DE59803917D1 - hot film anemometer - Google Patents
hot film anemometerInfo
- Publication number
- DE59803917D1 DE59803917D1 DE59803917T DE59803917T DE59803917D1 DE 59803917 D1 DE59803917 D1 DE 59803917D1 DE 59803917 T DE59803917 T DE 59803917T DE 59803917 T DE59803917 T DE 59803917T DE 59803917 D1 DE59803917 D1 DE 59803917D1
- Authority
- DE
- Germany
- Prior art keywords
- hot film
- film anemometer
- anemometer
- hot
- film
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
- G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
- G01F1/68—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using thermal effects
- G01F1/684—Structural arrangements; Mounting of elements, e.g. in relation to fluid flow
- G01F1/6845—Micromachined devices
Landscapes
- Physics & Mathematics (AREA)
- Fluid Mechanics (AREA)
- General Physics & Mathematics (AREA)
- Measuring Volume Flow (AREA)
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| AT0007397U AT2267U1 (en) | 1997-02-04 | 1997-02-04 | HOT FILM MANOMETER AND METHOD FOR THE PRODUCTION THEREOF |
| PCT/EP1998/000561 WO1998034084A1 (en) | 1997-02-04 | 1998-02-03 | Hot-film anemometer, and the manufacture of same |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| DE59803917D1 true DE59803917D1 (en) | 2002-05-29 |
Family
ID=3480824
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| DE59803917T Expired - Lifetime DE59803917D1 (en) | 1997-02-04 | 1998-02-03 | hot film anemometer |
Country Status (4)
| Country | Link |
|---|---|
| EP (1) | EP0958487B1 (en) |
| AT (2) | AT2267U1 (en) |
| DE (1) | DE59803917D1 (en) |
| WO (1) | WO1998034084A1 (en) |
Families Citing this family (11)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE19808249A1 (en) * | 1998-02-27 | 1999-09-02 | Pierburg Ag | Measuring element and method of manufacture |
| GB9913547D0 (en) * | 1999-06-10 | 1999-08-11 | Unilever Plc | Particulate detergent composition containing zeolite |
| DE10049903A1 (en) * | 2000-10-10 | 2002-05-08 | Bosch Gmbh Robert | sensor |
| DE10063794A1 (en) * | 2000-12-21 | 2002-06-27 | E & E Elektronik Gmbh | Process for the production of thin film sensors, especially hot film anemometers |
| AU2003224894A1 (en) | 2002-04-08 | 2003-10-27 | Littelfuse, Inc. | Voltage variable material for direct application and devices employing same |
| US7183891B2 (en) | 2002-04-08 | 2007-02-27 | Littelfuse, Inc. | Direct application voltage variable material, devices employing same and methods of manufacturing such devices |
| CN1303426C (en) * | 2004-10-14 | 2007-03-07 | 东南大学 | Wind speed sensor based on micro mechanic working and its producing method |
| EP1941576A1 (en) * | 2005-10-19 | 2008-07-09 | Eidgenössische Technische Hochschule Zürich | Thin-film composite and a glass ceramic substrate used in a miniaturised electrochemical device |
| KR20080080083A (en) * | 2005-10-19 | 2008-09-02 | 아이드제노시쉐 테크니쉐 훽슐레 쥐리히 | Thin films and composites made from these thin films |
| DE102008006831A1 (en) | 2008-01-30 | 2009-08-13 | Eads Deutschland Gmbh | Hot-film sensor |
| JP6731936B2 (en) * | 2015-02-23 | 2020-07-29 | アセインナ インコーポレイテッド | MEMS thermal type flow sensor and method for measuring fluid flow rate |
Family Cites Families (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| GB2179748B (en) * | 1985-08-20 | 1989-09-06 | Sharp Kk | Thermal flow sensor |
| US4914742A (en) * | 1987-12-07 | 1990-04-03 | Honeywell Inc. | Thin film orthogonal microsensor for air flow and method |
| US4888988A (en) * | 1987-12-23 | 1989-12-26 | Siemens-Bendix Automotive Electronics L.P. | Silicon based mass airflow sensor and its fabrication method |
| WO1995002164A1 (en) * | 1993-07-07 | 1995-01-19 | Ic Sensors, Inc. | Pulsed thermal flow sensor system |
| DE19511590A1 (en) * | 1995-03-29 | 1996-10-02 | Bosch Gmbh Robert | Measurement element for flow sensor with diaphragm, heater and temp. sensor |
-
1997
- 1997-02-04 AT AT0007397U patent/AT2267U1/en unknown
-
1998
- 1998-02-03 DE DE59803917T patent/DE59803917D1/en not_active Expired - Lifetime
- 1998-02-03 AT AT98906906T patent/ATE216770T1/en not_active IP Right Cessation
- 1998-02-03 WO PCT/EP1998/000561 patent/WO1998034084A1/en not_active Ceased
- 1998-02-03 EP EP98906906A patent/EP0958487B1/en not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| EP0958487A1 (en) | 1999-11-24 |
| ATE216770T1 (en) | 2002-05-15 |
| AT2267U1 (en) | 1998-07-27 |
| WO1998034084A1 (en) | 1998-08-06 |
| EP0958487B1 (en) | 2002-04-24 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| 8364 | No opposition during term of opposition |