DE3041743C2 - Vorrichtung zur Beschleunigungsmessung - Google Patents
Vorrichtung zur BeschleunigungsmessungInfo
- Publication number
- DE3041743C2 DE3041743C2 DE3041743A DE3041743A DE3041743C2 DE 3041743 C2 DE3041743 C2 DE 3041743C2 DE 3041743 A DE3041743 A DE 3041743A DE 3041743 A DE3041743 A DE 3041743A DE 3041743 C2 DE3041743 C2 DE 3041743C2
- Authority
- DE
- Germany
- Prior art keywords
- support ring
- stator
- elements
- sensor
- seismic
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 230000001133 acceleration Effects 0.000 title claims description 6
- 230000005484 gravity Effects 0.000 claims description 24
- 125000006850 spacer group Chemical group 0.000 claims description 23
- 238000000576 coating method Methods 0.000 claims description 17
- 238000005452 bending Methods 0.000 claims description 15
- 239000011248 coating agent Substances 0.000 claims description 15
- 239000003990 capacitor Substances 0.000 claims description 6
- 230000000694 effects Effects 0.000 claims description 6
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims 1
- 230000000712 assembly Effects 0.000 claims 1
- 238000000429 assembly Methods 0.000 claims 1
- 108090000623 proteins and genes Proteins 0.000 claims 1
- 210000005182 tip of the tongue Anatomy 0.000 claims 1
- 230000035945 sensitivity Effects 0.000 description 8
- 210000000078 claw Anatomy 0.000 description 1
- 238000010276 construction Methods 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 230000003247 decreasing effect Effects 0.000 description 1
- 230000001419 dependent effect Effects 0.000 description 1
- 238000001514 detection method Methods 0.000 description 1
- 235000013601 eggs Nutrition 0.000 description 1
- 239000000945 filler Substances 0.000 description 1
- 239000003292 glue Substances 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- 230000035699 permeability Effects 0.000 description 1
- 230000036316 preload Effects 0.000 description 1
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- 239000010409 thin film Substances 0.000 description 1
- 238000005406 washing Methods 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
- G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
- G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
- G01P15/125—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by capacitive pick-up
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
- G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
- G01D5/12—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means
- G01D5/14—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage
- G01D5/24—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying capacitance
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
- G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
- G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
- G01P15/13—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by measuring the force required to restore a proofmass subjected to inertial forces to a null position
- G01P15/132—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by measuring the force required to restore a proofmass subjected to inertial forces to a null position with electromagnetic counterbalancing means
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
- G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
- G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
- G01P2015/0805—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration
- G01P2015/0822—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining out-of-plane movement of the mass
- G01P2015/0825—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining out-of-plane movement of the mass for one single degree of freedom of movement of the mass
- G01P2015/0828—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining out-of-plane movement of the mass for one single degree of freedom of movement of the mass the mass being of the paddle type being suspended at one of its longitudinal ends
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Electromagnetism (AREA)
- Transmission And Conversion Of Sensor Element Output (AREA)
- Pressure Sensors (AREA)
- Vehicle Body Suspensions (AREA)
Description
3339419 angegeben. Dort ist eine Konstruktion ge- Fig.2 eine Draufsicht von oben auf einen Teil einer zeigt, bei der das Tragglied einseitig festgelegt ist und 5 Prüfmasseneinheit gemäß einem Ausführungsbeispiel seinerseits ein einseitig befestigtes bewegliches Element der Erfindung, die in einem Beschleunigungsmesser einhalten, wobei auf jeder Seite des Randes des einseitig setzbar ist;
Claims (5)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US06/092,240 US4250757A (en) | 1979-11-05 | 1979-11-05 | Movable element with position sensing means for transducers |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| DE3041743A1 DE3041743A1 (de) | 1981-09-03 |
| DE3041743C2 true DE3041743C2 (de) | 1986-01-02 |
Family
ID=22232324
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| DE3041743A Expired DE3041743C2 (de) | 1979-11-05 | 1980-11-05 | Vorrichtung zur Beschleunigungsmessung |
Country Status (11)
| Country | Link |
|---|---|
| US (1) | US4250757A (de) |
| JP (1) | JPS6034069B2 (de) |
| AU (1) | AU525853B2 (de) |
| CA (1) | CA1139123A (de) |
| CH (1) | CH642460A5 (de) |
| DE (1) | DE3041743C2 (de) |
| FR (1) | FR2468913B2 (de) |
| GB (1) | GB2062248B (de) |
| IT (1) | IT1127914B (de) |
| NO (1) | NO803294L (de) |
| SE (1) | SE441394B (de) |
Families Citing this family (34)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4494409A (en) * | 1981-05-29 | 1985-01-22 | Kabushiki Kaisha Toyota Chuo Kenkyusho | Engine vibration sensor |
| US4400979A (en) * | 1981-07-14 | 1983-08-30 | Sundstrand Data Control, Inc. | Force transducer flexure with conductors on surfaces in the neutral bending plane |
| US4394405A (en) * | 1981-07-14 | 1983-07-19 | Sundstrand Data Control, Inc. | Method of making force transducer flexure |
| US4399700A (en) * | 1981-07-14 | 1983-08-23 | Sundstrand Data Control, Inc. | Force transducer flexure with conductors on surfaces in the neutral bending plane |
| US4441366A (en) * | 1981-07-14 | 1984-04-10 | Sundstrand Data Control, Inc. | Flexure with electrical conductor |
| US4498342A (en) * | 1983-04-18 | 1985-02-12 | Honeywell Inc. | Integrated silicon accelerometer with stress-free rebalancing |
| US4592234A (en) * | 1984-06-11 | 1986-06-03 | Sundstrand Data Control, Inc. | Suspension system for a transducer |
| JPS6117959A (ja) * | 1984-07-05 | 1986-01-25 | Japan Aviation Electronics Ind Ltd | 加速度計 |
| US4726228A (en) * | 1986-04-16 | 1988-02-23 | Sundstrand Data Control, Inc. | Accelerometer proof mass interface |
| EP0268351B1 (de) * | 1986-08-25 | 1991-10-23 | Richard A. Hanson | Prüfmassenaufhängung für einen Beschleunigungsmesser |
| US4779463A (en) * | 1987-01-13 | 1988-10-25 | Systron Donner Corporation | Servo accelerometer |
| US4987780A (en) * | 1987-11-16 | 1991-01-29 | Litton Systems, Inc. | Integrated accelerometer assembly |
| US5024089A (en) * | 1988-06-29 | 1991-06-18 | Sundstrand Data Control, Inc. | Stress compensated transducer |
| US4932258A (en) * | 1988-06-29 | 1990-06-12 | Sundstrand Data Control, Inc. | Stress compensated transducer |
| US5072619A (en) * | 1988-10-11 | 1991-12-17 | Hanson Richard A | Pendulous assembly including specifically configured mounting pads |
| DE69106326T2 (de) * | 1990-06-11 | 1995-05-11 | Allied Signal Inc | Beschleunigungsmesser mit isolierenden biegegelenken. |
| US5111694A (en) * | 1990-08-17 | 1992-05-12 | Sundstrand Corporation | Accelerometer with rebalance coil stress isolation |
| US5239871A (en) * | 1990-12-17 | 1993-08-31 | Texas Instruments Incorporated | Capacitive accelerometer |
| US5557044A (en) * | 1994-01-21 | 1996-09-17 | Alliedsignal, Inc. | Low stress magnet interface |
| US5532665A (en) * | 1994-01-21 | 1996-07-02 | Alliedsignal, Inc. | Low stress magnet interface |
| US5524488A (en) * | 1994-01-24 | 1996-06-11 | Alliedsignal Inc. | Flux control groove |
| DE69509312T2 (de) * | 1994-06-29 | 1999-11-04 | New Sd, Inc. | Beschleunigungsmesser sowie Verfahren zu seiner Herstellung |
| US5488865A (en) * | 1994-08-15 | 1996-02-06 | Alliedsignal Inc. | Wide-band servo accelerometer with flat leaf flexure suspension |
| WO1997047977A1 (en) | 1996-06-11 | 1997-12-18 | Alliedsignal Inc. | Compensation of second-order non-linearity in sensors employing double-ended tuning forks |
| US5978972A (en) * | 1996-06-14 | 1999-11-09 | Johns Hopkins University | Helmet system including at least three accelerometers and mass memory and method for recording in real-time orthogonal acceleration data of a head |
| US20070048456A1 (en) * | 2004-09-14 | 2007-03-01 | Keshner Marvin S | Plasma enhanced chemical vapor deposition apparatus and method |
| US7100447B2 (en) | 2004-12-07 | 2006-09-05 | Honeywell International Inc. | Super Invar magnetic return path for high performance accelerometers |
| IL215656A0 (en) | 2011-10-10 | 2011-11-30 | Israel Aerospace Ind Ltd | Accelerometer |
| US9164117B2 (en) * | 2012-10-19 | 2015-10-20 | Honeywell International Inc. | Stress reduction components for sensors |
| CN102998481A (zh) * | 2012-12-11 | 2013-03-27 | 中国船舶重工集团公司第七0七研究所 | 一种新型电磁加速度计结构 |
| US9658244B2 (en) * | 2014-07-08 | 2017-05-23 | Honeywell International Inc. | Reducing hysteresis effects in accelerometer |
| US10036765B2 (en) * | 2015-07-10 | 2018-07-31 | Honeywell International Inc. | Reducing hysteresis effects in an accelerometer |
| CN107703329B (zh) * | 2017-09-29 | 2019-11-26 | 中国船舶重工集团公司第七0七研究所 | 用于高分辨率石英挠性加速度计的真空保持结构 |
| CN113252944B (zh) * | 2021-07-14 | 2021-09-17 | 中国工程物理研究院电子工程研究所 | 基于微型力矩器的石英挠性加速度计及其制造方法 |
Family Cites Families (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US2643869A (en) * | 1948-01-15 | 1953-06-30 | Clark James | Accelerometer |
| FR1437946A (fr) * | 1964-06-24 | 1966-05-06 | Gen Precision Inc | Commande d'amortissement d'accéléromètre |
| US3283586A (en) * | 1964-06-24 | 1966-11-08 | Gen Precision Inc | Accelerometer damping control |
| US3339419A (en) * | 1964-07-02 | 1967-09-05 | North American Aviation Inc | Accelerometer |
| US3702073A (en) * | 1969-02-28 | 1972-11-07 | Sundstrand Data Control | Accelerometer |
| US3673873A (en) * | 1969-10-23 | 1972-07-04 | North American Rockwell | Sensing instrument having a cantilevered proof mass |
| AU3825078A (en) * | 1977-10-17 | 1980-01-24 | Sundstrand Data Control | Servoed accelerometer |
-
1979
- 1979-11-05 US US06/092,240 patent/US4250757A/en not_active Expired - Lifetime
-
1980
- 1980-10-15 SE SE8007206A patent/SE441394B/sv not_active IP Right Cessation
- 1980-10-16 AU AU63457/80A patent/AU525853B2/en not_active Ceased
- 1980-10-30 CA CA000363603A patent/CA1139123A/en not_active Expired
- 1980-11-03 IT IT50065/80A patent/IT1127914B/it active
- 1980-11-03 NO NO803294A patent/NO803294L/no unknown
- 1980-11-04 CH CH819780A patent/CH642460A5/fr not_active IP Right Cessation
- 1980-11-04 FR FR8023535A patent/FR2468913B2/fr not_active Expired
- 1980-11-05 DE DE3041743A patent/DE3041743C2/de not_active Expired
- 1980-11-05 GB GB8035602A patent/GB2062248B/en not_active Expired
- 1980-11-05 JP JP55154758A patent/JPS6034069B2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| DE3041743A1 (de) | 1981-09-03 |
| JPS6034069B2 (ja) | 1985-08-06 |
| CH642460A5 (fr) | 1984-04-13 |
| SE8007206L (sv) | 1981-05-06 |
| AU6345780A (en) | 1981-05-14 |
| IT8050065A0 (it) | 1980-11-03 |
| FR2468913A2 (fr) | 1981-05-08 |
| CA1139123A (en) | 1983-01-11 |
| US4250757A (en) | 1981-02-17 |
| GB2062248A (en) | 1981-05-20 |
| SE441394B (sv) | 1985-09-30 |
| IT1127914B (it) | 1986-05-28 |
| GB2062248B (en) | 1983-06-22 |
| NO803294L (no) | 1981-05-06 |
| FR2468913B2 (fr) | 1985-07-05 |
| JPS5682450A (en) | 1981-07-06 |
| AU525853B2 (en) | 1982-12-02 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| OP8 | Request for examination as to paragraph 44 patent law | ||
| 8161 | Application of addition to: |
Ref document number: 2919336 Country of ref document: DE Format of ref document f/p: P |
|
| AF | Is addition to no. |
Ref country code: DE Ref document number: 2919336 Format of ref document f/p: P |
|
| 8125 | Change of the main classification |
Ipc: G01P 15/13 |
|
| AF | Is addition to no. |
Ref country code: DE Ref document number: 2919336 Format of ref document f/p: P |
|
| D2 | Grant after examination | ||
| 8364 | No opposition during term of opposition | ||
| 8327 | Change in the person/name/address of the patent owner |
Owner name: SUNDSTRAND CORP. (N.D.GES.D. STAATES DELAWARE), RO |
|
| 8328 | Change in the person/name/address of the agent |
Free format text: BEETZ, R., DIPL.-ING. DR.-ING. TIMPE, W., DR.-ING. SIEGFRIED, J., DIPL.-ING. SCHMITT-FUMIAN, W., PROF. DIPL.-CHEM. DR.RER.NAT. MAYR, C., DIPL.-PHYS.DR.RER.NAT., PAT.-ANWAELTE, 80538 MUENCHEN |
|
| 8340 | Patent of addition ceased/non-payment of fee of main patent |