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DE602007000426D1 - Messvorrichtung und Verfahren zur Oberflächentexturmessung - Google Patents

Messvorrichtung und Verfahren zur Oberflächentexturmessung

Info

Publication number
DE602007000426D1
DE602007000426D1 DE602007000426T DE602007000426T DE602007000426D1 DE 602007000426 D1 DE602007000426 D1 DE 602007000426D1 DE 602007000426 T DE602007000426 T DE 602007000426T DE 602007000426 T DE602007000426 T DE 602007000426T DE 602007000426 D1 DE602007000426 D1 DE 602007000426D1
Authority
DE
Germany
Prior art keywords
measuring device
surface texture
texture measurement
measurement
measuring
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
DE602007000426T
Other languages
English (en)
Inventor
Nobuhiro Ishikawa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitutoyo Corp
Original Assignee
Mitutoyo Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitutoyo Corp filed Critical Mitutoyo Corp
Publication of DE602007000426D1 publication Critical patent/DE602007000426D1/de
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B21/00—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant
    • G01B21/02—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant for measuring length, width, or thickness
    • G01B21/04—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant for measuring length, width, or thickness by measuring coordinates of points
    • G01B21/045—Correction of measurements
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B5/00—Measuring arrangements characterised by the use of mechanical techniques
    • G01B5/004—Measuring arrangements characterised by the use of mechanical techniques for measuring coordinates of points
    • G01B5/008—Measuring arrangements characterised by the use of mechanical techniques for measuring coordinates of points using coordinate measuring machines
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B5/00—Measuring arrangements characterised by the use of mechanical techniques
    • G01B5/20—Measuring arrangements characterised by the use of mechanical techniques for measuring contours or curvatures
    • G01B5/201—Measuring arrangements characterised by the use of mechanical techniques for measuring contours or curvatures for measuring roundness
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B5/00—Measuring arrangements characterised by the use of mechanical techniques
    • G01B5/28—Measuring arrangements characterised by the use of mechanical techniques for measuring roughness or irregularity of surfaces

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • A Measuring Device Byusing Mechanical Method (AREA)
DE602007000426T 2006-05-25 2007-05-24 Messvorrichtung und Verfahren zur Oberflächentexturmessung Active DE602007000426D1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2006145294A JP5221004B2 (ja) 2006-05-25 2006-05-25 測定装置、表面性状測定方法、及び表面性状測定プログラム

Publications (1)

Publication Number Publication Date
DE602007000426D1 true DE602007000426D1 (de) 2009-02-12

Family

ID=38596846

Family Applications (1)

Application Number Title Priority Date Filing Date
DE602007000426T Active DE602007000426D1 (de) 2006-05-25 2007-05-24 Messvorrichtung und Verfahren zur Oberflächentexturmessung

Country Status (4)

Country Link
US (1) US7464481B2 (de)
EP (1) EP1862761B1 (de)
JP (1) JP5221004B2 (de)
DE (1) DE602007000426D1 (de)

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* Cited by examiner, † Cited by third party
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DE602007005778D1 (de) * 2007-04-18 2010-05-20 Hexagon Metrology Ab Tastkopf mit konstanter Rastergeschwindigkeit
DE102007025304B4 (de) * 2007-05-30 2009-02-26 Vistec Semiconductor Systems Gmbh Verfahren zur Verbesserung der Reproduzierbarkeit einer Koordinaten-Messmaschine und deren Genauigkeit
CN101458058B (zh) * 2007-12-12 2010-09-29 鸿富锦精密工业（深圳）有限公司 量测装置
JP2009180525A (ja) * 2008-01-29 2009-08-13 Mitsutoyo Corp 測定装置
JP5410048B2 (ja) * 2008-08-06 2014-02-05 株式会社ミツトヨ 測定機、及びフィルタ装置
CN102362143B (zh) * 2009-03-24 2013-11-13 柯尼卡美能达精密光学株式会社 形状测定装置
CN102472662B (zh) * 2009-06-30 2014-06-18 六边形度量衡股份公司 使用振动检测的坐标测量机
JP2012018117A (ja) * 2010-07-09 2012-01-26 Mitsutoyo Corp 形状測定装置
CN102435160A (zh) * 2011-09-28 2012-05-02 张孟臣 三角皮带长度检测机
WO2013128183A1 (en) * 2012-02-27 2013-09-06 Taylor Hobson Limited Surface measurement apparatus and method
CN103455045A (zh) * 2012-05-30 2013-12-18 鸿富锦精密工业（深圳）有限公司 接触式运动控制系统及方法
JP6052956B2 (ja) * 2012-07-02 2016-12-27 株式会社ミツトヨ 形状解析方法および形状解析プログラム
JP6154605B2 (ja) * 2012-09-04 2017-06-28 株式会社ミツトヨ 形状測定装置及び形状測定誤差の補正方法
JP6114010B2 (ja) * 2012-11-14 2017-04-12 株式会社ミツトヨ 形状測定装置及び形状測定誤差の補正方法
WO2014161568A1 (de) * 2013-04-02 2014-10-09 Carl Zeiss Industrielle Messtechnik Gmbh Verfahren zum bestimmen einer formkontur an einem messobjekt
US9797715B2 (en) 2013-07-23 2017-10-24 Landau Gage, Inc. Gage for verifying profile of part and method of verifying profile of part
DE102013015237A1 (de) 2013-09-13 2015-03-19 Blum-Novotest Gmbh Rauheits-Messinstrument zum Einsatz in einer Werkzeugmaschine und Verfahren zur Rauheitsmessung in einer Werkzeugmaschine
JP6219141B2 (ja) * 2013-11-27 2017-10-25 株式会社ミツトヨ 形状測定装置及び形状測定方法
CN103900509B (zh) * 2014-01-23 2017-01-04 河海大学常州校区 一种可实现多方位检测的装置
JP6254451B2 (ja) * 2014-02-19 2017-12-27 株式会社ミツトヨ 形状測定装置及び形状測定誤差の補正方法
WO2015153325A1 (en) 2014-04-04 2015-10-08 Hexagon Metrology, Inc. Coordinate measuring machine with carbon fiber air bearings
JP6448242B2 (ja) * 2014-07-18 2019-01-09 株式会社ミツトヨ 形状測定装置の測定誤差の補正方法及び形状測定装置
US9879968B2 (en) 2014-10-23 2018-01-30 Caterpillar Inc. Component measurement system having wavelength filtering
US9658047B2 (en) 2014-10-23 2017-05-23 Caterpillar Inc. Component measurement system having wavelength filtering
JP6393156B2 (ja) * 2014-11-06 2018-09-19 株式会社ミツトヨ 形状測定装置、及び形状測定方法
JP6777589B2 (ja) * 2017-05-24 2020-10-28 株式会社ミツトヨ 表面性状測定装置
JP6993800B2 (ja) * 2017-07-07 2022-01-14 株式会社ミツトヨ 門型移動装置および三次元測定機
GB202002562D0 (en) 2020-02-24 2020-04-08 Renishaw Plc Measurement method
CN112923885B (zh) * 2021-01-20 2023-03-31 桂林理工大学 基于差分误差补偿的磁轴承转子位移测量方法

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GB2045437B (en) * 1979-03-30 1984-02-08 Renishaw Electrical Ltd Coordinate measuring machine
DE3523188A1 (de) * 1985-06-28 1987-01-08 Zeiss Carl Fa Steuerung fuer koordinatenmessgeraete
US4819195A (en) * 1987-01-20 1989-04-04 The Warner & Swasey Company Method for calibrating a coordinate measuring machine and the like and system therefor
GB8728500D0 (en) * 1987-12-05 1988-01-13 Renishaw Plc Position sensing probe
DE4245012B4 (de) * 1992-04-14 2004-09-23 Carl Zeiss Verfahren zur Messung von Formelementen auf einem Koordinatenmeßgerät
DE4342312A1 (de) * 1993-12-11 1995-06-14 Zeiss Carl Fa Verfahren zur Korrektur von schwingungsbedingten Meßfehlern bei Koordinatenmeßgeräten
EP0684448B1 (de) * 1994-05-27 2004-03-24 Carl Zeiss Koordinatenmessung an Werkstücken mit Korrekturen von Beschleunigungen
DE59510796D1 (de) * 1994-05-27 2003-10-23 Zeiss Carl Koordinatenmessung an Werkstücken mit einer Korrektur des durch die Messkraft abhängigen Biegeverhaltens des Koordinatenmessgerätes
US6044569A (en) * 1997-02-10 2000-04-04 Mitutoyo Corporation Measuring method and measuring instrument
US5979070A (en) * 1997-12-19 1999-11-09 Lau; Kam C. Method and apparatus for selectively locking a movement direction of a coordinate measurement probe
US6112423A (en) * 1999-01-15 2000-09-05 Brown & Sharpe Manufacturing Co. Apparatus and method for calibrating a probe assembly of a measuring machine
EP1158269B1 (de) * 2000-05-23 2005-07-20 Carl Zeiss Industrielle Messtechnik GmbH Korrekturverfahren für Koordinatenmessgeräte
GB0016533D0 (en) * 2000-07-06 2000-08-23 Renishaw Plc Method of and apparatus for correction of coordinate measurement errors due to vibrations in coordinate measuring machines (cmms)
US6973734B2 (en) * 2002-02-14 2005-12-13 Faro Technologies, Inc. Method for providing sensory feedback to the operator of a portable measurement machine
JP2004020469A (ja) * 2002-06-19 2004-01-22 Jfe Steel Kk 表面形状計測方法及びその方法のプログラム
EP1730465B1 (de) * 2004-03-18 2015-05-20 Renishaw plc Scannen eines objekts
DE102005028788A1 (de) * 2005-06-16 2006-12-21 Carl Zeiss Industrielle Messtechnik Gmbh Verfahren zum Bestimmen von Korrekturwerten zum Korrigieren von Positionsmessfehlern bei einer Maschine mit zumindest einer translatorischen Bewegungssache

Also Published As

Publication number Publication date
JP2007315897A (ja) 2007-12-06
US20070271803A1 (en) 2007-11-29
US7464481B2 (en) 2008-12-16
JP5221004B2 (ja) 2013-06-26
EP1862761B1 (de) 2008-12-31
EP1862761A1 (de) 2007-12-05

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