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DE60332204D1 - System zur Überwachung von Substrat-Eigenschaften - Google Patents

System zur Überwachung von Substrat-Eigenschaften

Info

Publication number
DE60332204D1
DE60332204D1 DE60332204T DE60332204T DE60332204D1 DE 60332204 D1 DE60332204 D1 DE 60332204D1 DE 60332204 T DE60332204 T DE 60332204T DE 60332204 T DE60332204 T DE 60332204T DE 60332204 D1 DE60332204 D1 DE 60332204D1
Authority
DE
Germany
Prior art keywords
substrate properties
monitoring substrate
monitoring
properties
substrate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE60332204T
Other languages
English (en)
Inventor
Frederick M Discenzo
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Rockwell Automation Technologies Inc
Original Assignee
Rockwell Automation Technologies Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from US10/254,357 external-priority patent/US6950193B1/en
Application filed by Rockwell Automation Technologies Inc filed Critical Rockwell Automation Technologies Inc
Application granted granted Critical
Publication of DE60332204D1 publication Critical patent/DE60332204D1/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
    • G01B11/06—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material
    • G01B11/0608—Height gauges
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
    • G01B11/06—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
    • G01B11/06—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material
    • G01B11/0616—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material of coating
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02K—DYNAMO-ELECTRIC MACHINES
    • H02K11/00—Structural association of dynamo-electric machines with electric components or with devices for shielding, monitoring or protection
    • H02K11/20—Structural association of dynamo-electric machines with electric components or with devices for shielding, monitoring or protection for measuring, monitoring, testing, protecting or switching
    • H02K11/25—Devices for sensing temperature, or actuated thereby
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02K—DYNAMO-ELECTRIC MACHINES
    • H02K11/00—Structural association of dynamo-electric machines with electric components or with devices for shielding, monitoring or protection
    • H02K11/30—Structural association with control circuits or drive circuits
    • H02K11/35—Devices for recording or transmitting machine parameters, e.g. memory chips or radio transmitters for diagnosis
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02K—DYNAMO-ELECTRIC MACHINES
    • H02K5/00—Casings; Enclosures; Supports
    • H02K5/04—Casings or enclosures characterised by the shape, form or construction thereof
    • H02K5/14—Means for supporting or protecting brushes or brush holders

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Power Engineering (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Mechanical Treatment Of Semiconductor (AREA)
DE60332204T 2002-09-25 2003-08-25 System zur Überwachung von Substrat-Eigenschaften Expired - Lifetime DE60332204D1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US10/254,357 US6950193B1 (en) 1997-10-28 2002-09-25 System for monitoring substrate conditions

Publications (1)

Publication Number Publication Date
DE60332204D1 true DE60332204D1 (de) 2010-06-02

Family

ID=31977823

Family Applications (1)

Application Number Title Priority Date Filing Date
DE60332204T Expired - Lifetime DE60332204D1 (de) 2002-09-25 2003-08-25 System zur Überwachung von Substrat-Eigenschaften

Country Status (2)

Country Link
EP (1) EP1403613B1 (de)
DE (1) DE60332204D1 (de)

Families Citing this family (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20110126617A1 (en) * 2007-09-03 2011-06-02 Koninklijke Philips Electronics N.V. Laser sensor based system for status detection of tires
GB2479942A (en) * 2010-04-30 2011-11-02 Vestas Wind Sys As Optical sensor for power electronics module
US8836197B2 (en) * 2012-03-23 2014-09-16 General Electric Company Brush holder having radio frequency identification (RFID)temperature monitoring system
EP2943741B1 (de) 2013-01-09 2019-06-12 Defelsko Corporation Vorrichtung und verfahren zur charakterisierung eines kopierten bandes
EP3262387B1 (de) * 2015-02-27 2019-04-10 Nils Schopohl Sensorvorrichtung für reifen
DE102016207312A1 (de) * 2016-04-28 2017-11-02 Schunk Bahn- Und Industrietechnik Gmbh Messvorrichtung und Verfahren zur Messung eines Verschleißzustandes
CN107877355B (zh) * 2017-12-19 2023-08-11 浙江大学台州研究院 一种高可靠的研磨机关停控制装置及其方法
US12255110B2 (en) * 2021-04-14 2025-03-18 Samsung Electronics Co., Ltd. Methods and systems for real-time quality control of a film in a spin coating process
CN114324388A (zh) * 2021-12-17 2022-04-12 武汉科技大学 一种基于激光的轮胎磨损检测装置和方法
GB2614740A (en) * 2022-01-18 2023-07-19 Siemens Energy AS Wear sensor

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2592744B1 (fr) * 1986-01-06 1988-10-07 Ferraz Dispositif pour la detection du seuil d'usure des contacts electriques du type a frottement
US5910846A (en) * 1996-05-16 1999-06-08 Micron Technology, Inc. Method and apparatus for detecting the endpoint in chemical-mechanical polishing of semiconductor wafers
US6111634A (en) * 1997-05-28 2000-08-29 Lam Research Corporation Method and apparatus for in-situ monitoring of thickness using a multi-wavelength spectrometer during chemical-mechanical polishing
US6111643A (en) * 1997-10-28 2000-08-29 Reliance Electric Industrial Company Apparatus, system and method for determining wear of an article

Also Published As

Publication number Publication date
EP1403613B1 (de) 2010-04-21
EP1403613A1 (de) 2004-03-31

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition