[go: up one dir, main page]

DE60134564D1 - Dünnfilm-seltenerd-dauermagnet und verfahren zu seiner herstellung - Google Patents

Dünnfilm-seltenerd-dauermagnet und verfahren zu seiner herstellung

Info

Publication number
DE60134564D1
DE60134564D1 DE60134564T DE60134564T DE60134564D1 DE 60134564 D1 DE60134564 D1 DE 60134564D1 DE 60134564 T DE60134564 T DE 60134564T DE 60134564 T DE60134564 T DE 60134564T DE 60134564 D1 DE60134564 D1 DE 60134564D1
Authority
DE
Germany
Prior art keywords
production
thin film
permanent magnet
film rare
rare permanent
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE60134564T
Other languages
English (en)
Inventor
Osamu Yamashita
Ken Makita
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Proterial Ltd
Original Assignee
Hitachi Metals Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Metals Ltd filed Critical Hitachi Metals Ltd
Application granted granted Critical
Publication of DE60134564D1 publication Critical patent/DE60134564D1/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01F—MAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
    • H01F10/00—Thin magnetic films, e.g. of one-domain structure
    • H01F10/32—Spin-exchange-coupled multilayers, e.g. nanostructured superlattices
    • H01F10/3222—Exchange coupled hard/soft multilayers, e.g. CoPt/Co or NiFe/CoSm
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B82—NANOTECHNOLOGY
    • B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y25/00—Nanomagnetism, e.g. magnetoimpedance, anisotropic magnetoresistance, giant magnetoresistance or tunneling magnetoresistance
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B82—NANOTECHNOLOGY
    • B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y40/00—Manufacture or treatment of nanostructures
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/14—Metallic material, boron or silicon
    • C23C14/16—Metallic material, boron or silicon on metallic substrates or on substrates of boron or silicon
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01F—MAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
    • H01F10/00—Thin magnetic films, e.g. of one-domain structure
    • H01F10/007—Thin magnetic films, e.g. of one-domain structure ultrathin or granular films
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01F—MAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
    • H01F10/00—Thin magnetic films, e.g. of one-domain structure
    • H01F10/08—Thin magnetic films, e.g. of one-domain structure characterised by magnetic layers
    • H01F10/10—Thin magnetic films, e.g. of one-domain structure characterised by magnetic layers characterised by the composition
    • H01F10/12—Thin magnetic films, e.g. of one-domain structure characterised by magnetic layers characterised by the composition being metals or alloys
    • H01F10/126—Thin magnetic films, e.g. of one-domain structure characterised by magnetic layers characterised by the composition being metals or alloys containing rare earth metals
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01F—MAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
    • H01F10/00—Thin magnetic films, e.g. of one-domain structure
    • H01F10/26—Thin magnetic films, e.g. of one-domain structure characterised by the substrate or intermediate layers
    • H01F10/28—Thin magnetic films, e.g. of one-domain structure characterised by the substrate or intermediate layers characterised by the composition of the substrate
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01F—MAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
    • H01F10/00—Thin magnetic films, e.g. of one-domain structure
    • H01F10/32—Spin-exchange-coupled multilayers, e.g. nanostructured superlattices
    • H01F10/3227—Exchange coupling via one or more magnetisable ultrathin or granular films
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01F—MAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
    • H01F41/00—Apparatus or processes specially adapted for manufacturing or assembling magnets, inductances or transformers; Apparatus or processes specially adapted for manufacturing materials characterised by their magnetic properties
    • H01F41/14—Apparatus or processes specially adapted for manufacturing or assembling magnets, inductances or transformers; Apparatus or processes specially adapted for manufacturing materials characterised by their magnetic properties for applying magnetic films to substrates
    • H01F41/30—Apparatus or processes specially adapted for manufacturing or assembling magnets, inductances or transformers; Apparatus or processes specially adapted for manufacturing materials characterised by their magnetic properties for applying magnetic films to substrates for applying nanostructures, e.g. by molecular beam epitaxy [MBE]
    • H01F41/302—Apparatus or processes specially adapted for manufacturing or assembling magnets, inductances or transformers; Apparatus or processes specially adapted for manufacturing materials characterised by their magnetic properties for applying magnetic films to substrates for applying nanostructures, e.g. by molecular beam epitaxy [MBE] for applying spin-exchange-coupled multilayers, e.g. nanostructured superlattices
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00—Stock material or miscellaneous articles
    • Y10T428/11—Magnetic recording head
    • Y10T428/1107—Magnetoresistive
    • Y10T428/1121—Multilayer
    • Y10T428/1129—Super lattice [e.g., giant magneto resistance [GMR] or colossal magneto resistance [CMR], etc.]
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00—Stock material or miscellaneous articles
    • Y10T428/11—Magnetic recording head
    • Y10T428/115—Magnetic layer composition
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00—Stock material or miscellaneous articles
    • Y10T428/12—All metal or with adjacent metals
    • Y10T428/12493—Composite; i.e., plural, adjacent, spatially distinct metal components [e.g., layers, joint, etc.]
    • Y10T428/12771—Transition metal-base component
    • Y10T428/12861—Group VIII or IB metal-base component
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00—Stock material or miscellaneous articles
    • Y10T428/12—All metal or with adjacent metals
    • Y10T428/12493—Composite; i.e., plural, adjacent, spatially distinct metal components [e.g., layers, joint, etc.]
    • Y10T428/12771—Transition metal-base component
    • Y10T428/12861—Group VIII or IB metal-base component
    • Y10T428/12868—Group IB metal-base component alternative to platinum group metal-base component [e.g., precious metal, etc.]
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00—Stock material or miscellaneous articles
    • Y10T428/12—All metal or with adjacent metals
    • Y10T428/12493—Composite; i.e., plural, adjacent, spatially distinct metal components [e.g., layers, joint, etc.]
    • Y10T428/12771—Transition metal-base component
    • Y10T428/12861—Group VIII or IB metal-base component
    • Y10T428/12875—Platinum group metal-base component
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00—Stock material or miscellaneous articles
    • Y10T428/12—All metal or with adjacent metals
    • Y10T428/12493—Composite; i.e., plural, adjacent, spatially distinct metal components [e.g., layers, joint, etc.]
    • Y10T428/12771—Transition metal-base component
    • Y10T428/12861—Group VIII or IB metal-base component
    • Y10T428/12931—Co-, Fe-, or Ni-base components, alternative to each other
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00—Stock material or miscellaneous articles
    • Y10T428/12—All metal or with adjacent metals
    • Y10T428/12493—Composite; i.e., plural, adjacent, spatially distinct metal components [e.g., layers, joint, etc.]
    • Y10T428/12771—Transition metal-base component
    • Y10T428/12861—Group VIII or IB metal-base component
    • Y10T428/12937—Co- or Ni-base component next to Fe-base component
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00—Stock material or miscellaneous articles
    • Y10T428/24—Structurally defined web or sheet [e.g., overall dimension, etc.]
    • Y10T428/24942—Structurally defined web or sheet [e.g., overall dimension, etc.] including components having same physical characteristic in differing degree
    • Y10T428/2495—Thickness [relative or absolute]
    • Y10T428/24967—Absolute thicknesses specified
    • Y10T428/24975—No layer or component greater than 5 mils thick
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00—Stock material or miscellaneous articles
    • Y10T428/32—Composite [nonstructural laminate] of inorganic material having metal-compound-containing layer and having defined magnetic layer
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00—Stock material or miscellaneous articles
    • Y10T428/32—Composite [nonstructural laminate] of inorganic material having metal-compound-containing layer and having defined magnetic layer
    • Y10T428/325—Magnetic layer next to second metal compound-containing layer

Landscapes

  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Power Engineering (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Nanotechnology (AREA)
  • Mechanical Engineering (AREA)
  • Organic Chemistry (AREA)
  • Metallurgy (AREA)
  • Materials Engineering (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Composite Materials (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Thin Magnetic Films (AREA)
  • Physical Vapour Deposition (AREA)
DE60134564T 2000-08-02 2001-07-30 Dünnfilm-seltenerd-dauermagnet und verfahren zu seiner herstellung Expired - Lifetime DE60134564D1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2000233936 2000-08-02
PCT/JP2001/006562 WO2002015206A1 (en) 2000-08-02 2001-07-30 Thin film rare earth permanent magnet, and method for manufacturing the permanent magnet

Publications (1)

Publication Number Publication Date
DE60134564D1 true DE60134564D1 (de) 2008-08-07

Family

ID=18726382

Family Applications (1)

Application Number Title Priority Date Filing Date
DE60134564T Expired - Lifetime DE60134564D1 (de) 2000-08-02 2001-07-30 Dünnfilm-seltenerd-dauermagnet und verfahren zu seiner herstellung

Country Status (6)

Country Link
US (1) US7285338B2 (de)
EP (1) EP1329912B1 (de)
JP (1) JP4697570B2 (de)
CN (1) CN1218331C (de)
DE (1) DE60134564D1 (de)
WO (1) WO2002015206A1 (de)

Families Citing this family (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4698581B2 (ja) * 2004-03-23 2011-06-08 独立行政法人科学技術振興機構 Ｒ−Ｆｅ−Ｂ系薄膜磁石及びその製造方法
US20060141281A1 (en) * 2004-12-24 2006-06-29 Tdk Corporation R-T-B system permanent magnet and plating film
JP4670567B2 (ja) * 2005-09-30 2011-04-13 Ｔｄｋ株式会社 希土類磁石
JP4988713B2 (ja) * 2006-03-20 2012-08-01 並木精密宝石株式会社 薄膜希土類磁石及びその製造方法
ITTO20080462A1 (it) * 2008-06-13 2009-12-14 Torino Politecnico Metodo per la produzione di magneti permanenti macroscopici nanostrutturati con elevata densita d energia magnetica e relativi magneti
US8268264B2 (en) * 2009-02-09 2012-09-18 Caprotec Bioanalytics Gmbh Devices, systems and methods for separating magnetic particles
US20150028976A1 (en) * 2012-03-26 2015-01-29 Hitachi, Ltd. Rare-Earth Magnet
US9786419B2 (en) 2013-10-09 2017-10-10 Ford Global Technologies, Llc Grain boundary diffusion process for rare-earth magnets
FR3025357A1 (fr) * 2014-09-01 2016-03-04 Vivier Harry J P Aimants permanents structures en strates
WO2017154653A1 (ja) * 2016-03-07 2017-09-14 Ｊｘ金属株式会社 希土類薄膜磁石及びその製造方法
CN114497268B (zh) * 2020-10-26 2025-10-21 Tdk株式会社 光检测元件及接收装置
CN112756602B (zh) * 2020-12-23 2022-12-16 苏州大学张家港工业技术研究院 独立单原子厚金属膜及其制备方法与应用
CN115020099B (zh) * 2022-05-26 2023-11-03 中国科学院金属研究所 一种增强NdFeB基永磁厚膜垂直磁各向异性的方法

Family Cites Families (21)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3342555A (en) * 1961-06-19 1967-09-19 Dow Chemical Co Process for the preparation of light weight porous carbon
SE393967B (sv) * 1974-11-29 1977-05-31 Sateko Oy Forfarande och for utforande av stroleggning mellan lagren i ett virkespaket
JPS6130017A (ja) 1984-07-20 1986-02-12 Nippon Telegr & Teleph Corp <Ntt> 酸化物垂直磁化薄膜の製造方法
US4671907A (en) * 1984-08-07 1987-06-09 Sumitomo Metal Industries, Inc. Method of manufacturing carbon materials
JPH063768B2 (ja) 1984-10-31 1994-01-12 株式会社リコー 垂直磁化膜
CA1254385A (en) * 1985-07-26 1989-05-23 Noboru Sato Magneto-optical recording medium having amorphous artificially layered structure of rare earth element and transition metal element
JPS62128041A (ja) * 1985-11-28 1987-06-10 Sony Corp 光磁気記録媒体
JPS6260865A (ja) * 1985-09-11 1987-03-17 Sony Corp 積層構造薄膜の作製装置
US4929320A (en) * 1986-04-11 1990-05-29 Fuji Photo Film Co., Ltd. Method of making magneto-optical recording medium
JPS63269354A (ja) * 1987-04-28 1988-11-07 Ricoh Co Ltd 光磁気記録媒体
JPH01168858A (ja) * 1987-12-23 1989-07-04 Nec Home Electron Ltd 非晶質材及びその製造方法
US4876159A (en) * 1988-03-14 1989-10-24 Eastman Kodak Company Magnetrooptical recording media and method of preparing them
JPH04255943A (ja) * 1991-02-08 1992-09-10 Ricoh Co Ltd 光磁気記録媒体
US5441804A (en) * 1991-02-12 1995-08-15 Mitsubishi Plastics Industries Limited Magneto-optical recording medium and method for production thereof
JPH06151226A (ja) 1992-05-14 1994-05-31 Yaskawa Electric Corp 膜磁石の形成方法
JPH08195314A (ja) 1995-01-12 1996-07-30 Ricoh Co Ltd 薄膜磁性材料
US5858565A (en) * 1995-11-09 1999-01-12 Eastman Kodak Company Magneto-optic compositionally modulated structure
JP3598171B2 (ja) * 1995-12-27 2004-12-08 株式会社Ｎｅｏｍａｘ 交換スプリング磁石およびその製造方法
JPH10172190A (ja) * 1996-12-09 1998-06-26 Sharp Corp 光磁気記録媒体及びその製造方法
DE69940130D1 (de) * 1998-03-13 2009-01-29 Hoya Corp Kristallisiertes Glas für Informationsaufzeichnungsmedium, kristallisiertes Glas-Substrat, und Informationsaufzeichnungsmedium unter Verwendung des kristallisierten Glas-Substrats
US6346309B1 (en) * 1998-08-11 2002-02-12 Hitachi Maxell, Ltd. Optical recording medium and process for producing same

Also Published As

Publication number Publication date
JP4697570B2 (ja) 2011-06-08
EP1329912A1 (de) 2003-07-23
US7285338B2 (en) 2007-10-23
US20040091745A1 (en) 2004-05-13
EP1329912B1 (de) 2008-06-25
EP1329912A4 (de) 2005-09-21
CN1218331C (zh) 2005-09-07
WO2002015206A1 (en) 2002-02-21
CN1443357A (zh) 2003-09-17

Similar Documents

Publication Publication Date Title
DE60233385D1 (de) Permanentmagnet und verfahren zu seiner herstellung
DE10083996T1 (de) Permanentmagnet mit seltenen Erden und Verfahren zu seiner Herstellung
DE60237114D1 (de) Gesinterter seltenerdelementmagnet und verfahren zur herstellung eines gesinterten seltenerdelementmagneten
DE60115902D1 (de) Osteoimplantat und verfahren zu seiner herstellung
DE60144235D1 (de) Zusammengesetzter film mit mehreren komponenten und verfahren zu seiner herstellung
DE60136793D1 (de) Elektrostatisches spannfutterglied und verfahren zu seiner herstellung
ATA10852001A (de) Bauelement und verfahren zu seiner herstellung
DE60144032D1 (de) Galvanisch abgeschiedener verbundfilm und verfahren zu seiner herstellung
EP1408562A4 (de) Magnetsensor und verfahren zu seiner herstellung
DE50214717D1 (de) Und verfahren zu seiner herstellung
DE60132554D1 (de) STATORBLECHKöRPER UND VERFAHREN ZUR HERSTELLUNG DESSELBEN
DE69916610D1 (de) Polyesterfolie und verfahren zu seiner herstellung
DE60034735D1 (de) Miniaturmotor und Verfahren zu seiner Herstellung
DE60035471D1 (de) Oberflächenmontierbare Spule und Verfahren zu ihrer Herstellung
DE50103010D1 (de) Induktives bauelement und verfahren zu seiner herstellung
DE60129589D1 (de) Wabenfilter und verfahren zur herstellung desselben
DE60238599D1 (de) Betätigungsglied des typs mit piezoelektischem/elektrostriktivem film und verfahren zu seiner herstellung
DE60201475D1 (de) Mit Polyhydroxyalkanoat beschichtetes Liposom und Verfahren zu seiner Herstellung
EP1292970A4 (de) Verfahren zur herstellung einer dünnen schicht
DE50006193D1 (de) Verfahren zur herstellung von otoplastiken und otoplastik
FI20000898L (fi) Menetelmä oksidiohutkalvojen valmistamiseksi
DE69909569D1 (de) Korrosionsbeständiger dauermagnet und verfahren zu seiner herstellung
DE69804712D1 (de) Kopräzipitations-Reduktions-Diffusions-Verfahren zur Herstellung von Neodym-Eisen-Bor-Permanentmagnetlegierungen
DE69713700D1 (de) Verfahren zur seltenerd-verbundmagnet herstellung
DE60116486D1 (de) Gallengangstent und verfahren zu seiner herstellung

Legal Events

Date Code Title Description
8364 No opposition during term of opposition