DE19881467T1 - Einkristall-Ziehvorrichtung und Einkristall-Ziehverfahren - Google Patents

Einkristall-Ziehvorrichtung und Einkristall-Ziehverfahren

Info

Publication number: DE19881467T1
Authority: DE; Germany
Prior art keywords: single crystal; crystal pulling; pulling device; pulling method; pulling
Prior art date: 1997-09-05
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.): Ceased

Application number

DE19881467T

Other languages

English (en)

Inventor

Yutaka Shiraishi

Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)

Super Silicon Crystal Research Institute Corp

Original Assignee

Super Silicon Crystal Research Institute Corp

Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)

1997-09-05

Filing date

1998-08-26

Publication date

1999-12-02

1998-08-26 Application filed by Super Silicon Crystal Research Institute Corp filed Critical Super Silicon Crystal Research Institute Corp

1999-12-02 Publication of DE19881467T1 publication Critical patent/DE19881467T1/de

Status Ceased legal-status Critical Current

Classifications

- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B15/00—Single-crystal growth by pulling from a melt, e.g. Czochralski method
- C30B15/30—Mechanisms for rotating or moving either the melt or the crystal
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B15/00—Single-crystal growth by pulling from a melt, e.g. Czochralski method
- C30B15/20—Controlling or regulating
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S117/00—Single-crystal, oriented-crystal, and epitaxy growth processes; non-coating apparatus therefor
- Y10S117/911—Seed or rod holders
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T117/00—Single-crystal, oriented-crystal, and epitaxy growth processes; non-coating apparatus therefor
- Y10T117/10—Apparatus
- Y10T117/1024—Apparatus for crystallization from liquid or supercritical state
- Y10T117/1032—Seed pulling
- Y10T117/1068—Seed pulling including heating or cooling details [e.g., shield configuration]
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T117/00—Single-crystal, oriented-crystal, and epitaxy growth processes; non-coating apparatus therefor
- Y10T117/10—Apparatus
- Y10T117/1024—Apparatus for crystallization from liquid or supercritical state
- Y10T117/1032—Seed pulling
- Y10T117/1072—Seed pulling including details of means providing product movement [e.g., shaft guides, servo means]

Landscapes

Chemical & Material Sciences (AREA)
Engineering & Computer Science (AREA)
Crystallography & Structural Chemistry (AREA)
Materials Engineering (AREA)
Metallurgy (AREA)
Organic Chemistry (AREA)
Crystals, And After-Treatments Of Crystals (AREA)

DE19881467T 1997-09-05 1998-08-26 Einkristall-Ziehvorrichtung und Einkristall-Ziehverfahren Ceased DE19881467T1 (de)

Applications Claiming Priority (2)

Application Number	Priority Date	Filing Date	Title
JP25615397A JP3400312B2 (ja)	1997-09-05	1997-09-05	単結晶引上げ装置及び単結晶引上げ方法
PCT/JP1998/003787 WO1999013138A1 (en)	1997-09-05	1998-08-26	Single crystal pull-up apparatus and single crystal pull-up method

Publications (1)

Publication Number	Publication Date
DE19881467T1 true DE19881467T1 (de)	1999-12-02

Family

ID=17288652

Family Applications (1)

Application Number	Title	Priority Date	Filing Date
DE19881467T Ceased DE19881467T1 (de)	1997-09-05	1998-08-26	Einkristall-Ziehvorrichtung und Einkristall-Ziehverfahren

Country Status (6)

Country	Link
US (1)	US6217648B1 (de)
JP (1)	JP3400312B2 (de)
KR (1)	KR20000068909A (de)
DE (1)	DE19881467T1 (de)
TW (1)	TW515855B (de)
WO (1)	WO1999013138A1 (de)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
KR20040044146A (ko) *	2002-11-19	2004-05-27	가부시끼가이샤 도꾸야마	플루오르화 금속용 단결정 인출 장치
JP4791073B2 (ja) *	2005-04-26	2011-10-12	ＳｕｍｃｏＴｅｃｈｘｉｖ株式会社	シリコンウェーハの製造方法
KR101674287B1 (ko) *	2015-01-21	2016-11-08	주식회사 엘지실트론	단결정 잉곳의 직경 제어 시스템 및 제어 방법
CN110451442A (zh) *	2018-05-08	2019-11-15	上海新宇箴诚电控科技有限公司	一种实现端位保持并自由转向的提拉装置
US11255024B2 (en)	2019-06-18	2022-02-22	Linton Crystal Technologies Corp.	Seed lifting and rotating system for use in crystal growth
US11891721B2 (en)	2020-12-09	2024-02-06	Linton Kayex Technology Co., Ltd	Spool-balanced seed lift
CN116374600A (zh) *	2023-01-30	2023-07-04	杭叉集团股份有限公司	一种取晶棒属具

Family Cites Families (11)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
US3937623A (en) *	1973-07-25	1976-02-10	Vasily Porfirovich Kononko	Method of making glass tubes
US4145201A (en) *	1978-03-06	1979-03-20	Owens-Corning Fiberglas Corporation	Glass fiber producing and collecting apparatus
JPS63252991A (ja)	1987-04-09	1988-10-20	Mitsubishi Metal Corp	落下防止保持部を有するｃｚ単結晶
JPH03295892A (ja)	1990-02-19	1991-12-26	Kawasaki Steel Corp	単結晶引上方法及びその装置
JPH03285891A (ja)	1990-03-31	1991-12-17	Ntn Corp	結晶引上げ装置
JP2796687B2 (ja)	1992-01-17	1998-09-10	コマツ電子金属株式会社	単結晶製造方法およびその装置
JP2946933B2 (ja)	1992-03-19	1999-09-13	三菱マテリアル株式会社	単結晶引上装置
JP2946934B2 (ja)	1992-03-19	1999-09-13	三菱マテリアル株式会社	単結晶引上装置
JPH07172981A (ja)	1993-12-14	1995-07-11	Komatsu Electron Metals Co Ltd	半導体単結晶の製造装置および製造方法
JP2990658B2 (ja)	1996-09-03	1999-12-13	住友金属工業株式会社	単結晶引上装置
JP2990662B2 (ja)	1996-11-11	1999-12-13	住友金属工業株式会社	単結晶引上装置

1997
- 1997-09-05 JP JP25615397A patent/JP3400312B2/ja not_active Expired - Fee Related
1998
- 1998-08-26 KR KR1019997003975A patent/KR20000068909A/ko not_active Withdrawn
- 1998-08-26 WO PCT/JP1998/003787 patent/WO1999013138A1/ja not_active Ceased
- 1998-08-26 US US09/284,834 patent/US6217648B1/en not_active Expired - Fee Related
- 1998-08-26 DE DE19881467T patent/DE19881467T1/de not_active Ceased
- 1998-08-26 TW TW087114048A patent/TW515855B/zh not_active IP Right Cessation

Also Published As

Publication number	Publication date
TW515855B (en)	2003-01-01
WO1999013138A1 (en)	1999-03-18
KR20000068909A (ko)	2000-11-25
US6217648B1 (en)	2001-04-17
JPH1179881A (ja)	1999-03-23
JP3400312B2 (ja)	2003-04-28

Publication	Publication Date	Title
DE69523670D1 (de)	2001-12-13	Anzeigeverfahren und -gerät
KR970704918A (ko)	1997-09-06	단결정 제조장치 및 제조방법
DE69521819D1 (de)	2001-08-30	Gesteneingabeverfahren und Gerät
DE69826564D1 (de)	2004-11-04	Druckvorrichtung und Druckverfahren
FI962055A7 (fi)	1996-11-17	Pariston jatkolaite ja siihen liittyvä menetelmä
KR960012578A (ko)	1996-04-20	표시 장치 및 그 제조 방법
DE69836310D1 (de)	2006-12-14	Punktaufzeichnungsverfahren und punktaufzeichnungsvorrichtung
DE69738634D1 (de)	2008-05-29	Bildselektions- und anzeigegerät
DE69909882D1 (de)	2003-09-04	Anzeigesteuerungsverfaren und -gerät
DE69820278D1 (de)	2004-01-15	Mischverfahren und mischvorrichtung
DE69515254D1 (de)	2000-04-06	Anzeigevorrichtung und ihre Kontrollmethode
DE69821408D1 (de)	2004-03-11	Multiplikationsverfahren und -vorrichtung
DE69715584D1 (de)	2002-10-24	Bilderzeugungsgerät und -Verfahren
DE69614654D1 (de)	2001-09-27	Verschlüsselungsgerät und -verfahren
DE69830796D1 (de)	2005-08-11	Optisches regelverfahren und gerät
DE69517913D1 (de)	2000-08-17	Fixiervorrichtung und Fixierverfahren
KR960013620A (ko)	1996-05-22	성형 방법 및 성형 장치
DE69840108D1 (de)	2008-11-20	Versuchsverfahren und vorrichtung
DE69602808D1 (de)	1999-07-15	Ziehverfahren und Ziehvorrichtung
DE69838571D1 (de)	2007-11-29	Wärme-Behandlungsgerät und Wärme-Entwicklungsgerät unter Verwendung desselben
DE69628248D1 (de)	2003-06-26	Graphenanzeigevorrichtungen und -verfahren
DE69628873D1 (de)	2003-08-07	Ausrichtgerät und -verfahren
DE69716364D1 (de)	2002-11-21	Kupplungsmethode und Kupplungsvorrichtung
DE69615544D1 (de)	2001-10-31	Anzeigeverfahren und anzeigevorrichtung
DE69726642D1 (de)	2004-01-22	Übertragungsverfahren und Übertragungsvorrichtung

Legal Events

Date	Code	Title	Description
2002-05-23	8110	Request for examination paragraph 44
2004-05-19	8131	Rejection