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DE19881035T1 - Sondenkarte - Google Patents

Sondenkarte

Info

Publication number
DE19881035T1
DE19881035T1 DE19881035T DE19881035T DE19881035T1 DE 19881035 T1 DE19881035 T1 DE 19881035T1 DE 19881035 T DE19881035 T DE 19881035T DE 19881035 T DE19881035 T DE 19881035T DE 19881035 T1 DE19881035 T1 DE 19881035T1
Authority
DE
Germany
Prior art keywords
probe card
probe
card
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
DE19881035T
Other languages
English (en)
Inventor
Akio Kojima
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Advantest Corp
Original Assignee
Advantest Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Advantest Corp filed Critical Advantest Corp
Publication of DE19881035T1 publication Critical patent/DE19881035T1/de
Ceased legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G01R31/2851—Testing of integrated circuits [IC]
    • G01R31/2886—Features relating to contacting the IC under test, e.g. probe heads; chucks
    • G01R31/2887—Features relating to contacting the IC under test, e.g. probe heads; chucks involving moving the probe head or the IC under test; docking stations
    • H10P74/00—
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02—General constructional details
    • G01R1/06—Measuring leads; Measuring probes
    • G01R1/067—Measuring probes
    • G01R1/073—Multiple probes
    • G01R1/07307—Multiple probes with individual probe elements, e.g. needles, cantilever beams or bump contacts, fixed in relation to each other, e.g. bed of nails fixture or probe card
    • G01R1/0735—Multiple probes with individual probe elements, e.g. needles, cantilever beams or bump contacts, fixed in relation to each other, e.g. bed of nails fixture or probe card arranged on a flexible frame or film

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • General Engineering & Computer Science (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
  • Measuring Leads Or Probes (AREA)
DE19881035T 1997-06-17 1998-06-17 Sondenkarte Ceased DE19881035T1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP16009997 1997-06-17
PCT/JP1998/002669 WO1998058266A1 (fr) 1997-06-17 1998-06-17 Carte d'essai

Publications (1)

Publication Number Publication Date
DE19881035T1 true DE19881035T1 (de) 1999-07-15

Family

ID=15707837

Family Applications (1)

Application Number Title Priority Date Filing Date
DE19881035T Ceased DE19881035T1 (de) 1997-06-17 1998-06-17 Sondenkarte

Country Status (6)

Country Link
KR (1) KR20000068145A (de)
CN (1) CN1228160A (de)
DE (1) DE19881035T1 (de)
GB (1) GB2331877A (de)
TW (1) TW369601B (de)
WO (1) WO1998058266A1 (de)

