DE60315059D1 - Prüfverbinder mit anisotroper leitfähigkeit - Google Patents
Prüfverbinder mit anisotroper leitfähigkeitInfo
- Publication number
- DE60315059D1 DE60315059D1 DE60315059T DE60315059T DE60315059D1 DE 60315059 D1 DE60315059 D1 DE 60315059D1 DE 60315059 T DE60315059 T DE 60315059T DE 60315059 T DE60315059 T DE 60315059T DE 60315059 D1 DE60315059 D1 DE 60315059D1
- Authority
- DE
- Germany
- Prior art keywords
- connection
- conductive
- conductive parts
- parts
- total number
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
- G01R1/02—General constructional details
- G01R1/06—Measuring leads; Measuring probes
- G01R1/067—Measuring probes
- G01R1/06711—Probe needles; Cantilever beams; "Bump" contacts; Replaceable probe pins
-
- H10P74/00—
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01R—ELECTRICALLY-CONDUCTIVE CONNECTIONS; STRUCTURAL ASSOCIATIONS OF A PLURALITY OF MUTUALLY-INSULATED ELECTRICAL CONNECTING ELEMENTS; COUPLING DEVICES; CURRENT COLLECTORS
- H01R13/00—Details of coupling devices of the kinds covered by groups H01R12/70 or H01R24/00 - H01R33/00
- H01R13/02—Contact members
- H01R13/22—Contacts for co-operating by abutting
- H01R13/24—Contacts for co-operating by abutting resilient; resiliently-mounted
- H01R13/2407—Contacts for co-operating by abutting resilient; resiliently-mounted characterized by the resilient means
- H01R13/2414—Contacts for co-operating by abutting resilient; resiliently-mounted characterized by the resilient means conductive elastomers
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
- G01R1/02—General constructional details
- G01R1/06—Measuring leads; Measuring probes
- G01R1/067—Measuring probes
- G01R1/06711—Probe needles; Cantilever beams; "Bump" contacts; Replaceable probe pins
- G01R1/06755—Material aspects
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
- G01R1/02—General constructional details
- G01R1/06—Measuring leads; Measuring probes
- G01R1/067—Measuring probes
- G01R1/073—Multiple probes
- G01R1/07307—Multiple probes with individual probe elements, e.g. needles, cantilever beams or bump contacts, fixed in relation to each other, e.g. bed of nails fixture or probe card
- G01R1/07314—Multiple probes with individual probe elements, e.g. needles, cantilever beams or bump contacts, fixed in relation to each other, e.g. bed of nails fixture or probe card the body of the probe being perpendicular to test object, e.g. bed of nails or probe with bump contacts on a rigid support
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R3/00—Apparatus or processes specially adapted for the manufacture or maintenance of measuring instruments, e.g. of probe tips
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
- G01R31/28—Testing of electronic circuits, e.g. by signal tracer
- G01R31/2851—Testing of integrated circuits [IC]
- G01R31/2886—Features relating to contacting the IC under test, e.g. probe heads; chucks
- G01R31/2889—Interfaces, e.g. between probe and tester
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01R—ELECTRICALLY-CONDUCTIVE CONNECTIONS; STRUCTURAL ASSOCIATIONS OF A PLURALITY OF MUTUALLY-INSULATED ELECTRICAL CONNECTING ELEMENTS; COUPLING DEVICES; CURRENT COLLECTORS
- H01R12/00—Structural associations of a plurality of mutually-insulated electrical connecting elements, specially adapted for printed circuits, e.g. printed circuit boards [PCB], flat or ribbon cables, or like generally planar structures, e.g. terminal strips, terminal blocks; Coupling devices specially adapted for printed circuits, flat or ribbon cables, or like generally planar structures; Terminals specially adapted for contact with, or insertion into, printed circuits, flat or ribbon cables, or like generally planar structures
- H01R12/70—Coupling devices
- H01R12/71—Coupling devices for rigid printing circuits or like structures
- H01R12/712—Coupling devices for rigid printing circuits or like structures co-operating with the surface of the printed circuit or with a coupling device exclusively provided on the surface of the printed circuit
- H01R12/714—Coupling devices for rigid printing circuits or like structures co-operating with the surface of the printed circuit or with a coupling device exclusively provided on the surface of the printed circuit with contacts abutting directly the printed circuit; Button contacts therefore provided on the printed circuit
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
- Measuring Leads Or Probes (AREA)
- Non-Insulated Conductors (AREA)
- Testing Of Individual Semiconductor Devices (AREA)
- Electron Sources, Ion Sources (AREA)
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2002232558 | 2002-08-09 | ||
| JP2002232558 | 2002-08-09 | ||
| PCT/JP2003/010057 WO2004015762A1 (ja) | 2002-08-09 | 2003-08-07 | 異方導電性コネクターおよびプローブ部材並びにウエハ検査装置およびウエハ検査方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| DE60315059D1 true DE60315059D1 (de) | 2007-08-30 |
| DE60315059T2 DE60315059T2 (de) | 2008-04-17 |
Family
ID=31711837
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| DE60315059T Expired - Lifetime DE60315059T2 (de) | 2002-08-09 | 2003-08-07 | Prüfverbinder mit anisotroper leitfähigkeit |
Country Status (8)
| Country | Link |
|---|---|
| US (1) | US7095241B2 (de) |
| EP (1) | EP1553623B1 (de) |
| KR (1) | KR100715751B1 (de) |
| CN (1) | CN100413045C (de) |
| AT (1) | ATE367650T1 (de) |
| AU (1) | AU2003254855A1 (de) |
| DE (1) | DE60315059T2 (de) |
| WO (1) | WO2004015762A1 (de) |
Families Citing this family (23)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1765032A (zh) * | 2003-03-26 | 2006-04-26 | Jsr株式会社 | 各向异性导电连接器、导电膏组分、探针部件、以及晶片检查装置和晶片检查方法 |
| US8518304B1 (en) | 2003-03-31 | 2013-08-27 | The Research Foundation Of State University Of New York | Nano-structure enhancements for anisotropic conductive material and thermal interposers |
| TWI239684B (en) * | 2003-04-16 | 2005-09-11 | Jsr Corp | Anisotropic conductive connector and electric inspection device for circuit device |
| US7446545B2 (en) * | 2003-05-08 | 2008-11-04 | Unitechno Inc. | Anisotropically conductive sheet |
| WO2006046650A1 (ja) * | 2004-10-29 | 2006-05-04 | Jsr Corporation | ウエハ検査用探針部材、ウエハ検査用プローブカードおよびウエハ検査装置 |
| US20070268032A1 (en) * | 2004-11-12 | 2007-11-22 | Jsr Corporation | Probe Member for Wafer Inspection, Probe Card for Wafer Inspection and Wafer Inspection Apparatus |
| JP4353171B2 (ja) * | 2005-02-02 | 2009-10-28 | セイコーエプソン株式会社 | 電子機器、光学パネル、検査プローブ、光学パネルの検査装置、光学パネルの検査方法 |
| JP4577109B2 (ja) * | 2005-06-20 | 2010-11-10 | パナソニック株式会社 | タッチパネル及びその製造方法 |
| DE102006059429A1 (de) * | 2006-12-15 | 2008-06-26 | Atg Luther & Maelzer Gmbh | Modul für eine Prüfvorrichtung zum Testen von Leiterplatten |
| US8410808B2 (en) * | 2007-03-30 | 2013-04-02 | Jsr Corporation | Anisotropic conductive connector, probe member and wafer inspection system |
| KR100886712B1 (ko) * | 2007-07-27 | 2009-03-04 | 주식회사 하이닉스반도체 | 반도체 패키지 및 이의 제조 방법 |
| KR100787407B1 (ko) * | 2007-08-14 | 2007-12-21 | 주식회사 파이컴 | 전기 검사 장치 및 그 제조 방법 |
| JP5650649B2 (ja) * | 2009-09-02 | 2015-01-07 | ポリマテック・ジャパン株式会社 | 異方導電体及び異方導電体の製造方法並びに異方導電体配列シート |
| JP6374642B2 (ja) * | 2012-11-28 | 2018-08-15 | 株式会社日本マイクロニクス | プローブカード及び検査装置 |
| CN105527472B (zh) * | 2014-10-17 | 2018-10-02 | 株式会社Isc | 测试座 |
| CN106568993B (zh) * | 2015-10-09 | 2019-07-30 | 苍南县三维电子塑胶有限公司 | 可编程的显示面板检测用探针结构及检测系统 |
| KR101785428B1 (ko) * | 2016-04-21 | 2017-10-16 | (주) 마이크로프랜드 | 반도체소자 테스트소켓 |
| JP2018073577A (ja) * | 2016-10-27 | 2018-05-10 | 株式会社エンプラス | 異方導電性シート及びその製造方法 |
| US10684930B2 (en) | 2017-11-30 | 2020-06-16 | International Business Machines Corporation | Functional testing of high-speed serial links |
| CN108461387B (zh) * | 2018-03-19 | 2020-06-19 | 北京北方华创微电子装备有限公司 | 功率馈入机构、旋转基座装置及半导体加工设备 |
| CN112753135B (zh) * | 2018-10-11 | 2024-05-10 | 积水保力马科技株式会社 | 电连接片及带端子的玻璃板构造 |
| KR102075669B1 (ko) * | 2018-10-26 | 2020-02-10 | 오재숙 | 신호 전송 커넥터 및 그 제조방법 |
| CN112924844A (zh) * | 2019-12-06 | 2021-06-08 | 迪科特测试科技(苏州)有限公司 | 探测装置 |
Family Cites Families (13)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2794296B2 (ja) * | 1988-08-10 | 1998-09-03 | エヌオーケー株式会社 | 成形品 |
| JP2737647B2 (ja) | 1994-03-10 | 1998-04-08 | カシオ計算機株式会社 | 異方導電性接着剤およびそれを用いた導電接続構造 |
| JPH1140224A (ja) * | 1997-07-11 | 1999-02-12 | Jsr Corp | 異方導電性シート |
| TW561266B (en) * | 1999-09-17 | 2003-11-11 | Jsr Corp | Anisotropic conductive sheet, its manufacturing method, and connector |
| JP4240724B2 (ja) * | 2000-01-26 | 2009-03-18 | Jsr株式会社 | 異方導電性シートおよびコネクター |
| DE10011806A1 (de) * | 2000-03-10 | 2001-09-13 | Fr Luerssen Werft Gmbh & Co | Abgasanlage für Wasserfahrzeuge |
| JP3541777B2 (ja) | 2000-03-15 | 2004-07-14 | ソニーケミカル株式会社 | 異方性導電接続材料 |
| TW536628B (en) * | 2000-08-09 | 2003-06-11 | Jsr Corp | Anisotropic conductive sheet |
| US6720787B2 (en) * | 2000-09-25 | 2004-04-13 | Jsr Corporation | Anisotropically conductive sheet, production process thereof and applied product thereof |
| JP4734706B2 (ja) * | 2000-11-01 | 2011-07-27 | Jsr株式会社 | 電気抵抗測定用コネクター並びに回路基板の電気抵抗測定装置および測定方法 |
| AU2002221060A1 (en) * | 2000-12-08 | 2002-06-18 | Jsr Corporation | Anisotropic conductive sheet and wafer inspection device |
| JP3543765B2 (ja) * | 2000-12-28 | 2004-07-21 | Jsr株式会社 | ウエハ検査用プローブ装置 |
| US6969622B1 (en) * | 2001-02-09 | 2005-11-29 | Jsr Corporation | Anisotropically conductive connector, its manufacture method and probe member |
-
2003
- 2003-08-07 EP EP03784570A patent/EP1553623B1/de not_active Expired - Lifetime
- 2003-08-07 AU AU2003254855A patent/AU2003254855A1/en not_active Abandoned
- 2003-08-07 US US10/522,537 patent/US7095241B2/en not_active Expired - Lifetime
- 2003-08-07 KR KR1020057001117A patent/KR100715751B1/ko not_active Expired - Fee Related
- 2003-08-07 DE DE60315059T patent/DE60315059T2/de not_active Expired - Lifetime
- 2003-08-07 AT AT03784570T patent/ATE367650T1/de not_active IP Right Cessation
- 2003-08-07 CN CNB038189100A patent/CN100413045C/zh not_active Expired - Fee Related
- 2003-08-07 WO PCT/JP2003/010057 patent/WO2004015762A1/ja not_active Ceased
Also Published As
| Publication number | Publication date |
|---|---|
| WO2004015762A1 (ja) | 2004-02-19 |
| KR100715751B1 (ko) | 2007-05-08 |
| AU2003254855A1 (en) | 2004-02-25 |
| US20060043983A1 (en) | 2006-03-02 |
| CN1675755A (zh) | 2005-09-28 |
| ATE367650T1 (de) | 2007-08-15 |
| CN100413045C (zh) | 2008-08-20 |
| US7095241B2 (en) | 2006-08-22 |
| DE60315059T2 (de) | 2008-04-17 |
| KR20050027252A (ko) | 2005-03-18 |
| EP1553623A1 (de) | 2005-07-13 |
| EP1553623A4 (de) | 2006-05-24 |
| EP1553623B1 (de) | 2007-07-18 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| 8364 | No opposition during term of opposition |