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DE2029705B2 - Lichtempfindliches gemisch - Google Patents

Lichtempfindliches gemisch

Info

Publication number
DE2029705B2
DE2029705B2 DE19702029705 DE2029705A DE2029705B2 DE 2029705 B2 DE2029705 B2 DE 2029705B2 DE 19702029705 DE19702029705 DE 19702029705 DE 2029705 A DE2029705 A DE 2029705A DE 2029705 B2 DE2029705 B2 DE 2029705B2
Authority
DE
Germany
Prior art keywords
light
sensitive mixture
sensitive
mixture
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
DE19702029705
Other languages
English (en)
Other versions
DE2029705A1 (en
DE2029705C (de
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Publication of DE2029705A1 publication Critical patent/DE2029705A1/de
Publication of DE2029705B2 publication Critical patent/DE2029705B2/de
Application granted granted Critical
Publication of DE2029705C publication Critical patent/DE2029705C/de
Expired legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004—Photosensitive materials
    • G03F7/008—Azides
    • G03F7/012—Macromolecular azides; Macromolecular additives, e.g. binders
    • G03F7/0125—Macromolecular azides; Macromolecular additives, e.g. binders characterised by the polymeric binder or the macromolecular additives other than the macromolecular azides

Landscapes

  • Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • General Physics & Mathematics (AREA)
  • Processes Of Treating Macromolecular Substances (AREA)
  • Photosensitive Polymer And Photoresist Processing (AREA)
  • Phenolic Resins Or Amino Resins (AREA)
DE19702029705 1969-06-17 1970-06-16 Lichtempfindliches Gemisch Expired DE2029705C (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP4808369 1969-06-17
JP4808369A JPS505081B1 (de) 1969-06-17 1969-06-17

Publications (3)

Publication Number Publication Date
DE2029705A1 DE2029705A1 (en) 1971-02-18
DE2029705B2 true DE2029705B2 (de) 1973-01-18
DE2029705C DE2029705C (de) 1973-08-02

Family

ID=

Also Published As

Publication number Publication date
DE2029705A1 (en) 1971-02-18
JPS505081B1 (de) 1975-02-28

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Legal Events

Date Code Title Description
C3 Grant after two publication steps (3rd publication)
E77 Valid patent as to the heymanns-index 1977
EHJ Ceased/non-payment of the annual fee