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DE60314875D1 - Mikroelektromechanischer hf-schalter - Google Patents

Mikroelektromechanischer hf-schalter

Info

Publication number
DE60314875D1
DE60314875D1 DE60314875T DE60314875T DE60314875D1 DE 60314875 D1 DE60314875 D1 DE 60314875D1 DE 60314875 T DE60314875 T DE 60314875T DE 60314875 T DE60314875 T DE 60314875T DE 60314875 D1 DE60314875 D1 DE 60314875D1
Authority
DE
Germany
Prior art keywords
microelectromechanic
switch
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE60314875T
Other languages
English (en)
Other versions
DE60314875T2 (de
Inventor
Lawrence E Dickens
Fred E Sacks
Howard Fudem
Iii Donald E Crockett
Frank Lindberg
Robert Young
Gregory Desalvo
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Northrop Grumman Corp
Original Assignee
Northrop Grumman Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Northrop Grumman Corp filed Critical Northrop Grumman Corp
Application granted granted Critical
Publication of DE60314875D1 publication Critical patent/DE60314875D1/de
Publication of DE60314875T2 publication Critical patent/DE60314875T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H59/00—Electrostatic relays; Electro-adhesion relays
    • H01H59/0009—Electrostatic relays; Electro-adhesion relays making use of micromechanics
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01G—CAPACITORS; CAPACITORS, RECTIFIERS, DETECTORS, SWITCHING DEVICES, LIGHT-SENSITIVE OR TEMPERATURE-SENSITIVE DEVICES OF THE ELECTROLYTIC TYPE
    • H01G5/00—Capacitors in which the capacitance is varied by mechanical means, e.g. by turning a shaft; Processes of their manufacture
    • H01G5/16—Capacitors in which the capacitance is varied by mechanical means, e.g. by turning a shaft; Processes of their manufacture using variation of distance between electrodes
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H1/00—Contacts
    • H01H1/0036—Switches making use of microelectromechanical systems [MEMS]
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H59/00—Electrostatic relays; Electro-adhesion relays
    • H01H59/0009—Electrostatic relays; Electro-adhesion relays making use of micromechanics
    • H01H2059/0072—Electrostatic relays; Electro-adhesion relays making use of micromechanics with stoppers or protrusions for maintaining a gap, reducing the contact area or for preventing stiction between the movable and the fixed electrode in the attracted position

Landscapes

  • Engineering & Computer Science (AREA)
  • Power Engineering (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Micromachines (AREA)
DE60314875T 2002-05-31 2003-05-28 Mikroelektromechanischer hf-schalter Expired - Lifetime DE60314875T2 (de)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US157935 2002-05-31
US10/157,935 US6657525B1 (en) 2002-05-31 2002-05-31 Microelectromechanical RF switch
PCT/US2003/016697 WO2003102989A1 (en) 2002-05-31 2003-05-28 Microelectromechanical rf switch

Publications (2)

Publication Number Publication Date
DE60314875D1 true DE60314875D1 (de) 2007-08-23
DE60314875T2 DE60314875T2 (de) 2008-03-13

Family

ID=29549248

Family Applications (1)

Application Number Title Priority Date Filing Date
DE60314875T Expired - Lifetime DE60314875T2 (de) 2002-05-31 2003-05-28 Mikroelektromechanischer hf-schalter

Country Status (6)

Country Link
US (1) US6657525B1 (de)
EP (1) EP1509939B1 (de)
JP (1) JP4262199B2 (de)
AU (1) AU2003243324A1 (de)
DE (1) DE60314875T2 (de)
WO (1) WO2003102989A1 (de)

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US6998946B2 (en) * 2002-09-17 2006-02-14 The Board Of Trustees Of The University Of Illinois High cycle deflection beam MEMS devices
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FR2848021B1 (fr) * 2002-11-28 2005-05-06 Commissariat Energie Atomique Micro-commutateur electrostatique pour composants a faible tension d'actionnement
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US7071888B2 (en) 2003-05-12 2006-07-04 Hrl Laboratories, Llc Steerable leaky wave antenna capable of both forward and backward radiation
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US7245269B2 (en) 2003-05-12 2007-07-17 Hrl Laboratories, Llc Adaptive beam forming antenna system using a tunable impedance surface
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FR2868591B1 (fr) * 2004-04-06 2006-06-09 Commissariat Energie Atomique Microcommutateur a faible tension d'actionnement et faible consommation
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CN100403476C (zh) * 2004-09-27 2008-07-16 东南大学 射频微电子机械单刀双掷膜开关及其制造方法
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US7605675B2 (en) * 2006-06-20 2009-10-20 Intel Corporation Electromechanical switch with partially rigidified electrode
KR20080001241A (ko) * 2006-06-29 2008-01-03 삼성전자주식회사 Ｍｅｍｓ 스위치 및 그 제조방법
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WO2008064216A2 (en) * 2006-11-20 2008-05-29 Massachusetts Institute Of Technology Micro-electro mechanical tunneling switch
JP4739173B2 (ja) * 2006-12-07 2011-08-03 富士通株式会社 マイクロスイッチング素子
JP4855233B2 (ja) * 2006-12-07 2012-01-18 富士通株式会社 マイクロスイッチング素子およびマイクロスイッチング素子製造方法
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JP4879760B2 (ja) * 2007-01-18 2012-02-22 富士通株式会社 マイクロスイッチング素子およびマイクロスイッチング素子製造方法
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Also Published As

Publication number Publication date
JP2005528751A (ja) 2005-09-22
AU2003243324A1 (en) 2003-12-19
EP1509939B1 (de) 2007-07-11
US20030227361A1 (en) 2003-12-11
EP1509939A1 (de) 2005-03-02
US6657525B1 (en) 2003-12-02
DE60314875T2 (de) 2008-03-13
JP4262199B2 (ja) 2009-05-13
WO2003102989A1 (en) 2003-12-11

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