Families Citing this family (29)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002098736A (ja) 2000-09-26 2002-04-05 Nec Corp 半導体デバイス試験装置
US7190184B2 (en) 2001-08-13 2007-03-13 Finisar Corporation Systems for wafer level burn-in of electronic devices
US7700379B2 (en) 2001-08-13 2010-04-20 Finisar Corporation Methods of conducting wafer level burn-in of electronic devices
US8039277B2 (en) 2001-08-13 2011-10-18 Finisar Corporation Providing current control over wafer borne semiconductor devices using overlayer patterns
JP4134289B2 (ja) * 2002-05-29 2008-08-20 東京エレクトロン株式会社 プローブカード搬送装置及びアダプタ
JP2004205487A (ja) 2002-11-01 2004-07-22 Tokyo Electron Ltd プローブカードの固定機構
JP2004185208A (ja) * 2002-12-02 2004-07-02 Sony Corp Ｉｃカード
US7202682B2 (en) * 2002-12-20 2007-04-10 Formfactor, Inc. Composite motion probing
US7057404B2 (en) * 2003-05-23 2006-06-06 Sharp Laboratories Of America, Inc. Shielded probe for testing a device under test
US7084651B2 (en) * 2004-07-28 2006-08-01 International Business Machines Corporation Probe card assembly
JP4755597B2 (ja) * 2004-11-18 2011-08-24 ルネサスエレクトロニクス株式会社 半導体集積回路装置の製造方法
JP4769474B2 (ja) * 2005-04-06 2011-09-07 ルネサスエレクトロニクス株式会社 半導体集積回路装置の製造方法
JP4919617B2 (ja) * 2005-05-27 2012-04-18 ヤマハファインテック株式会社 プリント基板の電気検査装置および電気検査方法
WO2007029422A1 (ja) 2005-09-07 2007-03-15 Nec Corporation 半導体装置の検査装置及び電源供給ユニット
CN100488335C (zh) * 2005-10-31 2009-05-13 旺矽科技股份有限公司 探针卡的多阶式印刷电路板
JP4518041B2 (ja) * 2006-05-19 2010-08-04 エルピーダメモリ株式会社 プローブカード
JP5138615B2 (ja) * 2008-02-15 2013-02-06 シャープ株式会社 半導体機能試験電気接続装置
JP5406464B2 (ja) * 2008-04-17 2014-02-05 日本電子材料株式会社 プローブカード
KR101583000B1 (ko) 2009-03-09 2016-01-19 삼성전자주식회사 반도체 디바이스 테스트 장치 및 방법
CN102914673B (zh) * 2011-08-03 2015-09-30 旺矽科技股份有限公司 探针测试装置
JP2017194388A (ja) * 2016-04-21 2017-10-26 日本電子材料株式会社 プローブカード
TWI619948B (zh) * 2017-02-13 2018-04-01 華邦電子股份有限公司 探針頭、探針模組及其製作方法
CN108427021B (zh) 2017-02-13 2020-08-21 华邦电子股份有限公司 探针头、探针模块及其制作方法
IT201700017037A1 (it) * 2017-02-15 2018-08-15 Technoprobe Spa Scheda di misura per applicazioni ad alta frequenza
JP2019109103A (ja) * 2017-12-18 2019-07-04 株式会社ヨコオ 検査治具
IT201800005444A1 (it) * 2018-05-16 2019-11-16 Scheda di misura avente elevate prestazioni in alta frequenza
MY207866A (en) * 2019-06-12 2025-03-24 Jf Microtechnology Sdn Bhd Wedged contact fingers for integrated circuit testing apparatus
TWI711824B (zh) * 2019-10-02 2020-12-01 銳捷科技股份有限公司 可調式探針承載裝置
TWI784439B (zh) * 2021-03-12 2022-11-21 冠銓科技實業股份有限公司 應用於高頻量測之測試針座構造

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61129501A (ja) * 1984-11-28 1986-06-17 Olympus Optical Co Ltd カメラレンズの移動量測定装置
JPH0524064Y2 (de) * 1986-03-20 1993-06-18
JPH01128381A (ja) * 1987-11-12 1989-05-22 Fujitsu Ltd Ｌｓｉウエハの試験方法
US5264787A (en) * 1991-08-30 1993-11-23 Hughes Aircraft Company Rigid-flex circuits with raised features as IC test probes
US5355079A (en) * 1993-01-07 1994-10-11 Wentworth Laboratories, Inc. Probe assembly for testing integrated circuit devices
US5461326A (en) * 1993-02-25 1995-10-24 Hughes Aircraft Company Self leveling and self tensioning membrane test probe
JP2978720B2 (ja) * 1994-09-09 1999-11-15 東京エレクトロン株式会社 プローブ装置

Also Published As

Publication number Publication date
KR20000068145A (ko) 2000-11-25
TW369601B (en) 1999-09-11
WO1998058266A1 (fr) 1998-12-23
GB9903309D0 (en) 1999-04-07
GB2331877A (en) 1999-06-02
CN1228160A (zh) 1999-09-08

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Legal Events

Date Code Title Description
8110 Request for examination paragraph 44
8125 Change of the main classification

Ipc: G01R 31/26

8607 Notification of search results after publication
8131 Rejection