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DE60122094D1 - Infrarotdetektor - Google Patents

Infrarotdetektor

Info

Publication number
DE60122094D1
DE60122094D1 DE60122094T DE60122094T DE60122094D1 DE 60122094 D1 DE60122094 D1 DE 60122094D1 DE 60122094 T DE60122094 T DE 60122094T DE 60122094 T DE60122094 T DE 60122094T DE 60122094 D1 DE60122094 D1 DE 60122094D1
Authority
DE
Germany
Prior art keywords
infrared detector
infrared
detector
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE60122094T
Other languages
English (en)
Other versions
DE60122094T2 (de
Inventor
Shinichi Morita
Nami Shibata
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
IHI Aerospace Co Ltd
Original Assignee
IHI Aerospace Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by IHI Aerospace Co Ltd filed Critical IHI Aerospace Co Ltd
Publication of DE60122094D1 publication Critical patent/DE60122094D1/de
Application granted granted Critical
Publication of DE60122094T2 publication Critical patent/DE60122094T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01JMEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J5/00Radiation pyrometry, e.g. infrared or optical thermometry
    • G01J5/02Constructional details
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01JMEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J5/00Radiation pyrometry, e.g. infrared or optical thermometry
    • G01J5/02Constructional details
    • G01J5/0225Shape of the cavity itself or of elements contained in or suspended over the cavity
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01JMEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J5/00Radiation pyrometry, e.g. infrared or optical thermometry
    • G01J5/10Radiation pyrometry, e.g. infrared or optical thermometry using electric radiation detectors
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01JMEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J5/00Radiation pyrometry, e.g. infrared or optical thermometry
    • G01J5/10Radiation pyrometry, e.g. infrared or optical thermometry using electric radiation detectors
    • G01J5/12Radiation pyrometry, e.g. infrared or optical thermometry using electric radiation detectors using thermoelectric elements, e.g. thermocouples

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Photometry And Measurement Of Optical Pulse Characteristics (AREA)
  • Radiation Pyrometers (AREA)
  • Solid State Image Pick-Up Elements (AREA)
  • Micromachines (AREA)
DE60122094T 2000-11-22 2001-11-19 Infrarotdetektor Expired - Lifetime DE60122094T2 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2000356514 2000-11-22
JP2000356514A JP3812881B2 (ja) 2000-11-22 2000-11-22 赤外線検出素子

Publications (2)

Publication Number Publication Date
DE60122094D1 true DE60122094D1 (de) 2006-09-21
DE60122094T2 DE60122094T2 (de) 2007-03-01

Family

ID=18828749

Family Applications (1)

Application Number Title Priority Date Filing Date
DE60122094T Expired - Lifetime DE60122094T2 (de) 2000-11-22 2001-11-19 Infrarotdetektor

Country Status (4)

Country Link
US (1) US6777680B2 (de)
EP (1) EP1209455B1 (de)
JP (1) JP3812881B2 (de)
DE (1) DE60122094T2 (de)

Families Citing this family (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6608370B1 (en) * 2002-01-28 2003-08-19 Motorola, Inc. Semiconductor wafer having a thin die and tethers and methods of making the same
US6828560B2 (en) * 2002-01-31 2004-12-07 Delphi Technologies, Inc. Integrated light concentrator
US6787387B2 (en) * 2002-06-24 2004-09-07 Matsushita Electric Industrial Co., Ltd. Electronic device and method for fabricating the electronic device
JP5079211B2 (ja) * 2004-10-13 2012-11-21 浜松ホトニクス株式会社 赤外線検出装置及びその製造方法
JP5283825B2 (ja) 2006-01-25 2013-09-04 浜松ホトニクス株式会社 熱型赤外線検出器
JP2009174917A (ja) * 2008-01-22 2009-08-06 Oki Semiconductor Co Ltd 赤外線検出素子、及び赤外線検出素子の製造方法
US8440972B2 (en) * 2009-08-25 2013-05-14 Raytheon Company Radiation detector with microstructured silicon
JP5143176B2 (ja) * 2010-03-31 2013-02-13 株式会社東芝 赤外線撮像素子およびその製造方法
JP5541137B2 (ja) * 2010-12-15 2014-07-09 ソニー株式会社 撮像装置、電子機器、太陽電池、および、撮像装置の製造方法
GB2521476A (en) * 2013-12-22 2015-06-24 Melexis Technologies Nv Infrared thermal sensor with good SNR
CN113614499B (zh) 2019-03-11 2025-09-30 泰立戴恩菲力尔商业系统公司 微测热辐射计系统和方法
CN113310583B (zh) * 2021-06-24 2025-09-02 美新半导体(无锡)有限公司 一种红外热电堆传感装置
CN120813223B (zh) * 2025-09-16 2025-11-25 上海芯龙半导体技术股份有限公司 一种红外热电堆探测器及其制造方法

Family Cites Families (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02165025A (ja) * 1988-12-20 1990-06-26 New Japan Radio Co Ltd サーモパイル
JPH02205729A (ja) * 1989-02-03 1990-08-15 Nec Corp 赤外線センサ
JP2771277B2 (ja) * 1989-09-06 1998-07-02 株式会社豊田中央研究所 赤外線センサ
JPH0476065U (de) * 1990-11-16 1992-07-02
WO1994007115A1 (fr) * 1992-09-17 1994-03-31 Mitsubishi Denki Kabushiki Kaisha Reseau de detecteurs a infrarouge et son procede de production
US5471060A (en) * 1993-08-23 1995-11-28 Matsushita Electric Industrial Co., Ltd. Pyroelectric infrared radiation detector and method of producing the same
JPH07167708A (ja) * 1993-12-13 1995-07-04 Nippondenso Co Ltd 赤外線センサ
JP3374498B2 (ja) * 1993-12-27 2003-02-04 株式会社デンソー 赤外線センサ
FI98325C (fi) * 1994-07-07 1997-05-26 Vaisala Oy Selektiivinen infrapunadetektori
US5689087A (en) * 1994-10-04 1997-11-18 Santa Barbara Research Center Integrated thermopile sensor for automotive, spectroscopic and imaging applications, and methods of fabricating same
JP3422150B2 (ja) * 1995-11-16 2003-06-30 日産自動車株式会社 赤外線検知素子
JP3175662B2 (ja) * 1997-10-07 2001-06-11 日本電気株式会社 熱型赤外線検出素子の製造方法
US6300554B1 (en) 1999-09-09 2001-10-09 Metrodyne Microsystem Corp. Method of fabricating thermoelectric sensor and thermoelectric sensor device

Also Published As

Publication number Publication date
US6777680B2 (en) 2004-08-17
DE60122094T2 (de) 2007-03-01
EP1209455B1 (de) 2006-08-09
US20020060291A1 (en) 2002-05-23
JP3812881B2 (ja) 2006-08-23
EP1209455A2 (de) 2002-05-29
JP2002162291A (ja) 2002-06-07
EP1209455A3 (de) 2003-08-27

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition