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DE3369392D1 - Lens-on-disc type optical scanning apparatus - Google Patents

Lens-on-disc type optical scanning apparatus

Info

Publication number
DE3369392D1
DE3369392D1 DE8383100762T DE3369392T DE3369392D1 DE 3369392 D1 DE3369392 D1 DE 3369392D1 DE 8383100762 T DE8383100762 T DE 8383100762T DE 3369392 T DE3369392 T DE 3369392T DE 3369392 D1 DE3369392 D1 DE 3369392D1
Authority
DE
Germany
Prior art keywords
lens
optical scanning
type optical
disc type
scanning apparatus
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
DE8383100762T
Other languages
German (de)
Inventor
Keiji Kataoka
Susumu Saito
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Koki Holdings Co Ltd
Hitachi Ltd
Original Assignee
Hitachi Ltd
Hitachi Koki Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd, Hitachi Koki Co Ltd filed Critical Hitachi Ltd
Application granted granted Critical
Publication of DE3369392D1 publication Critical patent/DE3369392D1/en
Expired legal-status Critical Current

Links

Classifications

    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/10Scanning systems
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B3/00Simple or compound lenses

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Mechanical Optical Scanning Systems (AREA)
  • Facsimile Scanning Arrangements (AREA)
DE8383100762T 1982-02-24 1983-01-27 Lens-on-disc type optical scanning apparatus Expired DE3369392D1 (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP57027491A JPS58145916A (en) 1982-02-24 1982-02-24 Disk type lens optical scanner

Publications (1)

Publication Number Publication Date
DE3369392D1 true DE3369392D1 (en) 1987-02-26

Family

ID=12222598

Family Applications (1)

Application Number Title Priority Date Filing Date
DE8383100762T Expired DE3369392D1 (en) 1982-02-24 1983-01-27 Lens-on-disc type optical scanning apparatus

Country Status (5)

Country Link
US (1) US4640573A (en)
EP (1) EP0087586B1 (en)
JP (1) JPS58145916A (en)
CA (1) CA1215563A (en)
DE (1) DE3369392D1 (en)

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US5188633A (en) * 1987-03-16 1993-02-23 Michael Kratzer Device for selective destruction of cells
DE3708511A1 (en) * 1987-03-16 1988-09-29 Kratzer Michael DEVICE FOR SELECTIVE DESTRUCTION OF CELLS
US5196957A (en) * 1990-03-20 1993-03-23 Olive Tree Technology, Inc. Laser scanner with post-facet lens system
JPH04117762A (en) * 1990-09-06 1992-04-17 Brother Ind Ltd Moire eliminating device for image scanner
DE4138020A1 (en) * 1991-11-19 1992-04-16 Burkhard Dr Neumann Microscope system for increasing light transmission through grid - has lens raster projecting congruent light source raster in intermediate image raster to improve contrast
US5465243A (en) * 1992-04-24 1995-11-07 E-Systems, Inc. Optical recorder and reader of data on light sensitive media
US5216534A (en) * 1992-04-24 1993-06-01 E-Systems, Inc. Read-write head for an optical tape recorder
JPH06317953A (en) * 1993-04-28 1994-11-15 Canon Inc Frame structure and image forming device
US6016185A (en) * 1997-10-23 2000-01-18 Hugle Lithography Lens array photolithography
AUPP176898A0 (en) * 1998-02-12 1998-03-05 Moldflow Pty Ltd Automated machine technology for thermoplastic injection molding
US6396042B1 (en) 1999-10-19 2002-05-28 Raytheon Company Digital laser image recorder including delay lines
US6563581B1 (en) * 2000-07-14 2003-05-13 Applera Corporation Scanning system and method for scanning a plurality of samples
US20030160957A1 (en) * 2000-07-14 2003-08-28 Applera Corporation Scanning system and method for scanning a plurality of samples
EP1310970B1 (en) * 2001-11-09 2007-08-01 ABB Schweiz AG Hybrid circuit breaker with drive
US7184184B2 (en) * 2003-12-31 2007-02-27 Reliant Technologies, Inc. High speed, high efficiency optical pattern generator using rotating optical elements
US7196831B2 (en) 2003-12-31 2007-03-27 Reliant Technologies, Inc. Two-dimensional optical scan system using a counter-rotating disk scanner
US7372606B2 (en) * 2003-12-31 2008-05-13 Reliant Technologies, Inc. Optical pattern generator using a single rotating component
US7178562B2 (en) * 2004-04-08 2007-02-20 Graham Packaging Pet Technologies Inc. Pellet transfer apparatus and method
EP2329322B1 (en) 2008-09-22 2016-09-07 ASML Netherlands BV Lithographic apparatus and lithographic method
JP2010175823A (en) * 2009-01-29 2010-08-12 Astro Design Inc Optical scanner
TWI448830B (en) 2010-02-09 2014-08-11 Asml荷蘭公司 Microlithography device and component manufacturing method
US9235140B2 (en) 2010-02-23 2016-01-12 Asml Netherlands B.V. Lithographic apparatus and device manufacturing method
SG183393A1 (en) 2010-02-25 2012-09-27 Asml Netherlands Bv Lithographic apparatus and device manufacturing method
WO2011128162A1 (en) 2010-04-12 2011-10-20 Asml Netherlands B.V. Substrate handling apparatus and lithographic apparatus
WO2012076300A1 (en) 2010-12-08 2012-06-14 Asml Netherlands B.V. Lithographic apparatus and device manufacturing method
US8441625B2 (en) 2011-03-02 2013-05-14 The United States Of America As Represented By The Secretary Of The Navy Laser beam profile measurement
US9304401B2 (en) 2011-03-29 2016-04-05 Asml Netherlands B.V. Measurement of the position of a radiation beam spot in lithography
US9645502B2 (en) 2011-04-08 2017-05-09 Asml Netherlands B.V. Lithographic apparatus, programmable patterning device and lithographic method
NL2008500A (en) 2011-04-21 2012-10-23 Asml Netherlands Bv Lithographic apparatus, method for maintaining a lithographic apparatus and device manufacturing method.
US9690210B2 (en) 2011-08-18 2017-06-27 Asml Netherlands B.V. Lithographic apparatus and device manufacturing method
NL2009342A (en) 2011-10-31 2013-05-07 Asml Netherlands Bv Lithographic apparatus and device manufacturing method.
US9696636B2 (en) 2011-11-29 2017-07-04 Asml Netherlands B.V. Lithographic apparatus, device manufacturing method and computer program
US10346729B2 (en) 2011-11-29 2019-07-09 Asml Netherlands B.V. Apparatus and method for converting a vector-based representation of a desired device pattern for a lithography apparatus, apparatus and method for providing data to a programmable patterning device, a lithography apparatus and a device manufacturing method
WO2013083371A1 (en) 2011-12-05 2013-06-13 Asml Netherlands B.V. Lithographic apparatus and device manufacturing method
JP5881851B2 (en) 2011-12-06 2016-03-09 エーエスエムエル ネザーランズ ビー.ブイ. Lithographic apparatus, apparatus for providing setpoint data, device manufacturing method, setpoint data calculation method, and computer program
NL2009902A (en) 2011-12-27 2013-07-01 Asml Netherlands Bv Lithographic apparatus and device manufacturing method.
KR101633759B1 (en) 2012-01-12 2016-06-27 에이에스엠엘 네델란즈 비.브이. A lithography apparatus, an apparatus for providing setpoint data, a device manufacturing method, a method for providing setpoint data and a computer program
NL2010020A (en) 2012-01-17 2013-07-18 Asml Netherlands Bv Lithographic apparatus and device manufacturing method.
JP6042457B2 (en) 2012-02-23 2016-12-14 エーエスエムエル ネザーランズ ビー.ブイ. Device, exposure apparatus, and radiation induction method
NL2012052A (en) 2013-01-29 2014-08-04 Asml Netherlands Bv A radiation modulator for a lithography apparatus, a lithography apparatus, a method of modulating radiation for use in lithography, and a device manufacturing method.
JP6318358B2 (en) * 2013-04-08 2018-05-09 株式会社ニューフレアテクノロジー Lighting device and inspection device

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US1810598A (en) * 1929-02-26 1931-06-16 Gen Electric Scanning disk
US2174917A (en) * 1938-02-24 1939-10-03 Bausch & Lomb Ophthalmic lens system
US2540953A (en) * 1946-09-16 1951-02-06 Jr Martin C Kessler Plastic lens and guard
US3619033A (en) * 1968-09-25 1971-11-09 Sperry Rand Corp Three-dimensional light beam scanner utilizing tandemly arranged diffraction gratings
JPS5567721A (en) * 1978-11-15 1980-05-22 Ricoh Co Ltd Light beam scanner
JPS5579409A (en) * 1978-12-11 1980-06-14 Ricoh Co Ltd Light beam scanner
US4383755A (en) * 1982-01-11 1983-05-17 Burroughs Corporation Unitary, modular, demountable optical system for laser diode/printing copying apparatus

Also Published As

Publication number Publication date
JPS58145916A (en) 1983-08-31
EP0087586A1 (en) 1983-09-07
EP0087586B1 (en) 1987-01-21
US4640573A (en) 1987-02-03
CA1215563A (en) 1986-12-23

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee