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DE60336644D1 - Mechanischen gyroskops - Google Patents

Mechanischen gyroskops

Info

Publication number
DE60336644D1
DE60336644D1 DE60336644T DE60336644T DE60336644D1 DE 60336644 D1 DE60336644 D1 DE 60336644D1 DE 60336644 T DE60336644 T DE 60336644T DE 60336644 T DE60336644 T DE 60336644T DE 60336644 D1 DE60336644 D1 DE 60336644D1
Authority
DE
Germany
Prior art keywords
mechanical gyroscopes
gyroscopes
mechanical
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE60336644T
Other languages
English (en)
Inventor
William P Platt
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Honeywell International Inc
Original Assignee
Honeywell International Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Honeywell International Inc filed Critical Honeywell International Inc
Application granted granted Critical
Publication of DE60336644D1 publication Critical patent/DE60336644D1/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
    • G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
    • G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
    • G01C19/5719—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using planar vibrating masses driven in a translation vibration along an axis

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • General Physics & Mathematics (AREA)
  • Radar, Positioning & Navigation (AREA)
  • Remote Sensing (AREA)
  • Gyroscopes (AREA)
  • Micromachines (AREA)
DE60336644T 2002-04-23 2003-04-22 Mechanischen gyroskops Expired - Lifetime DE60336644D1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US10/128,071 US6837108B2 (en) 2002-04-23 2002-04-23 Increasing the dynamic range of a MEMS gyroscope
PCT/US2003/012570 WO2004001335A2 (en) 2002-04-23 2003-04-22 Increasing the dynamic range of a mems gyroscope

Publications (1)

Publication Number Publication Date
DE60336644D1 true DE60336644D1 (de) 2011-05-19

Family

ID=29215398

Family Applications (1)

Application Number Title Priority Date Filing Date
DE60336644T Expired - Lifetime DE60336644D1 (de) 2002-04-23 2003-04-22 Mechanischen gyroskops

Country Status (7)

Country Link
US (1) US6837108B2 (de)
EP (1) EP1497616B1 (de)
JP (1) JP2005524093A (de)
AU (1) AU2003269815B2 (de)
CA (1) CA2483711A1 (de)
DE (1) DE60336644D1 (de)
WO (1) WO2004001335A2 (de)

Families Citing this family (23)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6879429B2 (en) * 2002-05-15 2005-04-12 Jds Uniphase Inc. Drive circuit for a MEMS device
AU2003276913A1 (en) * 2002-09-18 2004-04-08 Carnegie Mellon University Built-in self test of mems
DE102005010940B8 (de) * 2004-03-12 2013-01-17 Denso Corporation Elektrostatisch in Schwingungen versetzbare Anordnung
EP1645847B1 (de) * 2004-10-08 2014-07-02 STMicroelectronics Srl Mikro-elektromechanische Vorrichtung mit Temperaturkompensation und Verfahren zur Temperaturkompensation in einer mikro-elektromechanischen Vorrichtung
US7258010B2 (en) * 2005-03-09 2007-08-21 Honeywell International Inc. MEMS device with thinned comb fingers
US7302848B2 (en) * 2005-03-10 2007-12-04 The Charles Stark Draper Laboratory, Inc. Force compensated comb drive
JP2007093233A (ja) * 2005-09-27 2007-04-12 Seiko Epson Corp 角速度信号処理回路
US20070163346A1 (en) * 2006-01-18 2007-07-19 Honeywell International Inc. Frequency shifting of rotational harmonics in mems devices
US7543496B2 (en) * 2006-03-27 2009-06-09 Georgia Tech Research Corporation Capacitive bulk acoustic wave disk gyroscopes
US7401515B2 (en) * 2006-03-28 2008-07-22 Honeywell International Inc. Adaptive circuits and methods for reducing vibration or shock induced errors in inertial sensors
US20080098814A1 (en) * 2006-10-31 2008-05-01 Honeywell International Inc. Dual mode mems sensor
US8187902B2 (en) 2008-07-09 2012-05-29 The Charles Stark Draper Laboratory, Inc. High performance sensors and methods for forming the same
US8664951B2 (en) 2009-03-30 2014-03-04 Honeywell International Inc. MEMS gyroscope magnetic sensitivity reduction
US9097524B2 (en) * 2009-09-11 2015-08-04 Invensense, Inc. MEMS device with improved spring system
US8534127B2 (en) 2009-09-11 2013-09-17 Invensense, Inc. Extension-mode angular velocity sensor
FR2964652B1 (fr) * 2010-09-13 2015-05-15 Commissariat Energie Atomique Dispositif resonant, a detection piezoresistive et a resonateur relie de facon elastique au support du dispositif, et procede de fabrication de celui-ci
KR101298286B1 (ko) * 2011-11-30 2013-08-20 삼성전기주식회사 자이로센서 오프셋 자동 보정회로, 자이로센서 시스템 및 자이로센서 오프셋 자동 보정방법
EP2746724B1 (de) 2012-12-20 2017-02-22 Tronics Microsystems S.A. Mikromechanisches Gyroskop
US9534896B2 (en) 2013-03-27 2017-01-03 Honeywell International Inc. Oscillating voltage of sense electrodes in a MEMS tuning fork gyroscope
EP2887013B1 (de) 2013-12-18 2016-08-10 Tronic's Microsystems MEMS-Sensor zur Messung der Z-Achsen-Winkelgeschwindigkeit
JP6492790B2 (ja) * 2015-03-09 2019-04-03 セイコーエプソン株式会社 物理量センサー、電子機器、及び移動体
US11435229B2 (en) * 2018-10-24 2022-09-06 SA Photonics, Inc. Hyperspectral imaging systems
US20200292313A1 (en) * 2019-03-11 2020-09-17 Honeywell International Inc. In-plane non-degenerate coriolis vibratory gyroscope

Family Cites Families (18)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4105967A (en) * 1976-10-01 1978-08-08 Baxter Travenol Laboratories, Inc. Automatic range selection circuit
US4848158A (en) * 1983-03-31 1989-07-18 Honeywell Inc. Single-axis centrifugal rate sensor
JPS60222715A (ja) 1984-04-19 1985-11-07 Nippon Denso Co Ltd 振動型角速度検出装置
US4977367A (en) * 1988-01-28 1990-12-11 Bicron Corporation Range selector switch for ion chamber instrument
GB9027992D0 (en) 1990-12-22 1991-02-13 British Aerospace Piezo-electric sensors
EP0578519B1 (de) * 1992-06-11 1997-03-12 Sagem Sa Schwingstabgyroskop-Messvorrichtung mit Resonator
US5481914A (en) 1994-03-28 1996-01-09 The Charles Stark Draper Laboratory, Inc. Electronics for coriolis force and other sensors
US6064169A (en) 1995-10-11 2000-05-16 The Charles Stark Draper Laboratory, Inc. Motor amplitude control circuit in conductor-on-insulator tuning fork gyroscope
KR100327481B1 (ko) * 1995-12-27 2002-06-24 윤종용 마이크로 자이로스코프
US6250156B1 (en) * 1996-05-31 2001-06-26 The Regents Of The University Of California Dual-mass micromachined vibratory rate gyroscope
US5783973A (en) 1997-02-24 1998-07-21 The Charles Stark Draper Laboratory, Inc. Temperature insensitive silicon oscillator and precision voltage reference formed therefrom
KR100363786B1 (ko) * 1999-05-13 2002-12-11 삼성전기주식회사 마이크로 자이로스코프
KR100374812B1 (ko) 1999-11-04 2003-03-03 삼성전자주식회사 두개의 공진판을 가진 마이크로 자이로스코프
US6311555B1 (en) 1999-11-17 2001-11-06 American Gnc Corporation Angular rate producer with microelectromechanical system technology
JP2001153659A (ja) 1999-11-29 2001-06-08 Murata Mfg Co Ltd 角速度センサ
US6467346B1 (en) * 2000-06-14 2002-10-22 Hughes Electronics Corporation Coriolis sensor interface
US6445195B1 (en) 2000-08-02 2002-09-03 The Charles Stark Draper Laboratory, Inc. Drive feedthrough nulling system
US20020134154A1 (en) * 2001-03-23 2002-09-26 Hsu Ying W. Method and apparatus for on-chip measurement of micro-gyro scale factors

Also Published As

Publication number Publication date
AU2003269815B2 (en) 2007-01-18
WO2004001335A2 (en) 2003-12-31
US20030196491A1 (en) 2003-10-23
WO2004001335A3 (en) 2004-04-01
EP1497616B1 (de) 2011-04-06
CA2483711A1 (en) 2003-12-31
AU2003269815A1 (en) 2004-01-06
EP1497616A2 (de) 2005-01-19
US6837108B2 (en) 2005-01-04
JP2005524093A (ja) 2005-08-11

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