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DE60316457D1 - Dünnfilmresonator-Abzweigfilter und Verfahren zur Erdung dieser Filter - Google Patents

Dünnfilmresonator-Abzweigfilter und Verfahren zur Erdung dieser Filter

Info

Publication number
DE60316457D1
DE60316457D1 DE60316457T DE60316457T DE60316457D1 DE 60316457 D1 DE60316457 D1 DE 60316457D1 DE 60316457 T DE60316457 T DE 60316457T DE 60316457 T DE60316457 T DE 60316457T DE 60316457 D1 DE60316457 D1 DE 60316457D1
Authority
DE
Germany
Prior art keywords
fbar
coupled
metal electrode
ladder filter
thin film
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE60316457T
Other languages
English (en)
Other versions
DE60316457T2 (de
Inventor
Ngoc-Hoa Huynh
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Avago Technologies International Sales Pte Ltd
Original Assignee
Infineon Technologies AG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Infineon Technologies AG filed Critical Infineon Technologies AG
Publication of DE60316457D1 publication Critical patent/DE60316457D1/de
Application granted granted Critical
Publication of DE60316457T2 publication Critical patent/DE60316457T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/46—Filters
    • H03H9/54—Filters comprising resonators of piezoelectric or electrostrictive material
    • H03H9/56—Monolithic crystal filters
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/46—Filters
    • H03H9/54—Filters comprising resonators of piezoelectric or electrostrictive material
    • H03H9/58—Multiple crystal filters
    • H03H9/60—Electric coupling means therefor
    • H03H9/605—Electric coupling means therefor consisting of a ladder configuration
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/46—Filters
    • H03H9/54—Filters comprising resonators of piezoelectric or electrostrictive material

Landscapes

  • Physics & Mathematics (AREA)
  • Acoustics & Sound (AREA)
  • Chemical & Material Sciences (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
  • Control Of Motors That Do Not Use Commutators (AREA)
DE60316457T 2003-12-22 2003-12-22 Dünnfilmresonator-Abzweigfilter und Verfahren zur Erdung dieser Filter Expired - Lifetime DE60316457T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
EP03029610A EP1548938B1 (de) 2003-12-22 2003-12-22 Dünnfilmresonator-Abzweigfilter und Verfahren zur Erdung dieser Filter

Publications (2)

Publication Number Publication Date
DE60316457D1 true DE60316457D1 (de) 2007-10-31
DE60316457T2 DE60316457T2 (de) 2008-06-19

Family

ID=34530702

Family Applications (1)

Application Number Title Priority Date Filing Date
DE60316457T Expired - Lifetime DE60316457T2 (de) 2003-12-22 2003-12-22 Dünnfilmresonator-Abzweigfilter und Verfahren zur Erdung dieser Filter

Country Status (6)

Country Link
US (1) US6972641B2 (de)
EP (1) EP1548938B1 (de)
KR (1) KR100632134B1 (de)
CN (1) CN100466470C (de)
AT (1) ATE373892T1 (de)
DE (1) DE60316457T2 (de)

Families Citing this family (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7479847B2 (en) * 2003-11-20 2009-01-20 Panasonic Corporation Filter using piezoelectric resonator
EP1533897A3 (de) * 2003-11-20 2010-06-30 Panasonic Corporation Filter mit piezoelektrischem Resonator
FR2863789B1 (fr) * 2003-12-12 2006-09-29 St Microelectronics Sa Dispositif de resonateur acoustique
US7554422B2 (en) * 2004-09-10 2009-06-30 Panasonic Corporation Filter module using piezoelectric resonators, duplexer, communication device, and method for fabricating filter module
JP5039290B2 (ja) * 2005-08-25 2012-10-03 太陽誘電株式会社 フィルタおよびアンテナ分波器
KR101238358B1 (ko) * 2006-02-06 2013-03-04 삼성전자주식회사 대역 통과 필터 및 이를 구비한 듀플렉서
JP4181185B2 (ja) * 2006-04-27 2008-11-12 富士通メディアデバイス株式会社 フィルタおよび分波器
KR100787233B1 (ko) * 2006-11-16 2007-12-21 삼성전자주식회사 집적 소자 및 그 제조 방법
DE102006059996B4 (de) * 2006-12-19 2015-02-26 Epcos Ag Anordnung mit einem HF Bauelement und Verfahren zur Kompensation der Anbindungsinduktivität
JP5419617B2 (ja) * 2009-09-28 2014-02-19 太陽誘電株式会社 フィルタ、通信モジュール、および通信装置
CN102111124A (zh) * 2009-12-24 2011-06-29 华为技术有限公司 Fbar滤波器及其组件
KR101928359B1 (ko) * 2012-09-11 2018-12-12 삼성전자주식회사 전도성 물질을 이용하여 전기적 손실을 처리하는 공진 장치 및 그 제조 방법
CN104966868A (zh) * 2015-06-29 2015-10-07 南京理工大学 三维集成超小型带通滤波器
CN107196624B (zh) * 2016-03-15 2020-01-31 络达科技股份有限公司 具主动校准机制的声波装置
US10547287B2 (en) * 2017-02-03 2020-01-28 Samsung Electro-Mechanics Co., Ltd. Filter and front end module including the same

Family Cites Families (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6262637B1 (en) 1999-06-02 2001-07-17 Agilent Technologies, Inc. Duplexer incorporating thin-film bulk acoustic resonators (FBARs)
US6291931B1 (en) 1999-11-23 2001-09-18 Tfr Technologies, Inc. Piezoelectric resonator with layered electrodes
DE19962028A1 (de) * 1999-12-22 2001-06-28 Philips Corp Intellectual Pty Filteranordnung
US6323744B1 (en) 2000-02-04 2001-11-27 Agere Systems Guardian Corp. Grounding of TFR ladder filters
DE60138188D1 (de) * 2000-04-06 2009-05-14 Nxp Bv Abstimmbare filteranordnung
GB0014630D0 (en) * 2000-06-16 2000-08-09 Koninkl Philips Electronics Nv Bulk accoustic wave filter
US6472954B1 (en) * 2001-04-23 2002-10-29 Agilent Technologies, Inc. Controlled effective coupling coefficients for film bulk acoustic resonators
DE10127655A1 (de) * 2001-06-07 2003-01-02 Infineon Technologies Ag BAW-Filteranordnung
TW519750B (en) * 2001-06-27 2003-02-01 Asia Pacific Microsystems Inc Manufacturing method of steady-type film bulk acoustic wave device
JP4154949B2 (ja) * 2002-08-06 2008-09-24 松下電器産業株式会社 Ｓａｗフィルタ
DE10258422A1 (de) * 2002-12-13 2004-06-24 Epcos Ag Mit akustischen Volumenwellen arbeitendes Bauelement mit gekoppelten Resonatoren

Also Published As

Publication number Publication date
US20050134400A1 (en) 2005-06-23
EP1548938B1 (de) 2007-09-19
EP1548938A1 (de) 2005-06-29
CN1638273A (zh) 2005-07-13
ATE373892T1 (de) 2007-10-15
KR100632134B1 (ko) 2006-10-11
CN100466470C (zh) 2009-03-04
KR20050063701A (ko) 2005-06-28
DE60316457T2 (de) 2008-06-19
US6972641B2 (en) 2005-12-06

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8327 Change in the person/name/address of the patent owner

Owner name: AVAGO TECHNOLOGIES WIRELESS IP (SINGAPORE) PTE, SG

8328 Change in the person/name/address of the agent

Representative=s name: DILG HAEUSLER SCHINDELMANN PATENTANWALTSGESELLSCHA