DE60302398D1 - Poliervorrichtung - Google Patents

Poliervorrichtung

Info

Publication number: DE60302398D1
Authority: DE; Germany
Prior art keywords: polisher
Prior art date: 2002-08-29
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.): Expired - Fee Related

Application number

DE60302398T

Other languages

English (en)

Other versions

DE60302398T2 (de

Inventor

Norihiko Moriya

Satoki Kanda

Takumi Kobayashi

Atsushi Kajikura

Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)

Fujikoshi Machinery Corp

Original Assignee

Fujikoshi Machinery Corp

Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)

2002-08-29

Filing date

2003-08-28

Publication date

2005-12-29

2003-08-28 Application filed by Fujikoshi Machinery Corp filed Critical Fujikoshi Machinery Corp

2005-12-29 Publication of DE60302398D1 publication Critical patent/DE60302398D1/de

2006-07-27 Application granted granted Critical

2006-07-27 Publication of DE60302398T2 publication Critical patent/DE60302398T2/de

2023-08-29 Anticipated expiration legal-status Critical

Status Expired - Fee Related legal-status Critical Current

Classifications

- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B37/00—Lapping machines or devices; Accessories
- B24B37/04—Lapping machines or devices; Accessories designed for working plane surfaces
- B24B37/07—Lapping machines or devices; Accessories designed for working plane surfaces characterised by the movement of the work or lapping tool
- B24B37/08—Lapping machines or devices; Accessories designed for working plane surfaces characterised by the movement of the work or lapping tool for double side lapping
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B37/00—Lapping machines or devices; Accessories
- B24B37/04—Lapping machines or devices; Accessories designed for working plane surfaces
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B37/00—Lapping machines or devices; Accessories
- B24B37/11—Lapping tools
- B24B37/20—Lapping pads for working plane surfaces
- B24B37/26—Lapping pads for working plane surfaces characterised by the shape of the lapping pad surface, e.g. grooved
- H10P52/00—

Landscapes

Engineering & Computer Science (AREA)
Mechanical Engineering (AREA)
Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
Mechanical Treatment Of Semiconductor (AREA)
Grinding Of Cylindrical And Plane Surfaces (AREA)

DE60302398T 2002-08-29 2003-08-28 Poliervorrichtung Expired - Fee Related DE60302398T2 (de)

Applications Claiming Priority (4)

Application Number	Priority Date	Filing Date	Title
JP2002251381		2002-08-29
JP2002251381		2002-08-29
JP2003292132A JP2004106173A (ja)	2002-08-29	2003-08-12	両面研磨装置
JP2003292132		2003-08-12

Publications (2)

Publication Number	Publication Date
DE60302398D1 true DE60302398D1 (de)	2005-12-29
DE60302398T2 DE60302398T2 (de)	2006-07-27

Family

ID=31497689

Family Applications (1)

Application Number	Title	Priority Date	Filing Date
DE60302398T Expired - Fee Related DE60302398T2 (de)	2002-08-29	2003-08-28	Poliervorrichtung

Country Status (7)

Country	Link
US (1)	US6830505B2 (de)
EP (1)	EP1393858B1 (de)
JP (1)	JP2004106173A (de)
KR (1)	KR20040019918A (de)
CN (1)	CN100408270C (de)
DE (1)	DE60302398T2 (de)
TW (1)	TWI306794B (de)

Families Citing this family (22)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
WO2005058544A1 (en) *	2003-12-18	2005-06-30	Carl Zeiss Smt Ag	Device and method for surface working
JP4343020B2 (ja) *	2003-12-22	2009-10-14	株式会社住友金属ファインテック	両面研磨方法及び装置
JP4727218B2 (ja) *	2004-12-10	2011-07-20	株式会社住友金属ファインテック	両面研磨用キャリア
JP2007152499A (ja) *	2005-12-06	2007-06-21	Fujikoshi Mach Corp	ワーク研磨方法
JP4764782B2 (ja) *	2006-08-07	2011-09-07	株式会社チップトン	遠心バレル研磨機及び遠心バレル研磨機のワーク投入方法
US7399217B1 (en) *	2007-02-05	2008-07-15	P.R. Hoffman Machine Products	Lapping machine
KR100801489B1 (ko) *	2007-05-10	2008-02-12	한국공작기계 주식회사	매엽식 양면 래핑머신
JP4985451B2 (ja) *	2008-02-14	2012-07-25	信越半導体株式会社	ワークの両頭研削装置およびワークの両頭研削方法
JP2009196012A (ja) *	2008-02-19	2009-09-03	Disco Abrasive Syst Ltd	両面研磨装置
DE102009038942B4 (de) *	2008-10-22	2022-06-23	Peter Wolters Gmbh	Vorrichtung zur beidseitigen Bearbeitung von flachen Werkstücken sowie Verfahren zur gleichzeitigen beidseitigen Material abtragenden Bearbeitung mehrerer Halbleiterscheiben
CN102528650A (zh) *	2011-12-21	2012-07-04	贵州航天控制技术有限公司	一种挠性接头轴组合研磨夹具
CN102979870B (zh) *	2012-12-05	2015-06-17	中国科学院光电技术研究所	一种传递旋转扭矩并可轴向往复移动机构
CN102941529B (zh) *	2012-12-08	2015-11-18	中国科学院光电技术研究所	一种行星运动式研磨装置
US20140273756A1 (en) *	2013-03-14	2014-09-18	Chih Hung Chen	Substrate precession mechanism for cmp polishing head
CN103465159A (zh) *	2013-09-03	2013-12-25	宇环数控机床股份有限公司	一种应用于磨削设备的内齿圈抬升旋转机构
KR101572103B1 (ko)	2014-09-11	2015-12-04	주식회사 엘지실트론	웨이퍼 연마 장치
JP6491024B2 (ja) *	2015-04-20	2019-03-27	不二越機械工業株式会社	両面研磨装置および研磨方法
CN105904334B (zh) *	2016-06-30	2018-01-02	广东利鸿基不锈钢实业有限公司	立式自动平抛机
CN107584381A (zh) *	2017-09-29	2018-01-16	南京博尔迈兴机械设备有限公司	一种手持式汽车抛光机
CN108942567A (zh) *	2018-08-14	2018-12-07	天长市永鑫制冷设备有限公司	套筒式手持抛光装置
US11443973B2 (en) *	2019-07-12	2022-09-13	Applied Materials, Inc.	Robot for simultaneous substrate transfer
CN114959865B (zh) *	2022-07-01	2023-08-08	天朗科技有限公司	一种钢板抛光装置及抛光方法

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
GB718184A (en) *	1951-06-28	1954-11-10	Nat Res And Dev Corp	Improvements in or relating to lapping machines
US4205489A (en) *	1976-12-10	1980-06-03	Balabanov Anatoly S	Apparatus for finishing workpieces on surface-lapping machines
DE3730795A1 (de) *	1987-09-14	1989-03-23	Wolters Peter Fa	Hon-, laepp- oder poliermaschine
JPH11179649A (ja) *	1997-12-16	1999-07-06	Speedfam Co Ltd	ワークの取出方法及びワーク取出機構付き平面研磨装置
JPH11254308A (ja) *	1998-03-06	1999-09-21	Fujikoshi Mach Corp	両面研磨装置
JP4256977B2 (ja)	1999-04-13	2009-04-22	不二越機械工業株式会社	両面研磨装置システム
US6206765B1 (en) *	1999-08-16	2001-03-27	Komag, Incorporated	Non-rotational dresser for grinding stones
JP2002036099A (ja)	2000-07-21	2002-02-05	Fujikoshi Mach Corp	両面研磨装置

2003
- 2003-08-12 JP JP2003292132A patent/JP2004106173A/ja active Pending
- 2003-08-20 TW TW092122888A patent/TWI306794B/zh not_active IP Right Cessation
- 2003-08-25 KR KR1020030058592A patent/KR20040019918A/ko not_active Withdrawn
- 2003-08-25 US US10/648,680 patent/US6830505B2/en not_active Expired - Fee Related
- 2003-08-28 DE DE60302398T patent/DE60302398T2/de not_active Expired - Fee Related
- 2003-08-28 EP EP03255336A patent/EP1393858B1/de not_active Expired - Lifetime
- 2003-08-29 CN CNB031577849A patent/CN100408270C/zh not_active Expired - Fee Related

Also Published As

Publication number	Publication date
EP1393858A3 (de)	2004-06-16
KR20040019918A (ko)	2004-03-06
CN1488470A (zh)	2004-04-14
JP2004106173A (ja)	2004-04-08
EP1393858B1 (de)	2005-11-23
TWI306794B (en)	2009-03-01
CN100408270C (zh)	2008-08-06
US20040043713A1 (en)	2004-03-04
EP1393858A2 (de)	2004-03-03
TW200403132A (en)	2004-03-01
US6830505B2 (en)	2004-12-14
DE60302398T2 (de)	2006-07-27

Publication	Publication Date	Title
EP1583493A4 (de)	2011-07-20	Wundauflage
DE60237485D1 (de)	2010-10-14	Poliervorrichtung
DE60331327D1 (de)	2010-04-01	Polierbürste
NO20052802D0 (no)	2005-06-09	Pyrrolopyrimidinderivativer
IS7743A (is)	2005-03-15	Samskiptavír
DE50305852D1 (de)	2007-01-11	Einspritzventil
DE60332709D1 (de)	2010-07-08	Zünder
DE60321537D1 (de)	2008-07-24	Schtrockner
IS7405A (is)	2004-08-16	thynnupakkningatæki
DE50310083D1 (de)	2008-08-14	Phthalocyaninpigmentzubereitungen
DE60305827D1 (de)	2006-07-20	Polierzusammensetzung
DE60302398D1 (de)	2005-12-29	Poliervorrichtung
DE60330096D1 (de)	2009-12-31	Nadelabschirmanordnung
DE60333021D1 (de)	2010-07-29	Eflügels
DE60332518D1 (de)	2010-06-24	Strömungswegumschaltventil
DE60328304D1 (de)	2009-08-20	-zusammensetzungen
DE50305301D1 (de)	2006-11-16	Einspritzventil
DE60231468D1 (de)	2009-04-23	Einachsgrubber
DE60221163D1 (de)	2007-08-23	Poliermaschine
DE60218856D1 (de)	2007-04-26	Münzspeichermessung
NO20023668D0 (no)	2002-08-02	Stigerörstrekkanordning
DE60309990D1 (de)	2007-01-11	Schraubbefestigungsstruktur
IS2943B (is)	2016-03-15	Fínasteríðsamsetningar
IS7563A (is)	2004-11-29	Sýanógúanidínforlyf
EP1491849A4 (de)	2005-12-21	Zünder

Legal Events

Date	Code	Title	Description
2006-12-14	8364	No opposition during term of opposition
2007-06-28	8339	Ceased/non-payment of the annual fee