DE60122094D1 - Infrarotdetektor - Google Patents
InfrarotdetektorInfo
- Publication number
- DE60122094D1 DE60122094D1 DE60122094T DE60122094T DE60122094D1 DE 60122094 D1 DE60122094 D1 DE 60122094D1 DE 60122094 T DE60122094 T DE 60122094T DE 60122094 T DE60122094 T DE 60122094T DE 60122094 D1 DE60122094 D1 DE 60122094D1
- Authority
- DE
- Germany
- Prior art keywords
- infrared detector
- infrared
- detector
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
- G01J5/02—Constructional details
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
- G01J5/02—Constructional details
- G01J5/0225—Shape of the cavity itself or of elements contained in or suspended over the cavity
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
- G01J5/10—Radiation pyrometry, e.g. infrared or optical thermometry using electric radiation detectors
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
- G01J5/10—Radiation pyrometry, e.g. infrared or optical thermometry using electric radiation detectors
- G01J5/12—Radiation pyrometry, e.g. infrared or optical thermometry using electric radiation detectors using thermoelectric elements, e.g. thermocouples
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Spectroscopy & Molecular Physics (AREA)
- Photometry And Measurement Of Optical Pulse Characteristics (AREA)
- Radiation Pyrometers (AREA)
- Solid State Image Pick-Up Elements (AREA)
- Micromachines (AREA)
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2000356514 | 2000-11-22 | ||
| JP2000356514A JP3812881B2 (ja) | 2000-11-22 | 2000-11-22 | 赤外線検出素子 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| DE60122094D1 true DE60122094D1 (de) | 2006-09-21 |
| DE60122094T2 DE60122094T2 (de) | 2007-03-01 |
Family
ID=18828749
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| DE60122094T Expired - Lifetime DE60122094T2 (de) | 2000-11-22 | 2001-11-19 | Infrarotdetektor |
Country Status (4)
| Country | Link |
|---|---|
| US (1) | US6777680B2 (de) |
| EP (1) | EP1209455B1 (de) |
| JP (1) | JP3812881B2 (de) |
| DE (1) | DE60122094T2 (de) |
Families Citing this family (13)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6608370B1 (en) * | 2002-01-28 | 2003-08-19 | Motorola, Inc. | Semiconductor wafer having a thin die and tethers and methods of making the same |
| US6828560B2 (en) * | 2002-01-31 | 2004-12-07 | Delphi Technologies, Inc. | Integrated light concentrator |
| US6787387B2 (en) * | 2002-06-24 | 2004-09-07 | Matsushita Electric Industrial Co., Ltd. | Electronic device and method for fabricating the electronic device |
| JP5079211B2 (ja) * | 2004-10-13 | 2012-11-21 | 浜松ホトニクス株式会社 | 赤外線検出装置及びその製造方法 |
| JP5283825B2 (ja) | 2006-01-25 | 2013-09-04 | 浜松ホトニクス株式会社 | 熱型赤外線検出器 |
| JP2009174917A (ja) * | 2008-01-22 | 2009-08-06 | Oki Semiconductor Co Ltd | 赤外線検出素子、及び赤外線検出素子の製造方法 |
| US8440972B2 (en) * | 2009-08-25 | 2013-05-14 | Raytheon Company | Radiation detector with microstructured silicon |
| JP5143176B2 (ja) * | 2010-03-31 | 2013-02-13 | 株式会社東芝 | 赤外線撮像素子およびその製造方法 |
| JP5541137B2 (ja) * | 2010-12-15 | 2014-07-09 | ソニー株式会社 | 撮像装置、電子機器、太陽電池、および、撮像装置の製造方法 |
| GB2521476A (en) * | 2013-12-22 | 2015-06-24 | Melexis Technologies Nv | Infrared thermal sensor with good SNR |
| CN113614499B (zh) | 2019-03-11 | 2025-09-30 | 泰立戴恩菲力尔商业系统公司 | 微测热辐射计系统和方法 |
| CN113310583B (zh) * | 2021-06-24 | 2025-09-02 | 美新半导体(无锡)有限公司 | 一种红外热电堆传感装置 |
| CN120813223B (zh) * | 2025-09-16 | 2025-11-25 | 上海芯龙半导体技术股份有限公司 | 一种红外热电堆探测器及其制造方法 |
Family Cites Families (13)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH02165025A (ja) * | 1988-12-20 | 1990-06-26 | New Japan Radio Co Ltd | サーモパイル |
| JPH02205729A (ja) * | 1989-02-03 | 1990-08-15 | Nec Corp | 赤外線センサ |
| JP2771277B2 (ja) * | 1989-09-06 | 1998-07-02 | 株式会社豊田中央研究所 | 赤外線センサ |
| JPH0476065U (de) * | 1990-11-16 | 1992-07-02 | ||
| WO1994007115A1 (fr) * | 1992-09-17 | 1994-03-31 | Mitsubishi Denki Kabushiki Kaisha | Reseau de detecteurs a infrarouge et son procede de production |
| US5471060A (en) * | 1993-08-23 | 1995-11-28 | Matsushita Electric Industrial Co., Ltd. | Pyroelectric infrared radiation detector and method of producing the same |
| JPH07167708A (ja) * | 1993-12-13 | 1995-07-04 | Nippondenso Co Ltd | 赤外線センサ |
| JP3374498B2 (ja) * | 1993-12-27 | 2003-02-04 | 株式会社デンソー | 赤外線センサ |
| FI98325C (fi) * | 1994-07-07 | 1997-05-26 | Vaisala Oy | Selektiivinen infrapunadetektori |
| US5689087A (en) * | 1994-10-04 | 1997-11-18 | Santa Barbara Research Center | Integrated thermopile sensor for automotive, spectroscopic and imaging applications, and methods of fabricating same |
| JP3422150B2 (ja) * | 1995-11-16 | 2003-06-30 | 日産自動車株式会社 | 赤外線検知素子 |
| JP3175662B2 (ja) * | 1997-10-07 | 2001-06-11 | 日本電気株式会社 | 熱型赤外線検出素子の製造方法 |
| US6300554B1 (en) | 1999-09-09 | 2001-10-09 | Metrodyne Microsystem Corp. | Method of fabricating thermoelectric sensor and thermoelectric sensor device |
-
2000
- 2000-11-22 JP JP2000356514A patent/JP3812881B2/ja not_active Expired - Lifetime
-
2001
- 2001-11-19 US US09/988,365 patent/US6777680B2/en not_active Expired - Fee Related
- 2001-11-19 DE DE60122094T patent/DE60122094T2/de not_active Expired - Lifetime
- 2001-11-19 EP EP01127321A patent/EP1209455B1/de not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| US6777680B2 (en) | 2004-08-17 |
| DE60122094T2 (de) | 2007-03-01 |
| EP1209455B1 (de) | 2006-08-09 |
| US20020060291A1 (en) | 2002-05-23 |
| JP3812881B2 (ja) | 2006-08-23 |
| EP1209455A2 (de) | 2002-05-29 |
| JP2002162291A (ja) | 2002-06-07 |
| EP1209455A3 (de) | 2003-08-27 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| 8364 | No opposition during term of opposition |