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DE602007008182D1 - Optisches Röntgensystem - Google Patents

Optisches Röntgensystem

Info

Publication number
DE602007008182D1
DE602007008182D1 DE602007008182T DE602007008182T DE602007008182D1 DE 602007008182 D1 DE602007008182 D1 DE 602007008182D1 DE 602007008182 T DE602007008182 T DE 602007008182T DE 602007008182 T DE602007008182 T DE 602007008182T DE 602007008182 D1 DE602007008182 D1 DE 602007008182D1
Authority
DE
Germany
Prior art keywords
optical
ray system
ray
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
DE602007008182T
Other languages
English (en)
Inventor
Ryuji Matsuo
Akira Echizenya
Go Fujinawa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Rigaku Denki Co Ltd
Rigaku Corp
Original Assignee
Rigaku Denki Co Ltd
Rigaku Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Rigaku Denki Co Ltd, Rigaku Corp filed Critical Rigaku Denki Co Ltd
Publication of DE602007008182D1 publication Critical patent/DE602007008182D1/de
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • G—PHYSICS
    • G21—NUCLEAR PHYSICS; NUCLEAR ENGINEERING
    • G21K—TECHNIQUES FOR HANDLING PARTICLES OR IONISING RADIATION NOT OTHERWISE PROVIDED FOR; IRRADIATION DEVICES; GAMMA RAY OR X-RAY MICROSCOPES
    • G21K1/00—Arrangements for handling particles or ionising radiation, e.g. focusing or moderating
    • G21K1/06—Arrangements for handling particles or ionising radiation, e.g. focusing or moderating using diffraction, refraction or reflection, e.g. monochromators
    • G—PHYSICS
    • G21—NUCLEAR PHYSICS; NUCLEAR ENGINEERING
    • G21K—TECHNIQUES FOR HANDLING PARTICLES OR IONISING RADIATION NOT OTHERWISE PROVIDED FOR; IRRADIATION DEVICES; GAMMA RAY OR X-RAY MICROSCOPES
    • G21K1/00—Arrangements for handling particles or ionising radiation, e.g. focusing or moderating
    • G21K1/02—Arrangements for handling particles or ionising radiation, e.g. focusing or moderating using diaphragms, collimators
    • G21K1/025—Arrangements for handling particles or ionising radiation, e.g. focusing or moderating using diaphragms, collimators using multiple collimators, e.g. Bucky screens; other devices for eliminating undesired or dispersed radiation

Landscapes

  • Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • High Energy & Nuclear Physics (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
DE602007008182T 2006-10-10 2007-10-10 Optisches Röntgensystem Active DE602007008182D1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2006276135A JP4860418B2 (ja) 2006-10-10 2006-10-10 Ｘ線光学系

Publications (1)

Publication Number Publication Date
DE602007008182D1 true DE602007008182D1 (de) 2010-09-16

Family

ID=38921671

Family Applications (1)

Application Number Title Priority Date Filing Date
DE602007008182T Active DE602007008182D1 (de) 2006-10-10 2007-10-10 Optisches Röntgensystem

Country Status (4)

Country Link
US (1) US7542548B2 (de)
EP (1) EP1912061B1 (de)
JP (1) JP4860418B2 (de)
DE (1) DE602007008182D1 (de)

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US7738630B2 (en) * 2008-03-05 2010-06-15 X-Ray Optical Systems, Inc. Highly aligned x-ray optic and source assembly for precision x-ray analysis applications
US8488743B2 (en) 2008-04-11 2013-07-16 Rigaku Innovative Technologies, Inc. Nanotube based device for guiding X-ray photons and neutrons
WO2009126868A1 (en) * 2008-04-11 2009-10-15 Rigaku Innovative Technologies, Inc. X-ray generator with polycapillary optic
MX2011004622A (es) * 2008-10-30 2011-06-20 Inspired Surgical Technologies Inc Procesador de haz de rayos x.
DE102008060070B4 (de) * 2008-12-02 2010-10-14 Bruker Axs Gmbh Röntgenoptisches Element und Diffraktometer mit einer Sollerblende
CN102472714B (zh) * 2009-07-01 2014-08-13 株式会社理学 X射线装置、其使用方法以及x射线照射方法
TWM369027U (en) * 2009-07-02 2009-11-21 Univ Far East Watering-hint flower pots by utilizing humidity sensing material
US8249220B2 (en) * 2009-10-14 2012-08-21 Rigaku Innovative Technologies, Inc. Multiconfiguration X-ray optical system
US8705694B2 (en) * 2009-11-11 2014-04-22 Physical Optics Corporation X-ray imaging system and method
DE102009047672C5 (de) * 2009-12-08 2014-06-05 Bruker Axs Gmbh Röntgenoptischer Aufbau mit zwei fokussierenden Elementen
FR2955391B1 (fr) * 2010-01-18 2012-03-16 Xenocs Systeme compact d'analyse par rayons-x
US8126117B2 (en) * 2010-02-03 2012-02-28 Rigaku Innovative Technologies, Inc. Multi-beam X-ray system
CN101999901A (zh) * 2010-12-22 2011-04-06 中国政法大学 基于毛细管x射线半透镜的指纹提取设备
CN102110486A (zh) * 2010-12-23 2011-06-29 北京师范大学 玻璃多毛细管会聚准直器、x射线脉冲星探测装置及方法
US9269468B2 (en) * 2012-04-30 2016-02-23 Jordan Valley Semiconductors Ltd. X-ray beam conditioning
WO2013185000A1 (en) * 2012-06-08 2013-12-12 Rigaku Innovative Technologies, Inc. X-ray beam system offering 1d and 2d beams
JP5964705B2 (ja) * 2012-09-14 2016-08-03 浜松ホトニクス株式会社 ポリキャピラリレンズ
CN103411986A (zh) * 2013-07-26 2013-11-27 北京师范大学 一种薄膜衍射仪
JP2015060735A (ja) * 2013-09-19 2015-03-30 浜松ホトニクス株式会社 Ｘ線発生装置及び試料検査装置
EP2896960B1 (de) 2014-01-15 2017-07-26 PANalytical B.V. Röntgenvorrichtung für SAXS und Bragg-Brentano Messungen
CN104897703B (zh) * 2014-03-04 2018-09-28 清华大学 检查设备、方法和系统
GB2523796A (en) 2014-03-05 2015-09-09 Adaptix Ltd X-ray generator
GB2523792A (en) 2014-03-05 2015-09-09 Adaptix Ltd X-ray collimator
CN103900562B (zh) * 2014-04-04 2016-06-15 中国科学院空间科学与应用研究中心 一种脉冲星导航x射线计时探测器
DE102015226101A1 (de) 2015-12-18 2017-06-22 Bruker Axs Gmbh Röntgenoptik-Baugruppe mit Umschaltsystem für drei Strahlpfade und zugehöriges Röntgendiffraktometer
DE102016203588A1 (de) 2016-03-04 2017-09-07 Bruker Biospin Gmbh Streufeldarme Permanentmagnetanordnung für MR-Apparaturen
DE102017105275B4 (de) * 2017-03-13 2019-02-14 Focus Gmbh Vorrichtung und Verfahren zur Generierung monochromatischer Strahlung einer Strahlungsquelle mit Linienspektrum
EP3480586B1 (de) * 2017-11-06 2021-02-24 Bruker Nano GmbH Röntgenfluoreszenzspektrometer
JP6857400B2 (ja) 2018-03-01 2021-04-14 株式会社リガク Ｘ線発生装置、及びｘ線分析装置
JP6937025B2 (ja) * 2018-03-20 2021-09-22 株式会社リガク Ｘ線回折装置
JP2019191169A (ja) 2018-04-23 2019-10-31 ブルカー ジェイヴィ イスラエル リミテッドＢｒｕｋｅｒ Ｊｖ Ｉｓｒａｅｌ Ｌｔｄ． 小角ｘ線散乱測定用のｘ線源光学系
CN108627530A (zh) * 2018-05-24 2018-10-09 北京师范大学 一种波长色散x射线荧光分析仪
KR102710484B1 (ko) 2018-07-05 2024-09-27 브루커 테크놀로지스 리미티드 소각 ｘ선 산란 계측
JP6851107B2 (ja) * 2019-03-29 2021-03-31 株式会社応用科学研究所 Ｘ線分析装置
JP6924348B2 (ja) * 2019-10-31 2021-08-25 パルステック工業株式会社 Ｘ線回折測定装置
JP6924349B2 (ja) * 2019-10-31 2021-08-25 パルステック工業株式会社 Ｘ線回折測定装置
EP3845891B1 (de) * 2019-12-30 2022-02-09 Xenocs SAS Röntgenstrahlstreuungsvorrichtung
CN111449672B (zh) * 2020-03-05 2025-01-21 北京师范大学 一种x射线平行束光源系统及x射线准直器
JP7280516B2 (ja) * 2020-09-30 2023-05-24 パルステック工業株式会社 Ｘ線回折測定装置
JP7572033B2 (ja) * 2020-10-23 2024-10-23 株式会社リガク 結像型ｘ線顕微鏡
US11781999B2 (en) 2021-09-05 2023-10-10 Bruker Technologies Ltd. Spot-size control in reflection-based and scatterometry-based X-ray metrology systems
US12249059B2 (en) 2022-03-31 2025-03-11 Bruker Technologies Ltd. Navigation accuracy using camera coupled with detector assembly
CN115389538B (zh) * 2022-08-09 2023-12-29 深圳市埃芯半导体科技有限公司 X射线分析装置及方法

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JPH0740080B2 (ja) * 1986-06-19 1995-05-01 株式会社島津製作所 Ｘ線ビ−ム収束装置
US5497008A (en) * 1990-10-31 1996-03-05 X-Ray Optical Systems, Inc. Use of a Kumakhov lens in analytic instruments
JPH10227898A (ja) * 1997-02-12 1998-08-25 Rigaku Corp Ｘ線分析装置のソーラースリット装置
JP3821414B2 (ja) 1998-04-03 2006-09-13 株式会社リガク Ｘ線回折分析方法及びｘ線回折分析装置
JP3950239B2 (ja) * 1998-09-28 2007-07-25 株式会社リガク Ｘ線装置
EP1049927A2 (de) * 1998-11-25 2000-11-08 PANalytical B.V. Röntgenanalysevorrichtung mit parabolischem röntgenspiegel und kristallmonochromator
JP2000180388A (ja) * 1998-12-18 2000-06-30 Rigaku Corp Ｘ線回折装置及びｘ線回折測定方法
RU2180439C2 (ru) * 2000-02-11 2002-03-10 Кумахов Мурадин Абубекирович Способ получения изображения внутренней структуры объекта с использованием рентгеновского излучения и устройство для его осуществления
JP3548556B2 (ja) * 2001-12-28 2004-07-28 株式会社リガク Ｘ線回折装置
EP1515167A4 (de) * 2002-06-14 2005-07-20 Muradin Abubekirovich Kumakhov Einrichtung zum umsetzen eines lichtemissionsflusses
JP3757199B2 (ja) * 2002-09-03 2006-03-22 株式会社リガク Ｘ線小角散乱光学系
EP1403882B1 (de) * 2002-09-03 2012-06-13 Rigaku Corporation Parabolspiegel und bewegliche Röntgenquelle zur Erzeugung von parallelen Röntgenstrahlen unterschiedlicher Wellenlängen
JP4143399B2 (ja) * 2002-12-25 2008-09-03 株式会社堀場製作所 全反射蛍光ｘ線分析装置および全反射蛍光ｘ線を用いた分析方法
WO2004061428A1 (ja) * 2002-12-27 2004-07-22 Technos Institute Co., Ltd. 空孔または粒子サイズ分布測定装置
JP3697246B2 (ja) * 2003-03-26 2005-09-21 株式会社リガク Ｘ線回折装置

Also Published As

Publication number Publication date
US7542548B2 (en) 2009-06-02
EP1912061B1 (de) 2010-08-04
EP1912061A1 (de) 2008-04-16
JP4860418B2 (ja) 2012-01-25
JP2008096180A (ja) 2008-04-24
US20080084967A1 (en) 2008-04-10

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