DE60032591D1 - Magnetische immersionslinse mit detektionsanordnung - Google Patents

Magnetische immersionslinse mit detektionsanordnung

Info

Publication number: DE60032591D1
Authority: DE; Germany
Prior art keywords: immersionline; magnetic; detection arrangement; arrangement; detection
Prior art date: 1999-03-19
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.): Expired - Lifetime

Application number

DE60032591T

Other languages

English (en)

Other versions

DE60032591T2 (de

Inventor

Takao Marui

Ranjan Krishnachandra Badheka

Frank Henry Read

Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)

Shimadzu Research Laboratory Europe Ltd

Original Assignee

Shimadzu Research Laboratory Europe Ltd

Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)

1999-03-19

Filing date

2000-03-17

Publication date

2007-02-08

2000-03-17 Application filed by Shimadzu Research Laboratory Europe Ltd filed Critical Shimadzu Research Laboratory Europe Ltd

2007-02-08 Application granted granted Critical

2007-02-08 Publication of DE60032591D1 publication Critical patent/DE60032591D1/de

2007-11-15 Publication of DE60032591T2 publication Critical patent/DE60032591T2/de

2020-03-18 Anticipated expiration legal-status Critical

Status Expired - Lifetime legal-status Critical Current

Classifications

- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/244—Detectors; Associated components or circuits therefor
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
- H01J37/10—Lenses
- H01J37/14—Lenses magnetic
- H01J37/141—Electromagnetic lenses
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
- H01J2237/10—Lenses
- H01J2237/103—Lenses characterised by lens type
- H01J2237/1035—Immersion lens

Landscapes

Chemical & Material Sciences (AREA)
Analytical Chemistry (AREA)
Physics & Mathematics (AREA)
Electromagnetism (AREA)
Analysing Materials By The Use Of Radiation (AREA)

DE60032591T 1999-03-19 2000-03-17 Magnetische immersionslinse mit detektionsanordnung Expired - Lifetime DE60032591T2 (de)

Applications Claiming Priority (3)

Application Number	Priority Date	Filing Date	Title
GB9906443A GB2348048A (en)	1999-03-19	1999-03-19	Magnetic immersion lenses
GB9906443		1999-03-19
PCT/GB2000/000996 WO2000057450A2 (en)	1999-03-19	2000-03-17	Magnetic immersion lense with detection arrangement

Publications (2)

Publication Number	Publication Date
DE60032591D1 true DE60032591D1 (de)	2007-02-08
DE60032591T2 DE60032591T2 (de)	2007-11-15

Family

ID=10850028

Family Applications (1)

Application Number	Title	Priority Date	Filing Date
DE60032591T Expired - Lifetime DE60032591T2 (de)	1999-03-19	2000-03-17	Magnetische immersionslinse mit detektionsanordnung

Country Status (7)

Country	Link
US (1)	US6664544B1 (de)
EP (1)	EP1166320B1 (de)
JP (1)	JP2002540562A (de)
AU (1)	AU3305900A (de)
DE (1)	DE60032591T2 (de)
GB (1)	GB2348048A (de)
WO (1)	WO2000057450A2 (de)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
JP4632407B2 (ja) *	2004-06-21	2011-02-16	株式会社トプコン	電子線装置
GB0506907D0 (en) *	2005-04-05	2005-05-11	Oxford Instr Analytical Ltd	Method for correcting distortions in electron backscatter diffraction patterns
JP4588602B2 (ja) *	2005-09-30	2010-12-01	株式会社トプコン	静電偏向器の製造方法
EP2706554B1 (de) *	2012-09-10	2016-05-25	Fei Company	Verfahren zur Verwendung einer kombnierten teilchenoptischen Linse
US9082580B2 (en) *	2013-09-23	2015-07-14	Kla-Tencor Corporation	Notched magnetic lens for improved sample access in an SEM
CN113192814B (zh) *	2021-03-25	2022-04-19	中国工程物理研究院激光聚变研究中心	一种混合式磁聚焦透镜电子束成像系统

