DE60117458D1 - Integrierter Druckwandler - Google Patents

Integrierter Druckwandler

Info

Publication number: DE60117458D1
Authority: DE; Germany
Prior art keywords: pressure transducer; integrated pressure; integrated; transducer; pressure
Prior art date: 2000-09-12
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.): Expired - Lifetime

Application number

DE60117458T

Other languages

English (en)

Other versions

DE60117458T2 (de

Inventor

Markus Lutz

Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)

Robert Bosch GmbH

Original Assignee

Robert Bosch GmbH

Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)

2000-09-12

Filing date

2001-09-12

Publication date

2006-04-27

2001-09-12 Application filed by Robert Bosch GmbH filed Critical Robert Bosch GmbH

2006-04-27 Application granted granted Critical

2006-04-27 Publication of DE60117458D1 publication Critical patent/DE60117458D1/de

2006-10-12 Publication of DE60117458T2 publication Critical patent/DE60117458T2/de

2021-09-13 Anticipated expiration legal-status Critical

Status Expired - Lifetime legal-status Critical Current

Classifications

- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
- G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
- G01L9/0072—Transmitting or indicating the displacement of flexible diaphragms using variations in capacitance
- G01L9/0073—Transmitting or indicating the displacement of flexible diaphragms using variations in capacitance using a semiconductive diaphragm

Landscapes

Physics & Mathematics (AREA)
General Physics & Mathematics (AREA)
Measuring Fluid Pressure (AREA)
Pressure Sensors (AREA)

DE60117458T 2000-09-12 2001-09-12 Integrierter Druckwandler Expired - Lifetime DE60117458T2 (de)

Applications Claiming Priority (2)

Application Number	Priority Date	Filing Date	Title
US09/660,218 US6521965B1 (en)	2000-09-12	2000-09-12	Integrated pressure sensor
US660218		2000-09-12

Publications (2)

Publication Number	Publication Date
DE60117458D1 true DE60117458D1 (de)	2006-04-27
DE60117458T2 DE60117458T2 (de)	2006-10-12

Family

ID=24648619

Family Applications (1)

Application Number	Title	Priority Date	Filing Date
DE60117458T Expired - Lifetime DE60117458T2 (de)	2000-09-12	2001-09-12	Integrierter Druckwandler

Country Status (3)

Country	Link
US (1)	US6521965B1 (de)
EP (1)	EP1193486B1 (de)
DE (1)	DE60117458T2 (de)

Families Citing this family (21)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
US6531331B1 (en) *	2002-07-16	2003-03-11	Sandia Corporation	Monolithic integration of a MOSFET with a MEMS device
US7514283B2 (en) *	2003-03-20	2009-04-07	Robert Bosch Gmbh	Method of fabricating electromechanical device having a controlled atmosphere
US8912174B2 (en) *	2003-04-16	2014-12-16	Mylan Pharmaceuticals Inc.	Formulations and methods for treating rhinosinusitis
US6936491B2 (en)	2003-06-04	2005-08-30	Robert Bosch Gmbh	Method of fabricating microelectromechanical systems and devices having trench isolated contacts
US7075160B2 (en)	2003-06-04	2006-07-11	Robert Bosch Gmbh	Microelectromechanical systems and devices having thin film encapsulated mechanical structures
US6952041B2 (en) *	2003-07-25	2005-10-04	Robert Bosch Gmbh	Anchors for microelectromechanical systems having an SOI substrate, and method of fabricating same
US7068125B2 (en)	2004-03-04	2006-06-27	Robert Bosch Gmbh	Temperature controlled MEMS resonator and method for controlling resonator frequency
US7102467B2 (en) *	2004-04-28	2006-09-05	Robert Bosch Gmbh	Method for adjusting the frequency of a MEMS resonator
US8154092B2 (en)	2004-08-09	2012-04-10	Case Western Reserve University	Silicon carbide MEMS structures and methods of forming the same
US20070020794A1 (en) *	2005-07-22	2007-01-25	Debar Michael J	Method of strengthening a microscale chamber formed over a sacrificial layer
TWI289879B (en) *	2005-09-30	2007-11-11	Touch Micro System Tech	Method of fabricating pressure sensor
US20070170528A1 (en)	2006-01-20	2007-07-26	Aaron Partridge	Wafer encapsulated microelectromechanical structure and method of manufacturing same
JP4739164B2 (ja) *	2006-10-20	2011-08-03	三菱電機株式会社	車両用エンジンの吸入空気圧力測定用の半導体感歪センサ
US7875484B2 (en) *	2006-11-20	2011-01-25	Alces Technology, Inc.	Monolithic IC and MEMS microfabrication process
ITTO20090616A1 (it) *	2009-08-05	2011-02-06	St Microelectronics Srl	Procedimento di fabbricazione di dispositivi mems dotati di cavita' sepolte e dispositivo mems cosi' ottenuto
CN104969049B (zh)	2012-10-02	2018-04-27	罗伯特·博世有限公司	电容式压力传感器和方法
US9557238B2 (en) *	2014-07-25	2017-01-31	Ams International Ag	Pressure sensor with geter embedded in membrane
CN105651450B (zh) *	2014-11-14	2018-07-06	中芯国际集成电路制造(上海)有限公司	压力传感器及其形成方法
CN105036059B (zh) *	2015-06-24	2017-01-25	上海芯赫科技有限公司	一种电容式mems传感器的加工方法及传感器结构
FR3108462B1 (fr) *	2020-03-23	2022-08-26	Commissariat Energie Atomique	Microphone microelectromecanique a encombrement reduit
IT202100022505A1 (it)	2021-08-30	2023-03-02	St Microelectronics Srl	Procedimento di fabbricazione di un sensore di pressione capacitivo e sensore di pressione capacitivo

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
US5343064A (en) *	1988-03-18	1994-08-30	Spangler Leland J	Fully integrated single-crystal silicon-on-insulator process, sensors and circuits
US5177661A (en) *	1989-01-13	1993-01-05	Kopin Corporation	SOI diaphgram sensor
US5316619A (en) *	1993-02-05	1994-05-31	Ford Motor Company	Capacitive surface micromachine absolute pressure sensor and method for processing
US6012336A (en) *	1995-09-06	2000-01-11	Sandia Corporation	Capacitance pressure sensor
US5963788A (en) *	1995-09-06	1999-10-05	Sandia Corporation	Method for integrating microelectromechanical devices with electronic circuitry
US5798283A (en) *	1995-09-06	1998-08-25	Sandia Corporation	Method for integrating microelectromechanical devices with electronic circuitry
WO1998023935A1 (de) *	1996-11-28	1998-06-04	Siemens Aktiengesellschaft	Verfahren zur herstellung von mikromechanischen sensoren
US6167761B1 (en) *	1998-03-31	2001-01-02	Hitachi, Ltd. And Hitachi Car Engineering Co., Ltd.	Capacitance type pressure sensor with capacitive elements actuated by a diaphragm
US6174820B1 (en) *	1999-02-16	2001-01-16	Sandia Corporation	Use of silicon oxynitride as a sacrificial material for microelectromechanical devices

2000
- 2000-09-12 US US09/660,218 patent/US6521965B1/en not_active Expired - Lifetime
2001
- 2001-09-12 DE DE60117458T patent/DE60117458T2/de not_active Expired - Lifetime
- 2001-09-12 EP EP01203424A patent/EP1193486B1/de not_active Expired - Lifetime

Also Published As

Publication number	Publication date
US6521965B1 (en)	2003-02-18
EP1193486A1 (de)	2002-04-03
EP1193486B1 (de)	2006-03-01
DE60117458T2 (de)	2006-10-12

Publication	Publication Date	Title
DK1250827T3 (da)	2004-02-09	Transducer
DE50016091D1 (de)	2011-05-19	Drucksensor
DE60139435D1 (de)	2009-09-17	Druckwandlermontage
DE60131129D1 (de)	2007-12-13	Drucksensor
DE60235468D1 (de)	2010-04-08	Drucksignalerzeugung
DE69922727D1 (de)	2005-01-27	Kapazitiver Druckwandler
DE60144214D1 (de)	2011-04-28	Kapazitiver Drucksensor
DE50015477D1 (de)	2009-01-22	Drucksensor
DE60117458D1 (de)	2006-04-27	Integrierter Druckwandler
DE60125876D1 (de)	2007-02-22	Ultraschalleinsatz
DE50106776D1 (de)	2005-08-25	Anzeigeinstrument
DE50112184D1 (de)	2007-04-26	Druckmessvorrichtung
DE60128766D1 (de)	2007-07-19	Elektroakustischer Wandler
DE60119633D1 (de)	2006-06-22	Tragbares Druckmessgerät
PT102677B (pt)	2003-10-31	Tecla-botao de pressao
DE60117346D1 (de)	2006-04-27	Elektroakustischer Wandler
DE50103208D1 (de)	2004-09-16	Druckanzeiger
DE59809098D1 (de)	2003-08-28	Druckaufnehmer
DE60143373D1 (de)	2010-12-16	Druckpulsationsdämpfer
DE50101269D1 (de)	2004-02-05	Ultraschallsensor
DE50113956D1 (de)	2008-06-26	Anzeigeinstrument
ATE285585T1 (de)	2005-01-15	Messwandler
DE60128885D1 (de)	2007-07-26	Magnetoresistiver Wandler
DE60139568D1 (de)	2009-09-24	Drucksensoreinheit
DE60100576D1 (de)	2003-09-18	Messuhr

Legal Events

Date	Code	Title	Description
2007-03-22	8364	No opposition during term of opposition