[go: up one dir, main page]

DE60300293D1 - Mit einer Kohlenstoffbeschichtung versehener Gegenstand und Verfahren zu dessen Herstellung - Google Patents

Mit einer Kohlenstoffbeschichtung versehener Gegenstand und Verfahren zu dessen Herstellung

Info

Publication number
DE60300293D1
DE60300293D1 DE60300293T DE60300293T DE60300293D1 DE 60300293 D1 DE60300293 D1 DE 60300293D1 DE 60300293 T DE60300293 T DE 60300293T DE 60300293 T DE60300293 T DE 60300293T DE 60300293 D1 DE60300293 D1 DE 60300293D1
Authority
DE
Germany
Prior art keywords
production
carbon coating
article provided
article
coating
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE60300293T
Other languages
English (en)
Other versions
DE60300293T2 (de
Inventor
Yasuo Murakami
Takashi Mikami
Hiroshi Murakami
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nissin Electric Co Ltd
Original Assignee
Nissin Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nissin Electric Co Ltd filed Critical Nissin Electric Co Ltd
Publication of DE60300293D1 publication Critical patent/DE60300293D1/de
Application granted granted Critical
Publication of DE60300293T2 publication Critical patent/DE60300293T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
    • H01J37/32055—Arc discharge
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/02—Pretreatment of the material to be coated
    • C23C14/024—Deposition of sublayers, e.g. to promote adhesion of the coating
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/0605—Carbon
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C28/00—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D
    • C23C28/30—Coatings combining at least one metallic layer and at least one inorganic non-metallic layer
    • C23C28/32—Coatings combining at least one metallic layer and at least one inorganic non-metallic layer including at least one pure metallic layer
    • C23C28/321—Coatings combining at least one metallic layer and at least one inorganic non-metallic layer including at least one pure metallic layer with at least one metal alloy layer
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C28/00—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D
    • C23C28/30—Coatings combining at least one metallic layer and at least one inorganic non-metallic layer
    • C23C28/32—Coatings combining at least one metallic layer and at least one inorganic non-metallic layer including at least one pure metallic layer
    • C23C28/322—Coatings combining at least one metallic layer and at least one inorganic non-metallic layer including at least one pure metallic layer only coatings of metal elements only
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C28/00—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D
    • C23C28/30—Coatings combining at least one metallic layer and at least one inorganic non-metallic layer
    • C23C28/34—Coatings combining at least one metallic layer and at least one inorganic non-metallic layer including at least one inorganic non-metallic material layer, e.g. metal carbide, nitride, boride, silicide layer and their mixtures, enamels, phosphates and sulphates
    • C23C28/343—Coatings combining at least one metallic layer and at least one inorganic non-metallic layer including at least one inorganic non-metallic material layer, e.g. metal carbide, nitride, boride, silicide layer and their mixtures, enamels, phosphates and sulphates with at least one DLC or an amorphous carbon based layer, the layer being doped or not
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C28/00—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D
    • C23C28/30—Coatings combining at least one metallic layer and at least one inorganic non-metallic layer
    • C23C28/34—Coatings combining at least one metallic layer and at least one inorganic non-metallic layer including at least one inorganic non-metallic material layer, e.g. metal carbide, nitride, boride, silicide layer and their mixtures, enamels, phosphates and sulphates
    • C23C28/347—Coatings combining at least one metallic layer and at least one inorganic non-metallic layer including at least one inorganic non-metallic material layer, e.g. metal carbide, nitride, boride, silicide layer and their mixtures, enamels, phosphates and sulphates with layers adapted for cutting tools or wear applications
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00—Stock material or miscellaneous articles
    • Y10T428/12—All metal or with adjacent metals
    • Y10T428/12493—Composite; i.e., plural, adjacent, spatially distinct metal components [e.g., layers, joint, etc.]
    • Y10T428/12535—Composite; i.e., plural, adjacent, spatially distinct metal components [e.g., layers, joint, etc.] with additional, spatially distinct nonmetal component
    • Y10T428/12625—Free carbon containing component
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00—Stock material or miscellaneous articles
    • Y10T428/24—Structurally defined web or sheet [e.g., overall dimension, etc.]
    • Y10T428/24942—Structurally defined web or sheet [e.g., overall dimension, etc.] including components having same physical characteristic in differing degree
    • Y10T428/2495—Thickness [relative or absolute]
    • Y10T428/24967—Absolute thicknesses specified
    • Y10T428/24975—No layer or component greater than 5 mils thick
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00—Stock material or miscellaneous articles
    • Y10T428/26—Web or sheet containing structurally defined element or component, the element or component having a specified physical dimension
    • Y10T428/263—Coating layer not in excess of 5 mils thick or equivalent
    • Y10T428/264—Up to 3 mils
    • Y10T428/265—1 mil or less
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00—Stock material or miscellaneous articles
    • Y10T428/30—Self-sustaining carbon mass or layer with impregnant or other layer
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00—Stock material or miscellaneous articles
    • Y10T428/31504—Composite [nonstructural laminate]
    • Y10T428/31678—Of metal

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Inorganic Chemistry (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • Plasma & Fusion (AREA)
  • Analytical Chemistry (AREA)
  • Physical Vapour Deposition (AREA)
DE2003600293 2002-07-10 2003-07-09 Mit einer Kohlenstoffbeschichtung versehener Gegenstand und Verfahren zu dessen Herstellung Expired - Fee Related DE60300293T2 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2002201339A JP4300762B2 (ja) 2002-07-10 2002-07-10 炭素膜被覆物品及びその製造方法
JP2002201339 2002-07-10

Publications (2)

Publication Number Publication Date
DE60300293D1 true DE60300293D1 (de) 2005-03-03
DE60300293T2 DE60300293T2 (de) 2005-12-22

Family

ID=29728460

Family Applications (1)

Application Number Title Priority Date Filing Date
DE2003600293 Expired - Fee Related DE60300293T2 (de) 2002-07-10 2003-07-09 Mit einer Kohlenstoffbeschichtung versehener Gegenstand und Verfahren zu dessen Herstellung

Country Status (7)

Country Link
US (2) US7169473B2 (de)
EP (1) EP1380667B1 (de)
JP (1) JP4300762B2 (de)
CN (1) CN1225569C (de)
DE (1) DE60300293T2 (de)
SG (1) SG105577A1 (de)
TW (1) TWI229139B (de)

Families Citing this family (19)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1598441B1 (de) * 2003-02-26 2018-09-26 Sumitomo Electric Industries, Ltd. Film aus amorphem kohlenstoff und herstellungsverfahren dafür
DE102004002678B4 (de) * 2004-01-19 2005-12-01 Siemens Ag Ventilnadel und Ventil
JP2006138404A (ja) * 2004-11-12 2006-06-01 Kobe Steel Ltd 水系環境下での耐摩耗性に優れた摺動部材
DE102006004750A1 (de) * 2005-04-11 2006-10-12 Schaeffler Kg Schaltbares Ventiltriebbauteil
US7735834B2 (en) * 2005-12-07 2010-06-15 Fev Engine Technology, Inc. Two-stroke internal combustion engine with oil ring
JP5273337B2 (ja) * 2007-06-01 2013-08-28 神奈川県 低摩擦摺動部材
EP2067983B1 (de) * 2007-12-04 2014-07-16 Continental Automotive GmbH Ventilanordnung für ein Einspritzventil und Einspritzventil
DE102009028504C5 (de) * 2009-08-13 2014-10-30 Federal-Mogul Burscheid Gmbh Kolbenring mit einer Beschichtung
DE102010062114B4 (de) * 2010-11-29 2014-12-11 Federal-Mogul Burscheid Gmbh Gleitelement, insbesondere Kolbenring, mit einer Beschichtung
JP5899584B2 (ja) * 2011-08-11 2016-04-06 株式会社ブイ・テクノロジー 真空蒸着方法、真空蒸着装置及び有機ｅｌ表示装置の製造方法
JP5627148B1 (ja) * 2013-07-24 2014-11-19 株式会社リケン ピストンリング及びその製造方法
FR3022560B1 (fr) * 2014-06-18 2022-02-25 Hydromecanique & Frottement Procede de revetement en carbone dlc du nez des cames d'un arbre a came, arbre a cames ainsi obtenu et installation pour la mise en oeuvre de ce procede
JP6586618B2 (ja) * 2014-08-07 2019-10-09 国立大学法人豊橋技術科学大学 Ｄｌｃ膜形成方法及びｄｌｃ膜形成装置
CN104847524B (zh) * 2015-05-05 2017-07-28 东风商用车有限公司 一种pvd活塞环的制备方法
JP7115849B2 (ja) * 2017-12-27 2022-08-09 株式会社リケン 摺動部材
DE102019200682A1 (de) * 2019-01-21 2020-07-23 Technische Universität Dresden Schneidwerkzeug mit räumlich strukturierter Beschichtung
DE102019200681B4 (de) * 2019-01-21 2022-09-01 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Schneidwerkzeug mit amorphem Kohlenstoff und Multilagenbeschichtung und Verfahren zu dessen Herstellung
CN111945119B (zh) * 2020-09-10 2022-05-06 东莞市华升真空镀膜科技有限公司 碳基薄膜、碳基薄膜的制备方法、刀具及应用
CN113511679A (zh) * 2021-06-30 2021-10-19 南京邮电大学 一种制备碳包覆二氧化钒正极材料的方法

Family Cites Families (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3706340A1 (de) * 1987-02-27 1988-09-08 Winter & Sohn Ernst Verfahren zum auftragen einer verschleissschutzschicht und danach hergestelltes erzeugnis
ATE101661T1 (de) * 1989-06-27 1994-03-15 Hauzer Holding Verfahren und vorrichtung zur beschichtung von substraten.
JPH046265A (ja) * 1990-04-24 1992-01-10 Toyota Central Res & Dev Lab Inc 鉄系合金基体への固体潤滑被膜の形成方法および固体潤滑被膜をもつ摺動部材
FR2728272B1 (fr) 1994-12-20 1997-01-24 Commissariat Energie Atomique Couche d'interface entre un revetement mince a base de carbone et un substrat en alliage de titane, materiau multicouche comprenant ladite couche et son procede de fabrication
US6126793A (en) * 1995-10-17 2000-10-03 Citizen Watch Co., Ltd. Method of forming films over inner surface of cylindrical member
US5902462A (en) * 1997-03-27 1999-05-11 Krauss; Alan R. Filtered cathodic arc deposition apparatus and method
DE19816491A1 (de) * 1998-04-14 1999-10-21 Hauzer Ind Bv Mehrlagen-Hartstoffschicht
US6264209B1 (en) * 1998-04-28 2001-07-24 Citizen Watch Co., Ltd. Guide bush and method of forming diamond-like carbon film over the guide bush
JP2000087218A (ja) 1998-09-10 2000-03-28 Kobe Steel Ltd 高密着性炭素皮膜形成材及びその製法
DE10005612A1 (de) 2000-02-09 2001-08-16 Hauzer Techno Coating Europ B Verfahren zur Herstellung eines Gegenstandes und Gegenstand
JP4560964B2 (ja) * 2000-02-25 2010-10-13 住友電気工業株式会社 非晶質炭素被覆部材

Also Published As

Publication number Publication date
CN1475597A (zh) 2004-02-18
US20050186424A1 (en) 2005-08-25
JP4300762B2 (ja) 2009-07-22
CN1225569C (zh) 2005-11-02
US7169473B2 (en) 2007-01-30
US20070071993A1 (en) 2007-03-29
EP1380667A1 (de) 2004-01-14
EP1380667B1 (de) 2005-01-26
TW200401045A (en) 2004-01-16
TWI229139B (en) 2005-03-11
SG105577A1 (en) 2004-08-27
DE60300293T2 (de) 2005-12-22
JP2004043867A (ja) 2004-02-12

Similar Documents

Publication Publication Date Title
DE60300293D1 (de) Mit einer Kohlenstoffbeschichtung versehener Gegenstand und Verfahren zu dessen Herstellung
DE60302649D1 (de) Umhüllungsmaterial mit einer z-verriegelung und verfahren zu dessen herstellung und zur verwendung desselben
DE60101929D1 (de) Gegenstand mit einer vorbestimmten oberflächenform und verfahren zu dessen herstellung
DE60332953D1 (de) Gleichmässiges faservlies und verfahren zu dessen herstellung
DE60209148D1 (de) Beschichteter gegenstand mit verbesserter barriereschichtstruktur und verfahren zu dessen herstellung
DE60036440D1 (de) Absorbierender Artikel mit Seitenflügel, und Verfahren zu dessen Herstellung
DE69917006D1 (de) Polyolefin-dispersionen und ein verfahren zu dessen herstellung
EP1649955A4 (de) Mit diamantfilm überzogenes werkzeug und verfahren zu dessen herstellung
DE50207943D1 (de) Kristallines anticholinergikum, verfahren zu dessen herstellung und dessen verwendung zur herstellung eines arzneimittels
DE60333438D1 (de) Beschichtete gefässprothesen, verfahren zu deren herstellung und verwendung derselben
DE60037857D1 (de) Saugfähiger Gegenstand und Verfahren zu dessen Herstellung
DE50302478D1 (de) Elektrode und ein verfahren zu deren herstellung
DE60317658D1 (de) Polstermaterial mit dichtegradient und verfahren zu dessen herstellung
DE60037715D1 (de) Geformter Artikel aus einer amorphen Legierung, mit gehärteter Oberfläche und Verfahren zu dessen Herstellung
DE60100062D1 (de) Verfahren zum Herstellen einer Wabenkörperstruktur mit Schlitzen und Vorrichtung zu dessen Herstellung
DE50310782D1 (de) Piezoaktor und verfahren zu dessen herstellung
DE50210470D1 (de) Stärkehaltige, schlauchförmige nahrungsmittelhülle mit übertragbarer beschichtung sowie verfahren zu deren herstellung
DE50214272D1 (de) Piezoelektrisches bauelement und verfahren zu dessen herstellung
DE60319717D1 (de) Spandexfaser mit ethylendiamin/1,2-diaminopropan als kettenverlängerer und verfahren zu dessen herstellung
AT5704U3 (de) Stopfpickel und verfahren zu dessen herstellung
DE50305655D1 (de) Piezoaktor und ein verfahren zu dessen herstellung
DE60321079D1 (de) Wässrige Grundierung, Prozess zur Herstellung einer Beschichtung mit dieser Grundierung und beschichteter Gegenstand
DE60319197D1 (de) Maraging-Stahl und Verfahren zu dessen Herstellung
DE60316056D1 (de) Nanoröhrenthermometer und ein Verfahren zu dessen Herstellung
DE50010354D1 (de) Verbundteil und verfahren zu dessen herstellung

Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee