
    • Y10T29/49409—Valve seat forming
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00—Metal working
    • Y10T29/49—Method of mechanical manufacture
    • Y10T29/49405—Valve or choke making
    • Y10T29/49412—Valve or choke making with assembly, disassembly or composite article making
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00—Metal working
    • Y10T29/49—Method of mechanical manufacture
    • Y10T29/49405—Valve or choke making
    • Y10T29/49412—Valve or choke making with assembly, disassembly or composite article making
    • Y10T29/49416—Valve or choke making with assembly, disassembly or composite article making with material shaping or cutting
    • Y10T29/49417—Valve or choke making with assembly, disassembly or composite article making with material shaping or cutting including molding or casting
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00—Metal working
    • Y10T29/49—Method of mechanical manufacture
    • Y10T29/49405—Valve or choke making
    • Y10T29/49412—Valve or choke making with assembly, disassembly or composite article making
    • Y10T29/49416—Valve or choke making with assembly, disassembly or composite article making with material shaping or cutting
    • Y10T29/49419—Valve or choke making with assembly, disassembly or composite article making with material shaping or cutting including machining or drilling
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00—Metal working
    • Y10T29/49—Method of mechanical manufacture
    • Y10T29/49826—Assembling or joining

Landscapes

  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • General Engineering & Computer Science (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Mechanical Engineering (AREA)
  • Dispersion Chemistry (AREA)
  • Inorganic Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Fluid Mechanics (AREA)
  • Water Supply & Treatment (AREA)
  • Manufacturing & Machinery (AREA)
  • Vascular Medicine (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Computer Hardware Design (AREA)
  • Automation & Control Theory (AREA)
  • Anesthesiology (AREA)
  • Biomedical Technology (AREA)
  • Heart & Thoracic Surgery (AREA)
  • Hematology (AREA)
  • Theoretical Computer Science (AREA)
  • Animal Behavior & Ethology (AREA)
  • General Health & Medical Sciences (AREA)
  • Public Health (AREA)
  • Veterinary Medicine (AREA)
  • Optics & Photonics (AREA)
  • General Physics & Mathematics (AREA)
  • Infusion, Injection, And Reservoir Apparatuses (AREA)
  • Separation Using Semi-Permeable Membranes (AREA)
  • Filtering Materials (AREA)
  • Fluid-Driven Valves (AREA)
DE69435124T 1993-10-04 1994-10-03 Mikrobearbeitete Filter Expired - Lifetime DE69435124D1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US13176293A 1993-10-04 1993-10-04

Publications (1)

Publication Number Publication Date
DE69435124D1 true DE69435124D1 (de) 2008-09-25

Family

ID=22450911

Family Applications (4)

Application Number Title Priority Date Filing Date
DE69435124T Expired - Lifetime DE69435124D1 (de) 1993-10-04 1994-10-03 Mikrobearbeitete Filter
DE69415549T Expired - Lifetime DE69415549T2 (de) 1993-10-04 1994-10-03 Mikromaschinen-flüssigkeitsfluss-regulator
DE69415683T Expired - Lifetime DE69415683T2 (de) 1993-10-04 1994-10-03 Mikromaschinen-fluss-schalter
DE69431994T Expired - Lifetime DE69431994T2 (de) 1993-10-04 1994-10-03 Mikro-bearbeitetes fluidbehandlungsvorrichtung mit filter und regelventiler

Family Applications After (3)

Application Number Title Priority Date Filing Date
DE69415549T Expired - Lifetime DE69415549T2 (de) 1993-10-04 1994-10-03 Mikromaschinen-flüssigkeitsfluss-regulator
DE69415683T Expired - Lifetime DE69415683T2 (de) 1993-10-04 1994-10-03 Mikromaschinen-fluss-schalter
DE69431994T Expired - Lifetime DE69431994T2 (de) 1993-10-04 1994-10-03 Mikro-bearbeitetes fluidbehandlungsvorrichtung mit filter und regelventiler

Country Status (4)

Country Link
US (7) US5697153A (de)
EP (4) EP1129739B1 (de)
DE (4) DE69435124D1 (de)
WO (3) WO1995009987A1 (de)

Families Citing this family (294)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5651900A (en) * 1994-03-07 1997-07-29 The Regents Of The University Of California Microfabricated particle filter
US5893974A (en) * 1994-03-07 1999-04-13 Regents Of University Of California Microfabricated capsules for immunological isolation of cell transplants
US5798042A (en) * 1994-03-07 1998-08-25 Regents Of The University Of California Microfabricated filter with specially constructed channel walls, and containment well and capsule constructed with such filters
US5985328A (en) * 1994-03-07 1999-11-16 Regents Of The University Of California Micromachined porous membranes with bulk support
US5985164A (en) * 1994-03-07 1999-11-16 Regents Of The University Of California Method for forming a filter
US5770076A (en) * 1994-03-07 1998-06-23 The Regents Of The University Of California Micromachined capsules having porous membranes and bulk supports
US5585069A (en) * 1994-11-10 1996-12-17 David Sarnoff Research Center, Inc. Partitioned microelectronic and fluidic device array for clinical diagnostics and chemical synthesis
US6068010A (en) * 1995-06-09 2000-05-30 Marotta Scientific Controls, Inc. Microvalve and microthruster for satellites and methods of making and using the same
US6141497A (en) * 1995-06-09 2000-10-31 Marotta Scientific Controls, Inc. Multilayer micro-gas rheostat with electrical-heater control of gas flow
US6454945B1 (en) 1995-06-16 2002-09-24 University Of Washington Microfabricated devices and methods
AU6541596A (en) * 1995-06-16 1997-01-15 University Of Washington Microfabricated differential extraction device and method
US5705018A (en) * 1995-12-13 1998-01-06 Hartley; Frank T. Micromachined peristaltic pump
US6068751A (en) * 1995-12-18 2000-05-30 Neukermans; Armand P. Microfluidic valve and integrated microfluidic system
US5961096A (en) * 1996-04-03 1999-10-05 The United States Of America As Represented By The Administrator Of The National Aeronautics And Space Administration Ferroelectric fluid flow control valve
US5885470A (en) 1997-04-14 1999-03-23 Caliper Technologies Corporation Controlled fluid transport in microfabricated polymeric substrates
CA2257341A1 (en) * 1996-06-07 1997-12-11 Robert H. Reinicke Micro gas rheostat
US6221654B1 (en) * 1996-09-25 2001-04-24 California Institute Of Technology Method and apparatus for analysis and sorting of polynucleotides based on size
US5831371A (en) * 1996-11-22 1998-11-03 Face International Corp. Snap-action ferroelectric transducer
US5938923A (en) * 1997-04-15 1999-08-17 The Regents Of The University Of California Microfabricated filter and capsule using a substrate sandwich
DE19719862A1 (de) * 1997-05-12 1998-11-19 Fraunhofer Ges Forschung Mikromembranpumpe
US5932799A (en) * 1997-07-21 1999-08-03 Ysi Incorporated Microfluidic analyzer module
US6073482A (en) * 1997-07-21 2000-06-13 Ysi Incorporated Fluid flow module
US6293012B1 (en) 1997-07-21 2001-09-25 Ysi Incorporated Method of making a fluid flow module
US6082185A (en) * 1997-07-25 2000-07-04 Research International, Inc. Disposable fluidic circuit cards
SE9703302D0 (sv) * 1997-09-10 1997-09-10 Vincenzo Vassarotti Filtration cell for tangential flow filtration and filtration system making use of such cell
US7214298B2 (en) 1997-09-23 2007-05-08 California Institute Of Technology Microfabricated cell sorter
US6540895B1 (en) 1997-09-23 2003-04-01 California Institute Of Technology Microfabricated cell sorter for chemical and biological materials
US6203523B1 (en) 1998-02-02 2001-03-20 Medtronic Inc Implantable drug infusion device having a flow regulator
JP3543604B2 (ja) * 1998-03-04 2004-07-14 株式会社日立製作所 送液装置および自動分析装置
US7134323B1 (en) 1998-04-02 2006-11-14 Rockwell Automation Technologies, Inc. System and method for dynamic lubrication adjustment for a lubrication analysis system
US6196057B1 (en) 1998-04-02 2001-03-06 Reliance Electric Technologies, Llc Integrated multi-element lubrication sensor and lubricant health assessment
US6324899B1 (en) 1998-04-02 2001-12-04 Reliance Electric Technologies, Llc Bearing-sensor integration for a lubrication analysis system
US6023961A (en) 1998-04-02 2000-02-15 Reliance Electric Industrial Company Micro-viscosity sensor and lubrication analysis system employing the same
US6546785B1 (en) 1998-04-02 2003-04-15 Rockwell Automation Technologies, Inc. System and method for dynamic lubrication adjustment for a lubrication analysis system
AU3784299A (en) * 1998-05-04 1999-11-23 Cfmt, Inc. Wet processing methods for the manufacture of electronic components
US6160243A (en) * 1998-09-25 2000-12-12 Redwood Microsystems, Inc. Apparatus and method for controlling fluid in a micromachined boiler
WO2000029770A2 (en) * 1998-11-16 2000-05-25 California Institute Of Technology Parylene micro check valve and fabrication method thereof
US6263249B1 (en) 1999-02-26 2001-07-17 Medtronic, Inc. Medical electrical lead having controlled texture surface and method of making same
AU2199599A (en) * 1998-12-11 2000-07-03 United States Government as represented by The National Aeronautics and Space Administration, The Ferroelectric pump
DE19910392B4 (de) * 1999-03-05 2005-03-17 Clondiag Chip Technologies Gmbh Mikrosäulenreaktor
US20020148909A1 (en) * 1999-04-12 2002-10-17 Junkel Eric F. Cooling device using fan-driven misting with large bottom fill port
US6398132B1 (en) * 1999-04-12 2002-06-04 Circulair, Inc. Cooling device using fan-driven misting with large fill and drinking port
US6189536B1 (en) 1999-04-15 2001-02-20 Medtronic Inc. Method for protecting implantable devices
US6471675B1 (en) 1999-04-30 2002-10-29 Medtronic, Inc. Passive flow control devices for implantable pumps
AU5756700A (en) 1999-06-21 2001-01-09 General Hospital Corporation, The Cell culture systems and methods for organ assist devices
US6096656A (en) * 1999-06-24 2000-08-01 Sandia Corporation Formation of microchannels from low-temperature plasma-deposited silicon oxynitride
US6692834B1 (en) 1999-06-28 2004-02-17 Medtronic, Inc. Method for coating implantable devices
US6179586B1 (en) * 1999-09-15 2001-01-30 Honeywell International Inc. Dual diaphragm, single chamber mesopump
US6638263B1 (en) 1999-10-12 2003-10-28 Durect Corporation Regulation of drug delivery through flow diversion
US6613241B1 (en) * 1999-10-29 2003-09-02 California Insitute Of Technology MEMS elements with integrated porous membranes and method of making the same
US20020022810A1 (en) * 1999-12-07 2002-02-21 Alex Urich Non-linear flow restrictor for a medical aspiration system
JP4712264B2 (ja) * 1999-12-08 2011-06-29 バクスター・インターナショナル・インコーポレイテッド 微小多孔性フィルター膜、微小多孔性フィルター膜を作製するための方法、および微小多孔性フィルター膜を使用する分離器
US20030168396A1 (en) * 1999-12-08 2003-09-11 Jacobson James D. Monolithic filter body and fabrication technique
US6982058B2 (en) * 1999-12-08 2006-01-03 Baxter International, Inc. Method for fabricating three dimensional structures
US6260957B1 (en) 1999-12-20 2001-07-17 Lexmark International, Inc. Ink jet printhead with heater chip ink filter
DE10195354T1 (de) 2000-02-03 2003-05-08 Medtronic Inc Katheter für variable Infusionsdurchflussmengen
US6551496B1 (en) 2000-03-03 2003-04-22 Ysi Incorporated Microstructured bilateral sensor
US6770322B1 (en) 2000-03-03 2004-08-03 Ysi Incorporated Method of making a platform for use in a sensor in a microfluidic device
US20020012926A1 (en) * 2000-03-03 2002-01-31 Mycometrix, Inc. Combinatorial array for nucleic acid analysis
US6485461B1 (en) 2000-04-04 2002-11-26 Insulet, Inc. Disposable infusion device
US6572583B1 (en) * 2000-04-28 2003-06-03 Medtronic, Inc. Bulkhead for implantable infusion device
US7420659B1 (en) 2000-06-02 2008-09-02 Honeywell Interantional Inc. Flow control system of a cartridge
US7351376B1 (en) 2000-06-05 2008-04-01 California Institute Of Technology Integrated active flux microfluidic devices and methods
US6829753B2 (en) 2000-06-27 2004-12-07 Fluidigm Corporation Microfluidic design automation method and system
US6561479B1 (en) * 2000-08-23 2003-05-13 Micron Technology, Inc. Small scale actuators and methods for their formation and use
US6669669B2 (en) 2001-10-12 2003-12-30 Insulet Corporation Laminated patient infusion device
CA2421133C (en) * 2000-09-08 2012-06-26 Insulet Corporation Devices, systems and methods for patient infusion
CN1262344C (zh) * 2000-09-22 2006-07-05 财团法人川村理化学研究所 微型化学装置及其流量调节方法
US6536477B1 (en) * 2000-10-12 2003-03-25 Nanostream, Inc. Fluidic couplers and modular microfluidic systems
US6827095B2 (en) * 2000-10-12 2004-12-07 Nanostream, Inc. Modular microfluidic systems
AU1189702A (en) 2000-10-13 2002-04-22 Fluidigm Corp Microfluidic device based sample injection system for analytical devices
US6467879B1 (en) 2000-10-16 2002-10-22 Xerox Corporation Method and apparatus for preventing degradation of electrostatically actuated devices
US6644944B2 (en) 2000-11-06 2003-11-11 Nanostream, Inc. Uni-directional flow microfluidic components
ES2281457T3 (es) 2000-11-09 2007-10-01 Insulet Corporation Medio de suministro transcutaneo.
ES2167281B1 (es) * 2000-11-21 2003-06-01 Leventon S A Reductor de presion y procedimiento de fabricacion y aplicacion correspondientes.
US6879861B2 (en) 2000-12-21 2005-04-12 Medtronic, Inc. Polymeric materials with improved dielectric breakdown strength
JP2004532664A (ja) 2000-12-21 2004-10-28 インシュレット コーポレイション 医療機器の遠隔制御装置及び方法
WO2002053290A2 (en) * 2001-01-08 2002-07-11 President And Fellows Of Harvard College Valves and pumps for microfluidic systems and method for making microfluidic systems
US6749581B2 (en) 2001-02-02 2004-06-15 Medtronic, Inc. Variable infusion rate catheter
US6562000B2 (en) 2001-02-02 2003-05-13 Medtronic, Inc. Single-use therapeutic substance delivery device with infusion rate control
CA2434731C (en) 2001-02-22 2010-01-26 Insulet Corporation Modular infusion device and method
US6572214B2 (en) * 2001-03-09 2003-06-03 Hewlett-Packard Development Company, L.P. Inkjet printing systems using filter fluid interconnects for pigmented inks
US20020128560A1 (en) * 2001-03-09 2002-09-12 Alex Urich Surgical flow restrictor and filter
DE10113358B4 (de) * 2001-03-20 2005-08-25 Festo Ag & Co. Sitzventil
WO2002081729A2 (en) 2001-04-06 2002-10-17 California Institute Of Technology Nucleic acid amplification utilizing microfluidic devices
US20020186263A1 (en) * 2001-06-07 2002-12-12 Nanostream, Inc. Microfluidic fraction collectors
US6811695B2 (en) * 2001-06-07 2004-11-02 Nanostream, Inc. Microfluidic filter
US6939632B2 (en) * 2001-08-06 2005-09-06 Massachusetts Institute Of Technology Thermally efficient micromachined device
US7025323B2 (en) * 2001-09-21 2006-04-11 The Regents Of The University Of California Low power integrated pumping and valving arrays for microfluidic systems
DE10149139A1 (de) * 2001-10-05 2003-04-24 Bosch Gmbh Robert Verfahren zum Erzeugen von Hohlräumen mit einer optisch transparenten Wandung
US8440093B1 (en) 2001-10-26 2013-05-14 Fuidigm Corporation Methods and devices for electronic and magnetic sensing of the contents of microfluidic flow channels
US20040078028A1 (en) * 2001-11-09 2004-04-22 Flaherty J. Christopher Plunger assembly for patient infusion device
CA2467587A1 (en) 2001-11-30 2003-06-12 Fluidigm Corporation Microfluidic device and methods of using same
US7691333B2 (en) 2001-11-30 2010-04-06 Fluidigm Corporation Microfluidic device and methods of using same
US6739576B2 (en) 2001-12-20 2004-05-25 Nanostream, Inc. Microfluidic flow control device with floating element
US6855542B2 (en) * 2001-12-21 2005-02-15 Organogenesis Inc. Chamber with adjustable volume for cell culture and organ assist
US6637257B2 (en) * 2002-01-02 2003-10-28 Integrated Sensing Systems Micromachined fluid analysis device and method
US7025324B1 (en) 2002-01-04 2006-04-11 Massachusetts Institute Of Technology Gating apparatus and method of manufacture
US20040073175A1 (en) * 2002-01-07 2004-04-15 Jacobson James D. Infusion system
US7061161B2 (en) * 2002-02-15 2006-06-13 Siemens Technology-To-Business Center Llc Small piezoelectric air pumps with unobstructed airflow
JP4002892B2 (ja) * 2002-02-18 2007-11-07 ダンフォス アクチーセルスカブ 液体態様の薬物を投与するためのデバイス
US6830558B2 (en) 2002-03-01 2004-12-14 Insulet Corporation Flow condition sensor assembly for patient infusion device
US6692457B2 (en) * 2002-03-01 2004-02-17 Insulet Corporation Flow condition sensor assembly for patient infusion device
CA2480728A1 (en) 2002-04-01 2003-10-16 Fluidigm Corporation Microfluidic particle-analysis systems
US7312085B2 (en) 2002-04-01 2007-12-25 Fluidigm Corporation Microfluidic particle-analysis systems
US6637476B2 (en) 2002-04-01 2003-10-28 Protedyne Corporation Robotically manipulable sample handling tool
US6656159B2 (en) 2002-04-23 2003-12-02 Insulet Corporation Dispenser for patient infusion device
US6656158B2 (en) 2002-04-23 2003-12-02 Insulet Corporation Dispenser for patient infusion device
US6960192B1 (en) 2002-04-23 2005-11-01 Insulet Corporation Transcutaneous fluid delivery system
JP3854190B2 (ja) * 2002-04-26 2006-12-06 株式会社ジェイテクト モータ制御装置
US6723072B2 (en) 2002-06-06 2004-04-20 Insulet Corporation Plunger assembly for patient infusion device
US7018360B2 (en) * 2002-07-16 2006-03-28 Insulet Corporation Flow restriction system and method for patient infusion device
US6935617B2 (en) * 2002-07-26 2005-08-30 Applera Corporation Valve assembly for microfluidic devices, and method for opening and closing the same
DE10239597B4 (de) * 2002-08-28 2005-03-17 Fresenius Medical Care Deutschland Gmbh Einwegkassette
JP2006501056A (ja) 2002-09-25 2006-01-12 カリフォルニア インスティテュート オブ テクノロジー ミクロ流体大規模集積
TW590982B (en) * 2002-09-27 2004-06-11 Agnitio Science & Technology I Micro-fluid driving device
US7144384B2 (en) 2002-09-30 2006-12-05 Insulet Corporation Dispenser components and methods for patient infusion device
US7128727B2 (en) 2002-09-30 2006-10-31 Flaherty J Christopher Components and methods for patient infusion device
EP1546412B1 (de) 2002-10-02 2014-05-21 California Institute Of Technology MIKROFLUIDISCHE NUKLEINSûUREANALYSE
JP4050971B2 (ja) * 2002-10-08 2008-02-20 株式会社島津製作所 ダイアフラムを用いフィルタ機能を有するバルブ
US7474180B2 (en) * 2002-11-01 2009-01-06 Georgia Tech Research Corp. Single substrate electromagnetic actuator
DE10254312B4 (de) 2002-11-21 2005-04-21 Hahn-Schickard-Gesellschaft für angewandte Forschung e.V. Variabler Flußwiderstand
US20040116866A1 (en) * 2002-12-17 2004-06-17 William Gorman Skin attachment apparatus and method for patient infusion device
US20050011554A1 (en) * 2003-01-28 2005-01-20 Taprite-Fassco Manufacturing Inc. Modular regulator
US7249529B2 (en) * 2003-03-28 2007-07-31 Protedyne Corporation Robotically manipulable sample handling tool
US7604965B2 (en) 2003-04-03 2009-10-20 Fluidigm Corporation Thermal reaction device and method for using the same
US7476363B2 (en) 2003-04-03 2009-01-13 Fluidigm Corporation Microfluidic devices and methods of using same
JP5419248B2 (ja) 2003-04-03 2014-02-19 フルイディグム コーポレイション マイクロ流体装置およびその使用方法
US8828663B2 (en) 2005-03-18 2014-09-09 Fluidigm Corporation Thermal reaction device and method for using the same
US20050145496A1 (en) 2003-04-03 2005-07-07 Federico Goodsaid Thermal reaction device and method for using the same
WO2004101151A1 (en) * 2003-05-08 2004-11-25 Nanostream, Inc. Sample preparation for parallel chromatography
JP4251019B2 (ja) * 2003-06-13 2009-04-08 パナソニック株式会社 微小固形成分分離デバイスとその製造方法、およびこれを用いた微小固形成分の分離方法
US7413712B2 (en) 2003-08-11 2008-08-19 California Institute Of Technology Microfluidic rotary flow reactor matrix
JP3946178B2 (ja) * 2003-09-05 2007-07-18 松下電器産業株式会社 マイクロポンプ用逆止弁装置およびその製造方法
US7581434B1 (en) 2003-09-25 2009-09-01 Rockwell Automation Technologies, Inc. Intelligent fluid sensor for machinery diagnostics, prognostics, and control
US7867194B2 (en) 2004-01-29 2011-01-11 The Charles Stark Draper Laboratory, Inc. Drug delivery apparatus
WO2005072793A1 (en) 2004-01-29 2005-08-11 The Charles Stark Draper Laboratory, Inc. Implantable drug delivery apparatus
US7790325B2 (en) * 2004-03-31 2010-09-07 Canon Kabushiki Kaisha Valve having valve element displaced by at least one of a movement of a diaphragm and a movement of an actuator, and fuel cell using the valve
DE102004049278A1 (de) * 2004-10-09 2006-04-13 Robert Bosch Gmbh Brennstoffeinspritzventil
US7832429B2 (en) * 2004-10-13 2010-11-16 Rheonix, Inc. Microfluidic pump and valve structures and fabrication methods
US7608160B2 (en) 2004-10-13 2009-10-27 Rheonix, Inc. Laminated microfluidic structures and method for making
US7124643B2 (en) * 2004-10-18 2006-10-24 Silverbrook Research Pty Ltd Pressure sensor with non-planar membrane
US7222639B2 (en) 2004-12-29 2007-05-29 Honeywell International Inc. Electrostatically actuated gas valve
US7328882B2 (en) 2005-01-06 2008-02-12 Honeywell International Inc. Microfluidic modulating valve
AU2006209151B2 (en) * 2005-01-25 2011-11-17 Aerocrine Ab Constant flow regulator device
US7445017B2 (en) 2005-01-28 2008-11-04 Honeywell International Inc. Mesovalve modulator
US20060245949A1 (en) * 2005-04-13 2006-11-02 Par Technologies, Llc Electromagnetically bonded pumps and pump subassemblies and methods of fabrication
US20060245951A1 (en) * 2005-04-13 2006-11-02 Par Technologies, Llc Multilayer valve structures, methods of making, and pumps using same
US7470971B2 (en) * 2005-05-13 2008-12-30 Sarnoff Corporation Anodically bonded ultra-high-vacuum cell
US20060263826A1 (en) * 2005-05-18 2006-11-23 Nuclea Biomarkers Llc Antibody protein analysis chip
US7517201B2 (en) 2005-07-14 2009-04-14 Honeywell International Inc. Asymmetric dual diaphragm pump
JP2007040322A (ja) * 2005-07-29 2007-02-15 Canon Inc リリーフバルブ、その製造方法および燃料電池
JP4942662B2 (ja) * 2005-10-28 2012-05-30 アークレイ株式会社 送液方法、およびこれに用いるカートリッジ
US7913928B2 (en) 2005-11-04 2011-03-29 Alliant Techsystems Inc. Adaptive structures, systems incorporating same and related methods
US20070151920A1 (en) * 2005-12-06 2007-07-05 Kay Ronald J System and method of micromolded filtration microstructure and devices
US7624755B2 (en) 2005-12-09 2009-12-01 Honeywell International Inc. Gas valve with overtravel
US7384549B2 (en) * 2005-12-29 2008-06-10 Spf Innovations, Llc Method and apparatus for the filtration of biological solutions
US8229570B2 (en) * 2006-01-30 2012-07-24 Medtronic, Inc. Implantable electrodes having zirconium nitride coatings
US7523762B2 (en) 2006-03-22 2009-04-28 Honeywell International Inc. Modulating gas valves and systems
US7854391B2 (en) * 2006-04-27 2010-12-21 General Electric Company Flow regulating articles and methods of manufacture
EP2043948A1 (de) * 2006-07-20 2009-04-08 CeQur ApS Strömungssystem mit strömungsdrossel
US7543604B2 (en) * 2006-09-11 2009-06-09 Honeywell International Inc. Control valve
US20080060995A1 (en) * 2006-09-12 2008-03-13 Sean Zhang Semi-Permeable Membrane
DE602006009405D1 (de) * 2006-10-28 2009-11-05 Sensirion Holding Ag Mehrzellenpumpe
US7644731B2 (en) 2006-11-30 2010-01-12 Honeywell International Inc. Gas valve with resilient seat
WO2008075253A1 (en) 2006-12-19 2008-06-26 Koninklijke Philips Electronics N.V. Micro fluidic device
US9046192B2 (en) * 2007-01-31 2015-06-02 The Charles Stark Draper Laboratory, Inc. Membrane-based fluid control in microfluidic devices
US20080260553A1 (en) * 2007-04-17 2008-10-23 Hsiao-Kang Ma Membrane pump device
US20080260552A1 (en) * 2007-04-17 2008-10-23 Hsiao-Kang Ma Membrane pump
DE102007049446A1 (de) 2007-10-16 2009-04-23 Cequr Aps Katheter-Einführeinrichtung
US20100324504A1 (en) * 2008-02-09 2010-12-23 Eric Chappel Passive flow regulator for infusion of medicaments
US20090270844A1 (en) * 2008-04-24 2009-10-29 Medtronic, Inc. Flow sensor controlled infusion device
US9333297B2 (en) 2008-05-08 2016-05-10 Minipumps, Llc Drug-delivery pump with intelligent control
WO2009137780A2 (en) 2008-05-08 2009-11-12 Replenish Pumps, Llc Implantable pumps and cannulas therefor
WO2009139898A2 (en) 2008-05-16 2009-11-19 President And Fellows Of Harvard College Valves and other flow control in fluidic systems including microfluidic systems
US20090326517A1 (en) * 2008-06-27 2009-12-31 Toralf Bork Fluidic capillary chip for regulating drug flow rates of infusion pumps
US7959598B2 (en) 2008-08-20 2011-06-14 Asante Solutions, Inc. Infusion pump systems and methods
WO2010023596A1 (en) * 2008-08-25 2010-03-04 Koninklijke Philips Electronics N.V. Reconfigurable microfluidic filter
DE102008041542A1 (de) * 2008-08-26 2010-03-04 Robert Bosch Gmbh Mikropumpe
WO2010024935A2 (en) * 2008-08-30 2010-03-04 Corning Incorporated Methods and devices for fluid handling
US20100059120A1 (en) * 2008-09-11 2010-03-11 General Electric Company Microfluidic device and methods for droplet generation and manipulation
US20100116429A1 (en) * 2008-11-10 2010-05-13 George Edward Berkey Method for layered glass micro-reactor fabrication
JP2012512629A (ja) 2008-12-17 2012-05-31 ディスカバリー テクノロジー インターナショナル，インク． 高トルク圧電モータ
CN102301500A (zh) * 2008-12-19 2011-12-28 发现技术国际股份有限公司 压电式电机
US8353864B2 (en) 2009-02-18 2013-01-15 Davis David L Low cost disposable infusion pump
US8197235B2 (en) 2009-02-18 2012-06-12 Davis David L Infusion pump with integrated permanent magnet
JP5382320B2 (ja) * 2009-03-26 2014-01-08 セイコーエプソン株式会社 圧電モーター、液体噴射装置及び時計
US20100282766A1 (en) * 2009-05-06 2010-11-11 Heiko Arndt Low-Dead Volume Microfluidic Component and Method
US8230744B2 (en) 2009-05-06 2012-07-31 Cequr Sa Low-dead volume microfluidic circuit and methods
US8672873B2 (en) 2009-08-18 2014-03-18 Cequr Sa Medicine delivery device having detachable pressure sensing unit
MX2012002063A (es) 2009-08-18 2012-08-01 Minipumps Llc Bomba electrolitica para la administracion de farmacos con control adaptativo.
US8547239B2 (en) 2009-08-18 2013-10-01 Cequr Sa Methods for detecting failure states in a medicine delivery device
WO2011028780A2 (en) * 2009-09-01 2011-03-10 Discovery Technology International, Lllp Piezoelectric rotary motor with high rotation speed and bi- directional operation
US8257295B2 (en) 2009-09-21 2012-09-04 Alcon Research, Ltd. Intraocular pressure sensor with external pressure compensation
TWI435196B (zh) 2009-10-15 2014-04-21 派伏塔系統公司 氣體流量控制方法及裝置
FR2952628A1 (fr) 2009-11-13 2011-05-20 Commissariat Energie Atomique Procede de fabrication d'au moins une micropompe a membrane deformable et micropompe a membrane deformable
EP2359886A1 (de) * 2010-02-12 2011-08-24 Debiotech S.A. Mikromechanischer passiver Durchflussregler
WO2012037348A2 (en) 2010-09-15 2012-03-22 Minipumps, Llc Molded and packaged elastomeric check valve
US9211378B2 (en) 2010-10-22 2015-12-15 Cequr Sa Methods and systems for dosing a medicament
US9400004B2 (en) 2010-11-29 2016-07-26 Pivotal Systems Corporation Transient measurements of mass flow controllers
ES2553772T3 (es) 2010-12-16 2015-12-11 Alcon Research, Ltd. Sistemas para aspiración de pequeño calibre
JP6162047B2 (ja) 2011-02-02 2017-07-12 ザ チャールズ スターク ドレイパー ラボラトリー インク 薬物送達装置
DE102011051140A1 (de) * 2011-02-25 2012-08-30 Embedded Microsystems Bremen GmbH (EMB) Applikationszentrum für Mikrosystemtechnik Strömungswiderstand
US9492648B2 (en) * 2011-05-06 2016-11-15 Sanofi-Aventis Deutschland Gmbh Valve element
US8939930B2 (en) * 2011-11-18 2015-01-27 Minipumps, Llc Accurate flow control in drug pump devices
US8840578B2 (en) * 2011-12-09 2014-09-23 Alcon Research, Ltd. Multilayer membrane actuators
WO2013090231A1 (en) 2011-12-13 2013-06-20 Alcon Research, Ltd. Active drainage systems with dual-input pressure-driven valves
US9074770B2 (en) 2011-12-15 2015-07-07 Honeywell International Inc. Gas valve with electronic valve proving system
US9835265B2 (en) 2011-12-15 2017-12-05 Honeywell International Inc. Valve with actuator diagnostics
US8947242B2 (en) 2011-12-15 2015-02-03 Honeywell International Inc. Gas valve with valve leakage test
US8899264B2 (en) 2011-12-15 2014-12-02 Honeywell International Inc. Gas valve with electronic proof of closure system
US9995486B2 (en) 2011-12-15 2018-06-12 Honeywell International Inc. Gas valve with high/low gas pressure detection
US9557059B2 (en) 2011-12-15 2017-01-31 Honeywell International Inc Gas valve with communication link
US9846440B2 (en) 2011-12-15 2017-12-19 Honeywell International Inc. Valve controller configured to estimate fuel comsumption
US8905063B2 (en) 2011-12-15 2014-12-09 Honeywell International Inc. Gas valve with fuel rate monitor
US8839815B2 (en) 2011-12-15 2014-09-23 Honeywell International Inc. Gas valve with electronic cycle counter
US9851103B2 (en) 2011-12-15 2017-12-26 Honeywell International Inc. Gas valve with overpressure diagnostics
US9339187B2 (en) 2011-12-15 2016-05-17 Alcon Research, Ltd. External pressure measurement system and method for an intraocular implant
FR2984756B1 (fr) * 2011-12-27 2014-02-21 Commissariat Energie Atomique Dispositif nano et micro fluidique pour la separation et concentration de particules presentes dans un fluide
US20150014557A1 (en) * 2012-01-31 2015-01-15 Jatco Ltd. Automatic transmission control valve body structure
GB2500658A (en) * 2012-03-28 2013-10-02 Dna Electronics Ltd Biosensor device and system
RS65875B1 (sr) 2012-03-30 2024-09-30 Insulet Corp Sredstvo za isporučivanje tečnosti sa alatom za transkutani pristup, mehanizmom za inserciju i praćenje nivoa glukoze u krvi za istovremenu upotrebu
ES2385079B1 (es) * 2012-05-08 2013-05-24 Leventon S.A.U. Reductor de presión para el suministro de medicamentos a un paciente y procedimiento de fabricación correspondiente
EP2695628A1 (de) * 2012-08-07 2014-02-12 Sanofi-Aventis Deutschland GmbH Ausgabeschnittstelle für eine Ausgabevorrichtung
US9234661B2 (en) 2012-09-15 2016-01-12 Honeywell International Inc. Burner control system
US10422531B2 (en) 2012-09-15 2019-09-24 Honeywell International Inc. System and approach for controlling a combustion chamber
US9572712B2 (en) 2012-12-17 2017-02-21 Novartis Ag Osmotically actuated fluidic valve
US9528633B2 (en) 2012-12-17 2016-12-27 Novartis Ag MEMS check valve
US9295389B2 (en) 2012-12-17 2016-03-29 Novartis Ag Systems and methods for priming an intraocular pressure sensor in an intraocular implant
EP2754935A1 (de) 2013-01-10 2014-07-16 Debiotech S.A. Einstellbarer passiver Durchflussregler
CN105874254B (zh) 2013-01-11 2020-07-14 迷你泵有限责任公司 隔膜式止回阀及其制造方法
CN104956279B (zh) * 2013-01-28 2018-02-27 株式会社岛津制作所 气体压力控制器
KR101476042B1 (ko) 2013-07-09 2014-12-23 김용무 약물주입용 레귤레이터 장치 및 이를 구비한 약물주입장치
US9561324B2 (en) 2013-07-19 2017-02-07 Bigfoot Biomedical, Inc. Infusion pump system and method
US9226851B2 (en) 2013-08-24 2016-01-05 Novartis Ag MEMS check valve chip and methods
EP2868970B1 (de) 2013-10-29 2020-04-22 Honeywell Technologies Sarl Regelungsvorrichtung
US10024439B2 (en) 2013-12-16 2018-07-17 Honeywell International Inc. Valve over-travel mechanism
KR101576052B1 (ko) * 2014-03-27 2015-12-09 연세대학교 산학협력단 다공성 중공 이산화티타늄 나노입자를 포함하는 이산화탄소 분리막 및 이의 제조방법
US20150316047A1 (en) * 2014-04-30 2015-11-05 Texas Instruments Incorporated Fluid pump having material displaceable responsive to electrical energy
US9841122B2 (en) 2014-09-09 2017-12-12 Honeywell International Inc. Gas valve with electronic valve proving system
US9645584B2 (en) 2014-09-17 2017-05-09 Honeywell International Inc. Gas valve with electronic health monitoring
TWI557321B (zh) 2015-06-25 2016-11-11 科際精密股份有限公司 壓電泵及其操作方法
EP3320408A1 (de) 2015-07-10 2018-05-16 Pivotal Systems Corporation Verfahren und vorrichtung für gasflusssteuerung
WO2017091624A1 (en) 2015-11-24 2017-06-01 Insulet Corporation Wearable automated medication delivery system
US10503181B2 (en) 2016-01-13 2019-12-10 Honeywell International Inc. Pressure regulator
US10275573B2 (en) 2016-01-13 2019-04-30 Bigfoot Biomedical, Inc. User interface for diabetes management system
CN108495665B (zh) 2016-01-14 2021-04-09 比格福特生物医药公司 调整胰岛素输送速率
HK1256995A1 (zh) 2016-01-14 2019-10-11 Bigfoot Biomedical, Inc. 药物输送设备、系统和方法中的阻塞解决方案
US12383166B2 (en) 2016-05-23 2025-08-12 Insulet Corporation Insulin delivery system and methods with risk-based set points
EP3871708A3 (de) 2016-05-26 2022-01-19 Insulet Corporation Tragbares medikamentenverabreichungssystem mit vorgefüllter kartusche
EP3281910B1 (de) * 2016-08-11 2019-10-02 IMEC vzw Verfahren zur herstellung von mikro-rohren auf einem substrat und daraus hergestellte struktur
WO2018031891A1 (en) 2016-08-12 2018-02-15 Insulet Corporation Plunger for drug delivery device
EP3496789A1 (de) 2016-08-14 2019-06-19 Insulet Corporation Automatische wirkstofffreisetzungsvorrichtung mit auslösemechanismus
DE102016217435B4 (de) * 2016-09-13 2018-08-02 Albert-Ludwigs-Universität Freiburg Fluidpumpe und Verfahren zum Betreiben einer Fluidpumpe
WO2018067645A1 (en) 2016-10-07 2018-04-12 Insulet Corporation Multi-stage delivery system
US10564062B2 (en) 2016-10-19 2020-02-18 Honeywell International Inc. Human-machine interface for gas valve
US10780217B2 (en) 2016-11-10 2020-09-22 Insulet Corporation Ratchet drive for on body delivery system
EP3500161A4 (de) 2016-12-12 2020-01-08 Bigfoot Biomedical, Inc. Alarme und warnungen für medikamentenabgabevorrichtungen und zugehörige systeme und verfahren
US10881792B2 (en) 2017-01-13 2021-01-05 Bigfoot Biomedical, Inc. System and method for adjusting insulin delivery
US10758675B2 (en) 2017-01-13 2020-09-01 Bigfoot Biomedical, Inc. System and method for adjusting insulin delivery
EP3568859B1 (de) 2017-01-13 2025-12-10 Insulet Corporation Insulinverabreichungsverfahren, -systeme und -vorrichtungen
WO2018132723A1 (en) 2017-01-13 2018-07-19 Mazlish Bryan Insulin delivery methods, systems and devices
US10500334B2 (en) 2017-01-13 2019-12-10 Bigfoot Biomedical, Inc. System and method for adjusting insulin delivery
US10603440B2 (en) 2017-01-19 2020-03-31 Insulet Corporation Cartridge hold-up volume reduction
US10695485B2 (en) 2017-03-07 2020-06-30 Insulet Corporation Very high volume user filled drug delivery device
US10973978B2 (en) 2017-08-03 2021-04-13 Insulet Corporation Fluid flow regulation arrangements for drug delivery devices
US11280327B2 (en) 2017-08-03 2022-03-22 Insulet Corporation Micro piston pump
US11786668B2 (en) 2017-09-25 2023-10-17 Insulet Corporation Drug delivery devices, systems, and methods with force transfer elements
US11073281B2 (en) 2017-12-29 2021-07-27 Honeywell International Inc. Closed-loop programming and control of a combustion appliance
WO2019158997A1 (en) 2018-02-16 2019-08-22 Cequr Sa Devices and methods for flow restriction in a microfluidic circuit for drug delivery
USD928199S1 (en) 2018-04-02 2021-08-17 Bigfoot Biomedical, Inc. Medication delivery device with icons
ES2968846T3 (es) 2018-05-02 2024-05-14 Cequr Sa Dispositivos y métodos para proporcionar una dosis en bolo en un circuito microfluídico de una bomba
US10874803B2 (en) 2018-05-31 2020-12-29 Insulet Corporation Drug cartridge with drive system
CN116221080A (zh) 2018-05-31 2023-06-06 株式会社村田制作所 泵
US11229736B2 (en) 2018-06-06 2022-01-25 Insulet Corporation Linear shuttle pump for drug delivery
US10697815B2 (en) 2018-06-09 2020-06-30 Honeywell International Inc. System and methods for mitigating condensation in a sensor module
WO2020113006A1 (en) 2018-11-28 2020-06-04 Insulet Corporation Drug delivery shuttle pump system and valve assembly
USD920343S1 (en) 2019-01-09 2021-05-25 Bigfoot Biomedical, Inc. Display screen or portion thereof with graphical user interface associated with insulin delivery
IT201900005808A1 (it) * 2019-04-15 2020-10-15 St Microelectronics Srl Dispositivo mems a micropompa per la movimentazione o eiezione di un fluido, in particolare microsoffiante o flussimetro
EP4051903A1 (de) 2019-10-29 2022-09-07 Quantum-Si Incorporated Peristaltisches pumpen von fluiden und zugehörige verfahren, systeme und vorrichtungen
US11369735B2 (en) 2019-11-05 2022-06-28 Insulet Corporation Component positioning of a linear shuttle pump
US11701503B2 (en) 2020-07-31 2023-07-18 Medtronic Ps Medical, Inc. System and method for valve control
US12059542B2 (en) * 2020-07-31 2024-08-13 Medtronic Ps Medical, Inc. System and method for valve control
US12433512B2 (en) 2020-12-18 2025-10-07 Insulet Corporation Adhesive pad with a metallic coil for securing an on-body medical device
US12491316B2 (en) 2020-12-18 2025-12-09 Insulet Corporation Scheduling of medicament bolus deliveries by a medicament delivery device at future dates and times with a computing device
CN116782966A (zh) 2021-01-08 2023-09-19 英赛罗公司 单致动精确剂量中间泵送室
US12440617B2 (en) 2021-01-11 2025-10-14 Insulet Corporation Linear activated drug dosing pump system
US12359903B2 (en) 2021-05-28 2025-07-15 Insulet Corporation Spring-based status sensors
SE2150773A1 (en) 2021-06-16 2022-12-17 Water Stuff & Sun Gmbh Micro-electro-mechanical system fluid control
US12514980B2 (en) 2021-06-30 2026-01-06 Insulet Corporation Adjustment of medicament delivery by a medicament delivery device based on menstrual cycle phase
US12521486B2 (en) 2021-07-16 2026-01-13 Insulet Corporation Method for modification of insulin delivery during pregnancy in automatic insulin delivery systems
GB202211580D0 (en) * 2022-08-09 2022-09-21 Cambridge Entpr Ltd Implantable device
CA3275991A1 (en) 2023-01-06 2024-07-11 Insulet Corporation Automatic or manual administration of meal boluses with subsequent automatic relaxation of safety constraints
US20250109742A1 (en) * 2023-09-28 2025-04-03 Boston Scientific Scimed, Inc. Surface enhancement of a bonding surface in a piezo electric pump/valve

