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DE60324654D1 - Piezoelektrische Wandler - Google Patents

Piezoelektrische Wandler

Info

Publication number
DE60324654D1
DE60324654D1 DE60324654T DE60324654T DE60324654D1 DE 60324654 D1 DE60324654 D1 DE 60324654D1 DE 60324654 T DE60324654 T DE 60324654T DE 60324654 T DE60324654 T DE 60324654T DE 60324654 D1 DE60324654 D1 DE 60324654D1
Authority
DE
Germany
Prior art keywords
piezoelectric converters
converters
piezoelectric
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE60324654T
Other languages
English (en)
Inventor
Stephen A Buhler
Karl A Littau
John S Fitch
John R Andrews
Cathie J Burke
Peter J Nystrom
Richard Schmachtenberg Iii
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Xerox Corp
Original Assignee
Xerox Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from US10/664,472 external-priority patent/US6987348B2/en
Application filed by Xerox Corp filed Critical Xerox Corp
Application granted granted Critical
Publication of DE60324654D1 publication Critical patent/DE60324654D1/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1607—Production of print heads with piezoelectric elements
    • B41J2/161—Production of print heads with piezoelectric elements of film type, deformed by bending and disposed on a diaphragm
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/14—Structure thereof only for on-demand ink jet heads
    • B41J2/14201—Structure of print heads with piezoelectric elements
    • B41J2/14233—Structure of print heads with piezoelectric elements of film type, deformed by bending and disposed on a diaphragm
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1623—Manufacturing processes bonding and adhesion
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1626—Manufacturing processes etching
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1631—Manufacturing processes photolithography
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/164—Manufacturing processes thin film formation
    • B41J2/1642—Manufacturing processes thin film formation thin film formation by CVD [chemical vapor deposition]
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/164—Manufacturing processes thin film formation
    • B41J2/1645—Manufacturing processes thin film formation thin film formation by spincoating
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/164—Manufacturing processes thin film formation
    • B41J2/1646—Manufacturing processes thin film formation thin film formation by sputtering
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/01—Manufacture or treatment
    • H10N30/07—Forming of piezoelectric or electrostrictive parts or bodies on an electrical element or another base
    • H10N30/072—Forming of piezoelectric or electrostrictive parts or bodies on an electrical element or another base by laminating or bonding of piezoelectric or electrostrictive bodies
    • H10N30/073—Forming of piezoelectric or electrostrictive parts or bodies on an electrical element or another base by laminating or bonding of piezoelectric or electrostrictive bodies by fusion of metals or by adhesives
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/20—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators
    • H10N30/204—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators using bending displacement, e.g. unimorph, bimorph or multimorph cantilever or membrane benders
    • H10N30/2047—Membrane type

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Measuring Fluid Pressure (AREA)
  • Particle Formation And Scattering Control In Inkjet Printers (AREA)
  • Diaphragms For Electromechanical Transducers (AREA)
  • Reciprocating Pumps (AREA)
  • Piezo-Electric Transducers For Audible Bands (AREA)
DE60324654T 2002-12-13 2003-12-12 Piezoelektrische Wandler Expired - Lifetime DE60324654D1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US43351202P 2002-12-13 2002-12-13
US10/664,472 US6987348B2 (en) 2002-12-13 2003-09-16 Piezoelectric transducers

Publications (1)

Publication Number Publication Date
DE60324654D1 true DE60324654D1 (de) 2008-12-24

Family

ID=32329338

Family Applications (1)

Application Number Title Priority Date Filing Date
DE60324654T Expired - Lifetime DE60324654D1 (de) 2002-12-13 2003-12-12 Piezoelektrische Wandler

Country Status (3)

Country Link
EP (1) EP1428661B1 (de)
JP (1) JP4870904B2 (de)
DE (1) DE60324654D1 (de)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2007010909A1 (ja) * 2005-07-19 2007-01-25 Mikuni Corporation 圧力センサ素子及び圧力センサ
JP5256423B2 (ja) * 2005-07-19 2013-08-07 株式会社ミクニ 圧力センサ素子及び圧力センサ
JP5168681B2 (ja) * 2005-12-12 2013-03-21 独立行政法人産業技術総合研究所 タイヤ空気圧センサおよびタイヤ空気圧監視装置
JP5734040B2 (ja) * 2011-03-22 2015-06-10 京セラ株式会社 インクジェットヘッド及び記録装置
US10516943B2 (en) 2016-05-04 2019-12-24 Infineon Technologies Ag Microelectromechanical device, an array of microelectromechanical devices, a method of manufacturing a microelectromechanical device, and a method of operating a microelectromechanical device
CN106441665A (zh) * 2016-09-26 2017-02-22 郑州航空工业管理学院 基于压电石英晶片弯曲效应的弯矩测量方法及传感器

Family Cites Families (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4613875A (en) * 1985-04-08 1986-09-23 Tektronix, Inc. Air assisted ink jet head with projecting internal ink drop-forming orifice outlet
JPS63173855A (ja) * 1987-01-12 1988-07-18 Nippon Keiki Seisakusho:Kk 圧電子ポンプ
JPH06117377A (ja) * 1992-10-02 1994-04-26 Toshiba Ceramics Co Ltd 定量ポンプ
JPH07174654A (ja) * 1993-12-20 1995-07-14 Hokuriku Electric Ind Co Ltd 圧力センサ
JPH08205273A (ja) * 1995-01-24 1996-08-09 Mitsubishi Electric Corp 骨伝導音声振動検出素子および骨伝導音声振動検出装置
JPH0976491A (ja) * 1995-09-20 1997-03-25 Nec Corp インクジェットヘッド
JPH09267494A (ja) * 1996-01-31 1997-10-14 Sony Corp プリンタ装置及びその製造方法
EP0803918B2 (de) * 1996-04-11 2010-10-20 Seiko Epson Corporation Piezolelektrischer Vibrator, diesen piezoelektrischen Vibrator verwendender Tintenstrahldruckkopf und Verfahren zur Herstellung
JP3531027B2 (ja) * 1996-10-04 2004-05-24 株式会社日立製作所 マイクロポンプおよびポンプシステム
JP3763175B2 (ja) * 1997-02-28 2006-04-05 ソニー株式会社 プリンタ装置の製造方法
US6271619B1 (en) * 1997-05-13 2001-08-07 Mitsubishi Denki Kabushiki Kaisha Piezoelectric thin film device
JP2000249074A (ja) * 1999-02-24 2000-09-12 Hitachi Ltd マイクロポンプ及びその製造方法

Also Published As

Publication number Publication date
JP4870904B2 (ja) 2012-02-08
EP1428661A3 (de) 2004-09-08
EP1428661B1 (de) 2008-11-12
EP1428661A2 (de) 2004-06-16
JP2004198421A (ja) 2004-07-15

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition