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DE60042929D1 - Herstellung eines dünnen films unter anwendung von druck - Google Patents

Herstellung eines dünnen films unter anwendung von druck

Info

Publication number
DE60042929D1
DE60042929D1 DE60042929T DE60042929T DE60042929D1 DE 60042929 D1 DE60042929 D1 DE 60042929D1 DE 60042929 T DE60042929 T DE 60042929T DE 60042929 T DE60042929 T DE 60042929T DE 60042929 D1 DE60042929 D1 DE 60042929D1
Authority
DE
Germany
Prior art keywords
printing
preparation
thin film
thin
film
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE60042929T
Other languages
English (en)
Inventor
Bernard Aspar
Michel Bruel
Hubert Moriceau
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Commissariat a lEnergie Atomique et aux Energies Alternatives CEA
Original Assignee
Commissariat a lEnergie Atomique CEA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Commissariat a lEnergie Atomique CEA filed Critical Commissariat a lEnergie Atomique CEA
Application granted granted Critical
Publication of DE60042929D1 publication Critical patent/DE60042929D1/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • H10P90/1916—
    • H10P90/1914—
    • H10P54/52—
    • H10W10/181—
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S438/00—Semiconductor device manufacturing: process
    • Y10S438/977—Thinning or removal of substrate
DE60042929T 1999-06-30 2000-06-29 Herstellung eines dünnen films unter anwendung von druck Expired - Lifetime DE60042929D1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
FR9908379A FR2795865B1 (fr) 1999-06-30 1999-06-30 Procede de realisation d'un film mince utilisant une mise sous pression
PCT/FR2000/001828 WO2001003171A1 (fr) 1999-06-30 2000-06-29 Procede de realisation d'un film mince utilisant une mise sous pression

Publications (1)

Publication Number Publication Date
DE60042929D1 true DE60042929D1 (de) 2009-10-22

Family

ID=9547499

Family Applications (1)

Application Number Title Priority Date Filing Date
DE60042929T Expired - Lifetime DE60042929D1 (de) 1999-06-30 2000-06-29 Herstellung eines dünnen films unter anwendung von druck

Country Status (7)

Country Link
US (1) US6809044B1 (de)
EP (1) EP1194951B1 (de)
JP (1) JP2003512719A (de)
KR (1) KR100745700B1 (de)
DE (1) DE60042929D1 (de)
FR (1) FR2795865B1 (de)
WO (1) WO2001003171A1 (de)

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Also Published As

Publication number Publication date
KR20020010723A (ko) 2002-02-04
EP1194951A1 (de) 2002-04-10
EP1194951B1 (de) 2009-09-09
KR100745700B1 (ko) 2007-08-02
WO2001003171A1 (fr) 2001-01-11
FR2795865B1 (fr) 2001-08-17
JP2003512719A (ja) 2003-04-02
US6809044B1 (en) 2004-10-26
FR2795865A1 (fr) 2001-01-05

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