Family Cites Families (66)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US942112A (en) * 1909-03-03 1909-12-07 Orville Sprecher Gas-pressure regulator.
US2192042A (en) * 1936-09-25 1940-02-27 Gen Electric Fluid control mechanism
US2219408A (en) * 1937-07-22 1940-10-29 Phillips Petroleum Co Automatic valve
US2377227A (en) * 1941-06-04 1945-05-29 Donald G Griswold Pressure responsive valve
US3109451A (en) * 1961-01-23 1963-11-05 Aim Pump Corp Check valve
US3411532A (en) * 1965-08-09 1968-11-19 Western Brass Works Constant flow rate orifice devices
US3520641A (en) * 1968-11-13 1970-07-14 Acf Ind Inc Piezoelectric pump
NL7002383A (de) * 1970-02-19 1971-08-23
DE2019651A1 (de) * 1970-04-23 1971-11-04 Westinghouse Bremsen Und Appba Vorrichtung zur Regelung der Stroemungsmenge eines stroemenden Mediums
US3773073A (en) * 1971-06-24 1973-11-20 Westinghouse Air Brake Co Pneumatic logic valve
US3973410A (en) * 1973-07-27 1976-08-10 White-Westinghouse Corporation Disc-type automatic expansion valve for refrigerant
US4022244A (en) * 1973-12-14 1977-05-10 Oman William S Irrigation purge valve
US3886968A (en) * 1974-04-22 1975-06-03 Robertshaw Controls Co Flow control device
CA1027084A (en) * 1974-07-15 1978-02-28 Merton R. Fallon Apparatus and methods for dispensing fluid under pressure
US4016231A (en) * 1974-08-16 1977-04-05 Rowe Industries Division Of Coleman Cable & Wire Company Method for molding articles of thermoplastic sheet materials
US3963380A (en) * 1975-01-06 1976-06-15 Thomas Jr Lyell J Micro pump powered by piezoelectric disk benders
US4142523A (en) 1976-03-31 1979-03-06 Koninklijke Emballage Industrie Van Leer B.V. Flow control device for the intravenous administration of liquids
US4152098A (en) * 1977-01-03 1979-05-01 Clark Ivan P Micropump
US4269391A (en) * 1977-04-28 1981-05-26 Nippon Petrochemicals Co., Ltd. Valve sealing device and a valve
US4343305A (en) * 1977-10-14 1982-08-10 Dan Bron Adjustable-rate, constant output infusion set
JPS5471432A (en) * 1977-11-17 1979-06-08 Sotokazu Rikuta Flow rate constant value automatic control valve
US4159954A (en) * 1978-02-24 1979-07-03 Gangemi Ronald J Isolator filter
US4299220A (en) * 1979-05-03 1981-11-10 The Regents Of The University Of Minnesota Implantable drug infusion regulator
US4344743A (en) * 1979-12-04 1982-08-17 Bessman Samuel P Piezoelectric driven diaphragm micro-pump
US4692147A (en) * 1980-04-02 1987-09-08 Medtronic, Inc. Drug administration device
DE3025596A1 (de) * 1980-07-05 1982-02-25 Feldmühle AG, 4000 Düsseldorf Ventilscheibe aus oxidkeramischem werkstoff
US4411603A (en) * 1981-06-24 1983-10-25 Cordis Dow Corp. Diaphragm type blood pump for medical use
US4414172A (en) * 1982-05-21 1983-11-08 Filtertek, Inc. Process and apparatus for sealing a plurality of filter elements
US4450375A (en) * 1982-11-12 1984-05-22 Kiwi Coders Corporation Piezoelectric fluid control device
JPS59110967A (ja) * 1982-12-16 1984-06-27 Nec Corp 弁素子の製造方法
NL8302860A (nl) * 1983-08-15 1985-03-01 Stichting Ct Voor Micro Elektr Piezo-elektrische micropomp.
US4581624A (en) * 1984-03-01 1986-04-08 Allied Corporation Microminiature semiconductor valve
US4537680A (en) * 1984-06-04 1985-08-27 The Board Of Trustees Of The Leland Stanford Junior University Integral fluid filter and capillary
US4678904A (en) * 1984-07-06 1987-07-07 Technology Dynamics, Inc. Optical measuring device using a spectral modulation sensor having an optically resonant structure
US4756508A (en) * 1985-02-21 1988-07-12 Ford Motor Company Silicon valve
GB8513925D0 (en) * 1985-06-03 1985-07-03 Glynwed Tubes & Fittings Plug valve
US4712583A (en) * 1986-05-27 1987-12-15 Pacesetter Infusion, Ltd. Precision passive flat-top valve for medication infusion system
US4715852A (en) * 1986-07-21 1987-12-29 Eaton Corporation Implanted medication infusion device
US4943032A (en) * 1986-09-24 1990-07-24 Stanford University Integrated, microminiature electric to fluidic valve and pressure/flow regulator
JPH0817681B2 (ja) * 1986-12-26 1996-02-28 日清製粉株式会社 卵質改善剤
US4768751A (en) * 1987-10-19 1988-09-06 Ford Motor Company Silicon micromachined non-elastic flow valves
AU625518B2 (en) 1988-03-14 1992-07-16 Baxter International Inc. Systems having fixed and variable flow rate control mechanisms
JPH0614969B2 (ja) * 1988-03-15 1994-03-02 テルモ株式会社 液体濾過装置
EP0341573A3 (de) * 1988-05-13 1990-05-09 Sartorius Ag Verfahren und Vorrichtung zur Filtration von Flüssigkeiten im Cross-Flow-Betrieb
JPH0217079A (ja) * 1988-07-04 1990-01-22 Olympus Optical Co Ltd 体内埋込型注液ポンプ
US5009251A (en) * 1988-11-15 1991-04-23 Baxter International, Inc. Fluid flow control
US4869282A (en) * 1988-12-09 1989-09-26 Rosemount Inc. Micromachined valve with polyimide film diaphragm
JPH02164867A (ja) * 1988-12-15 1990-06-25 Sanyo Chem Ind Ltd 光学活性な化合物
US4903732A (en) * 1989-01-19 1990-02-27 A. K. Allen Company Piezoelectric valve
CH679555A5 (de) * 1989-04-11 1992-03-13 Westonbridge Int Ltd
DE3917423C1 (de) * 1989-05-29 1990-05-31 Buerkert Gmbh & Co Werk Ingelfingen, 7118 Ingelfingen, De
EP0429591B1 (de) * 1989-06-14 1994-08-17 Westonbridge International Limited Mikropumpe
US5019047A (en) * 1989-06-16 1991-05-28 Science Incorporated Fluid delivery apparatus
WO1991001464A1 (fr) * 1989-07-19 1991-02-07 Westonbridge International Limited Clapet anti-retour, notamment pour micropompe et micropompe munie d'un tel clapet
DE3926647A1 (de) * 1989-08-11 1991-02-14 Bosch Gmbh Robert Verfahren zur herstellung eines mikroventils
CH681168A5 (en) * 1989-11-10 1993-01-29 Westonbridge Int Ltd Micro-pump for medicinal dosing
JPH0419479A (ja) * 1990-05-15 1992-01-23 Seiko Epson Corp ダイアフラムバルブ
US5246031A (en) * 1990-08-16 1993-09-21 The Coca-Cola Company Flow-control valve especially for gasified liquids
US5163920A (en) * 1991-01-30 1992-11-17 Infusaid Inc. Flow regulator damper element
DE4139668A1 (de) * 1991-12-02 1993-06-03 Kernforschungsz Karlsruhe Mikroventil und verfahren zu dessen herstellung
US5269917A (en) * 1992-02-28 1993-12-14 Millipore Corporation Filtration apparatus having stress relief groove
US5304487A (en) * 1992-05-01 1994-04-19 Trustees Of The University Of Pennsylvania Fluid handling in mesoscale analytical devices
DE4223067C2 (de) * 1992-07-14 1997-08-07 Univ Dresden Tech Mikromechanischer Durchflußbegrenzer in Mehrschichtenstruktur
GB2270735A (en) * 1992-09-15 1994-03-23 Adrian Michael Woodward Flow control valves
US5441597A (en) * 1992-12-01 1995-08-15 Honeywell Inc. Microstructure gas valve control forming method
US5407613A (en) * 1993-11-09 1995-04-18 Schulte; Franz Process and apparatus for bending plastic pipe

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US5585011A (en) 1996-12-17
WO1995009989A1 (en) 1995-04-13
WO1995009987A1 (en) 1995-04-13
EP0722541A1 (de) 1996-07-24
US5660728A (en) 1997-08-26
DE69415549D1 (de) 1999-02-04
US5705070A (en) 1998-01-06
WO1995009988A1 (en) 1995-04-13
EP1129739A3 (de) 2003-05-02
EP1129739A2 (de) 2001-09-05
US5702618A (en) 1997-12-30
DE69431994T2 (de) 2003-10-30
EP0722540A1 (de) 1996-07-24
EP0733169A1 (de) 1996-09-25
EP1129739B1 (de) 2008-08-13
US5839467A (en) 1998-11-24
EP0733169B1 (de) 2003-01-08
DE69415683D1 (de) 1999-02-11
US5697153A (en) 1997-12-16
DE69415683T2 (de) 1999-09-09
DE69431994D1 (de) 2003-02-13
EP0722540B1 (de) 1998-12-23
DE69415549T2 (de) 1999-08-19
US5617632A (en) 1997-04-08
EP0722541B1 (de) 1998-12-30

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