DE69410917D1 - Vibrationskreisel - Google Patents

Vibrationskreisel

Info

Publication number: DE69410917D1
Authority: DE; Germany
Prior art keywords: vibratory gyroscope; vibratory; gyroscope
Prior art date: 1993-10-15
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.): Expired - Fee Related

Application number

DE69410917T

Other languages

English (en)

Other versions

DE69410917T2 (de

Inventor

Nobuo Kurata

Hobuyoshi Sugitani

Takashi Ozaki

Kenji Haradao

Kimitoshi Tsuji

Yutaka Nonomura

Takeshi Morikawa

Masayuki Okuwa

Kouji Tsukada

Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)

Toyota Motor Corp

Original Assignee

Toyota Motor Corp

Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)

1993-10-15

Filing date

1994-10-12

Publication date

1998-07-16

1994-10-12 Application filed by Toyota Motor Corp filed Critical Toyota Motor Corp

1998-07-16 Publication of DE69410917D1 publication Critical patent/DE69410917D1/de

1998-12-17 Application granted granted Critical

1998-12-17 Publication of DE69410917T2 publication Critical patent/DE69410917T2/de

2014-10-13 Anticipated expiration legal-status Critical

Status Expired - Fee Related legal-status Critical Current

Classifications

- G—PHYSICS
- G01—MEASURING; TESTING
- G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
- G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
- G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
- G01C19/5607—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using vibrating tuning forks

Landscapes

Physics & Mathematics (AREA)
Engineering & Computer Science (AREA)
General Physics & Mathematics (AREA)
Radar, Positioning & Navigation (AREA)
Remote Sensing (AREA)
Gyroscopes (AREA)

DE69410917T 1993-10-15 1994-10-12 Vibrationskreisel Expired - Fee Related DE69410917T2 (de)

Applications Claiming Priority (1)

Application Number	Priority Date	Filing Date	Title
JP5281596A JPH07113645A (ja)	1993-10-15	1993-10-15	振動ジャイロ

Publications (2)

Publication Number	Publication Date
DE69410917D1 true DE69410917D1 (de)	1998-07-16
DE69410917T2 DE69410917T2 (de)	1998-12-17

Family

ID=17641356

Family Applications (1)

Application Number	Title	Priority Date	Filing Date
DE69410917T Expired - Fee Related DE69410917T2 (de)	1993-10-15	1994-10-12	Vibrationskreisel

Country Status (4)

Country	Link
US (1)	US5585562C1 (de)
EP (1)	EP0649002B1 (de)
JP (1)	JPH07113645A (de)
DE (1)	DE69410917T2 (de)

Families Citing this family (39)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
JP3326989B2 (ja) *	1994-08-25	2002-09-24	株式会社豊田中央研究所	振動子とその調整方法および角速度センサ
US5861705A (en) *	1994-11-01	1999-01-19	Fujitsu Limited	Tuning-fork vibratory gyro and sensor system using the same
JP3392959B2 (ja) *	1994-11-01	2003-03-31	富士通株式会社	音叉形振動ジャイロ及びこれを用いたセンサシステム
US6064169A (en) *	1995-10-11	2000-05-16	The Charles Stark Draper Laboratory, Inc.	Motor amplitude control circuit in conductor-on-insulator tuning fork gyroscope
JPH09311041A (ja) *	1996-05-24	1997-12-02	Toyota Motor Corp	角速度検出装置
JPH1047971A (ja) *	1996-08-05	1998-02-20	Nippon Soken Inc	角速度センサ
JP3805837B2 (ja) *	1996-08-12	2006-08-09	トヨタ自動車株式会社	角速度検出装置
JP3752737B2 (ja) *	1996-08-12	2006-03-08	トヨタ自動車株式会社	角速度検出装置
US6281619B1 (en) *	1997-05-09	2001-08-28	Citizen Watch Co., Ltd.	Vibration gyro
JP3973742B2 (ja) *	1997-07-04	2007-09-12	日本碍子株式会社	振動型ジャイロスコープ
US6186003B1 (en) *	1997-10-06	2001-02-13	Ngk Insulators, Ltd.	Vibratory gyroscope, vibrator used in this gyroscope, method for analyzing vibration of the vibrator, method for supporting the vibrator, and method for manufacturing the vibratory gyroscope
US6651498B1 (en)	1997-10-06	2003-11-25	Ngk Insulators, Ltd.	Vibratory gyroscope, vibrator used in this gyroscope, method for analyzing vibration of the vibrator, method for supporting the vibrator, and method for manufacturing the vibratory gyroscope
DE60021499D1 (de) *	1999-10-20	2005-09-01	Murata Manufacturing Co	Winkelgeschwindigkeitsmessverfahren und Vibrationskreisel
US7523537B1 (en)	2000-07-13	2009-04-28	Custom Sensors & Technologies, Inc.	Method of manufacturing a tuning fork with reduced quadrature errror and symmetrical mass balancing
US6462530B1 (en) *	2001-01-25	2002-10-08	Bei Technologies, Inc.	Redundant rate sensor and method
JP4147784B2 (ja) *	2001-10-09	2008-09-10	富士通株式会社	角速度センサ
JP4305623B2 (ja)	2002-03-13	2009-07-29	セイコーエプソン株式会社	振動子および振動型ジャイロスコープ
AU2003901914A0 (en) *	2003-04-22	2003-05-08	Quantum Precision Instruments Pty Ltd	Quantum tunnelling transducer device
JP4163067B2 (ja) *	2003-07-14	2008-10-08	日本碍子株式会社	物理量測定方法および装置
JP4352975B2 (ja) *	2003-07-25	2009-10-28	セイコーエプソン株式会社	圧電振動片、圧電振動片の支持構造、圧電振動子及び振動型圧電ジャイロスコープ
JP2005070030A (ja) *	2003-08-04	2005-03-17	Seiko Epson Corp	ジャイロ振動子及び電子機器
FR2859526B1 (fr) *	2003-09-09	2005-11-11	Sagem	Dispositif de mesure mecanique d'un organe vibrant, et gyrometre en faisant application
JP2006030125A (ja) *	2004-07-21	2006-02-02	Fujitsu Media Device Kk	角速度センサ
JP2006058101A (ja) *	2004-08-19	2006-03-02	Seiko Epson Corp	振動片、振動子および応用機器
US7975545B2 (en) *	2006-12-08	2011-07-12	Tdk Corporation	Angular velocity sensor and angular velocity sensor device
JP4415997B2 (ja) *	2007-03-19	2010-02-17	セイコーエプソン株式会社	角速度センサおよび電子機器
JP5360362B2 (ja)	2008-07-17	2013-12-04	セイコーエプソン株式会社	角速度検出装置用回路、角速度検出装置及び故障判定システム
JP5360361B2 (ja)	2008-07-17	2013-12-04	セイコーエプソン株式会社	角速度検出装置用回路、角速度検出装置及び故障判定システム
JP5786303B2 (ja) *	2009-12-10	2015-09-30	セイコーエプソン株式会社	振動片、振動子、物理量センサー、及び電子機器
JP2011145278A (ja) *	2009-12-16	2011-07-28	Seiko Epson Corp	振動片、振動子、物理量センサー、および電子機器
JP5652155B2 (ja) *	2010-11-24	2015-01-14	セイコーエプソン株式会社	振動片、センサーユニット、電子機器、振動片の製造方法、および、センサーユニットの製造方法
WO2013061558A1 (ja) *	2011-10-24	2013-05-02	パナソニック株式会社	角速度センサとそれに用いられる検出素子
CN103245339B (zh)	2012-02-14	2017-05-24	精工爱普生株式会社	振动片、传感器单元以及电子设备
JP6007541B2 (ja) *	2012-03-28	2016-10-12	セイコーエプソン株式会社	振動片およびその製造方法並びにジャイロセンサーおよび電子機器および移動体
JP6078968B2 (ja) *	2012-03-29	2017-02-15	セイコーエプソン株式会社	振動片の製造方法
JP5974629B2 (ja) *	2012-05-23	2016-08-23	セイコーエプソン株式会社	振動片、振動片の製造方法、角速度センサー、電子機器、移動体
JP2013253895A (ja) *	2012-06-08	2013-12-19	Seiko Epson Corp	電子デバイス、電子機器、移動体、および電子デバイスの製造方法
JP6264839B2 (ja) *	2013-10-29	2018-01-24	セイコーエプソン株式会社	振動素子、振動子、発振器、電子機器および移動体
US20170059393A1 (en) *	2015-08-26	2017-03-02	Seiko Epson Corporation	Physical Quantity Detection Device, Manufacturing Method For Physical Quantity Detection Device, Electronic Apparatus, And Moving Object

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
US5166571A (en) *	1987-08-28	1992-11-24	Nec Home Electronics, Ltd.	Vibration gyro having an H-shaped vibrator
GB2215054B (en) *	1988-02-19	1992-09-30	Yazaki Corp	Oscillatory angular velocity detecting apparatus
US4930351A (en) *	1988-03-24	1990-06-05	Wjm Corporation	Vibratory linear acceleration and angular rate sensing system
JPH02187621A (ja) *	1989-01-17	1990-07-23	Nec Home Electron Ltd	車両
JPH02218913A (ja) *	1989-02-18	1990-08-31	Nec Home Electron Ltd	振動ジャイロ
US5056366A (en) *	1989-12-26	1991-10-15	Litton Systems, Inc.	Piezoelectric vibratory rate sensor
JPH04102013A (ja) *	1990-08-21	1992-04-03	Nec Home Electron Ltd	振動ジャイロおよびその駆動方法
SE512378C2 (sv) *	1991-01-08	2000-03-06	Colibri Pro Dev Ab	För stämgaffelgyro avsett elektrodmönster

1993
- 1993-10-15 JP JP5281596A patent/JPH07113645A/ja active Pending
1994
- 1994-10-12 DE DE69410917T patent/DE69410917T2/de not_active Expired - Fee Related
- 1994-10-12 EP EP94116074A patent/EP0649002B1/de not_active Expired - Lifetime
1996
- 1996-04-30 US US08640399 patent/US5585562C1/en not_active Expired - Fee Related

Also Published As

Publication number	Publication date
US5585562C1 (en)	2001-05-01
US5585562A (en)	1996-12-17
EP0649002A1 (de)	1995-04-19
DE69410917T2 (de)	1998-12-17
EP0649002B1 (de)	1998-06-10
JPH07113645A (ja)	1995-05-02

Publication	Publication Date	Title
DE69410917D1 (de)	1998-07-16	Vibrationskreisel
DE69423014D1 (de)	2000-03-16	Vibrationskreisel
DE69207282D1 (de)	1996-02-15	Vibrationskreisel
DE69512703D1 (de)	1999-11-18	Vibrationskreisel
FI955369L (fi)	1995-11-08	Täryseula
DE69416178D1 (de)	1999-03-11	Laserkreisel
DE69636910D1 (de)	2007-03-29	Vibrationskreisel
DE69010609D1 (de)	1994-08-18	Vibrationskreisel.
DE69619307D1 (de)	2002-03-28	Vibrationskreisel
DE59409417D1 (de)	2000-08-10	Oszillator
DE69410694D1 (de)	1998-07-09	Schrittzähler
DE69207110D1 (de)	1996-02-08	Vibrationskreisel
DE69621372D1 (de)	2002-07-04	Vibrationskreisel
DE69211228D1 (de)	1996-07-11	Vibrationskreisel
DE69525419D1 (de)	2002-03-21	Vibrationskreisel
DE69610006D1 (de)	2000-10-05	Schwingkreisel
DE69316307D1 (de)	1998-02-19	Vibrator
DE69408274D1 (de)	1998-03-05	Vibrationskreisel
DE69719833D1 (de)	2003-04-24	Vibrationskreisel
DE69517657D1 (de)	2000-08-03	Schwingkreisel
DE69208787D1 (de)	1996-04-11	Vibrationskreisel
DE69604127D1 (de)	1999-10-14	Vibrationskreisel
DE69525231D1 (de)	2002-03-14	Vibrationskreisel
DE69621713D1 (de)	2002-07-18	Vibrationskreisel
DE69515437D1 (de)	2000-04-13	Schwingkreisel

Legal Events

Date	Code	Title	Description
1999-07-08	8364	No opposition during term of opposition
2001-11-08	8339	Ceased/non-payment of the annual fee