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DE19782276T1 - Process for the production of a thin-film positioning mirror arrangement - Google Patents

Process for the production of a thin-film positioning mirror arrangement

Info

Publication number
DE19782276T1
DE19782276T1 DE19782276T DE19782276T DE19782276T1 DE 19782276 T1 DE19782276 T1 DE 19782276T1 DE 19782276 T DE19782276 T DE 19782276T DE 19782276 T DE19782276 T DE 19782276T DE 19782276 T1 DE19782276 T1 DE 19782276T1
Authority
DE
Germany
Prior art keywords
thin
production
mirror arrangement
film positioning
positioning mirror
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
DE19782276T
Other languages
German (de)
Inventor
Yong-Ki Min
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
WiniaDaewoo Co Ltd
Original Assignee
Daewoo Electronics Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Daewoo Electronics Co Ltd filed Critical Daewoo Electronics Co Ltd
Priority claimed from PCT/KR1997/000095 external-priority patent/WO1998054911A1/en
Publication of DE19782276T1 publication Critical patent/DE19782276T1/en
Withdrawn legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
    • G02B26/0833—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
    • G02B26/0833—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
    • G02B26/0841—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD the reflecting element being moved or deformed by electrostatic means

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Mechanical Light Control Or Optical Switches (AREA)
  • Micromachines (AREA)
DE19782276T 1997-05-27 1997-05-27 Process for the production of a thin-film positioning mirror arrangement Withdrawn DE19782276T1 (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PCT/KR1997/000095 WO1998054911A1 (en) 1997-05-23 1997-05-27 Method for manufacturing a thin film actuated mirror array

Publications (1)

Publication Number Publication Date
DE19782276T1 true DE19782276T1 (en) 2000-05-25

Family

ID=19494120

Family Applications (1)

Application Number Title Priority Date Filing Date
DE19782276T Withdrawn DE19782276T1 (en) 1997-05-27 1997-05-27 Process for the production of a thin-film positioning mirror arrangement

Country Status (4)

Country Link
JP (1) JP2002500783A (en)
AU (1) AU735393B2 (en)
DE (1) DE19782276T1 (en)
GB (1) GB2341693B (en)

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TW305943B (en) * 1995-04-21 1997-05-21 Daewoo Electronics Co Ltd
GB2304918B (en) * 1995-08-30 1999-05-19 Daewoo Electronics Co Ltd Method for manufacturing a thin film actuated mirror having a stable elastic member

Also Published As

Publication number Publication date
GB9928013D0 (en) 2000-01-26
AU3049097A (en) 1998-12-30
GB2341693A (en) 2000-03-22
JP2002500783A (en) 2002-01-08
GB2341693B (en) 2001-11-14
AU735393B2 (en) 2001-07-05

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Legal Events

Date Code Title Description
8127 New person/name/address of the applicant

Owner name: DAEWOO ELECTRONICS CORP., SEOUL/SOUL, KR

8110 Request for examination paragraph 44
8139 Disposal/non-payment of the annual fee