DE68926554D1 - Durchflussensor - Google Patents

Durchflussensor

Info

Publication number: DE68926554D1
Authority: DE; Germany
Prior art keywords: flow sensor; sensor; flow
Prior art date: 1988-08-04
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.): Expired - Fee Related

Application number

DE68926554T

Other languages

English (en)

Other versions

DE68926554T2 (de

Inventor

Junichi Tanaka

Akihito Jinda

Nobuyuki Tanaka

Yasuhiko Inami

Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)

Sharp Corp

Original Assignee

Sharp Corp

Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)

1988-08-04

Filing date

1989-08-01

Publication date

1996-07-04

1989-08-01 Application filed by Sharp Corp filed Critical Sharp Corp

1996-07-04 Publication of DE68926554D1 publication Critical patent/DE68926554D1/de

1996-10-31 Application granted granted Critical

1996-10-31 Publication of DE68926554T2 publication Critical patent/DE68926554T2/de

2009-08-02 Anticipated expiration legal-status Critical

Status Expired - Fee Related legal-status Critical Current

Classifications

- G—PHYSICS
- G01—MEASURING; TESTING
- G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
- G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
- G01F1/68—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using thermal effects
- G—PHYSICS
- G01—MEASURING; TESTING
- G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
- G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
- G01F1/68—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using thermal effects
- G01F1/684—Structural arrangements; Mounting of elements, e.g. in relation to fluid flow
- G01F1/688—Structural arrangements; Mounting of elements, e.g. in relation to fluid flow using a particular type of heating, cooling or sensing element
- G01F1/69—Structural arrangements; Mounting of elements, e.g. in relation to fluid flow using a particular type of heating, cooling or sensing element of resistive type
- G01F1/692—Thin-film arrangements
- G—PHYSICS
- G01—MEASURING; TESTING
- G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
- G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
- G01F1/68—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using thermal effects
- G01F1/696—Circuits therefor, e.g. constant-current flow meters
- G01F1/698—Feedback or rebalancing circuits, e.g. self heated constant temperature flowmeters
- G01F1/699—Feedback or rebalancing circuits, e.g. self heated constant temperature flowmeters by control of a separate heating or cooling element

Landscapes

Physics & Mathematics (AREA)
Fluid Mechanics (AREA)
General Physics & Mathematics (AREA)
Measuring Volume Flow (AREA)

DE68926554T 1988-08-04 1989-08-01 Durchflussensor Expired - Fee Related DE68926554T2 (de)

Applications Claiming Priority (1)

Application Number	Priority Date	Filing Date	Title
JP63195426A JPH0244211A (ja)	1988-08-04	1988-08-04	フローセンサ

Publications (2)

Publication Number	Publication Date
DE68926554D1 true DE68926554D1 (de)	1996-07-04
DE68926554T2 DE68926554T2 (de)	1996-10-31

Family

ID=16340877

Family Applications (1)

Application Number	Title	Priority Date	Filing Date
DE68926554T Expired - Fee Related DE68926554T2 (de)	1988-08-04	1989-08-01	Durchflussensor

Country Status (4)

Country	Link
US (1)	US5033299A (de)
EP (1)	EP0353996B1 (de)
JP (1)	JPH0244211A (de)
DE (1)	DE68926554T2 (de)

Families Citing this family (20)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
DE3841135C2 (de) *	1988-12-07	1998-04-09	Hiss Eckart	Meßelement
EP0471316B1 (de) *	1990-08-17	1996-09-18	Sensycon Gesellschaft Für Industrielle Sensorsysteme Und Prozessleittechnik Mbh	Sensor für thermische Massenstrommesser
DE9011927U1 (de) *	1990-08-17	1990-11-08	Degussa Ag, 6000 Frankfurt	Sensor für thermische Massenstrommesser
DE9200771U1 (de) *	1992-01-23	1992-03-12	Siemens AG, 8000 München	Vorrichtung zur thermischen Messung von Strömungsgeschwindigkeiten
JP2842729B2 (ja) *	1992-04-30	1999-01-06	三菱電機株式会社	感熱式流量センサ
DE4307513A1 (de) *	1993-03-10	1994-09-15	Bosch Gmbh Robert	Meßelement
DE4307512A1 (de) *	1993-03-10	1994-09-15	Bosch Gmbh Robert	Meßelement
DE9409318U1 (de) *	1994-06-08	1994-08-11	Murata Elektronik GmbH, 90441 Nürnberg	Strömungssensor
RU2125242C1 (ru) *	1995-11-15	1999-01-20	Ракетно-космическая корпорация "Энергия" им.С.П.Королева	Способ определения расхода и датчик для измерения расхода
JP3366818B2 (ja) *	1997-01-16	2003-01-14	株式会社日立製作所	熱式空気流量計
DE19710559A1 (de) *	1997-03-14	1998-09-17	Bosch Gmbh Robert	Sensor mit einem Dünnfilmelement
US6078030A (en) *	1998-09-09	2000-06-20	Millipore Corporation	Component heater for use in semiconductor manufacturing equipment
JP3981907B2 (ja) *	1998-10-21	2007-09-26	株式会社デンソー	流量測定装置
DE10003436B4 (de) *	1999-02-18	2009-08-13	Ifm Electronic Gmbh	Wärmeübergangskontroll- und/oder -meßgerät
RU2256156C2 (ru) *	2003-09-23	2005-07-10	Федеральное государственное унитарное предприятие "Всероссийский научно-исследовательский институт метрологии им. Д.И. Менделеева"	Калориметрический способ измерения расхода горючих газов
DE102005061703A1 (de) *	2005-12-21	2007-07-05	Innovative Sensor Technology Ist Ag	Vorrichtung zur Bestimmung und/oder Überwachung einer Prozessgrösse und Verfahren zur Herstellung einer entsprechenden Sensoreinheit
DE102007023824B4 (de) *	2007-05-21	2010-01-07	Abb Ag	Thermischer Massendurchflussmesser
JP5094212B2 (ja) *	2007-05-25	2012-12-12	日立オートモティブシステムズ株式会社	熱式流量計と制御方法
DE102010018948B4 (de) *	2010-04-30	2018-08-16	Abb Schweiz Ag	Thermischer Massendurchflussmesser mit zusätzlichen Sensormitteln sowie Verfahren zum Betrieb desselben
EP3002564A1 (de)	2014-10-01	2016-04-06	Siemens Schweiz AG	Luftstromerkennungsvorrichtung

