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DE60122834D1 - Torsions-Kipp-Komponente - Google Patents

Torsions-Kipp-Komponente

Info

Publication number
DE60122834D1
DE60122834D1 DE60122834T DE60122834T DE60122834D1 DE 60122834 D1 DE60122834 D1 DE 60122834D1 DE 60122834 T DE60122834 T DE 60122834T DE 60122834 T DE60122834 T DE 60122834T DE 60122834 D1 DE60122834 D1 DE 60122834D1
Authority
DE
Germany
Prior art keywords
torsion
tilt component
tilt
component
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE60122834T
Other languages
English (en)
Other versions
DE60122834T2 (de
Inventor
Hiroshi Miyajima
Toshiharu Hidaka
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Olympus Corp
Original Assignee
Olympus Optical Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Olympus Optical Co Ltd filed Critical Olympus Optical Co Ltd
Publication of DE60122834D1 publication Critical patent/DE60122834D1/de
Application granted granted Critical
Publication of DE60122834T2 publication Critical patent/DE60122834T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B7/00—Mountings, adjusting means, or light-tight connections, for optical elements
    • G02B7/18—Mountings, adjusting means, or light-tight connections, for optical elements for prisms; for mirrors
    • G02B7/182—Mountings, adjusting means, or light-tight connections, for optical elements for prisms; for mirrors for mirrors
    • G02B7/1821—Mountings, adjusting means, or light-tight connections, for optical elements for prisms; for mirrors for mirrors for rotating or oscillating mirrors
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/10—Scanning systems
    • G02B26/105—Scanning systems with one or more pivoting mirrors or galvano-mirrors

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Micromachines (AREA)
  • Springs (AREA)
  • Mechanical Optical Scanning Systems (AREA)
  • Mechanical Light Control Or Optical Switches (AREA)
DE60122834T 2000-07-10 2001-07-06 Torsions-Kipp-Komponente Expired - Fee Related DE60122834T2 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2000208999A JP2002023097A (ja) 2000-07-10 2000-07-10 ねじり揺動体
JP2000208999 2000-07-10

Publications (2)

Publication Number Publication Date
DE60122834D1 true DE60122834D1 (de) 2006-10-19
DE60122834T2 DE60122834T2 (de) 2007-05-16

Family

ID=18705481

Family Applications (1)

Application Number Title Priority Date Filing Date
DE60122834T Expired - Fee Related DE60122834T2 (de) 2000-07-10 2001-07-06 Torsions-Kipp-Komponente

Country Status (4)

Country Link
US (2) US20020135846A1 (de)
EP (1) EP1172677B8 (de)
JP (1) JP2002023097A (de)
DE (1) DE60122834T2 (de)

Families Citing this family (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7170665B2 (en) * 2002-07-24 2007-01-30 Olympus Corporation Optical unit provided with an actuator
JP3862623B2 (ja) * 2002-07-05 2006-12-27 キヤノン株式会社 光偏向器及びその製造方法
JP2007111847A (ja) * 2005-10-24 2007-05-10 Olympus Corp アクチュエータ
FR2897200A1 (fr) * 2006-02-06 2007-08-10 Commissariat Energie Atomique Inducteur integre sur semi-conducteur
JP2008015256A (ja) * 2006-07-06 2008-01-24 Toyota Central Res & Dev Lab Inc 光偏向器
JP4277921B2 (ja) * 2007-06-05 2009-06-10 セイコーエプソン株式会社 アクチュエータ、光スキャナおよび画像形成装置
JP5554895B2 (ja) 2008-02-20 2014-07-23 キヤノン株式会社 揺動構造体、及び揺動構造体を用いた揺動体装置
JP2014182227A (ja) * 2013-03-18 2014-09-29 Seiko Epson Corp 光スキャナー、画像表示装置およびヘッドマウントディスプレイ
WO2019107311A1 (ja) 2017-12-01 2019-06-06 浜松ホトニクス株式会社 アクチュエータ装置
JP6591135B1 (ja) * 2018-05-11 2019-10-16 浜松ホトニクス株式会社 光学デバイス
KR20210007947A (ko) 2018-05-11 2021-01-20 하마마츠 포토닉스 가부시키가이샤 광학 디바이스
EP3795855A1 (de) * 2019-09-20 2021-03-24 Patek Philippe SA Genève Herstellungsverfahren einer uhrfeder aus monokristallinem material, und nach diesem verfahren erzeugte uhrfeder

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4421381A (en) * 1980-04-04 1983-12-20 Yokogawa Hokushin Electric Corp. Mechanical vibrating element
US5488862A (en) * 1993-10-18 1996-02-06 Armand P. Neukermans Monolithic silicon rate-gyro with integrated sensors
US5629790A (en) 1993-10-18 1997-05-13 Neukermans; Armand P. Micromachined torsional scanner
JP2722314B2 (ja) * 1993-12-20 1998-03-04 日本信号株式会社 プレーナー型ガルバノミラー及びその製造方法
US6188504B1 (en) * 1996-06-28 2001-02-13 Olympus Optical Co., Ltd. Optical scanner
JP4414498B2 (ja) * 1997-12-09 2010-02-10 オリンパス株式会社 光偏向器
JPH11305162A (ja) * 1998-04-27 1999-11-05 Olympus Optical Co Ltd 光スキャナ

Also Published As

Publication number Publication date
EP1172677B8 (de) 2006-11-15
US20030218787A1 (en) 2003-11-27
EP1172677A2 (de) 2002-01-16
US20020135846A1 (en) 2002-09-26
JP2002023097A (ja) 2002-01-23
DE60122834T2 (de) 2007-05-16
EP1172677B1 (de) 2006-09-06
US6813049B2 (en) 2004-11-02
EP1172677A3 (de) 2005-02-16

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee