DE69409154D1 - Entladungslampe - Google Patents

Entladungslampe

Info

Publication number: DE69409154D1
Authority: DE; Germany
Prior art keywords: discharge lamp; lamp; discharge
Prior art date: 1993-05-07
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.): Expired - Lifetime

Application number

DE69409154T

Other languages

English (en)

Other versions

DE69409154T2 (de

Inventor

Tatsumi Hiramoto

Tatsushi Igarashi

Hiromitsu Matsuno

Yukio Yasuda

Akiyasu Yamaguchi

Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)

Ushio Denki KK

Original Assignee

Ushio Denki KK

Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)

1993-05-07

Filing date

1994-05-05

Publication date

1998-04-30

1994-05-05 Application filed by Ushio Denki KK filed Critical Ushio Denki KK

1998-04-30 Publication of DE69409154D1 publication Critical patent/DE69409154D1/de

1998-08-20 Application granted granted Critical

1998-08-20 Publication of DE69409154T2 publication Critical patent/DE69409154T2/de

2014-05-06 Anticipated expiration legal-status Critical

Status Expired - Lifetime legal-status Critical Current

Classifications

- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/70008—Production of exposure light, i.e. light sources
- G03F7/70016—Production of exposure light, i.e. light sources by discharge lamps
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
- H05B41/00—Circuit arrangements or apparatus for igniting or operating discharge lamps
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J61/00—Gas-discharge or vapour-discharge lamps
- H01J61/02—Details
- H01J61/12—Selection of substances for gas fillings; Specified operating pressure or temperature
- H01J61/18—Selection of substances for gas fillings; Specified operating pressure or temperature having a metallic vapour as the principal constituent
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J61/00—Gas-discharge or vapour-discharge lamps
- H01J61/82—Lamps with high-pressure unconstricted discharge having a cold pressure > 400 Torr
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J61/00—Gas-discharge or vapour-discharge lamps
- H01J61/84—Lamps with discharge constricted by high pressure
- H01J61/86—Lamps with discharge constricted by high pressure with discharge additionally constricted by close spacing of electrodes, e.g. for optical projection

Landscapes

Physics & Mathematics (AREA)
Engineering & Computer Science (AREA)
Plasma & Fusion (AREA)
General Physics & Mathematics (AREA)
Discharge Lamp (AREA)
Vessels And Coating Films For Discharge Lamps (AREA)

DE69409154T 1993-05-07 1994-05-05 Entladungslampe Expired - Lifetime DE69409154T2 (de)

Applications Claiming Priority (1)

Application Number	Priority Date	Filing Date	Title
JP5130103A JP2775694B2 (ja)	1993-05-07	1993-05-07	放電ランプ

Publications (2)

Publication Number	Publication Date
DE69409154D1 true DE69409154D1 (de)	1998-04-30
DE69409154T2 DE69409154T2 (de)	1998-08-20

Family

ID=15026023

Family Applications (1)

Application Number	Title	Priority Date	Filing Date
DE69409154T Expired - Lifetime DE69409154T2 (de)	1993-05-07	1994-05-05	Entladungslampe

Country Status (5)

Country	Link
US (1)	US5481159A (de)
EP (1)	EP0623945B1 (de)
JP (1)	JP2775694B2 (de)
KR (1)	KR100292020B1 (de)
DE (1)	DE69409154T2 (de)

Families Citing this family (14)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
US5627430A (en) *	1994-06-29	1997-05-06	Ushiodenki Kabushiki Kaisha	Discharge lamp having a cathode with a sintered tip insert
JP3077538B2 (ja) *	1994-11-29	2000-08-14	ウシオ電機株式会社	ショートアーク型水銀ランプ
JPH08195186A (ja) *	1995-01-20	1996-07-30	Ushio Inc	ショートアーク型カドミウム希ガス放電ランプ
KR100379873B1 (ko) *	1995-07-11	2003-08-21	우시오덴키 가부시키가이샤	막질개량방법
US6084351A (en) *	1996-09-06	2000-07-04	Matsushita Electric Industrial Co., Ltd.	Metal halide lamp and temperature control system therefor
DE19714009A1 (de) *	1997-04-04	1998-10-08	Patent Treuhand Ges Fuer Elektrische Gluehlampen Mbh	Gleichstrombogenlampe
DE19714008A1 (de) *	1997-04-04	1998-10-08	Patent Treuhand Ges Fuer Elektrische Gluehlampen Mbh	Gleichstrombogenlampe
EP1150337A1 (de) *	2000-04-28	2001-10-31	Toshiba Lighting & Technology Corporation	Quecksilberfreie Metallhalogenid-Entladungslampe und Kfz-Beleuchtung mit einer solchen Lampe
JP2003130801A (ja) *	2001-10-22	2003-05-08	Ushio Inc	蛍光体の検査方法および装置
US7414367B2 (en) *	2003-04-16	2008-08-19	Koninklijke Philips Electronics, N.V.	Mercury free high-pressure metal halide discharge lamp
US7265493B2 (en) *	2004-10-04	2007-09-04	General Electric Company	Mercury-free compositions and radiation sources incorporating same
WO2006043184A2 (en) *	2004-10-20	2006-04-27	Philips Intellectual Property & Standards Gmbh	High-pressure gas discharge lamp
US7847484B2 (en) *	2004-12-20	2010-12-07	General Electric Company	Mercury-free and sodium-free compositions and radiation source incorporating same
GB0922076D0 (en) *	2009-12-17	2010-02-03	Ceravision Ltd	Lamp

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
GB600495A (en) *	1945-09-24	1948-04-09	Gen Electric Co Ltd	Improvements in and relating to high pressure metal vapour electric discharge lamps
US3259777A (en) *	1961-05-09	1966-07-05	Gen Electric	Metal halide vapor discharge lamp with near molten tip electrodes
US3706000A (en) *	1970-05-11	1972-12-12	Westinghouse Electric Corp	Current-rated short-arc lamp for light projection apparatus
NL184550C (nl) *	1982-12-01	1989-08-16	Philips Nv	Gasontladingslamp.
JPS622443A (ja) *	1985-06-28	1987-01-08	Ushio Inc	フオトリソグラフイ
JP3020397B2 (ja) *	1992-11-20	2000-03-15	ウシオ電機株式会社	ショートアーク型カドミウム希ガス放電ランプおよびこれを搭載した投影露光装置
DE69402641T2 (de) *	1993-08-03	1997-08-21	Ushiodenki K K	Cadmiumentladungslampe

1993
- 1993-05-07 JP JP5130103A patent/JP2775694B2/ja not_active Expired - Fee Related
1994
- 1994-03-16 KR KR1019940005202A patent/KR100292020B1/ko not_active Expired - Fee Related
- 1994-05-04 US US08/237,906 patent/US5481159A/en not_active Expired - Lifetime
- 1994-05-05 EP EP94107078A patent/EP0623945B1/de not_active Expired - Lifetime
- 1994-05-05 DE DE69409154T patent/DE69409154T2/de not_active Expired - Lifetime

Also Published As

Publication number	Publication date
JPH06318449A (ja)	1994-11-15
JP2775694B2 (ja)	1998-07-16
EP0623945A2 (de)	1994-11-09
US5481159A (en)	1996-01-02
KR940027636A (ko)	1994-12-10
EP0623945A3 (de)	1995-10-18
KR100292020B1 (ko)	2001-06-01
EP0623945B1 (de)	1998-03-25
DE69409154T2 (de)	1998-08-20

Publication	Publication Date	Title
DE69402491D1 (de)	1997-05-15	Dielektrikumbegrenzte Entladungslampe
DE69324047D1 (de)	1999-04-22	Elektrodenlose Entladungslampe
DE59303540D1 (de)	1996-10-02	Hochdruckentladungslampe
DE69627570D1 (de)	2003-05-28	Entladungslampe
DE69616605D1 (de)	2001-12-13	Entladungslampen
DE69206921D1 (de)	1996-02-01	Elektrodenlose Entladungslampe
DE59402590D1 (de)	1997-06-05	Hochdruckentladungslampe
DE59301543D1 (de)	1996-03-14	Hochdruckentladungslampe
DE69402641D1 (de)	1997-05-22	Cadmiumentladungslampe
DE69502581D1 (de)	1998-06-25	Entladungslampe
DE69409154D1 (de)	1998-04-30	Entladungslampe
DE69405181D1 (de)	1997-10-02	Hochdruck-Entladungslampe
DE59302019D1 (de)	1996-05-02	Hochdruckentladungslampe
DE69616125D1 (de)	2001-11-29	Entladungslampe
DE69605392D1 (de)	2000-01-05	Entladungslampe
DE69406866D1 (de)	1998-01-02	Entladungslampenanordnung
DE69404926D1 (de)	1997-09-18	Hochdruck-Entladungslampe
DE69301484D1 (de)	1996-03-21	Hochdruckentladungslampe
DE59308264D1 (de)	1998-04-23	Niederdruckentladungslampe
DE69417379D1 (de)	1999-04-29	Elektrodenlose Lampe
DE69314509D1 (de)	1997-11-20	Hochdruckentladungslampe
DE69410400D1 (de)	1998-06-25	Leuchte
DE69303070D1 (de)	1996-07-18	Hochdruckentladungslampe
DE59301425D1 (de)	1996-02-29	Niederdruckentladungslampe
DE69527008D1 (de)	2002-07-18	Entladungslampe

Legal Events

Date	Code	Title	Description
1999-04-22	8364	No opposition during term of opposition