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DE602005005836D1 - Laserprojektionssystem - Google Patents

Laserprojektionssystem

Info

Publication number
DE602005005836D1
DE602005005836D1 DE602005005836T DE602005005836T DE602005005836D1 DE 602005005836 D1 DE602005005836 D1 DE 602005005836D1 DE 602005005836 T DE602005005836 T DE 602005005836T DE 602005005836 T DE602005005836 T DE 602005005836T DE 602005005836 D1 DE602005005836 D1 DE 602005005836D1
Authority
DE
Germany
Prior art keywords
cell
projection system
laser projection
coherence
laser beam
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE602005005836T
Other languages
English (en)
Other versions
DE602005005836T2 (de
Inventor
Renatus H Sanders
Johannus W Weekamp
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Koninklijke Philips NV
Original Assignee
Koninklijke Philips Electronics NV
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Koninklijke Philips Electronics NV filed Critical Koninklijke Philips Electronics NV
Publication of DE602005005836D1 publication Critical patent/DE602005005836D1/de
Application granted granted Critical
Publication of DE602005005836T2 publication Critical patent/DE602005005836T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04N—PICTORIAL COMMUNICATION, e.g. TELEVISION
    • H04N5/00—Details of television systems
    • H04N5/74—Projection arrangements for image reproduction, e.g. using eidophor
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B3/00—Simple or compound lenses
    • G02B3/12—Fluid-filled or evacuated lenses
    • G02B3/14—Fluid-filled or evacuated lenses of variable focal length
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/004—Optical devices or arrangements for the control of light using movable or deformable optical elements based on a displacement or a deformation of a fluid
    • G02B26/005—Optical devices or arrangements for the control of light using movable or deformable optical elements based on a displacement or a deformation of a fluid based on electrowetting
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/06—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the phase of light
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
    • G02B27/48—Laser speckle optics
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/20—Exposure; Apparatus therefor
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70483—Information management; Active and passive control; Testing; Wafer monitoring, e.g. pattern monitoring
    • G03F7/7055—Exposure light control in all parts of the microlithographic apparatus, e.g. pulse length control or light interruption
    • G03F7/70583—Speckle reduction, e.g. coherence control or amplitude/wavefront splitting
    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04N—PICTORIAL COMMUNICATION, e.g. TELEVISION
    • H04N9/00—Details of colour television systems
    • H04N9/12—Picture reproducers
    • H04N9/31—Projection devices for colour picture display, e.g. using electronic spatial light modulators [ESLM]
    • H04N9/3129—Projection devices for colour picture display, e.g. using electronic spatial light modulators [ESLM] scanning a light beam on the display screen

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Engineering & Computer Science (AREA)
  • Multimedia (AREA)
  • Signal Processing (AREA)
  • Lasers (AREA)
  • Mechanical Light Control Or Optical Switches (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
  • Electrochromic Elements, Electrophoresis, Or Variable Reflection Or Absorption Elements (AREA)
  • Laser Surgery Devices (AREA)
DE602005005836T 2004-08-30 2005-08-25 Laserprojektionssystem Expired - Lifetime DE602005005836T2 (de)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
EP04104148 2004-08-30
EP04104148 2004-08-30
PCT/IB2005/052787 WO2006024998A2 (en) 2004-08-30 2005-08-25 A laser projection system

Publications (2)

Publication Number Publication Date
DE602005005836D1 true DE602005005836D1 (de) 2008-05-15
DE602005005836T2 DE602005005836T2 (de) 2009-05-14

Family

ID=35207687

Family Applications (1)

Application Number Title Priority Date Filing Date
DE602005005836T Expired - Lifetime DE602005005836T2 (de) 2004-08-30 2005-08-25 Laserprojektionssystem

Country Status (8)

Country Link
US (1) US7775670B2 (de)
EP (1) EP1787167B1 (de)
JP (1) JP4658127B2 (de)
KR (1) KR20070048205A (de)
CN (1) CN100483259C (de)
AT (1) ATE391309T1 (de)
DE (1) DE602005005836T2 (de)
WO (1) WO2006024998A2 (de)

Families Citing this family (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPWO2008088001A1 (ja) * 2007-01-18 2010-05-13 シャープ株式会社 光学素子およびそれを用いた画像表示装置
US7862183B2 (en) * 2007-10-16 2011-01-04 Alcatel-Lucent Usa Inc. Speckle reduction using a tunable liquid lens
WO2010125562A1 (en) 2009-04-26 2010-11-04 X.D.M. Ltd. Laser projector with reduced speckle effect
US8130433B2 (en) 2009-04-29 2012-03-06 Corning Incorporated Spinning optics for speckle mitigation in laser projection systems
US8077367B2 (en) 2009-04-29 2011-12-13 Corning Incorporated Speckle mitigation in laser projection systems
WO2011033802A1 (ja) * 2009-09-16 2011-03-24 シャープ株式会社 表示素子、及びこれを用いた電気機器
DE102011101323A1 (de) * 2011-05-12 2012-11-15 Osram Opto Semiconductors Gmbh Optoelektronisches Bauteil
CN105093559B (zh) * 2014-05-15 2017-07-28 中国科学院理化技术研究所 一种消相干装置
DE102014118378A1 (de) 2014-12-11 2016-06-16 Hella Kgaa Hueck & Co. Beleuchtungsvorrichtung für Fahrzeuge
JP2018031990A (ja) * 2016-08-26 2018-03-01 大日本印刷株式会社 スクリーンおよび表示装置

Family Cites Families (20)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2755349B2 (ja) 1987-09-17 1998-05-20 オリンパス光学工業株式会社 半導体露光装置の照明光学系
US5272473A (en) * 1989-02-27 1993-12-21 Texas Instruments Incorporated Reduced-speckle display system
JPH05173094A (ja) 1991-12-20 1993-07-13 Sony Corp レーザ表示装置
US6629641B2 (en) * 2000-06-07 2003-10-07 Metrologic Instruments, Inc. Method of and system for producing images of objects using planar laser illumination beams and image detection arrays
US6426836B2 (en) * 1996-06-11 2002-07-30 Hewlett-Packard Co. Method and apparatus for reducing the formation of spots in laser projection
JP4163751B2 (ja) * 1996-09-13 2008-10-08 シルバー，ジョシュア，デビッド 可変焦点レンズにおけるまたは関する改良
JP3986137B2 (ja) 1997-09-26 2007-10-03 オリンパス株式会社 レーザ照明装置及びそれを用いた光学装置
FR2769375B1 (fr) * 1997-10-08 2001-01-19 Univ Joseph Fourier Lentille a focale variable
US6816302B2 (en) * 1998-03-02 2004-11-09 Micronic Laser Systems Ab Pattern generator
US6069739A (en) * 1998-06-30 2000-05-30 Intel Corporation Method and lens arrangement to improve imaging performance of microlithography exposure tool
JP4345127B2 (ja) 1999-03-18 2009-10-14 ソニー株式会社 照明装置及び照明方法
US6839469B2 (en) * 2000-01-21 2005-01-04 Lam K. Nguyen Multiparallel three dimensional optical microscopy system
JP4553336B2 (ja) * 2000-11-30 2010-09-29 キヤノン株式会社 光学素子、光学装置および撮影装置
US6625381B2 (en) * 2001-02-20 2003-09-23 Eastman Kodak Company Speckle suppressed laser projection system with partial beam reflection
JP2002267825A (ja) 2001-03-09 2002-09-18 Sony Corp 回折型レンズ素子及びこれを用いた照明装置
US6594090B2 (en) * 2001-08-27 2003-07-15 Eastman Kodak Company Laser projection display system
US6577429B1 (en) * 2002-01-15 2003-06-10 Eastman Kodak Company Laser projection display system
CN100507611C (zh) * 2002-02-14 2009-07-01 皇家飞利浦电子股份有限公司 可变焦透镜
KR20060052809A (ko) 2003-07-14 2006-05-19 코닌클리케 필립스 일렉트로닉스 엔.브이. 프로젝션 디바이스
JP4290095B2 (ja) * 2004-08-16 2009-07-01 キヤノン株式会社 表示光学系および画像表示システム

Also Published As

Publication number Publication date
US20080278692A1 (en) 2008-11-13
DE602005005836T2 (de) 2009-05-14
US7775670B2 (en) 2010-08-17
WO2006024998A2 (en) 2006-03-09
JP2008511853A (ja) 2008-04-17
CN101010638A (zh) 2007-08-01
KR20070048205A (ko) 2007-05-08
EP1787167A2 (de) 2007-05-23
ATE391309T1 (de) 2008-04-15
CN100483259C (zh) 2009-04-29
WO2006024998A3 (en) 2006-10-26
JP4658127B2 (ja) 2011-03-23
EP1787167B1 (de) 2008-04-02

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Legal Events

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