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DE59803917D1 - hot film anemometer - Google Patents

hot film anemometer

Info

Publication number
DE59803917D1
DE59803917D1 DE59803917T DE59803917T DE59803917D1 DE 59803917 D1 DE59803917 D1 DE 59803917D1 DE 59803917 T DE59803917 T DE 59803917T DE 59803917 T DE59803917 T DE 59803917T DE 59803917 D1 DE59803917 D1 DE 59803917D1
Authority
DE
Germany
Prior art keywords
hot film
film anemometer
anemometer
hot
film
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE59803917T
Other languages
German (de)
Inventor
Helmut Mitter
Wolfgang Timelthaler
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
E&E Elektronik GmbH
Original Assignee
E&E Elektronik GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by E&E Elektronik GmbH filed Critical E&E Elektronik GmbH
Application granted granted Critical
Publication of DE59803917D1 publication Critical patent/DE59803917D1/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01FMEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F1/00Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
    • G01F1/68Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using thermal effects
    • G01F1/684Structural arrangements; Mounting of elements, e.g. in relation to fluid flow
    • G01F1/6845Micromachined devices

Landscapes

  • Physics & Mathematics (AREA)
  • Fluid Mechanics (AREA)
  • General Physics & Mathematics (AREA)
  • Measuring Volume Flow (AREA)
DE59803917T 1997-02-04 1998-02-03 hot film anemometer Expired - Lifetime DE59803917D1 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
AT0007397U AT2267U1 (en) 1997-02-04 1997-02-04 HOT FILM MANOMETER AND METHOD FOR THE PRODUCTION THEREOF
PCT/EP1998/000561 WO1998034084A1 (en) 1997-02-04 1998-02-03 Hot-film anemometer, and the manufacture of same

Publications (1)

Publication Number Publication Date
DE59803917D1 true DE59803917D1 (en) 2002-05-29

Family

ID=3480824

Family Applications (1)

Application Number Title Priority Date Filing Date
DE59803917T Expired - Lifetime DE59803917D1 (en) 1997-02-04 1998-02-03 hot film anemometer

Country Status (4)

Country Link
EP (1) EP0958487B1 (en)
AT (2) AT2267U1 (en)
DE (1) DE59803917D1 (en)
WO (1) WO1998034084A1 (en)

Families Citing this family (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE19808249A1 (en) * 1998-02-27 1999-09-02 Pierburg Ag Measuring element and method of manufacture
GB9913547D0 (en) * 1999-06-10 1999-08-11 Unilever Plc Particulate detergent composition containing zeolite
DE10049903A1 (en) * 2000-10-10 2002-05-08 Bosch Gmbh Robert sensor
DE10063794A1 (en) * 2000-12-21 2002-06-27 E & E Elektronik Gmbh Process for the production of thin film sensors, especially hot film anemometers
AU2003224894A1 (en) 2002-04-08 2003-10-27 Littelfuse, Inc. Voltage variable material for direct application and devices employing same
US7183891B2 (en) 2002-04-08 2007-02-27 Littelfuse, Inc. Direct application voltage variable material, devices employing same and methods of manufacturing such devices
CN1303426C (en) * 2004-10-14 2007-03-07 东南大学 Wind speed sensor based on micro mechanic working and its producing method
EP1941576A1 (en) * 2005-10-19 2008-07-09 Eidgenössische Technische Hochschule Zürich Thin-film composite and a glass ceramic substrate used in a miniaturised electrochemical device
KR20080080083A (en) * 2005-10-19 2008-09-02 아이드제노시쉐 테크니쉐 훽슐레 쥐리히 Thin films and composites made from these thin films
DE102008006831A1 (en) 2008-01-30 2009-08-13 Eads Deutschland Gmbh Hot-film sensor
JP6731936B2 (en) * 2015-02-23 2020-07-29 アセインナ インコーポレイテッド MEMS thermal type flow sensor and method for measuring fluid flow rate

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2179748B (en) * 1985-08-20 1989-09-06 Sharp Kk Thermal flow sensor
US4914742A (en) * 1987-12-07 1990-04-03 Honeywell Inc. Thin film orthogonal microsensor for air flow and method
US4888988A (en) * 1987-12-23 1989-12-26 Siemens-Bendix Automotive Electronics L.P. Silicon based mass airflow sensor and its fabrication method
WO1995002164A1 (en) * 1993-07-07 1995-01-19 Ic Sensors, Inc. Pulsed thermal flow sensor system
DE19511590A1 (en) * 1995-03-29 1996-10-02 Bosch Gmbh Robert Measurement element for flow sensor with diaphragm, heater and temp. sensor

Also Published As

Publication number Publication date
EP0958487A1 (en) 1999-11-24
ATE216770T1 (en) 2002-05-15
AT2267U1 (en) 1998-07-27
WO1998034084A1 (en) 1998-08-06
EP0958487B1 (en) 2002-04-24

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition