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DE602007002128D1 - Kraftsensorchip - Google Patents

Kraftsensorchip

Info

Publication number
DE602007002128D1
DE602007002128D1 DE602007002128T DE602007002128T DE602007002128D1 DE 602007002128 D1 DE602007002128 D1 DE 602007002128D1 DE 602007002128 T DE602007002128 T DE 602007002128T DE 602007002128 T DE602007002128 T DE 602007002128T DE 602007002128 D1 DE602007002128 D1 DE 602007002128D1
Authority
DE
Germany
Prior art keywords
force sensor
sensor chip
chip
force
sensor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
DE602007002128T
Other languages
English (en)
Inventor
Takeshi Ohsato
Nobuhiro Sakurai
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Honda Motor Co Ltd
Original Assignee
Honda Motor Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Honda Motor Co Ltd filed Critical Honda Motor Co Ltd
Publication of DE602007002128D1 publication Critical patent/DE602007002128D1/de
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L5/00—Apparatus for, or methods of, measuring force, work, mechanical power, or torque, specially adapted for specific purposes
    • G01L5/16—Apparatus for, or methods of, measuring force, work, mechanical power, or torque, specially adapted for specific purposes for measuring several components of force
    • G01L5/161—Apparatus for, or methods of, measuring force, work, mechanical power, or torque, specially adapted for specific purposes for measuring several components of force using variations in ohmic resistance
    • G01L5/162—Apparatus for, or methods of, measuring force, work, mechanical power, or torque, specially adapted for specific purposes for measuring several components of force using variations in ohmic resistance of piezoresistors

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Force Measurement Appropriate To Specific Purposes (AREA)
  • Pressure Sensors (AREA)
DE602007002128T 2006-08-08 2007-07-27 Kraftsensorchip Active DE602007002128D1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2006216143A JP5007083B2 (ja) 2006-08-08 2006-08-08 力覚センサ用チップ

Publications (1)

Publication Number Publication Date
DE602007002128D1 true DE602007002128D1 (de) 2009-10-08

Family

ID=38617525

Family Applications (1)

Application Number Title Priority Date Filing Date
DE602007002128T Active DE602007002128D1 (de) 2006-08-08 2007-07-27 Kraftsensorchip

Country Status (4)

Country Link
US (1) US7490524B2 (de)
EP (1) EP1887335B1 (de)
JP (1) JP5007083B2 (de)
DE (1) DE602007002128D1 (de)

Families Citing this family (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5303101B2 (ja) * 2006-05-02 2013-10-02 本田技研工業株式会社 力覚センサ用チップ
JP5243704B2 (ja) * 2006-08-24 2013-07-24 本田技研工業株式会社 力覚センサ
JP5243988B2 (ja) * 2009-02-10 2013-07-24 本田技研工業株式会社 多軸力覚センサおよび加速度センサ
JP5442514B2 (ja) * 2010-03-30 2014-03-12 大和製衡株式会社 多分力ロードセルおよびこれを用いたタイヤ試験機
JP5507323B2 (ja) * 2010-04-23 2014-05-28 本田技研工業株式会社 力覚センサの温度補償方法および力覚センサ
JP6869710B2 (ja) * 2016-12-09 2021-05-12 日本電産コパル電子株式会社 起歪体およびその起歪体を備えた力覚センサ
US11761837B2 (en) * 2018-11-26 2023-09-19 The University Of Tokyo Multi-axial tactile sensor
TWI716789B (zh) * 2018-12-20 2021-01-21 財團法人工業技術研究院 多軸力感測裝置
JP6999586B2 (ja) * 2019-01-28 2022-01-18 日本電産コパル電子株式会社 弾性体とそれを用いた力覚センサ
WO2021079464A1 (ja) * 2019-10-24 2021-04-29 株式会社安川電機 トルクセンサ、ロボット、トルク算出方法
CN112611489A (zh) * 2020-12-21 2021-04-06 陕西电器研究所 一种基于薄膜溅射的抗过载扭矩传感器
JP7592957B2 (ja) * 2020-12-24 2024-12-03 ミネベアミツミ株式会社 センサチップ、力覚センサ装置
JP2022142116A (ja) * 2021-03-16 2022-09-30 ミネベアミツミ株式会社 起歪体、力覚センサ装置
JP2022142117A (ja) * 2021-03-16 2022-09-30 ミネベアミツミ株式会社 センサチップ、力覚センサ装置
JP2022142118A (ja) * 2021-03-16 2022-09-30 ミネベアミツミ株式会社 センサチップ、力覚センサ装置
US12422314B2 (en) * 2021-10-08 2025-09-23 Qorvo Us, Inc. Input structures that include slots that create a stress concentration region in a substrate for strain detection by a sensor

Family Cites Families (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS606837A (ja) * 1983-06-24 1985-01-14 Hitachi Constr Mach Co Ltd 荷重検出装置
JPS6095331A (ja) * 1983-10-31 1985-05-28 Sumitomo Heavy Ind Ltd 力・モ−メントセンサ−
JPH0617839B2 (ja) * 1986-07-08 1994-03-09 株式会社共和電業 多分力検出器およびこれを用いた多分力検出装置
JPH02205077A (ja) * 1989-02-02 1990-08-14 Ricoh Co Ltd 力覚センサ
JP2000275127A (ja) * 1999-03-26 2000-10-06 Ngk Insulators Ltd 力センサ回路
EP1327870B1 (de) * 2002-01-11 2013-05-08 Honda Giken Kogyo Kabushiki Kaisha Sechsachsen-Kraftsensor
JP4011345B2 (ja) 2002-01-11 2007-11-21 本田技研工業株式会社 多軸力センサチップ
JP4216525B2 (ja) * 2002-05-13 2009-01-28 株式会社ワコー 加速度センサおよびその製造方法
JP4137710B2 (ja) * 2003-06-11 2008-08-20 シャープ株式会社 パネルセンサおよびこれを備えた情報機器
JP4550500B2 (ja) * 2004-04-01 2010-09-22 多摩川精機株式会社 多軸センサを有する力センサ装置における応力検出方法及び、この方法を用いる力センサ装置。
JP4680566B2 (ja) * 2004-10-26 2011-05-11 本田技研工業株式会社 多軸力センサチップとこれを用いた多軸力センサ
JP4754817B2 (ja) * 2004-12-20 2011-08-24 Ｏｋｉセミコンダクタ株式会社 半導体加速度センサ

Also Published As

Publication number Publication date
US7490524B2 (en) 2009-02-17
EP1887335A2 (de) 2008-02-13
US20080034897A1 (en) 2008-02-14
JP2008039646A (ja) 2008-02-21
EP1887335A3 (de) 2008-03-05
EP1887335B1 (de) 2009-08-26
JP5007083B2 (ja) 2012-08-22

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Legal Events

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