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DE60042354D1 - Plasma source of high-energy photons - Google Patents

Plasma source of high-energy photons

Info

Publication number
DE60042354D1
DE60042354D1 DE60042354T DE60042354T DE60042354D1 DE 60042354 D1 DE60042354 D1 DE 60042354D1 DE 60042354 T DE60042354 T DE 60042354T DE 60042354 T DE60042354 T DE 60042354T DE 60042354 D1 DE60042354 D1 DE 60042354D1
Authority
DE
Germany
Prior art keywords
plasma source
energy photons
photons
energy
plasma
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE60042354T
Other languages
German (de)
Inventor
William N Partlo
Igor V Fomenkov
Daniel L Birx
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Cymer Inc
Original Assignee
Cymer Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from US09/268,243 external-priority patent/US6064072A/en
Priority claimed from US09/324,526 external-priority patent/US6541786B1/en
Application filed by Cymer Inc filed Critical Cymer Inc
Application granted granted Critical
Publication of DE60042354D1 publication Critical patent/DE60042354D1/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

DE60042354T 1999-03-15 2000-03-14 Plasma source of high-energy photons Expired - Fee Related DE60042354D1 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US09/268,243 US6064072A (en) 1997-05-12 1999-03-15 Plasma focus high energy photon source
US09/324,526 US6541786B1 (en) 1997-05-12 1999-06-02 Plasma pinch high energy with debris collector

Publications (1)

Publication Number Publication Date
DE60042354D1 true DE60042354D1 (en) 2009-07-23

Family

ID=40707781

Family Applications (1)

Application Number Title Priority Date Filing Date
DE60042354T Expired - Fee Related DE60042354D1 (en) 1999-03-15 2000-03-14 Plasma source of high-energy photons

Country Status (2)

Country Link
AT (1) ATE433650T1 (en)
DE (1) DE60042354D1 (en)

Also Published As

Publication number Publication date
ATE433650T1 (en) 2009-06-15

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee