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DE60325556D1 - Kollektor mit hohem Wirkungsgrad - Google Patents

Kollektor mit hohem Wirkungsgrad

Info

Publication number
DE60325556D1
DE60325556D1 DE60325556T DE60325556T DE60325556D1 DE 60325556 D1 DE60325556 D1 DE 60325556D1 DE 60325556 T DE60325556 T DE 60325556T DE 60325556 T DE60325556 T DE 60325556T DE 60325556 D1 DE60325556 D1 DE 60325556D1
Authority
DE
Germany
Prior art keywords
collector
high efficiency
efficiency
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE60325556T
Other languages
English (en)
Inventor
Jonathan W Arenberg
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
University of Central Florida Research Foundation Inc
Original Assignee
University of Central Florida Research Foundation Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by University of Central Florida Research Foundation Inc filed Critical University of Central Florida Research Foundation Inc
Application granted granted Critical
Publication of DE60325556D1 publication Critical patent/DE60325556D1/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B82—NANOTECHNOLOGY
    • B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y10/00—Nanotechnology for information processing, storage or transmission, e.g. quantum computing or single electron logic
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70008—Production of exposure light, i.e. light sources
    • G03F7/70033—Production of exposure light, i.e. light sources by plasma extreme ultraviolet [EUV] sources
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70058—Mask illumination systems
    • G03F7/7015—Details of optical elements
    • G03F7/70175—Lamphouse reflector arrangements or collector mirrors, i.e. collecting light from solid angle upstream of the light source

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Nanotechnology (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Theoretical Computer Science (AREA)
  • Mathematical Physics (AREA)
  • Plasma & Fusion (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • X-Ray Techniques (AREA)
  • Plasma Technology (AREA)
  • Optical Elements Other Than Lenses (AREA)
DE60325556T 2003-05-05 2003-11-20 Kollektor mit hohem Wirkungsgrad Expired - Lifetime DE60325556D1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US10/429,413 US7075713B2 (en) 2003-05-05 2003-05-05 High efficiency collector for laser plasma EUV source

Publications (1)

Publication Number Publication Date
DE60325556D1 true DE60325556D1 (de) 2009-02-12

Family

ID=32990500

Family Applications (1)

Application Number Title Priority Date Filing Date
DE60325556T Expired - Lifetime DE60325556D1 (de) 2003-05-05 2003-11-20 Kollektor mit hohem Wirkungsgrad

Country Status (4)

Country Link
US (1) US7075713B2 (de)
EP (2) EP2034490A1 (de)
JP (1) JP2004333475A (de)
DE (1) DE60325556D1 (de)

Families Citing this family (26)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4120502B2 (ja) 2003-07-14 2008-07-16 株式会社ニコン 集光光学系、光源ユニット、照明光学装置および露光装置
TWI249588B (en) * 2004-08-11 2006-02-21 Ind Tech Res Inst One kind of cavity apparatus of energy wave reflection device
JP3912407B2 (ja) * 2004-12-14 2007-05-09 カシオ計算機株式会社 光源ユニット及びプロジェクタ装置
US7482609B2 (en) * 2005-02-28 2009-01-27 Cymer, Inc. LPP EUV light source drive laser system
JP4218649B2 (ja) * 2005-03-07 2009-02-04 カシオ計算機株式会社 光源ユニット及びプロジェクタ装置
FR2899698A1 (fr) * 2006-04-07 2007-10-12 Sagem Defense Securite Dispositif de collecte de flux de rayonnement electromagnetique dans l'extreme ultraviolet
EP2083328B1 (de) * 2008-01-28 2013-06-19 Media Lario s.r.l. Kollektor für streifenden Strahlungseinfall geeignet für lasererzeugte Plasmaquellen
WO2010043288A1 (en) * 2008-10-17 2010-04-22 Asml Netherlands B.V. Collector assembly, radiation source, lithographic appparatus and device manufacturing method
EP2182412A1 (de) * 2008-11-04 2010-05-05 ASML Netherlands B.V. Strahlungsquelle und lithografische Vorrichtung
US9513569B2 (en) 2010-03-18 2016-12-06 ETH Zürich Optical collector for collecting extreme ultraviolet radiation, method for operating such an optical collector, and EUV source with such a collector
JP5670174B2 (ja) * 2010-03-18 2015-02-18 ギガフォトン株式会社 チャンバ装置および極端紫外光生成装置
US8587768B2 (en) * 2010-04-05 2013-11-19 Media Lario S.R.L. EUV collector system with enhanced EUV radiation collection
DE102010028655A1 (de) * 2010-05-06 2011-11-10 Carl Zeiss Smt Gmbh EUV-Kollektor
US9057962B2 (en) * 2010-06-18 2015-06-16 Media Lario S.R.L. Source-collector module with GIC mirror and LPP EUV light source
JP2012028759A (ja) * 2010-06-29 2012-02-09 Asml Netherlands Bv Ｅｕｖ放射源およびｅｕｖ放射を発生させる方法
US20120050706A1 (en) * 2010-08-30 2012-03-01 Media Lario S.R.L Source-collector module with GIC mirror and xenon ice EUV LPP target system
DE102011084266A1 (de) * 2011-10-11 2013-04-11 Carl Zeiss Smt Gmbh Kollektor
NL2010274C2 (en) 2012-02-11 2015-02-26 Media Lario Srl Source-collector modules for euv lithography employing a gic mirror and a lpp source.
DE102012220465A1 (de) 2012-11-09 2014-05-15 Carl Zeiss Smt Gmbh EUV-Kollektor
DE102013204441A1 (de) 2013-03-14 2014-04-03 Carl Zeiss Smt Gmbh Kollektor
NL2012499A (en) * 2013-04-17 2014-10-20 Asml Netherlands Bv Radiation collector, radiation source and lithographic apparatus.
DE102013218128A1 (de) 2013-09-11 2015-03-12 Carl Zeiss Smt Gmbh Beleuchtungssystem
DE102013218132A1 (de) 2013-09-11 2015-03-12 Carl Zeiss Smt Gmbh Kollektor
JP6498680B2 (ja) * 2014-01-27 2019-04-10 エーエスエムエル ネザーランズ ビー．ブイ． 放射源
KR102313345B1 (ko) 2014-10-02 2021-10-15 삼성전자주식회사 광대역 광원 및 이를 구비하는 광학 검사장치
US10128016B2 (en) 2016-01-12 2018-11-13 Asml Netherlands B.V. EUV element having barrier to hydrogen transport

Family Cites Families (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2198014A (en) * 1937-07-22 1940-04-23 Harry G Ott Optical system
US3078760A (en) * 1958-11-03 1963-02-26 Dietzgen Co Eugene Optical projection system
US4048490A (en) * 1976-06-11 1977-09-13 Union Carbide Corporation Apparatus for delivering relatively cold UV to a substrate
JPS63208310A (ja) * 1987-02-24 1988-08-29 Nec Corp 組立式アンテナ反射鏡
NL8801348A (nl) * 1988-05-26 1989-12-18 Philips Nv Belichtingsstelsel.
US5823662A (en) * 1994-08-25 1998-10-20 Lightware, Inc. High efficiency illumination system
US6586757B2 (en) * 1997-05-12 2003-07-01 Cymer, Inc. Plasma focus light source with active and buffer gas control
JP3602717B2 (ja) * 1998-03-11 2004-12-15 エヌ・ティ・ティ・アドバンステクノロジ株式会社 多層膜ｘ線反射鏡
DE10138313A1 (de) * 2001-01-23 2002-07-25 Zeiss Carl Kollektor für Beleuchtugnssysteme mit einer Wellenlänge < 193 nm
JP2000089000A (ja) * 1998-09-14 2000-03-31 Nikon Corp Ｘ線発生装置
US6351058B1 (en) * 1999-07-12 2002-02-26 Eg&G Ilc Technology, Inc. Xenon ceramic lamp with integrated compound reflectors
US6278764B1 (en) * 1999-07-22 2001-08-21 The Regents Of The Unviersity Of California High efficiency replicated x-ray optics and fabrication method
JP2002006096A (ja) * 2000-06-23 2002-01-09 Nikon Corp 電磁波発生装置、これを用いた半導体製造装置並びに半導体デバイスの製造方法
US6633048B2 (en) 2001-05-03 2003-10-14 Northrop Grumman Corporation High output extreme ultraviolet source

Also Published As

Publication number Publication date
EP1475807A2 (de) 2004-11-10
EP1475807B1 (de) 2008-12-31
US7075713B2 (en) 2006-07-11
EP1475807A3 (de) 2006-04-19
EP2034490A1 (de) 2009-03-11
JP2004333475A (ja) 2004-11-25
US20040223531A1 (en) 2004-11-11

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition