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DE60023788D1 - Spiegel mit deformierbarer Membran - Google Patents

Spiegel mit deformierbarer Membran

Info

Publication number
DE60023788D1
DE60023788D1 DE60023788T DE60023788T DE60023788D1 DE 60023788 D1 DE60023788 D1 DE 60023788D1 DE 60023788 T DE60023788 T DE 60023788T DE 60023788 T DE60023788 T DE 60023788T DE 60023788 D1 DE60023788 D1 DE 60023788D1
Authority
DE
Germany
Prior art keywords
mirror
deformable membrane
deformable
membrane
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE60023788T
Other languages
English (en)
Other versions
DE60023788T2 (de
Inventor
Robert Gilles
Lionel Babadjian
Serge Spirkovitch
Jean-Louis Carel
Arnaud Coville
Jean-Pierre Herriau
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Safran Electronics and Defense SAS
Original Assignee
Sagem SA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sagem SA filed Critical Sagem SA
Publication of DE60023788D1 publication Critical patent/DE60023788D1/de
Application granted granted Critical
Publication of DE60023788T2 publication Critical patent/DE60023788T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
    • G02B26/0825—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a flexible sheet or membrane, e.g. for varying the focus

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Mechanical Light Control Or Optical Switches (AREA)
DE2000623788 1999-05-27 2000-05-25 Spiegel mit deformierbarer Membran Expired - Fee Related DE60023788T2 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
FR9906709 1999-05-27
FR9906709A FR2794251B1 (fr) 1999-05-27 1999-05-27 Miroir a membrane deformable

Publications (2)

Publication Number Publication Date
DE60023788D1 true DE60023788D1 (de) 2005-12-15
DE60023788T2 DE60023788T2 (de) 2006-06-08

Family

ID=9546068

Family Applications (1)

Application Number Title Priority Date Filing Date
DE2000623788 Expired - Fee Related DE60023788T2 (de) 1999-05-27 2000-05-25 Spiegel mit deformierbarer Membran

Country Status (3)

Country Link
EP (1) EP1055949B1 (de)
DE (1) DE60023788T2 (de)
FR (1) FR2794251B1 (de)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2824643B1 (fr) * 2001-05-10 2003-10-31 Jean Pierre Lazzari Dispositif de modulation de lumiere
US6661830B1 (en) * 2002-10-07 2003-12-09 Coherent, Inc. Tunable optically-pumped semiconductor laser including a polarizing resonator mirror
EP2494401A1 (de) * 2009-10-30 2012-09-05 Consiglio Nazionale Delle Ricerche Optisch gesteuerte deformierbare reflektive/refraktäre anordnung mit einem lichtleitendem substrat

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0046873A1 (de) * 1980-09-02 1982-03-10 Texas Instruments Incorporated Lichtmodulator mit verformbarem Spiegel
US5022745A (en) * 1989-09-07 1991-06-11 Massachusetts Institute Of Technology Electrostatically deformable single crystal dielectrically coated mirror
US5774252A (en) * 1994-01-07 1998-06-30 Texas Instruments Incorporated Membrane device with recessed electrodes and method of making
CA2198105A1 (en) * 1994-09-02 1996-03-14 Rad Hassan Dabbaj Reflective light valve modulator

Also Published As

Publication number Publication date
EP1055949B1 (de) 2005-11-09
FR2794251A1 (fr) 2000-12-01
DE60023788T2 (de) 2006-06-08
EP1055949A1 (de) 2000-11-29
FR2794251B1 (fr) 2002-08-02

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8327 Change in the person/name/address of the patent owner

Owner name: SAGEM DEFENSE SECURITE, PARIS, FR

8339 Ceased/non-payment of the annual fee