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
DE2728060A1 (de) *	1977-06-22	1979-01-18	Bosch Gmbh Robert	Messonde mit temperaturabhaengigem widerstand zur mengenmessung
US4399697A (en) *	1980-03-26	1983-08-23	Nippon Soken, Inc.	Gas flow measuring apparatus
JPS59162413A (ja) *	1983-03-07	1984-09-13	Hitachi Ltd	熱式流量計
DE3328853C2 (de) *	1983-08-10	1994-07-14	Bosch Gmbh Robert	Vorrichtung zur Messung der Masse eines strömenden Mediums
JPH0663798B2 (ja) *	1986-05-09	1994-08-22	日本電装株式会社	熱式流量センサ
JPS63233325A (ja) *	1986-08-22	1988-09-29	Hitachi Ltd	熱膜式流量計用感温抵抗体
GB2196433B (en) *	1986-10-08	1990-10-24	Hitachi Ltd	Hot element air flow meter
DE3638138A1 (de) *	1986-11-08	1988-05-11	Bosch Gmbh Robert	Vorrichtung zur bestimmung der masse eines stroemenden mediums

1988
- 1988-08-04 JP JP63195426A patent/JPH0244211A/ja active Pending
1989
- 1989-08-01 US US07/388,334 patent/US5033299A/en not_active Expired - Lifetime
- 1989-08-01 EP EP89307812A patent/EP0353996B1/de not_active Expired - Lifetime
- 1989-08-01 DE DE68926554T patent/DE68926554T2/de not_active Expired - Fee Related

Also Published As

Publication number	Publication date
EP0353996B1 (de)	1996-05-29
JPH0244211A (ja)	1990-02-14
EP0353996A2 (de)	1990-02-07
US5033299A (en)	1991-07-23
DE68926554T2 (de)	1996-10-31
EP0353996A3 (de)	1993-02-17

Publication	Publication Date	Title
FI96722B (fi)	1996-04-30	Biologiset anturit
DE68926601D1 (de)	1996-07-11	Halbleitermessaufnehmer
DE58902396D1 (de)	1992-11-12	Positionsgeber.
DE59010549D1 (de)	1996-11-28	Elektrochemisch-enzymatischer Sensor
FI896143A7 (fi)	1990-06-25	Voimatunnistin
DE3877795D1 (de)	1993-03-11	Stroemungssensor.
FI924849L (fi)	1992-10-26	Ultraljudsgivare
KR890019684U (ko)	1989-10-05	압력센서
DE68926554D1 (de)	1996-07-04	Durchflussensor
KR900012782U (ko)	1990-07-04	감열식 유량센서
FI882697L (fi)	1989-12-09	Integrerad uppvaermbar sensor.
DE68914762D1 (de)	1994-05-26	Wegwerffühler.
KR900006772A (ko)	1990-05-08	압력 센서
DE68910080D1 (de)	1993-11-25	Sensoreinrichtung.
FI892478L (fi)	1989-11-24	Kosteusherkkä elementti
DE68904365D1 (de)	1993-02-25	Fluessigkeitsdurchflusssensor.
KR890018017U (ko)	1989-09-08	감열식 유량센서
KR890001205U (ko)	1989-03-17	열선식 유량 센서
DE68923734D1 (de)	1995-09-14	Gasfühlelement.
KR900006767A (ko)	1990-05-08	초전소자 응용센서
NO892999L (no)	1990-05-18	Sensor.
KR900011061A (ko)	1990-07-11	개선된 위치센서
KR910005037A (ko)	1991-03-29	감열식 유량 감지기
DK364189D0 (da)	1989-07-24	Sensor
KR910012243U (ko)	1991-07-30	감열식 유량센서

Legal Events

Date	Code	Title	Description
1997-03-20	8328	Change in the person/name/address of the agent	Free format text: PATENTANWAELTE MUELLER & HOFFMANN, 81667 MUENCHEN
1997-06-26	8364	No opposition during term of opposition
2004-06-09	8339	Ceased/non-payment of the annual fee