[go: up one dir, main page]

DE60315059D1 - Prüfverbinder mit anisotroper leitfähigkeit - Google Patents

Prüfverbinder mit anisotroper leitfähigkeit

Info

Publication number
DE60315059D1
DE60315059D1 DE60315059T DE60315059T DE60315059D1 DE 60315059 D1 DE60315059 D1 DE 60315059D1 DE 60315059 T DE60315059 T DE 60315059T DE 60315059 T DE60315059 T DE 60315059T DE 60315059 D1 DE60315059 D1 DE 60315059D1
Authority
DE
Germany
Prior art keywords
connection
conductive
conductive parts
parts
total number
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE60315059T
Other languages
English (en)
Other versions
DE60315059T2 (de
Inventor
Ryoji Setaka
Masaya Naoi
Katsumi Sato
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
JSR Corp
Original Assignee
JSR Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by JSR Corp filed Critical JSR Corp
Publication of DE60315059D1 publication Critical patent/DE60315059D1/de
Application granted granted Critical
Publication of DE60315059T2 publication Critical patent/DE60315059T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01RMEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02General constructional details
    • G01R1/06Measuring leads; Measuring probes
    • G01R1/067Measuring probes
    • G01R1/06711Probe needles; Cantilever beams; "Bump" contacts; Replaceable probe pins
    • H10P74/00
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01RELECTRICALLY-CONDUCTIVE CONNECTIONS; STRUCTURAL ASSOCIATIONS OF A PLURALITY OF MUTUALLY-INSULATED ELECTRICAL CONNECTING ELEMENTS; COUPLING DEVICES; CURRENT COLLECTORS
    • H01R13/00Details of coupling devices of the kinds covered by groups H01R12/70 or H01R24/00 - H01R33/00
    • H01R13/02Contact members
    • H01R13/22Contacts for co-operating by abutting
    • H01R13/24Contacts for co-operating by abutting resilient; resiliently-mounted
    • H01R13/2407Contacts for co-operating by abutting resilient; resiliently-mounted characterized by the resilient means
    • H01R13/2414Contacts for co-operating by abutting resilient; resiliently-mounted characterized by the resilient means conductive elastomers
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01RMEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02General constructional details
    • G01R1/06Measuring leads; Measuring probes
    • G01R1/067Measuring probes
    • G01R1/06711Probe needles; Cantilever beams; "Bump" contacts; Replaceable probe pins
    • G01R1/06755Material aspects
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01RMEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02General constructional details
    • G01R1/06Measuring leads; Measuring probes
    • G01R1/067Measuring probes
    • G01R1/073Multiple probes
    • G01R1/07307Multiple probes with individual probe elements, e.g. needles, cantilever beams or bump contacts, fixed in relation to each other, e.g. bed of nails fixture or probe card
    • G01R1/07314Multiple probes with individual probe elements, e.g. needles, cantilever beams or bump contacts, fixed in relation to each other, e.g. bed of nails fixture or probe card the body of the probe being perpendicular to test object, e.g. bed of nails or probe with bump contacts on a rigid support
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01RMEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R3/00Apparatus or processes specially adapted for the manufacture or maintenance of measuring instruments, e.g. of probe tips
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01RMEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28Testing of electronic circuits, e.g. by signal tracer
    • G01R31/2851Testing of integrated circuits [IC]
    • G01R31/2886Features relating to contacting the IC under test, e.g. probe heads; chucks
    • G01R31/2889Interfaces, e.g. between probe and tester
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01RELECTRICALLY-CONDUCTIVE CONNECTIONS; STRUCTURAL ASSOCIATIONS OF A PLURALITY OF MUTUALLY-INSULATED ELECTRICAL CONNECTING ELEMENTS; COUPLING DEVICES; CURRENT COLLECTORS
    • H01R12/00Structural associations of a plurality of mutually-insulated electrical connecting elements, specially adapted for printed circuits, e.g. printed circuit boards [PCB], flat or ribbon cables, or like generally planar structures, e.g. terminal strips, terminal blocks; Coupling devices specially adapted for printed circuits, flat or ribbon cables, or like generally planar structures; Terminals specially adapted for contact with, or insertion into, printed circuits, flat or ribbon cables, or like generally planar structures
    • H01R12/70Coupling devices
    • H01R12/71Coupling devices for rigid printing circuits or like structures
    • H01R12/712Coupling devices for rigid printing circuits or like structures co-operating with the surface of the printed circuit or with a coupling device exclusively provided on the surface of the printed circuit
    • H01R12/714Coupling devices for rigid printing circuits or like structures co-operating with the surface of the printed circuit or with a coupling device exclusively provided on the surface of the printed circuit with contacts abutting directly the printed circuit; Button contacts therefore provided on the printed circuit

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
  • Measuring Leads Or Probes (AREA)
  • Non-Insulated Conductors (AREA)
  • Testing Of Individual Semiconductor Devices (AREA)
  • Electron Sources, Ion Sources (AREA)
DE60315059T 2002-08-09 2003-08-07 Prüfverbinder mit anisotroper leitfähigkeit Expired - Lifetime DE60315059T2 (de)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2002232558 2002-08-09
JP2002232558 2002-08-09
PCT/JP2003/010057 WO2004015762A1 (ja) 2002-08-09 2003-08-07 異方導電性コネクターおよびプローブ部材並びにウエハ検査装置およびウエハ検査方法

Publications (2)

Publication Number Publication Date
DE60315059D1 true DE60315059D1 (de) 2007-08-30
DE60315059T2 DE60315059T2 (de) 2008-04-17

Family

ID=31711837

Family Applications (1)

Application Number Title Priority Date Filing Date
DE60315059T Expired - Lifetime DE60315059T2 (de) 2002-08-09 2003-08-07 Prüfverbinder mit anisotroper leitfähigkeit

Country Status (8)

Country Link
US (1) US7095241B2 (de)
EP (1) EP1553623B1 (de)
KR (1) KR100715751B1 (de)
CN (1) CN100413045C (de)
AT (1) ATE367650T1 (de)
AU (1) AU2003254855A1 (de)
DE (1) DE60315059T2 (de)
WO (1) WO2004015762A1 (de)

Families Citing this family (23)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1765032A (zh) * 2003-03-26 2006-04-26 Jsr株式会社 各向异性导电连接器、导电膏组分、探针部件、以及晶片检查装置和晶片检查方法
US8518304B1 (en) 2003-03-31 2013-08-27 The Research Foundation Of State University Of New York Nano-structure enhancements for anisotropic conductive material and thermal interposers
TWI239684B (en) * 2003-04-16 2005-09-11 Jsr Corp Anisotropic conductive connector and electric inspection device for circuit device
US7446545B2 (en) * 2003-05-08 2008-11-04 Unitechno Inc. Anisotropically conductive sheet
WO2006046650A1 (ja) * 2004-10-29 2006-05-04 Jsr Corporation ウエハ検査用探針部材、ウエハ検査用プローブカードおよびウエハ検査装置
US20070268032A1 (en) * 2004-11-12 2007-11-22 Jsr Corporation Probe Member for Wafer Inspection, Probe Card for Wafer Inspection and Wafer Inspection Apparatus
JP4353171B2 (ja) * 2005-02-02 2009-10-28 セイコーエプソン株式会社 電子機器、光学パネル、検査プローブ、光学パネルの検査装置、光学パネルの検査方法
JP4577109B2 (ja) * 2005-06-20 2010-11-10 パナソニック株式会社 タッチパネル及びその製造方法
DE102006059429A1 (de) * 2006-12-15 2008-06-26 Atg Luther & Maelzer Gmbh Modul für eine Prüfvorrichtung zum Testen von Leiterplatten
US8410808B2 (en) * 2007-03-30 2013-04-02 Jsr Corporation Anisotropic conductive connector, probe member and wafer inspection system
KR100886712B1 (ko) * 2007-07-27 2009-03-04 주식회사 하이닉스반도체 반도체 패키지 및 이의 제조 방법
KR100787407B1 (ko) * 2007-08-14 2007-12-21 주식회사 파이컴 전기 검사 장치 및 그 제조 방법
JP5650649B2 (ja) * 2009-09-02 2015-01-07 ポリマテック・ジャパン株式会社 異方導電体及び異方導電体の製造方法並びに異方導電体配列シート
JP6374642B2 (ja) * 2012-11-28 2018-08-15 株式会社日本マイクロニクス プローブカード及び検査装置
CN105527472B (zh) * 2014-10-17 2018-10-02 株式会社Isc 测试座
CN106568993B (zh) * 2015-10-09 2019-07-30 苍南县三维电子塑胶有限公司 可编程的显示面板检测用探针结构及检测系统
KR101785428B1 (ko) * 2016-04-21 2017-10-16 (주) 마이크로프랜드 반도체소자 테스트소켓
JP2018073577A (ja) * 2016-10-27 2018-05-10 株式会社エンプラス 異方導電性シート及びその製造方法
US10684930B2 (en) 2017-11-30 2020-06-16 International Business Machines Corporation Functional testing of high-speed serial links
CN108461387B (zh) * 2018-03-19 2020-06-19 北京北方华创微电子装备有限公司 功率馈入机构、旋转基座装置及半导体加工设备
CN112753135B (zh) * 2018-10-11 2024-05-10 积水保力马科技株式会社 电连接片及带端子的玻璃板构造
KR102075669B1 (ko) * 2018-10-26 2020-02-10 오재숙 신호 전송 커넥터 및 그 제조방법
CN112924844A (zh) * 2019-12-06 2021-06-08 迪科特测试科技(苏州)有限公司 探测装置

Family Cites Families (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2794296B2 (ja) * 1988-08-10 1998-09-03 エヌオーケー株式会社 成形品
JP2737647B2 (ja) 1994-03-10 1998-04-08 カシオ計算機株式会社 異方導電性接着剤およびそれを用いた導電接続構造
JPH1140224A (ja) * 1997-07-11 1999-02-12 Jsr Corp 異方導電性シート
TW561266B (en) * 1999-09-17 2003-11-11 Jsr Corp Anisotropic conductive sheet, its manufacturing method, and connector
JP4240724B2 (ja) * 2000-01-26 2009-03-18 Jsr株式会社 異方導電性シートおよびコネクター
DE10011806A1 (de) * 2000-03-10 2001-09-13 Fr Luerssen Werft Gmbh & Co Abgasanlage für Wasserfahrzeuge
JP3541777B2 (ja) 2000-03-15 2004-07-14 ソニーケミカル株式会社 異方性導電接続材料
TW536628B (en) * 2000-08-09 2003-06-11 Jsr Corp Anisotropic conductive sheet
US6720787B2 (en) * 2000-09-25 2004-04-13 Jsr Corporation Anisotropically conductive sheet, production process thereof and applied product thereof
JP4734706B2 (ja) * 2000-11-01 2011-07-27 Jsr株式会社 電気抵抗測定用コネクター並びに回路基板の電気抵抗測定装置および測定方法
AU2002221060A1 (en) * 2000-12-08 2002-06-18 Jsr Corporation Anisotropic conductive sheet and wafer inspection device
JP3543765B2 (ja) * 2000-12-28 2004-07-21 Jsr株式会社 ウエハ検査用プローブ装置
US6969622B1 (en) * 2001-02-09 2005-11-29 Jsr Corporation Anisotropically conductive connector, its manufacture method and probe member

Also Published As

Publication number Publication date
WO2004015762A1 (ja) 2004-02-19
KR100715751B1 (ko) 2007-05-08
AU2003254855A1 (en) 2004-02-25
US20060043983A1 (en) 2006-03-02
CN1675755A (zh) 2005-09-28
ATE367650T1 (de) 2007-08-15
CN100413045C (zh) 2008-08-20
US7095241B2 (en) 2006-08-22
DE60315059T2 (de) 2008-04-17
KR20050027252A (ko) 2005-03-18
EP1553623A1 (de) 2005-07-13
EP1553623A4 (de) 2006-05-24
EP1553623B1 (de) 2007-07-18

Similar Documents

Publication Publication Date Title
DE60315059D1 (de) Prüfverbinder mit anisotroper leitfähigkeit
EP2731226A3 (de) Stromversorgungssystem
Knite et al. Polyisoprene-carbon black nanocomposites as tensile strain and pressure sensor materials
TW362299B (en) Electronic assemblies with elastomeric members made from cured room temperature curable silicone compositions having improved stress relaxation resistance
PT1188170E (pt) Estruturas de condutancia variavel
Palakodeti et al. Influence of frequency and prestrain on the mechanical efficiency of dielectric electroactive polymer actuators
DE69838245D1 (de) Polymerzusammensetzung
EP2426787A4 (de) Schaltungsanschlussmaterial, folienähnliches schaltungsanschlussmaterial damit, struktur zur verbindung von schaltungselementen und verfahren zur verbindung von schaltungselementen
ATE421759T1 (de) Elektrisch leitfähige zusammensetzung und methode zu deren herstellung
ATE448585T1 (de) Elektrische verbindungsvorrichtung
DE602005023665D1 (de) Verriegelung für elektrische Steckverbinder
ATE363729T1 (de) Prüfverbinder mit anisotroper leitfähigkeit
EP0773560A3 (de) Elektronische Vorrichtung mit einem Thermistor-Element
ATE549770T1 (de) Untersuchungsgeräte für eine schaltungseinrichtung mit anisotropem leitfähigen verbinder
TW200511468A (en) Anisotropic conductive connector, probe member, wafer-inspecting device, and wafer-inspecting
WO2004015786A3 (en) Electrical and electro-mechanical applications of superconducting phenomena in carbon nanotubes
EP1172831A3 (de) Schalter mit mindestens einem flexiblen leitenden Element
JP6883182B2 (ja) フレキシブル加速度センサならびにそれを用いたモーションセンサ
Greig et al. Evaluation of a spring-finger based, magnetic connector concept for reliable e-textile interconnects
TW431039B (en) Connector used for card insertion and has the detection method for card insertion
EP1940207A3 (de) Elektrische Vorrichtung mit einem Trägerelement mit zumindest einer speziellen Anschlussfläche und einem oberflächenmontierten Bauelement
WO2007082125A3 (en) Method and apparatus for measurement of electrical resistance
DE502007004871D1 (de) Schienenfahrzeug mit einer branddetektionseinrichtung
DE60308894D1 (de) Elektrischer Kontakt mit elastischer Rückstellvorrichtung und elektrischer Verbindungsteil mit mindestens einem solchen Kontakt
ES2193818A1 (es) Mezclas polimericas conductoras que contienen fibras fibriladas y dispositivos.

Legal Events

Date Code Title Description
8364 No opposition during term of opposition