Family Cites Families (13)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
DE3236271A1 (de) *	1982-09-30	1984-04-05	Siemens AG, 1000 Berlin und 8000 München	Spektrometerobjektiv fuer die korpuskularstrahl-messtechnik
GB8327737D0 (en) *	1983-10-17	1983-11-16	Texas Instruments Ltd	Electron detector
JPS6197575A (ja) *	1984-10-19	1986-05-16	Jeol Ltd	電子線を用いた電位測定装置
JPH0736321B2 (ja) *	1985-06-14	1995-04-19	イーツエーテー、インテグレイテツド、サーキツト、テスチング、ゲゼルシヤフト、フユア、ハルプライタープリユーフテヒニク、ミツト、ベシユレンクテル、ハフツング	定量的電位測定用スペクトロメ−タ−対物レンズ装置
GB8607222D0 (en) *	1986-03-24	1986-04-30	Welding Inst	Charged particle collection
JPS63274049A (ja) *	1987-05-06	1988-11-11	Horon:Kk	走査型電子顕微鏡
US4926054A (en) *	1988-03-17	1990-05-15	Ict Integrated Circuit Testing Gesellschaft Fur Halbleiterpruftechnik Mbh	Objective lens for focusing charged particles in an electron microscope
US5079428A (en)	1989-08-31	1992-01-07	Bell Communications Research, Inc.	Electron microscope with an asymmetrical immersion lens
JPH03295141A (ja) *	1990-04-11	1991-12-26	Hitachi Ltd	検出器
DE4239443A1 (en) *	1992-11-24	1993-07-01	Siemens Ag	Electron beam appts. for testing IC logic circuit - contains remote focus beam generator, beam gate, deflection unit, magnetic lens and secondary electron detector
DE69602936T2 (de) *	1996-07-25	1999-11-04	Act Advanced Circuit Testing Gesellschaft Fuer Testsystementwicklung Mbh	Detektor-Objektivlinse
US5900667A (en) *	1996-10-04	1999-05-04	Etec Systems, Inc.	Operating a solid state particle detector within a magnetic deflection field so as to minimize eddy currents
DE19732093B4 (de) *	1997-07-25	2008-09-25	Carl Zeiss Nts Gmbh	Korpuskularstrahlgerät

1999
- 1999-03-19 GB GB9906443A patent/GB2348048A/en not_active Withdrawn
2000
- 2000-03-17 AU AU33059/00A patent/AU3305900A/en not_active Abandoned
- 2000-03-17 US US09/936,875 patent/US6664544B1/en not_active Expired - Fee Related
- 2000-03-17 WO PCT/GB2000/000996 patent/WO2000057450A2/en not_active Ceased
- 2000-03-17 EP EP00911062A patent/EP1166320B1/de not_active Expired - Lifetime
- 2000-03-17 JP JP2000607244A patent/JP2002540562A/ja active Pending
- 2000-03-17 DE DE60032591T patent/DE60032591T2/de not_active Expired - Lifetime

Also Published As

Publication number	Publication date
WO2000057450A2 (en)	2000-09-28
DE60032591T2 (de)	2007-11-15
WO2000057450A3 (en)	2001-01-18
JP2002540562A (ja)	2002-11-26
EP1166320B1 (de)	2006-12-27
EP1166320A2 (de)	2002-01-02
US6664544B1 (en)	2003-12-16
AU3305900A (en)	2000-10-09
GB2348048A (en)	2000-09-20
GB9906443D0 (en)	1999-05-12

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DE69904168D1 (de)	2003-01-09	Magnetfeldfühler
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DE50011454D1 (de)	2005-12-01	Handgeschirrspülmittel mit mikrokapseln
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DE60005581D1 (de)	2003-11-06	Magnetische Positions- und Richtungserfassung
DE59908126D1 (de)	2004-01-29	Geldkassettenanordnung mit sensor
NO20016189D0 (no)	2001-12-18	SRSV deteksjonssett
DE69937533D1 (de)	2007-12-27	Offener Magnet mit Abschirmung
DE69836891D1 (de)	2007-03-08	Magnetfeldsensor
DE19782275T1 (de)	2000-04-27	Magnetoresistiver Sensor mit verbesserter Stabilität
DE50000734D1 (de)	2002-12-12	Endoskop mit magnetkörpern
DE69938551D1 (de)	2008-05-29	Integrierender magnetischer sensor
DE60026952D1 (de)	2006-05-18	Stromsensor
DE59811023D1 (de)	2004-04-22	Magnetfeldsensor
DE60143148D1 (de)	2010-11-11	En mit honigwaben

Legal Events

Date	Code	Title	Description
2008-01-17	8364	No opposition during term of opposition